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2. Nanoparticles


Nanoparticles are the simplest form of structures with sizes in the nm range. In principle any
collection of atoms bonded together with a structural radius of < 100 nm can be considered a
nanoparticle.
These can include, e.g., fullerens, metal clusters (agglomerates of metal atoms), large molecules,
such as proteins, and even hydrogen-bonded assemblies of water molecules, which exist in water at
ambient temperatures.
Nanoparticles are very commonplace in nature - for instance proteins exist in almost all biological
systems, metal-oxide nanoparticles are easily produced, etc . . .




Introduction to Nanoscience, 2005                                                           ×     1
2.1. Physically manufactured nanoparticles



                                          2.1.1. Nanoclusters

When studying nanoparticles a distinction must neccessarily be made between condensed “hard”
matter nanoparticles, generally termed nanoclusters, and “soft” bio-organic nanoparticles and large
molecules.


A nanocluster is a nanometer sized particle made up of equal subunits. These subunits can be
atoms of a single element, molecules or even combinations of atoms of several elements in subunits
with equal stoichiometries (alloys, etc.)
E.g.: Nan, (SF6)n, (H2O)n, (Cu3Au)n, (ClCH3C6H3CO2H)n, (TiO2)n, . . .


The greatest difference arises from the fact that molecules have functionality which directly depends
on the inter-positioning of their atoms, whereas the properties of nanoclusters are solely guided by
the number of subunits they contain.

Introduction to Nanoscience, 2005                                                           ×      2
For this reason clusters can be seen as an intermediate stage between single atoms/molecules and
bulk materials.


In general, the physical properties of materials are dependent on the dimensions of the material in
question – its properties (e.g. conductivity, elasticity, etc.) are scaleable with respect to the amount
of atoms in the material.
- scaleable size-regime – N−γ
Once the particles are small enough - nanoclusters - these properties vary greatly with every addition
or subtraction of an atom.
- non-scaleable size-regime – every atom counts !




                               2.1.2. Size does matter – small is very different!

2.1.2.1. Geometric structure
Usually the crystal structure of a large nanocluster is the same as the bulk structure of the material,

Introduction to Nanoscience, 2005                                                               ×      3
with somewhat different lattice parameters (in general clusters are slightly contracted as compared
to bulk).
E.g. Cu clusters tend to have an FCC structure (Wulff polyhedra).




Some exceptions do, however, occur. Smaller clusters of Cu (e.g. Cu55, Cu147, . . . ) have perfect
icosahedral structures.
- structural magic numbers: occur when an exact amount of atoms is needed for a specific structure


Even smaller clusters can be amorphous-like (spherical, etc.), although a general tendency of the
clusters is to form structures where the total surface energy (and internal energy) is minimized -

Introduction to Nanoscience, 2005                                                          ×     4
the exact structure then depends on the surface energies related to the specific crystal facets of the
material.


2.1.2.2. Electronic structure
Structural magic numbers affect the formation and abundancies of larger clusters, whereas for the
case of smaller clusters the combined electronic structure of all the atoms is of greater importance.
For instance in a Pbn cluster spectrum, clusters with n=7 or 10 are more abundant than others.
When the ionization potentials of sodium clusters are plotted as a function of the number of atoms
in the clusters, peaks are observed at clusters having two and eight atoms. This can be compared to
the high ionization potentials observed for example in rare-gas atoms, where electrons are removed
from filled orbitals.
- electronic magic numbers are observed for clusters (although most apparent for small clusters
these magic numbers can be noticed even for very large clusters - up to several thousands of atoms.)




Introduction to Nanoscience, 2005                                                            ×      5
2.1.2.3. Jellium
The jellium model has successfully been used in the theoretical modelling of nanoclusters. The
jellium model envisions a cluster of atoms as a single large atom, where the distribution of ionic

Introduction to Nanoscience, 2005                                                          ×     6
cores is replaced by a constant positive background, the so called “jellium density”, and only valence
electrons are treated explicitly.


