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Caracterização
de materiais &
dispositivos
semicondutores
por Roní Gonçalves
?
!
$
www.janczochralski.com
www.janczochralski.com
CZ, MCZ, FZ
www.sumcosi.com/english/products/process
Mais um
catálogo! :-)
Siltronic AG – Roadshow Presentation
January, 2018
3 of 40© Siltronic AG 2018
Increasing demand for electronic devices and new applications
drive semiconductor growth, which in turn fuels silicon demand
Electronics value chain 2016
Electronics
USD 1,457bn
Semiconductors
USD 327bn
Semiconductors silicon wafers
USD 7.2bn
Silicon for electronic applications
USD 1.2bn
Siltronic AG – Roadshow Presentation
January, 2018
4 of 40© Siltronic AG 2018
10%
15%
31%
28%
16%
SK Siltron Siltronic Shin Etsu Sumco GlobalWafers
Siltronic is a strong wafer supplier with leading-edge technology
Sources: Companies’ revenue reports 2016, converted to USD million
Top 5 wafer producers serve more than 90% of market across all diameters
Comments
 Siltronic with long-term
stable market share of
around 15%
 Siltronic recognized as
technology leader in the
industry
 Joint development
programs with most
300mm customers
 Qualified at latest Design
Rules
Siltronic AG – Roadshow Presentation
January, 2018
8 of 40© Siltronic AG 2018
~5.5 mn. Wfr./month
Wafer suppliers not able to support 300mm wafer demand
during 2018 and 2019
 Customers bringing new FABs online –
total demand increase 2017-2020:
~1.900 kw/m
 Capacity increase of wafer suppliers limited
by equipment supply potentials / lead times
 Wafer suppliers seem to act rationally by
only adding capacities in incremental steps
 Industry probably constrained by wafer
supply until 2020
Sources: SEMI, IHS, Siltronic estimates
300mm demand vs. supply capacity, in kw/month
Demand (SEMI / IHS)
Capacity (Estimation)
© Siltronic AG 2017 10 of 40
Siltronic’s Design Rule roadmap follows road to “More Moore”
“More Moore” – Siltronic’s technology roadmap will
stay “One Generation Ahead”
10
2012 2013 2014 2015 2016 2017 2018 2019 2020 2021
300
mm
22 / 16
nm
16 nm
16 / 11
nm
11 nm 11 / 8 nm 8 nm 8 / 5 nm 5 nm
5 / 3.5
nm
3.5 nm
Technology
node
300 mm
development
8 nm Development Commercialization
16 nm Commercialization
11 nm Development Commercialization
5 nm Development
Commercialization
© Siltronic AG 2017 11 of 40
The transition to the next DR typically requires an improvement of critical wafer
parameters by ~ 30 %!
Siltronic DR projects develop processes for upcoming wafer
requirements one generation ahead
Image source: www.chiemsee-alpenland.de
 Surface defects
 Shape
 Crystal homogeneity
 Surface / bulk metals
 Local / near-edge flatness
How small is 20nm?
20nm height on a wafer ≈ a flat leave
on the surface of the Chiemsee.
Specifications down to 20nm!
Siltronic AG – Roadshow Presentation
January, 2018
15 of 40© Siltronic AG 2018
Ingot
Flatness just one example – A number of key ingot & wafer properties
needs to be continuously improved to meet customers‘ requirements
Wafer
oxygen content
homogeneity
flatness
surface cleanliness
edge flatness
uniformity
resistivity
shape
mechanical stability
purity
doping level
JMS + Projeto GNU
JMS + Projeto GNU
Archimedes
www.gnu.org/software/archimedes/
www.nano-archimedes.com
www.nanohub.org/tools/archimedes
www.seattlenano.org
nano4me.org/remoteaccess
www.synopsys.com/silicon/tcad.html
ρ=
1
q(nμn+ pμp)
ρ=
1
q(nμn+ pμp)
ρ=
1
q(nμn+ pμp)
ρ=
1
q(nμn+ pμp)
x cm
www.americanelements.com/silicon-ingot-7440-21-3
Mais um
catálogo! :-)
Duas pontas de prova
ρ = 2πs
V
I
Método van der Pauw
Dopantes & portadores de
carga
ρ =
1
q(nμn+ pμp)
Resistência de
contato &
Barreira Schottky
rs = f (ρ,ρi+ρc , x , y , z)
L & W
R ∝
L
W
VTH
Defeitos
DLTS & PAS
www.sas-globalwafers.co.jp/eng/products/wafer/characteristic.html
SiSiO2
Muito
obrigado!
:-)
roni.goncalves@ufrgs.br

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