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Recent Advances in Low-Dimensional Heterojunction-Based Tunnel Field Effect Transistors
1.
PROGRESS REPORT 1800569 (1
of 15) © 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim www.advelectronicmat.de Recent Advances in Low-Dimensional Heterojunction- Based Tunnel Field Effect Transistors Yawei Lv, Wenjing Qin, Chunlan Wang, Lei Liao,* and Xingqiang Liu* DOI: 10.1002/aelm.201800569 depleted silicon-on-insulator (FDSOI) configuration.[5] However, because of the 60 mV dec−1 limitation in the subthreshold swing (SS) of traditional MOSFETs,[6–8] effective method to reduce supply voltage is still under exploration. Owing to the carriers’ band-to-band tun- neling (BTBT) transport mechanism,[9–11] the SS limitation can be conquered by tunnel FETs (TFETs). It is believed that TFETs based on ultrathin semiconducting films or nanowires could achieve a 100- fold power reduction over MOSFETs.[6] Early TFETs made of bulk materials suffer from low tunneling ability caused by uniform band structures and rough interfaces. The explosive expansion of low-dimensional materials after the redis- covery of graphene in 2004 has inspired worldwide efforts on TFET designs based on these materials because of their high current densities,[12,13] easily modulated electronic properties,[14,15] and clean sur- faces and interfaces.[16,17] Furthermore, they can be fabricated into heterojunctions (HJs) via thickness, width, van der Waals (vdW) stacking, and other engineering methods due to their unique quantum con- finement properties. The introducing of HJs can improve the on- and off-state behaviors of TFETs simultaneously, which has become the research focus in recent years. For an example, the high carrier mobilities in graphene make it very suitable for source injector, which is called the Dirac source.[18,19] A vital drawback of graphene is the absence of bandgap between its conduction and valence bands, leading to large off-state cur- rent (Ioff).[20] Therefore, alternative insulation layer is needed, resulting in an interlayer TFET structure (ITFET) together with the graphene.[12,21–23] The current on-to-off (Ion/Ioff) ratios in the ITFETs have reached several decades now, much larger than the original graphene’s. Here, this progress report is devoted to introducing the TFET designs based on low-dimensional material HJs. Before that, the device physics of TFETs are introduced briefly (Figure 1). Then, the HJ construction strategies developed in recent years are studied (Figure 2a). Based on these HJs, different kinds of TFETs are introduced, including lateral and vertical vdW HJ TFETs, hot electron transistors (HETs), and Dirac-source FETs (Figure 2b). After performance demonstrations, the emerging problems towards these TFETs are studied (Figure 2c). The potential solutions and improvements are also proposed with the assistance of simulation and modeling methods Since the continuous scaling down of the transistor channel length, extraor- dinary improvement is achieved in the switching speed. However, the rising leakage current degrades the power consumption seriously. In this regard, reducing supply voltage might be the most effective method. This require- ment can be fulfilled well by tunnel field-effect transistors (TFETs), because carriers transport via a band-to-band tunneling manner in the TFETs. Relying on the special transport mechanism, the TFETs often require band structure modulations and steep interfaces without trap state, which are challenging for bulk materials. Therefore, these challenges have boosted TFET designs based on low-dimensional materials ranging from Si/Ge nanowires to state- of-art van der Waals heterostructures. Here, the key concepts of the currently developed TFETs are studied from the aspects of structure, material, trans- portation characteristic, and mechanism. According to the heterojunction bonding types, they can be divided into lateral and vertical TFETs in general. Furthermore, other related transistors based on tunneling are also included. Emerging problems and promotion methods toward these TFETs are intro- duced with the assistance of simulations. The main goal is to introduce the frontiers of TFET explorations and provide readers with a perspective on how to realize TFET applications in the future. Tunnel Field Effect Transistors Dr. Y. Lv, Prof. L. Liao, Prof. X. Liu School of Physics and Electronics Hunan University Changsha, Hunan 410082, P. R. China E-mail: liaolei@whu.edu.cn; liuxq@hnu.edu.cn Dr. W. Qin School of Physics and Electronics Hunan Normal University Changsha, Hunan 410081, P. R. China Prof. C. Wang School of Science Xi’an Polytechnic University Xi’an 710048, China 1. Introduction One of the key words for the next-generation complementary metal-oxide-semiconductor (CMOS) field-effect transistors (FETs) is “low power.” As the continuous scaling down of tech- nology node, power consumption caused by leakage current,[1] short channel effect (SCE),[2] and other technical issues have been studied intensely. Many strategies have been proposed to solve this problem, including Fin-FET structure,[3] alterna- tive materials such as GeSi and III–V compounds,[4] and fully Adv. Electron. Mater. 2018, 1800569