In effect a large spherically symmetric potential well is used to represent the potential describing
the interaction of valence electrons with the positive spherical charge distribution. Energy levels can
be calculated by solving the Schr¨dinger equations in a fashion analogous to that for the hydrogen
                                   o
atom.




As can be seen from the jellium model, the electronic structure of a cluster varies from that that of
a single atom, but it also varies greatly from that of a bulk material. When a bulk lattice is formed,

Introduction to Nanoscience, 2005                                                              ×      7
the discrete energy levels of the atoms are smuged out into energy bands. E.g. valence bands and
conduction bands exist in semiconductors and metals. As particles shrink in size there is a dramatic
change in these bands, as the continuous density of states in bulk is replaced with a set of discrete
energy levels.




2.1.2.4. Optical properties
This leads to interesting optical properties. In semiconductors the band gap will be increased as
cluster size is decreased – a blue shift in the absorption spectrum of the semiconductor (good for
tayloring lasers).
Individual energy levels and enrgy level seperations are also dependent on the size of the clusters,

Introduction to Nanoscience, 2005                                                            ×      8
which therefore affect the enrgies needed for the transitions of electrons to excited states. Clusters
of different sizes will therefore have different absorption spectra – and hence different colours!




2.1.2.5. Reactivity
Since the electronic structure of nanoclusters depends on their size, their ability to react with
other species should also depend on size. This has important applications for the design of catalytic
agents.



Introduction to Nanoscience, 2005                                                            ×      9
Reactivity is highly dependent on the electronic structure, leading to large variations in the reactivity
of clusters even with sizes differing by only single atoms. In general, however, the reactivity of all
nanoclusters is high as compared to that of bulk, due to their higher surface to volume ratio. E.g.
gold nanoclusters are highly reactive if compared to the fairly inert bulk material.


2.1.2.6. Melting temperatures
Another effect caused by a high surface to volume ratio in clusters, is a substantially lower melting
temperature as compared to bulk materials. Unusual phenomena such as negative heat capacities
have also been observed in clusters (at the melting temperature, an increase of the internal energy
of Na+ by 1 eV leads to a decrease in temperature by about 10 K).
     147



In large enough systems added energy is converted completely into potential energy, reducing
continuously the fraction of its solid phase. The kinetic energy and thus the temperature remain
constant. A small system, on the other hand, tries to avoid partly molten states and prefers to
convert some of its kinetic energy into potential energy instead. Therefore the cluster can become
colder, while its total energy increases.




Introduction to Nanoscience, 2005                                                               ×      10
2.1.2.7. Magnetic properties
Interesting magnetic properties have also been observed in small clusters. In a cluster the magnetic
moment of each atom will interact with the moments of the other atoms, and can force all the
moments to align in one direction with respect to some symmetry axis of the cluster – the cluster
will have a net magnetic moment, it will be magnetized.
As cluster size decreases it therefore becomes easier for them to exhibit ferromagnetic behaviour.
In some cases, even clusters made up of nonmagnetic atoms can have a net magnetic moment. For
instance rhenium clusters show a pronounced increase in their magnetic moment when they contain
less than 20 atoms. For clusters with less than 15 atoms these moments are fairly large.




Introduction to Nanoscience, 2005                                                           ×     11
2.1.3. Cluster production

In principle there are three different physical methods for producing clusters. Common for all
methods is the initial vaporization of atoms from a bulk target.
2.1.3.1. Energetic vaporization
Energetic vaporization is the simplest of all cluster production methods. Clusters are the resulting
product of the ejection of large numbers of atoms, at high energies, from the bulk material.
Various different vaporization techniques are used in different sources. Including:
- Laser vaporization sources, where atoms are irradiated with intense laser beams.
- Pulsed-arc sources, where intense electrical discharges cause vaporization.
- Ion sputtering sources, where atoms are ejected from the target through ion bombardment.
- Liquid-metal ion sources, where a needle is wetted with the material, after which a high potential
is applied, causing intense eletrical fields, due to which small droplets of the wetting material are
emitted.
Clusters produced with these sources are generally rather small and extremely hot (with temperatures
near the evaporation limit).

