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1
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
NC Operations
PREETIKA VATTIKUNDALA
Filter Reliability Engineering Intern
Supervisor: John Fendrich
Mentor: Art Durham
2
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Project : SAW filter desense spill over effects
on RF filter reliability
3
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Objective
• Wafer level desense testing
• Measure the effect of LTE desense spill over from transmit path to receive path on
reliability of the SAW filter
• Determine the amount of RF power degradation due to desense
• To develop a robust testing methodology to detect desense at wafer level
4
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Wafer level desense testing on Band 8 wafers
 Tested band 8 SAW wafers from Florida – 9 wafers – 4 inch wafers
 Measured for desense at 926-929 MHz
 Started testing using infinity probes
Work Summary
• Signal generators – E4438C
• 29dBm at 910 MHz with 10 MHz bandwidth and
50 resource blocks
• Duplexers
• i/p – K & L
• o/p – K & L
• Spectrum Analyzer
• FSW26 w/ 30dB pre-amp
• i/p probe: GGB : ECP - 18 – GS 350 DP
• o/p probe: GGB : ECP – 18 – GS 500 DP
5
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Infinity Probe Issue
• Infinity probes are not very robust and durable. Top layer of tin is so soft that it
sticks/grabs the pin head and overtime will pull the pin out of its housing (like a
tooth being pulled)
• Therefore infinity probes are not best for our application
6
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Probe investigation
• Infinity probes weren’t robust enough.
• Performed probe investigation using infinity, GGB and Z-probes.
• Decided to use GGB probes because its robust and durable
7
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
• Retested the band 8 wafers using GGB probes
• Input – TX – GGB ECP-SG-350
• Output – Ant – GGB ECP-SG-500
8
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
WL desense Band 8
Performed analysis using JMP
Good Part
9
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
• On analyzing these wafers, we noticed that most of the desense that we noticing are at
the edge of the wafer.
• In order to prove this we decided to perform a repeatability test only at the wafer edge.
10
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
• The following wafer map was used to perform the test.
• Tested 7 times in forward direction and 2 times in reverse.
11
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Band 26 wafer Desense testing
• Decided to perform a desense test at various levels of wafer fabrication
Probing at UBM level
Probes:
• Input TX – Z probes – Z10-GS-150
• Output ANT – Z probes – Z10-GS-150
Desense testing methodology
• UBM(Pre MILL Desense)
• Post MILL (Desense)
• Post MILL (RF 100%)
• Post Scan (Desense)*
• Post Scan (RF 100%)*
Device Tested
• TCSAW.0082 – 02,03 (band 26 duplexer) – NC – 6 inch wafer
• Full map (~5900 die)
12
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Nominal parts
• Used a set of good parts from TCSAW.0082.02
• Set a desense band for 862-865MHz
• Could not use the standard RX band(859-894MHz) because the
devices have not been tuned on frequency at the steps being
tested
• Noted where the LTE signal crosses the desense band(862-
865MHz)
• -102 dB
• Define desense at 10db above the crossing level
• -92 dB
Defining the Desense Level
300 Pre-MILL Nominal parts
13
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Merged Maps TCSAW.0082.02 – Pre MILL Desense Fail
: AOI Pass – Desense Pass
: AOI Fail – Desense Pass
: AOI Pass – Desense Fail **** (8)
: AOI Fail – Desense Fail (1)
AOI Pass – Desense fail - 0.13%
14
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Die Breakdown TCSAW.0082.02 - Pre MILL Desense Fail
iSiteRow iSiteColumn vcStructureType (site #) Rx(862-865MHz)
-4 1 10 -74.5
-4 1 22 -90.3
-4 1 96 -87.7
-3 2 93 -87.3
2 2 88 -87.0
2 0 48 -89.5
2 -1 111 -90.6