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www.advancedsciencenews.com © 2018 WILEY-VCH
Verlag GmbH & Co. KGaA, Weinheim 1800569 (2 of 15) www.advelectronicmat.de (Figure 2d). Finally, the TFET simulation theory based on the nonequilibrium Green’s function (NEGF) formalism is shown, which is regarded as the most general and rigorous method in quantum transport calculation. We conclude this report with a performance comparison between the experimental results and the theoretical modeling. Despite the long way to realize TFET applications, they are still very promising for the next-genera- tion integrated circuits (IC). 2. Brief Introduction to Band-to-Band Tunneling Mechanism According to quantum physics, a particle can pass through a classically forbidden potential energy barrier through tunneling. Different from conventional MOSFETs, in which the carrier transports rely on thermionic emission over channel barriers, carrier injections in TFETs primarily depend on the BTBT mech- anism.[6,24] This mechanism can be explained intuitively through a typical p–i–n structure, in which the source and drain regions are heavily doped by p- and n-type impurities, leaving the channel region undoped. At off-state (Figure 1a), the conduction band (CB) of the drain is higher than the valence band (VB) of the source in energy, no tunneling phenomenon being observed. The leakage currents are mainly induced by thermionic emission. When a positive gate voltage is applied (Figure 1b), the channel potential is lowered, opening a tunneling window between the VB of the source (almost filled with electrons) and the CB of the channel (almost empty). Note that the two boundaries of the window have prevented the carriers in higher or lower energies from being transported. Generally, carriers within the tunneling window possess lower energies compared with the thermionic carriers in MOSFETs. Therefore, currents in TFETs are very weakly dependent on the temperature.[25] This strict window also contributes to the TFETs’ lower than 60 mV dec−1 SS behavior. To outperform conventional transistors, the primary request for TFET optimization is to boost their on-state performance. According to the Wentzel–Kramer–Brillouin (WKB) approxi- mation,[26,27] the tunneling probabilities in TFETs can be sig- nificantly improved by reducing the bandgaps in the tunneling regions. On the other hand, small bandgaps will also enhance reverse hole injections from the CB of the drain to the VB of the channel at off-state, degrading the TFETs’ off-state behav- iors. The solution toward this problem is to build HJs in which the bandgaps of different segments are different. In an ideal HJ, the band structures in both sides of the junction are inde- pendent. In this case, the corresponding TFETs on- and off- states can be separately manipulated by the two segments of the HJ. For an example (Figure 1c), if only the bandgap of the source region is reduced, a shorter tunneling length at on-state will be obtained without increasing the reverse hole injections, suggesting that excellent on- and off-state behaviors of the TFET can be achieved simultaneously.[28] 3. Heterojunction Construction The WKB approximation has suggested that the bandgap and effective mass in the tunneling region should be minimized for Yawei Lv is an assistant professor of electronic science and technology at Hunan University. He received his Ph.D. degree in microelectronics from Wuhan University in 2018. His research involves quantum transport simulations of low- dimensional material based electronic devices. Lei Liao is a professor of electronic science and tech- nology at Hunan University. He received his Ph.D. degree in physics from Wuhan University in 2009. He was a professor and head of depart- ment of microelectronics in Wuhan University before joining Hunan University in 2016. His research involves design and synthesis of low- dimensional materials and processing methods for high- performance electronics. Xingqiang Liu is an asso- ciate professor of electronic science and technology at Hunan University. He received his Ph.D. degree in physics from Wuhan University in 2015. He joined the School of Electronics and Science at Hunan University in 2016. His research involves design of high-performance low-power electronics. high tunneling probability.[26,27] Early TFETs built on bulk Si suf- fered from poor on-state behavior because of the long tunneling length. The large bandgap of Si and the nonideal doping profile had led to this problem jointly. To boost tunneling, HJs were adopted later by component modulations in III–V compound materials. The bandgaps and tunneling lengths in the source– channel interfaces were reduced effectively.[29,30] Now, the on- state current of the TFET built on an InAs/InGaAsSb/GaSb HJ nanowire has reached several µA µm−1 .[31] On the other hand, too small bandgap will degrade the off-state behavior, which also should be avoided. Graphene, a famous high mobility material, cannot be used for transistors operating at room temperature because of the zero-bandgap characteristic.[32–34] Consequently, TFETs based on graphene bear large leakage currents at off-state. Despite the large Ion, Adv. Electron. Mater. 2018, 1800569
3.