Introduction to Nanoscience, 2005                                                           ×     12
2.1.3.2. Seeded supersonic nozzle sources
In seeded supersonic nozzle sources the material is vaporized in a hot oven, after which the vapor
is mixed with (or “seeded” in) an inert carrier gas, by pressurizing the oven with the inert gas.
Typically the inert-gas pressure is several atmospheres, whereas the metal-vapor pressure is in the
range of 10 - 100 mbar. The vapor/gas mixture is ejected into a vacuum via a small hole (a nozzle),
producing a supersonic molecular beam.




Introduction to Nanoscience, 2005                                                          ×     13
The expansion into the vacuum proceeds adiabatically and causes cooling of the mixture. The
cooled metal vapor becomes supersaturated, condensing in the form of clusters. Cluster production
continues until the expanding vapor density becomes too low to promote further growth, typically
within a few nozzle diameters from the nozzle exit. Likewise, the cooling of the clusters continues
until the inert-gas density becomes so low that its flow is molecular rather than hydrodynamic.
The cooling provided by the expanding gas may be adequate to stabilize a cluster against evaporation,
but if it is not, the clusters may further cool by evaporating one or more atoms. There is evidence
that both processes take place. Clusters produced with this method can have very low temperatures,
although, as the final cooling step for large metal clusters involves evaporation of one or more
atoms, these clusters typically have temperatures close to the evaporation limit.


Experimentally it is found that the more massive the carrier-gas atoms, the better the cluster
production. This is related to the larger collision cross sections, so that the transition to molecular
flow occurs later than for lighter gases.
Although the inert gas is very important, it is worth mentioning that neat expansions (without
carrier gas) also produce clusters. In this case the cluster production is limited to small sizes, with
usually fewer than ten atoms per cluster.



Introduction to Nanoscience, 2005                                                             ×      14
(NOTE: Clustering of atoms through binary collisions of single atoms can, according to the laws
of classical mechanics, never occur. Initial cluster formation must take place through collisions
between three or more atoms!)


Positive features related to seeded supersonic nozzle sources are:
- Intense cluster beams. Material consumption is about 0.1 mole per hour, of which a sizeable
fraction (estimated in excess of 10 % under suitable conditions) condenses into clusters in the beam.
- Clusters can be produced from almost any material. E.g. gaseous clusters and metal-oxide clusters
can readily be produced.
Negative features:
- Cluster sizes are rather limited, as the largest produceable cluster contain around 100 atoms.
- As large amounts of carrier gas flow through the nozzle high vacuum is difficult to sustain in the
deposition chamber.




Introduction to Nanoscience, 2005                                                            ×     15
2.1.3.3. Gas-aggregation cluster sources
In gas-aggregation cluster sources, or condensation-cell type sources, the cluster material is vaporized
(e.g. by magnetron sputtering) and introduced into a flow of cold inert gas. This causes the vapor
to become highly supersaturated. Pressures in the aggregation chamber are neccessarily high in
order to cause initial cluster growth.
After this, due to the low temperature of the inert gas, cluster production proceeds primarily by
successive single-atom addition.




Introduction to Nanoscience, 2005                                                              ×      16
Since the reverse process (i.e. reevaporation) is negligible, the cluster abundances are not sensitive
to the thermodynamic stabilities of the clusters and, consequently, the cluster abundances are
relatively smooth functions of the cluster size determined mainly by collision statistics.