0 -4 137 -91.8
: AOI Pass – Desense Pass
: AOI Fail – Desense Pass
: AOI Pass – Desense Fail **** (8)
: AOI Fail – Desense Fail (1)
15
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Merged Maps TCSAW.0082.02 – Post MILL Desense
* : AOI Pass – RF Pass – Desense Fail (9) ******
: AOI Pass – RF Fail – Desense Fail (3)
: AOI Fail – RF Pass – Desense Fail (4)
X : AOI Fail – RF Fail – Desense Pass (2)
AOI Pass – RF Pass – Desense fail - 0.15%
16
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Die Breakdown TCSAW.0082.02 - Post MILL Desense
iSiteRow iSiteColumn vcStructureType(site #) Rx(862-865MHz)
-4 1 10 -90.3
-4 1 22 -88.4
-4 1 96 -82.7
-3 2 93 -88.7
-3 2 95 -86.1
-2 2 146 -88.1
2 2 32 -90.4
2 2 54 -90.9
2 2 88 -86.3
* : AOI Pass – RF Pass – Desense Fail (9) ******
: AOI Pass – RF Fail – Desense Fail (3)
: AOI Fail – RF Pass – Desense Fail (4)
X : AOI Fail – RF Fail – Desense Pass (2)
17
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
• 4 common Desense sites
• 1 Pre-MILL only Desense site
• 1 Post-MILL only Desense site
• 1 good site
Pre MILL – Post MILL Die to Die Comparison
iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta
-4 1 10 -74.5 -90.3  -15.8
-4 1 22 -90.3 -88.4  1.9
-4 1 96 -87.7 -82.7  5
-3 2 93 -87.3 -88.7  -1.4
-2 2 146 -95.7 -88.1 7.6
0 -4 137 -91.8 -102.7 -10.9
-4 0 94 -104.8 -105.3 -0.5
18
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
300 Nominal parts
Pre-MILL / Post-MILL – site#10 (-4, 1) - common
• Pre-Mill trace noisy
iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta
-4 1 10 -74.5 -90.3  -15.8
-4 1 22 -90.3 -88.4  1.9
-4 1 96 -87.7 -82.7  5
-3 2 93 -87.3 -88.7  -1.4
-2 2 146 -95.7 -88.1 7.6
0 -4 137 -91.8 -102.7 -10.9
-4 0 94 -104.8 -105.3 -0.5
19
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
300 Nominal parts
iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta
-4 1 10 -74.5 -90.3  -15.8
-4 1 22 -90.3 -88.4  1.9
-4 1 96 -87.7 -82.7  5
-3 2 93 -87.3 -88.7  -1.4
-2 2 146 -95.7 -88.1 7.6
0 -4 137 -91.8 -102.7 -10.9
-4 0 94 -104.8 -105.3 -0.5
Pre-MILL / Post-MILL – site#22 (-4, 1) - common
20
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
300 Nominal parts
iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta
-4 1 10 -74.5 -90.3  -15.8
-4 1 22 -90.3 -88.4  1.9
-4 1 96 -87.7 -82.7  5
-3 2 93 -87.3 -88.7  -1.4
-2 2 146 -95.7 -88.1 7.6
0 -4 137 -91.8 -102.7 -10.9
-4 0 94 -104.8 -105.3 -0.5
Pre-MILL / Post-MILL – site#96 (-4, 1) - common
21
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
300 Nominal parts
iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta
-4 1 10 -74.5 -90.3  -15.8
-4 1 22 -90.3 -88.4  1.9
-4 1 96 -87.7 -82.7  5
-3 2 93 -87.3 -88.7  -1.4
-2 2 146 -95.7 -88.1 7.6
0 -4 137 -91.8 -102.7 -10.9
-4 0 94 -104.8 -105.3 -0.5
Pre-MILL / Post-MILL – site#93 (-3, 2) - common
22
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
300 Nominal parts
iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta
-4 1 10 -74.5 -90.3  -15.8
-4 1 22 -90.3 -88.4  1.9
-4 1 96 -87.7 -82.7  5
-3 2 93 -87.3 -88.7  -1.4
-2 2 146 -95.7 -88.1 7.6
0 -4 137 -91.8 -102.7 -10.9
-4 0 94 -104.8 -105.3 -0.5
Pre-MILL / Post-MILL – site#93 (-3, 2) – good
23
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Pre-MILL / Post-MILL – site#137 (0,-4)
iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta
-4 1 10 -74.5 -90.3  -15.8
-4 1 22 -90.3 -88.4  1.9
-4 1 96 -87.7 -82.7  5
-3 2 93 -87.3 -88.7  -1.4
-2 2 146 -95.7 -88.1 7.6
0 -4 137 -91.8 -102.7 -10.9
-4 0 94 -104.8 -105.3 -0.5
24
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Future Work
• Analyze the data at Post Scan(desense) and Post scan(RF 100%)
• Test for WL desense at post pillar
25
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Conclusion
What did I learn from this Internship?
Technical:
• Wafer level reliability testing using Prober
• Data Analysis - JMP
Soft skills:
• Time management
• Working with a team
26
QorvoTM Confidential & Proprietary Information
© 2015 Qorvo, Inc.