www.advancedsciencenews.com © 2018 WILEY-VCH
Verlag GmbH & Co. KGaA, Weinheim 1800569 (3 of 15) www.advelectronicmat.de the Ion/Ioff ratios remain small values even in simulations.[35] To meet the requirements of carrier blocking and tunneling at off- and on-state simultaneously, HJ maybe the only feasible method. In this section, we introduce the lateral and vertical vdW HJs. For the lateral HJs, different segments are covalently connected, demonstrating high reliability in applications. How- ever, the synthesis technologies are complicate. In contrast, it is simple to fabricate the vertical vdW HJs through exfoliation and restacking methods, but the reliability needs to be improved. 3.1. Lateral Heterojunctions As aforementioned, graphene is a zero-bandgap material. Band structure engineering should be adopted before its TFET applications. It is well known that the bandgap of graphene and be induced by tailoring it into nanoribbons (GNRs).[36] Along the scaling ribbon width, the bandgap variations are non-monotonic and they can be divided into three families.[37] Naturally, a lateral HJ can be constructed by connecting the GNRs with different widths.[38–40] Although this kind of GNR HJs had been investigated and used in TFET designs theoreti- cally,[41–43] the realization was not an easy task, because of the bad band width control ability in GNR technologies. Besides, this HJ constructing method was also controversial in simu- lations since the eigenstates in one segment might penetrate into the others.[38,39,44–46] Until 2015, Chen et al. had experimen- tally demonstrated a 7-13-7 width-modulated armchair GNR (AGNR) HJ via the bottom-up synthesis method (Figure 3a).[17] They had also confirmed that the electronic structure in this HJ was spatially modulated, corresponding to type I HJ behavior. Recently, Wang et al. further studied the quantum dot effect using a 7-14-7 AGNR HJ,[47] suggesting that it was promising to construct HJs in GNRs through the width modulation. We found that interface states might exist in the zigzag edges of the wide–narrow junctions.[43] These states pinned the Fermi levels of the channels partially, restraining the tunneling at on-state. To eliminate the interface states, we further proposed a GNR HJ strategy in simulation using segmental edge saturation on a uniform width GNR.[28] The bandgaps of different GNR seg- ments were tuned by the edge saturation atoms. Therefore, the interface zigzag edges were removed, so did their related states. Additionally, there are also many other methods towards gra- phene or GNR HJs, such as the controllable dehydrogenation and partial doping.[48,49] The diverse HJ strategies make gra- phene a competitive candidate in TFET applications. Adv. Electron. Mater. 2018, 1800569 Figure 1. Principle of TFET operation. a,b) Band structure diagrams of a uniform material TFET at off- and on-states. c) Band structure diagram of a HJ TFET at on-state. The bandgap of the source region is smaller than other regions. Therefore, the tunneling length is reduced compared to the uniform material TFET. Figure 2. Schematic outline of this report. Reproduced with permission.[16,74,126,130,137] c) Copyright 2018, Nature Publishing Group; a) Copyright 2018, Nature Publishing Group; d) Copyright 2016, Nature Publishing Group; b) Copyright 2018, IEEE; and c) Copyright 2015, IEEE, respectively.
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Verlag GmbH & Co. KGaA, Weinheim 1800569 (4 of 15) www.advelectronicmat.de Another 2D HJ construction method is to synthesize dif- ferent materials in the same plane directly. This procedure often requires strict process conditions. Gong et al. had synthe- sized a WS2/MoS2 lateral HJ through vapor growth at low tem- perature.[50] Gao et al. had produced a Graphene/h-BN in-plane HJ via chemical vapor deposition (CVD) and using benzoic acid precursor.[51] It required a more than 900 °C environment temperature and the lateral HJ would be changed into vertical one if the temperature was lowered. Zhang et al. had reported a general synthesis strategy for highly robust grown of diverse lateral HJs and superlattices.[52] A wide range of HJs including WS2–WSe2 and WS2–MoSe2 were fabricated. Most recently, via a one-pot synthetic approach, monolayer transition-metal dichalcogenide (TMD) lateral HJs had been synthesized by Sahoo et al. (Figure 3b).[53] By changing the reactive gas compo- sition in the presence of water vapor, the sequential formation of HJs was achieved. Undoubtedly, these works have stimulated the explorations on 2D material based lateral HJs.