The cluster size distribution is determined by the parameters of the source, such as:
- sputtering rate
- metal-vapor density (pressure in the chamber)
- gas flow rate (and type and temperature of the gas)
- length of the drift region
- dimensions of various components, such as apertures




Introduction to Nanoscience, 2005                                                             ×     17
Suitable cluster materials for a source with a magnetron sputter are e.g. metals, semiconductors,
all magnetic materials and metal oxides.
Ar and He are typically used as aggregation gases.


Positive features related to this source type are:
- large clusters can easily be produced, even > 20000 atoms

Introduction to Nanoscience, 2005                                                        ×     18
- relatively intense beams
- lower contamination of deposition chambers, UHV is possible
- a large fraction of the produced clusters are ionized (typically 1 each positive and negative single
                                                                   3
          1
charged, 3 neutral), which allows for easy beam manipulation with ion optics
Negative features:
- not all materials can be used (gaseous clusters not possible)


2.1.3.4. Multiple ionization
Multiple ionization of clusters is almost impossible, as this causes a rapid redistribution of the
charges on the atoms of the cluster, making each atom more positive. Due to this, the clusters
become highly unstable and rapidly fragment in a very high-energy dissociation or explosion. The
velocities of single fragments from this process, often called a Coulombic explosion, are very high.


One dramatic manifestation of this is the observation of nuclear fusion in deuterium clusters
subjected to femtosecond laser pulses. The fragments after dissociation have energies up to 1 Mev,
and can fuse upon collision!

Introduction to Nanoscience, 2005                                                             ×     19
2.1.4. Nanocluster applications

Applications of physically manufactured nanoclusters generally rely on the use of nanocluster beams
and the deposition of clusters on surfaces with the help of these. The inherent properties of “free”
clusters can therefore seldom by used, as this forced interaction with a substrate of some sort, which
slightly alters the cluster properties, is almost always neccessary.




The use of beams and deposition of clusters, however, opens new possibilities as the range of energy
and mass deposition in cluster beams greatly differs from that of conventional ion beams and atomic
or molecular beams.

Introduction to Nanoscience, 2005                                                            ×      20
The resulting features produced with cluster beams generally rely on the energy at which the clusters
are deposited.


2.1.4.1. Low-energy deposition




When nanoclusters are deposited at low energies, they generally retain some memory of their initial
shape. This is useful in the manufacturing of complex nanometer sized structures (e.g. quantum
dots, magnetic domain structures, etc. . . )
In the development of potential applications for low-energy deposition one almost always strives
towards the formation of structures which utilize the properties of clusters as they occur in a “free”
state.

Introduction to Nanoscience, 2005                                                             ×     21
Another alternative, however, is direct utilization of the interaction between the clusters and surfaces,
and structures resulting from these. It is for instance know that metal clusters of small enough sizes
will align epitaxially (with the same lattice directions and structure) with a single-crystal substrate
upon impact. This allows for the possibility of growing “perfect” thin films at low energies.



With larger clusters one can alternatively grow nanocrystalline films!




2.1.4.2. High-energy deposition
At higher deposition energies the usefulness of cluster beams is at its fullest. Irradiation with high

Introduction to Nanoscience, 2005                                                               ×      22
energy cluster ions can be used for instance in the manufacturing of high standard thin films, for
shallow implantation of cluster material and surface cleaning.




Cluster ion beams are superior to conventional ion beam methods due to the high energy densities
during bombardment and the low charge to mass ratio of clusters which leads to a more dense
deposition of material at every impact. As a result of the simultaneous impacting of several
atoms, multiple collisions occur at the impact point. This causes a very high increase in the local
temperatures, which is suitable for the rearrangment of local atoms, at the same time as it limits
the depths to which cluster atoms can penetrate into the substrate. Implantation depths for cluster
ions are several times more shallow than implantation depths for single atom ions.

Introduction to Nanoscience, 2005                                                          ×     23
2.1.4.3. Surface smoothing
The high energy density associated with cluster ion impacts, coupled with a high degree of lateral
sputtering and multiple near-surface collisions are ideal for smoothing surfaces. Cluster impacts
cause local melting of existing surface structures, and flow of atoms into valleys on the surface.