Acknowledgements
• Thanks to John Fendrich and Art Durham for their guidance
• Thanks to Qorvo for giving me this opportunity

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CSS Antenna TRU-OMNI S727
 

FINAL PRESENTATION_PREETIKA

  • 1. 1 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. NC Operations PREETIKA VATTIKUNDALA Filter Reliability Engineering Intern Supervisor: John Fendrich Mentor: Art Durham
  • 2. 2 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Project : SAW filter desense spill over effects on RF filter reliability
  • 3. 3 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Objective • Wafer level desense testing • Measure the effect of LTE desense spill over from transmit path to receive path on reliability of the SAW filter • Determine the amount of RF power degradation due to desense • To develop a robust testing methodology to detect desense at wafer level
  • 4. 4 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Wafer level desense testing on Band 8 wafers  Tested band 8 SAW wafers from Florida – 9 wafers – 4 inch wafers  Measured for desense at 926-929 MHz  Started testing using infinity probes Work Summary • Signal generators – E4438C • 29dBm at 910 MHz with 10 MHz bandwidth and 50 resource blocks • Duplexers • i/p – K & L • o/p – K & L • Spectrum Analyzer • FSW26 w/ 30dB pre-amp • i/p probe: GGB : ECP - 18 – GS 350 DP • o/p probe: GGB : ECP – 18 – GS 500 DP
  • 5. 5 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Infinity Probe Issue • Infinity probes are not very robust and durable. Top layer of tin is so soft that it sticks/grabs the pin head and overtime will pull the pin out of its housing (like a tooth being pulled) • Therefore infinity probes are not best for our application
  • 6. 6 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Probe investigation • Infinity probes weren’t robust enough. • Performed probe investigation using infinity, GGB and Z-probes. • Decided to use GGB probes because its robust and durable
  • 7. 7 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. • Retested the band 8 wafers using GGB probes • Input – TX – GGB ECP-SG-350 • Output – Ant – GGB ECP-SG-500
  • 8. 8 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. WL desense Band 8 Performed analysis using JMP Good Part
  • 9. 9 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. • On analyzing these wafers, we noticed that most of the desense that we noticing are at the edge of the wafer. • In order to prove this we decided to perform a repeatability test only at the wafer edge.
  • 10. 10 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. • The following wafer map was used to perform the test. • Tested 7 times in forward direction and 2 times in reverse.
  • 11. 11 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Band 26 wafer Desense testing • Decided to perform a desense test at various levels of wafer fabrication Probing at UBM level Probes: • Input TX – Z probes – Z10-GS-150 • Output ANT – Z probes – Z10-GS-150 Desense testing methodology • UBM(Pre MILL Desense) • Post MILL (Desense) • Post MILL (RF 100%) • Post Scan (Desense)* • Post Scan (RF 100%)* Device Tested • TCSAW.0082 – 02,03 (band 26 duplexer) – NC – 6 inch wafer • Full map (~5900 die)
  • 12. 12 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Nominal parts • Used a set of good parts from TCSAW.0082.02 • Set a desense band for 862-865MHz • Could not use the standard RX band(859-894MHz) because the devices have not been tuned on frequency at the steps being tested • Noted where the LTE signal crosses the desense band(862- 865MHz) • -102 dB • Define desense at 10db above the crossing level • -92 dB Defining the Desense Level 300 Pre-MILL Nominal parts
  • 13. 13 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Merged Maps TCSAW.0082.02 – Pre MILL Desense Fail : AOI Pass – Desense Pass : AOI Fail – Desense Pass : AOI Pass – Desense Fail **** (8) : AOI Fail – Desense Fail (1) AOI Pass – Desense fail - 0.13%
  • 14. 14 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Die Breakdown TCSAW.0082.02 - Pre MILL Desense Fail iSiteRow iSiteColumn vcStructureType (site #) Rx(862-865MHz) -4 1 10 -74.5 -4 1 22 -90.3 -4 1 96 -87.7 -3 2 93 -87.3 2 2 88 -87.0 2 0 48 -89.5 2 -1 111 -90.6 0 -4 137 -91.8 : AOI Pass – Desense Pass : AOI Fail – Desense Pass : AOI Pass – Desense Fail **** (8) : AOI Fail – Desense Fail (1)