[54–56] Unlike graphene, many 2D materials possess bandgaps ini- tially. Along the reducing number of layers, the bandgaps of the TMDs all increase gradually and the indirect-to-direct gap variations are observed,[57,58] making the bandgap modulation based on thickness engineering possible. However, considering the relatively low carrier mobilities which lead to small Ion,[59,60] they are commonly used in phototransistors.[61] The primary benefit using TMDs as phototransistors is the tunable channel conductance.[62] Consequently, the photoresponse is also con- trollable.[63] The layer-dependent electronic structure in phos- phorene was first shown in their transistor behaviors.[64] Later, it was observed directly by Li et al. as shown in Figure 3c.[65] They declared that distinct advantages over other 2D materials in electronic applications would be achieved by phosphorene because of its layer-dependent electronic property and high electrical mobility.[66] Then, the phosphorene TFETs with uni- form thicknesses were studied.[67] The phosphorene lateral HJ based on thickness modulation strategy was proposed by Liu et al.[68] Shown in Figure 3d, the HJ was achieved by connecting the double- and single-layer phosphorene segments together. They also mentioned that the edge states could be eliminated via edge dangling bond saturations. Although it is also hard to be realized, the primary advantage of varying thickness to form a HJ is to avoid the lattice mismatch problem at the interface.[69] Besides, Aaditya et al. found that the electronic properties of a bilayer phosphorene could be tuned by normal compressive strains.[70] A semiconductor to metal transition phenomenon was observed at ≈13.35% strain, which could be easily realized in experiments. Later, we also found that this strain–electronic relation could be enhanced by zigzag bilayer phosphorene nanoribbons.[71] We thus infer that few layer phosphorene HJs can also be achieved by partial strains. 3.2. Vertical van der Waals Heterojunctions Another HJ type which has been widely investigated is the ver- tical vdW HJ. It is formed by stacking the 2D materials layer- by-layer via mechanical transfer.[72] The 2D films can either be exfoliated directly through bulk materials or grown by CVD.[73] To date, the exfoliation is still the most successful method. However, it is not believed to be a manufacturable process considering the low yields.[74] Even it is challenging to pre- pare samples using CVD, the CVD technique is promising for semiconductor industry.[75] Direct CVD of 2D materials on 3D semiconductors also has been reported recently.[76,77] The inter- layer connections in this type of vertical HJs are achieved by the vdW force and the lattice mismatch issue can be well avoided. Due to the absence of dangling bond, the interfaces are pristine without electronic trap state. Also due to the weak interlayer interactions, many 2D materials can be combined together, generating diverse types of HJs with a wide range of band Adv. Electron. Mater. 2018, 1800569 Figure 3. Lateral HJ structure strategies based on low-dimensional materials. a) Synthesis of 7-13-7 GNR HJs using a bottom-up approach. Reproduced with permission.[17] Copyright 2015, Nature Publishing Group. b) MoSe2/WSe2 lateral HJ through a one-pot synthetic approach. Reproduced with per- mission.[53] Copyright 2018, Nature Publishing Group. c) Layer dependent band structures in phosphorene (up) and the phosphorene HJ via thickness modulation (down). Reproduced with permission.[65,68] Copyright 2017, Nature Publishing Group; Copyright 2016, The Royal Society of Chemistry, respectively.
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Verlag GmbH & Co. KGaA, Weinheim 1800569 (5 of 15) www.advelectronicmat.de alignments.[78,79] For example, only the phosphorene/TMD HJs are enough to produce all the three types of band alignments.[80] The interlayer carrier transports in vdW HJs are dominated by tunneling, thus particularly suitable for TFET design. The first vdW HJ made of graphene/boron nitride (hBN) or MoS2/graphene sandwich structure had been demonstrated by Britnell et al.[20] Their main purpose was to overcome the absence of an energy gap in graphene. The Ion/Ioff ratio of the corresponding FET reached 1 × 104. Later, the materials had been rapidly extended to WS2,[81] GaN,[82] phosphorene,[83] WSe2,[84] and SnSe2 [85] (Figure 4a–c). The transparency,[81] negative differential conductance (NDR),[86,87] spin-dependent tunneling,[88] and some other photoelectric properties[89–92] of the vdW HJs had also been investigated. Not only the 2D–2D materials, the vdW HJs also can be obtained by stacking 2D onto 3D materials. A vertical HJ had been reported by Sarkar et al. using highly doped Ge and atomi-cally thin MoS2.[93] This structure exhibited stable subthermionic tunneling behavior, generating an extremely low SS value of 3.9 mV dec−1 and an average value of 31.1 mV dec−1 for four decades. Similarly, the graphene/Si vdW HJ had also been reported by Liu et al.