Commercial cluster-smoothing equipment already exists!




Introduction to Nanoscience, 2005                                                         ×     24

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Nanosc2nc

  • 1. 2. Nanoparticles Nanoparticles are the simplest form of structures with sizes in the nm range. In principle any collection of atoms bonded together with a structural radius of < 100 nm can be considered a nanoparticle. These can include, e.g., fullerens, metal clusters (agglomerates of metal atoms), large molecules, such as proteins, and even hydrogen-bonded assemblies of water molecules, which exist in water at ambient temperatures. Nanoparticles are very commonplace in nature - for instance proteins exist in almost all biological systems, metal-oxide nanoparticles are easily produced, etc . . . Introduction to Nanoscience, 2005 × 1
  • 2. 2.1. Physically manufactured nanoparticles 2.1.1. Nanoclusters When studying nanoparticles a distinction must neccessarily be made between condensed “hard” matter nanoparticles, generally termed nanoclusters, and “soft” bio-organic nanoparticles and large molecules. A nanocluster is a nanometer sized particle made up of equal subunits. These subunits can be atoms of a single element, molecules or even combinations of atoms of several elements in subunits with equal stoichiometries (alloys, etc.) E.g.: Nan, (SF6)n, (H2O)n, (Cu3Au)n, (ClCH3C6H3CO2H)n, (TiO2)n, . . . The greatest difference arises from the fact that molecules have functionality which directly depends on the inter-positioning of their atoms, whereas the properties of nanoclusters are solely guided by the number of subunits they contain. Introduction to Nanoscience, 2005 × 2
  • 3. For this reason clusters can be seen as an intermediate stage between single atoms/molecules and bulk materials. In general, the physical properties of materials are dependent on the dimensions of the material in question – its properties (e.g. conductivity, elasticity, etc.) are scaleable with respect to the amount of atoms in the material. - scaleable size-regime – N−γ Once the particles are small enough - nanoclusters - these properties vary greatly with every addition or subtraction of an atom. - non-scaleable size-regime – every atom counts ! 2.1.2. Size does matter – small is very different! 2.1.2.1. Geometric structure Usually the crystal structure of a large nanocluster is the same as the bulk structure of the material, Introduction to Nanoscience, 2005 × 3
  • 4. with somewhat different lattice parameters (in general clusters are slightly contracted as compared to bulk). E.g. Cu clusters tend to have an FCC structure (Wulff polyhedra). Some exceptions do, however, occur. Smaller clusters of Cu (e.g. Cu55, Cu147, . . . ) have perfect icosahedral structures. - structural magic numbers: occur when an exact amount of atoms is needed for a specific structure Even smaller clusters can be amorphous-like (spherical, etc.), although a general tendency of the clusters is to form structures where the total surface energy (and internal energy) is minimized - Introduction to Nanoscience, 2005 × 4
  • 5. the exact structure then depends on the surface energies related to the specific crystal facets of the material. 2.1.2.2. Electronic structure Structural magic numbers affect the formation and abundancies of larger clusters, whereas for the case of smaller clusters the combined electronic structure of all the atoms is of greater importance. For instance in a Pbn cluster spectrum, clusters with n=7 or 10 are more abundant than others. When the ionization potentials of sodium clusters are plotted as a function of the number of atoms in the clusters, peaks are observed at clusters having two and eight atoms. This can be compared to the high ionization potentials observed for example in rare-gas atoms, where electrons are removed from filled orbitals. - electronic magic numbers are observed for clusters (although most apparent for small clusters these magic numbers can be noticed even for very large clusters - up to several thousands of atoms.) Introduction to Nanoscience, 2005 × 5
  • 6. 2.1.2.3. Jellium The jellium model has successfully been used in the theoretical modelling of nanoclusters. The jellium model envisions a cluster of atoms as a single large atom, where the distribution of ionic Introduction to Nanoscience, 2005 × 6