  • 15. 15 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Merged Maps TCSAW.0082.02 – Post MILL Desense * : AOI Pass – RF Pass – Desense Fail (9) ****** : AOI Pass – RF Fail – Desense Fail (3) : AOI Fail – RF Pass – Desense Fail (4) X : AOI Fail – RF Fail – Desense Pass (2) AOI Pass – RF Pass – Desense fail - 0.15%
  • 16. 16 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Die Breakdown TCSAW.0082.02 - Post MILL Desense iSiteRow iSiteColumn vcStructureType(site #) Rx(862-865MHz) -4 1 10 -90.3 -4 1 22 -88.4 -4 1 96 -82.7 -3 2 93 -88.7 -3 2 95 -86.1 -2 2 146 -88.1 2 2 32 -90.4 2 2 54 -90.9 2 2 88 -86.3 * : AOI Pass – RF Pass – Desense Fail (9) ****** : AOI Pass – RF Fail – Desense Fail (3) : AOI Fail – RF Pass – Desense Fail (4) X : AOI Fail – RF Fail – Desense Pass (2)
  • 17. 17 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. • 4 common Desense sites • 1 Pre-MILL only Desense site • 1 Post-MILL only Desense site • 1 good site Pre MILL – Post MILL Die to Die Comparison iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta -4 1 10 -74.5 -90.3  -15.8 -4 1 22 -90.3 -88.4  1.9 -4 1 96 -87.7 -82.7  5 -3 2 93 -87.3 -88.7  -1.4 -2 2 146 -95.7 -88.1 7.6 0 -4 137 -91.8 -102.7 -10.9 -4 0 94 -104.8 -105.3 -0.5
  • 18. 18 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. 300 Nominal parts Pre-MILL / Post-MILL – site#10 (-4, 1) - common • Pre-Mill trace noisy iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta -4 1 10 -74.5 -90.3  -15.8 -4 1 22 -90.3 -88.4  1.9 -4 1 96 -87.7 -82.7  5 -3 2 93 -87.3 -88.7  -1.4 -2 2 146 -95.7 -88.1 7.6 0 -4 137 -91.8 -102.7 -10.9 -4 0 94 -104.8 -105.3 -0.5
  • 19. 19 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. 300 Nominal parts iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta -4 1 10 -74.5 -90.3  -15.8 -4 1 22 -90.3 -88.4  1.9 -4 1 96 -87.7 -82.7  5 -3 2 93 -87.3 -88.7  -1.4 -2 2 146 -95.7 -88.1 7.6 0 -4 137 -91.8 -102.7 -10.9 -4 0 94 -104.8 -105.3 -0.5 Pre-MILL / Post-MILL – site#22 (-4, 1) - common
  • 20. 20 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. 300 Nominal parts iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta -4 1 10 -74.5 -90.3  -15.8 -4 1 22 -90.3 -88.4  1.9 -4 1 96 -87.7 -82.7  5 -3 2 93 -87.3 -88.7  -1.4 -2 2 146 -95.7 -88.1 7.6 0 -4 137 -91.8 -102.7 -10.9 -4 0 94 -104.8 -105.3 -0.5 Pre-MILL / Post-MILL – site#96 (-4, 1) - common
  • 21. 21 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. 300 Nominal parts iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta -4 1 10 -74.5 -90.3  -15.8 -4 1 22 -90.3 -88.4  1.9 -4 1 96 -87.7 -82.7  5 -3 2 93 -87.3 -88.7  -1.4 -2 2 146 -95.7 -88.1 7.6 0 -4 137 -91.8 -102.7 -10.9 -4 0 94 -104.8 -105.3 -0.5 Pre-MILL / Post-MILL – site#93 (-3, 2) - common
  • 22. 22 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. 300 Nominal parts iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta -4 1 10 -74.5 -90.3  -15.8 -4 1 22 -90.3 -88.4  1.9 -4 1 96 -87.7 -82.7  5 -3 2 93 -87.3 -88.7  -1.4 -2 2 146 -95.7 -88.1 7.6 0 -4 137 -91.8 -102.7 -10.9 -4 0 94 -104.8 -105.3 -0.5 Pre-MILL / Post-MILL – site#93 (-3, 2) – good
  • 23. 23 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Pre-MILL / Post-MILL – site#137 (0,-4) iSiteRow iSiteColumn vcStructureType (Site#) Pre Mill Post Mill Common Delta -4 1 10 -74.5 -90.3  -15.8 -4 1 22 -90.3 -88.4  1.9 -4 1 96 -87.7 -82.7  5 -3 2 93 -87.3 -88.7  -1.4 -2 2 146 -95.7 -88.1 7.6 0 -4 137 -91.8 -102.7 -10.9 -4 0 94 -104.8 -105.3 -0.5
  • 24. 24 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Future Work • Analyze the data at Post Scan(desense) and Post scan(RF 100%) • Test for WL desense at post pillar
  • 25. 25 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Conclusion What did I learn from this Internship? Technical: • Wafer level reliability testing using Prober • Data Analysis - JMP Soft skills: • Time management • Working with a team
  • 26. 26 QorvoTM Confidential & Proprietary Information © 2015 Qorvo, Inc. Acknowledgements • Thanks to John Fendrich and Art Durham for their guidance • Thanks to Qorvo for giving me this opportunity