[94] A current density of 0.2 µA µm−1 was demonstrated. Similar with the discovery of 2D materials, early prepara- tions of vdW HJs also relied on the layer-by-layer exfoliation and restacking, a much easier method than the chemical syn- theses of lateral HJs.[53,95–98] However, Haigh et al. pointed out that the restacking might bring adsorbates between layers, detrimental for creating vdW HJs with atomically sharp interfaces.[99] Recently, a vdW superlattice had been synthe- sized by Duan’s group using an electrochemical molecular intercalation approach which could avoid interlayer adsorbates (Figure 4d).[100] The intercalation of selected 2D materials with alkali metal ions offered an alternative way to HJ construction. The above vdW HJs possess some common characteristics. For example, to boost tunneling, the materials with high carrier mobilities such as graphene and Ge tend to be chosen as the injection layers and the semiconductors and insulators such as hBN and MoS2 tend to be chosen as barrier layers. This strategy is also suitable for metal/semiconductor contacts because of the perfect vdW interfaces and highly modulated tunneling behavior. Due to this, devices with both vdW contacts and chan- nels had been proposed recently.[101–103] A good application potential of the vertical vdW HJs can be foreseen. 4. Performance Demonstration After the introduction of the cutting-edge HJ construction methods, we will discuss the TFET performance based on these HJs next. According to the HJ categories, the TFETs also can be generally sorted as lateral and vertical ones. Besides, other TFETs including the HETs and Dirac-source FETs are shown separately. Although they also belong to either of the two TFET types, their working mechanisms are different to some extent. 4.1. Lateral Tunnel Field-Effect Transistors Lateral TFETs built on III–V compound HJs keep attracting attentions in these years because of their improved on-state behavior and compatible with current semiconductor fabrica- tion. However, the interface issue caused by defects and lat- tice mismatches is still the major trouble along the continuous SS scaling. In 2016, Moselund and co-workers had fabricated the in-plane InAs/Si TFETs and discussed their SS behaviors in comparisons with other excellent works.[4,104] As shown in Figure 5a, no SS could be smaller than 60 mV dec−1. They concluded that to experimentally realize the TFETs which were comparable to simulation results, one had to establish the nature of the traps and then find appropriate solutions to deal with them. The lattice mismatch issue can be overcome by GNR HJ nat- urally, since both sides of the junction are all GNRs. The first milestone towards TFET design based on this structure was carried out by Lam et al. through an NEGF quantum transport simulator.[41] They used a GNR HJ structure with four different segments in the channel. The on- and off-states were tuned simultaneously by a small bandgap GNR segment in the source– channel interface and a large bandgap GNR segment in the middle of the channel. Later, we simplified the structure to two GNR segments named the tunneling and blocking regions.[43] Limited by technology, the GNR HJ TFET using width mod- ulation had not been experimentally realized for a long time. Until recently, it was fabricated by Hamam et al. through a reactive ion etching (RIE) technique on single layer CVD grown graphene (Figure 5b).[105] The small and large bandgaps in the source–channel interface and the channel promoted tunneling and blocking independently. An SS of 47 mV dec−1 and a cur- rent density of 8.51 µA µm−1 were observed. Since the width of the GNR channel was not able to be reduced to an extremely small value by the RIE technique, they also pointed out that the Ion/Ioff ratio was low, due to the small bandgap of the 9.4 nm wide GNR channel. We expect that this problem can be solved by the bottom-up synthesis method later.[106] Adv. Electron. Mater. 2018, 1800569 Figure 4. Schematic illustration of the recently developed a–c) vertical vdW HJs and d) superlattices. Reproduced with permission.[83,87,100,124] b) Copyright 2016, American Chemical Society; a) Copyright 2016, American Chemical Society; d) Copyright 2018, Nature Publishing Group; and c) Copyright 2017, American Chemical Society, respectively.