  • 7. cores is replaced by a constant positive background, the so called “jellium density”, and only valence electrons are treated explicitly. In effect a large spherically symmetric potential well is used to represent the potential describing the interaction of valence electrons with the positive spherical charge distribution. Energy levels can be calculated by solving the Schr¨dinger equations in a fashion analogous to that for the hydrogen o atom. As can be seen from the jellium model, the electronic structure of a cluster varies from that that of a single atom, but it also varies greatly from that of a bulk material. When a bulk lattice is formed, Introduction to Nanoscience, 2005 × 7
  • 8. the discrete energy levels of the atoms are smuged out into energy bands. E.g. valence bands and conduction bands exist in semiconductors and metals. As particles shrink in size there is a dramatic change in these bands, as the continuous density of states in bulk is replaced with a set of discrete energy levels. 2.1.2.4. Optical properties This leads to interesting optical properties. In semiconductors the band gap will be increased as cluster size is decreased – a blue shift in the absorption spectrum of the semiconductor (good for tayloring lasers). Individual energy levels and enrgy level seperations are also dependent on the size of the clusters, Introduction to Nanoscience, 2005 × 8
  • 9. which therefore affect the enrgies needed for the transitions of electrons to excited states. Clusters of different sizes will therefore have different absorption spectra – and hence different colours! 2.1.2.5. Reactivity Since the electronic structure of nanoclusters depends on their size, their ability to react with other species should also depend on size. This has important applications for the design of catalytic agents. Introduction to Nanoscience, 2005 × 9
  • 10. Reactivity is highly dependent on the electronic structure, leading to large variations in the reactivity of clusters even with sizes differing by only single atoms. In general, however, the reactivity of all nanoclusters is high as compared to that of bulk, due to their higher surface to volume ratio. E.g. gold nanoclusters are highly reactive if compared to the fairly inert bulk material. 2.1.2.6. Melting temperatures Another effect caused by a high surface to volume ratio in clusters, is a substantially lower melting temperature as compared to bulk materials. Unusual phenomena such as negative heat capacities have also been observed in clusters (at the melting temperature, an increase of the internal energy of Na+ by 1 eV leads to a decrease in temperature by about 10 K). 147 In large enough systems added energy is converted completely into potential energy, reducing continuously the fraction of its solid phase. The kinetic energy and thus the temperature remain constant. A small system, on the other hand, tries to avoid partly molten states and prefers to convert some of its kinetic energy into potential energy instead. Therefore the cluster can become colder, while its total energy increases. Introduction to Nanoscience, 2005 × 10
  • 11. 2.1.2.7. Magnetic properties Interesting magnetic properties have also been observed in small clusters. In a cluster the magnetic moment of each atom will interact with the moments of the other atoms, and can force all the moments to align in one direction with respect to some symmetry axis of the cluster – the cluster will have a net magnetic moment, it will be magnetized. As cluster size decreases it therefore becomes easier for them to exhibit ferromagnetic behaviour. In some cases, even clusters made up of nonmagnetic atoms can have a net magnetic moment. For instance rhenium clusters show a pronounced increase in their magnetic moment when they contain less than 20 atoms. For clusters with less than 15 atoms these moments are fairly large. Introduction to Nanoscience, 2005 × 11
  • 12. 2.1.3. Cluster production In principle there are three different physical methods for producing clusters. Common for all methods is the initial vaporization of atoms from a bulk target. 2.1.3.1. Energetic vaporization Energetic vaporization is the simplest of all cluster production methods. Clusters are the resulting product of the ejection of large numbers of atoms, at high energies, from the bulk material. Various different vaporization techniques are used in different sources. Including: - Laser vaporization sources, where atoms are irradiated with intense laser beams. - Pulsed-arc sources, where intense electrical discharges cause vaporization. - Ion sputtering sources, where atoms are ejected from the target through ion bombardment. - Liquid-metal ion sources, where a needle is wetted with the material, after which a high potential is applied, causing intense eletrical fields, due to which small droplets of the wetting material are emitted. Clusters produced with these sources are generally rather small and extremely hot (with temperatures near the evaporation limit). Introduction to Nanoscience, 2005 × 12