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Verlag GmbH & Co. KGaA, Weinheim 1800569 (6 of 15) www.advelectronicmat.de The layer dependent electronic property and high car- rier mobility in phosphorene make it suitable for thickness engineered HJ TFETs (Figure 5c).[69] Similar with the width modulation in GNRs, this TFET is achieved by increasing the layers in the source–channel interface and reducing the layers in the middle channel region. This HJ is unstrained and the interface states generated by the dangling bonds can be elimi- nated through appropriate saturation procedures.[68] As seen in its transfer characteristics, the excellent on- and off-state behav- iors of the multilayer and monolayer phosphorene TFETs are all inherited by this HJ TFET. Lateral TMDs HJ TFETs are expected to be fabricated in the near future because the HJs had been reported in experiments.[52,53,97,98] However, the TMDs should be carefully selected, since too large bandgaps are not suitable for carrier tunneling. A recent study on MoS2/WS2 HJ FET had shown that even under 80 V gate bias, the Ion is only 0.1 µA,[54] suggesting lateral HJs made of these two materials not suitable for TFET application. 4.2. Vertical Tunnel Field-Effect Transistors TFETs built on vertically stacked vdW HJs have been inves- tigated for many years because of their extremely low opera- tion voltages (generally below 0.5 V) and tunneling lengths (equal to the thickness of the channel material). This HJ con- cept was primarily proposed to promote the graphene FETs’ off-state behavior, by inserting a large bandgap 2D material between two graphene monolayers.[20] The large bandgap layer acts as a barrier and the carriers mainly transport between the two graphene layers via tunneling. We call this sandwich type HJ device the interlayer TFET (ITFET). The two outside layers are of the same material, which is beneficial for NDR behavior.[21,86,107] To make high-quality electrical contact, Wang et al. reported a contact geometry which could metalize only the 1D edges of the 2D graphene layers to enhance the ITFETs’ low-temperature ballistic transport property.[108] The fasci- nating NDR behavior of the ITFET has caused many attentions. Kang at al. pointed out that increasing the thicknesses of the graphene layers was adverse to the NDR behavior.[22] To enhance the current peak-to-valley ratios (PVRs), Burg et al. demon- strated a bilayer graphene−bilayer WSe2−bilayer graphene ITFET, exhibiting the PVRs of 4 and 6 at T = 300 and 1.5 K, respectively.[12] Besides, they also verified that the interlayer transports were mainly contributed by energy and momentum conserving tunneling. The ITFETs are suitable for the future nanoelectronics because of their high Ion/Ioff ratios. Recently, Zhang et al. replaced the graphene layers with two single- walled carbon nanotubes (SWCNTs) and fabricated an ITFET made of SWCNT-MoS2-SWCNT (Figure 6a).[101] Because of the extremely reduced HJ interface, the effects of sulfur vacan- cies in mechanically exfoliated MoS2 were greatly restrained and thus the device could be effectively turned off, generating a high Ion/Ioff ratio exceeding 105. Furthermore, a CMOS cir- cuit was demonstrated, showing a typical complementary inverter characteristic with a gain of 2.6. The A-B-A HJ ITFETs studied above can further be simplified to the A-B TFETs in which carriers directly tunnel from A to B through vdW barriers. The first A-B vertical vdW FET was dem- onstrated by Yu et al. using a graphene/MoS2 HJ.[96] However, its transport mechanism was proved to be the thermionic emission acrossing a Schottky barrier. The most notable characteristic for thermionic emission is that the on- and off-state currents will be reduced simultaneously by decreasing temperature.[109,110] The tunneling phenomenon had been observed in a WSe2-based ver- tical graphene-TMD HJ transistor by Shim et al.[84] They found that trap-assisted tunneling could dominate the transport in this device under some specific conditions and induced an anoma- lously increasing Ion with decreasing temperature (Figure 6b). An extraordinarily large Ion/Ioff ratio of 5 × 107 was achieved at 180 K. The W vacancy defects in the WSe2 contributed to the trap states participating in transport. Similarly, trap-assisted tun- neling phenomenon was also observed in the graphene/black phosphorus (BP) vertical transistor with very strict conditions, including low temperature and negative gate voltage.[83] Even worse, the tunneling could contribute to the off-state leakage Adv. Electron. Mater. 2018, 1800569 Figure 5. a) SS behaviors of the lateral HJ TFETs made of traditional materials. Reproduced with permission.[4] Copyright 2016, IEEE. b) Width engi- neered GNR HJ TFET and its working mechanism. Reproduced with permission.[105] Copyright 2018, Elsevier. c) Thickness engineered phosphorene HJ TFET and its transfer characteristics. From the red transfer curve, the HJ TFET behaves like the monolayer and the multilayer phosphorene TFETs in off- and on-states simultaneously. Reproduced with permission.[69] Copyright 2017, IEEE.
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Verlag GmbH & Co. KGaA, Weinheim 1800569 (7 of 15) www.advelectronicmat.de currents. At on-state, carriers were mainly transported through thermionic emission over the Schottky barrier. From these analyses in A-B vertically stacked vdW HJ FETs, the competition between thermionic emission and tunneling often ends up with the former’s victory.[111] Therefore, they may not suitable for two-valued logic transistor application. Never- theless, they can be used in the multivalued logic via the NDR behavior. The NDR device made of BP/ReS2 HJ was reported to show high peak-to-valley current ratio values of 4.2 and 6.9 at room and low temperatures.[112] As mentioned above, the lateral HJs made of two large bandgap vdW materials are not suitable for TFET application. Therefore, to enhance tunneling, graphene layers can be included, since the carrier effective mass and bandgap in graphene are incredibly tiny. However, for the A-B vertical vdW devices, these graphene layers easily lead to the thermionic emission transport. Shim et al. had pointed out that if the barrier height between graphene and another vdW material was less than 0.4 eV, the FET built on them mainly operated under the thermionic emission mechanism.[78] To restrain the thermionic emission, graphene should be avoided in A-B vertical vdW TFETs. Note that the tunneling lengths have been extremely scaled by the vdW HJs. Therefore, a vertical vdW TFET made of two large bandgap materials is reasonable, since the tun- neling probability reduction will be compensated by the tunneling length. Seen in Figure 6c, a practical vertical n-type HJ TFET built on SnSe2/WSe2 HJ had been demonstrated by Yan et al.[113] The type-II staggered HJ band structure was obtained. Under positive gate voltages, this type-II HJ was changed to the type-III one and high BTBT currents were observed. They reported a minimum SS of 37 mV dec−1 and a Ion/Ioff ratio exceeding 106 in this work. 4.3. Other Transistors Based on Tunneling Similar with TFETs, many other transistors also operate with the assistance of tunneling. Here, we introduce two kinds of recently developed transistors using HJ structures and tun- neling mechanism: HETs and Dirac-source FETs. Besides these tunneling devices, there are still large amount of low-dimensional HJ based applications, such as the photo- detector.[114–117] The low-dimensional HJs have inspired world- wide investigations, showing their vast potential for future electronics. Since the emergence of graphene, its potential applica- tions are being investigated during recent decades, most of which devoting to overcoming its zero-bandgap drawback and improving the off-state behavior. Among these, the graphene is expected to promote the behaviors of HETs which allows expo- nential control over tunneling currents.[118] HETs are regarded as a promising candidate for high-speed electronic devices because of their short base transit time. This advantage can be further enlarged by graphene. At off-state (Figure 7a), carriers of the emitter are blocked by the emitter–base and base–col- lector insulators (EBI and BCI) jointly. At on-state, the effective tunneling barrier of the EBI is reduced by increasing the base voltage, enabling Fowler–Nordheim tunneling and ballistic transport across the graphene. The graphene-base HET was experimentally demonstrated by Vaziri et al.[119] and an Ion/Ioff ratio exceeding 104 was obtained. An important parameter to evaluate the HETs’ performance is the common-base cur- rent gain α, defined as IC/IE where IC and IE are the emitter and collector currents, respectively. To improve it, Zeng et al. had modified the device structures and the material para meters, obtaining an effective gain of 44%.[120] To enhance sub-nanometer-scale control on the thickness and the lateral uniformity, Kong et al. had further replaced the oxide layer between the emitter and the graphene base to MoS2 in simula- tion and declared that the device was capable of realizing THz operation.[121] The developments of HETs in recent years can be described as a gradual material replacement from bulk to 2D ones.[122–125] However, whether they can afford the THz opera- tion remains to be seen. Adv. Electron. Mater. 2018, 1800569 Figure 6. Schematic illustrations of recently developed vertical vdW TFETs. a) A CNT-MoS2-CNT ITFET, and b) a graphene-WSe2 TFET working on trap- assisted tunneling process. Along decreasing temperature, its on- and off-state currents increase and decrease anomalously. c) A SnSe2-WSe2 TFET. Direct tunneling is found under forward bias, whereas p-type MOSFET behavior is observed under reverse bias. Reproduced with permission.[84,101,113] b) Copyright 2016, a) Copyright 2017 and c) Copyright 2017, Wiley-VCH, respectively.
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Verlag GmbH & Co. KGaA, Weinheim 1800569 (8 of 15) www.advelectronicmat.de Quite recently, Peng’s group proposed a novel Dirac-source FET which can operate below the 60 mV dec−1 SS limit for several decades at room temperature.[18] In a conventional MOSFET with a normal source (Figure 7b), electrons of the source follow the thermal Boltzmann distribution, leaving a long thermal tail above the potential barrier of the channel. This tail can contribute to the leakage currents and sets a 60 mV dec−1 limit on the SS. Now, it can be eliminated by the Dirac source. Below the Dirac point, density of states (DOS) decrease rapidly along the increasing energy, resulting in a superexponentially decreasing trend of the electron density. Since the much more localized electron distribution around the Fermi level will definitely make the on–off switching more fast, a smaller SS is achieved. It should be noted that in prin- ciple, this Dirac-source FET do not purely work on tunneling mechanism. However, we want to incorporate it into this review because Peng’s group used tunneling to deal with the contact and interface issues. Furthermore, their main point towards this device is to break the SS limit and reduce supply voltage, which is consistent with the TFETs’ features. Later, they removed the tunneling process and added a bandgap in the Dirac corner in simulation to complete the Dirac-source FET’s theory.