  • 13. 2.1.3.2. Seeded supersonic nozzle sources In seeded supersonic nozzle sources the material is vaporized in a hot oven, after which the vapor is mixed with (or “seeded” in) an inert carrier gas, by pressurizing the oven with the inert gas. Typically the inert-gas pressure is several atmospheres, whereas the metal-vapor pressure is in the range of 10 - 100 mbar. The vapor/gas mixture is ejected into a vacuum via a small hole (a nozzle), producing a supersonic molecular beam. Introduction to Nanoscience, 2005 × 13
  • 14. The expansion into the vacuum proceeds adiabatically and causes cooling of the mixture. The cooled metal vapor becomes supersaturated, condensing in the form of clusters. Cluster production continues until the expanding vapor density becomes too low to promote further growth, typically within a few nozzle diameters from the nozzle exit. Likewise, the cooling of the clusters continues until the inert-gas density becomes so low that its flow is molecular rather than hydrodynamic. The cooling provided by the expanding gas may be adequate to stabilize a cluster against evaporation, but if it is not, the clusters may further cool by evaporating one or more atoms. There is evidence that both processes take place. Clusters produced with this method can have very low temperatures, although, as the final cooling step for large metal clusters involves evaporation of one or more atoms, these clusters typically have temperatures close to the evaporation limit. Experimentally it is found that the more massive the carrier-gas atoms, the better the cluster production. This is related to the larger collision cross sections, so that the transition to molecular flow occurs later than for lighter gases. Although the inert gas is very important, it is worth mentioning that neat expansions (without carrier gas) also produce clusters. In this case the cluster production is limited to small sizes, with usually fewer than ten atoms per cluster. Introduction to Nanoscience, 2005 × 14
  • 15. (NOTE: Clustering of atoms through binary collisions of single atoms can, according to the laws of classical mechanics, never occur. Initial cluster formation must take place through collisions between three or more atoms!) Positive features related to seeded supersonic nozzle sources are: - Intense cluster beams. Material consumption is about 0.1 mole per hour, of which a sizeable fraction (estimated in excess of 10 % under suitable conditions) condenses into clusters in the beam. - Clusters can be produced from almost any material. E.g. gaseous clusters and metal-oxide clusters can readily be produced. Negative features: - Cluster sizes are rather limited, as the largest produceable cluster contain around 100 atoms. - As large amounts of carrier gas flow through the nozzle high vacuum is difficult to sustain in the deposition chamber. Introduction to Nanoscience, 2005 × 15
  • 16. 2.1.3.3. Gas-aggregation cluster sources In gas-aggregation cluster sources, or condensation-cell type sources, the cluster material is vaporized (e.g. by magnetron sputtering) and introduced into a flow of cold inert gas. This causes the vapor to become highly supersaturated. Pressures in the aggregation chamber are neccessarily high in order to cause initial cluster growth. After this, due to the low temperature of the inert gas, cluster production proceeds primarily by successive single-atom addition. Introduction to Nanoscience, 2005 × 16
  • 17. Since the reverse process (i.e. reevaporation) is negligible, the cluster abundances are not sensitive to the thermodynamic stabilities of the clusters and, consequently, the cluster abundances are relatively smooth functions of the cluster size determined mainly by collision statistics. The cluster size distribution is determined by the parameters of the source, such as: - sputtering rate - metal-vapor density (pressure in the chamber) - gas flow rate (and type and temperature of the gas) - length of the drift region - dimensions of various components, such as apertures Introduction to Nanoscience, 2005 × 17
  • 18. Suitable cluster materials for a source with a magnetron sputter are e.g. metals, semiconductors, all magnetic materials and metal oxides. Ar and He are typically used as aggregation gases. Positive features related to this source type are: - large clusters can easily be produced, even > 20000 atoms Introduction to Nanoscience, 2005 × 18
  • 19. - relatively intense beams - lower contamination of deposition chambers, UHV is possible - a large fraction of the produced clusters are ionized (typically 1 each positive and negative single 3 1 charged, 3 neutral), which allows for easy beam manipulation with ion optics Negative features: - not all materials can be used (gaseous clusters not possible) 2.1.3.4. Multiple ionization Multiple ionization of clusters is almost impossible, as this causes a rapid redistribution of the charges on the atoms of the cluster, making each atom more positive. Due to this, the clusters become highly unstable and rapidly fragment in a very high-energy dissociation or explosion. The velocities of single fragments from this process, often called a Coulombic explosion, are very high. One dramatic manifestation of this is the observation of nuclear fusion in deuterium clusters subjected to femtosecond laser pulses. The fragments after dissociation have energies up to 1 Mev, and can fuse upon collision! Introduction to Nanoscience, 2005 × 19
  • 20. 2.1.4. Nanocluster applications Applications of physically manufactured nanoclusters generally rely on the use of nanocluster beams and the deposition of clusters on surfaces with the help of these. The inherent properties of “free” clusters can therefore seldom by used, as this forced interaction with a substrate of some sort, which slightly alters the cluster properties, is almost always neccessary. The use of beams and deposition of clusters, however, opens new possibilities as the range of energy and mass deposition in cluster beams greatly differs from that of conventional ion beams and atomic or molecular beams. Introduction to Nanoscience, 2005 × 20
  • 21. The resulting features produced with cluster beams generally rely on the energy at which the clusters are deposited. 2.1.4.1. Low-energy deposition When nanoclusters are deposited at low energies, they generally retain some memory of their initial shape. This is useful in the manufacturing of complex nanometer sized structures (e.g. quantum dots, magnetic domain structures, etc. . . ) In the development of potential applications for low-energy deposition one almost always strives towards the formation of structures which utilize the properties of clusters as they occur in a “free” state. Introduction to Nanoscience, 2005 × 21
  • 22. Another alternative, however, is direct utilization of the interaction between the clusters and surfaces, and structures resulting from these. It is for instance know that metal clusters of small enough sizes will align epitaxially (with the same lattice directions and structure) with a single-crystal substrate upon impact. This allows for the possibility of growing “perfect” thin films at low energies. With larger clusters one can alternatively grow nanocrystalline films! 2.1.4.2. High-energy deposition At higher deposition energies the usefulness of cluster beams is at its fullest. Irradiation with high Introduction to Nanoscience, 2005 × 22
  • 23. energy cluster ions can be used for instance in the manufacturing of high standard thin films, for shallow implantation of cluster material and surface cleaning. Cluster ion beams are superior to conventional ion beam methods due to the high energy densities during bombardment and the low charge to mass ratio of clusters which leads to a more dense deposition of material at every impact. As a result of the simultaneous impacting of several atoms, multiple collisions occur at the impact point. This causes a very high increase in the local temperatures, which is suitable for the rearrangment of local atoms, at the same time as it limits the depths to which cluster atoms can penetrate into the substrate. Implantation depths for cluster ions are several times more shallow than implantation depths for single atom ions. Introduction to Nanoscience, 2005 × 23
  • 24. 2.1.4.3. Surface smoothing The high energy density associated with cluster ion impacts, coupled with a high degree of lateral sputtering and multiple near-surface collisions are ideal for smoothing surfaces. Cluster impacts cause local melting of existing surface structures, and flow of atoms into valleys on the surface. Commercial cluster-smoothing equipment already exists! Introduction to Nanoscience, 2005 × 24