[19] We keep an optimal attitude on this device since it is able to achieve small SS at room temperature. 5. Emerging Challenges After an extraordinary years-long exploration, the fabrication of low-dimensional lateral HJs is still not an easy task, hindering the corresponding TFET application. Besides, the interface states in these HJs begin to draw attentions recently. An impor- tant figure of merit to replace the conventional bulk material HJs with the ones made of low-dimensional materials is their superior lattice mismatch suppression ability. However, that does not guarantee that they can avoid interface state totally, especially for the lateral HJs. Interface issue should be figured out completely before TFET design. The graphene wide–narrow ribbon HJs introduced above are regarded as free of lattice mismatch, since the two sides of the HJs are composed by the same material. However, interface states generating from the zigzag interfaces had also been theoretically observed in our recent studies (Figure 8a). In the corresponding TFET applica- tion, these states can cause the Fermi level pining effect in the tunneling region and add an additional barrier, degrading the on-state behavior seriously.[43] In the phosphorene lateral HJ TFETs based on thickness modulation, the interface states caused by the edges of the broken layers also had been observed in simulation.[68] How- ever, it was suggested that these states could be removed by dangling bond saturations. Considering these interface states which have not been studied in TFET transport, more works are needed to verify their impacts. More recently, Zhang et al. had carried out an experiment on the interface states of a WSe2 bilayer–monolayer HJ (Figure 8b).[126] Interface states were observed, inducing significant band bending in both sides of the interface region, similar with the Fermi pining effect stated above. The band bending from the valence band side was much stronger, effectively reducing the bandgap starting about 3–4 nm away from the interface. Such a serious interface issue will definitely affect the performance the TFET built on the HJ. When two different materials are covalently connected together laterally with an interface, we often hypothesis an ideal band structure combination as shown in Figure 8c. In fact, the electronic properties of the two sides will experience an inter- acting procedure after their combination.[39] In other words, the electronic states of the two sides can penetrate mutually through the connection, leaving a transition region in the band structure. The electronic properties of the transition regions are unpredictable. Their bandgaps can be larger or lower than the two sides’. In many TFETs, the transition regions increase the tunneling lengths at on-state, leading to Ion degradations. More seriously, in some HJs,[126] the transition regions are able to be extended to several nanometers away from the interfaces. If the length of a TFETs channel constructed by this kind of HJs is only a few nanometers, the band structure of the whole channel will become uniform, losing the HJs’ features. Compared with the lateral HJ TFETs, one may not consider the interface issue in the vertical vdW HJ TFETs because of the weak vdW interactions. However, just because the weak connections, the Adv. Electron. Mater. 2018, 1800569 Figure 7. a) Band-diagrams of the HET at off- and on-states. Reproduced with permission.[119] Copyright 2013, American Chemical Society. b) State and electron density distribution comparisons between a normal source and a Dirac source. The electron density in the Dirac source decreases more rapidly along the increasing energy. Reproduced with permission.[18] Copyright 2018, American Association for the Advancement of Science.
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Verlag GmbH & Co. KGaA, Weinheim 1800569 (9 of 15) www.advelectronicmat.de relative positions of different layers can be varied easily, causing unreliable device performance. Typical effects induced by the interlayer displacements include lattice mismatch and misorienta- tion. In view of momentum conservation for direct tunneling, lat- tice mismatch will cause the k-point mismatch in the momentum space of the whole HJ structure.[127] In most monolayer TMDs, the valence band maximum (VBM) and conduction band minimum (CBM) are located at the hexagonal Brillouin zone (BZ) corners (K-points), meaning that the momenta of the VBM and CBM are matched with each other initially.[128] When they are stacked layer- by-layer to construct a vdW HJ, the k-point mismatch in the whole structure is hard to be compensated. As a result, the tunneling current is reduced at the beginning of conduction (Figure 8d). Along the opening of the conduction window, the permitted tun- neling k-range increases, eliminating the mismatch effect gradu- ally. Therefore, we can conclude that the switching speeds of the TFETs will be reduced by the lattice mismatch. Consequently, the SS performance is degraded. Another problem related to the vertical stacking of 2D mate- rials is the misorientation. Its underlying mechanism is very similar with the lattice mismatch. Therefore, Cao et al. also observed tunneling degradation in their misorientation inves- tigation.[129] They pointed out that the device performance was slightly affected by small momentum mismatches. Additionally, the electron–phonon scattering was able to relieve this effect. However, under large mismatches, the Ion reductions and the SS degradations were all observed and unavoidable. Finally, the electrical field screening effect of the overlap regions in the vertical vdW TFETs is discussed. Imagine a vertical vdW HJ with an overlap region in the middle and two extended monolayer regions on the left and right, similar with the structure in Figure 6c. The HJ is covered by a gate. When the overlap region is always populated by excessive charges, it will be immune to the gate voltage variation and only the Fermi levels of the two extended monolayer regions are varied. Thus, the tunneling is dominated by the monolayer regions, making the junction region useless. Chen et al. had systematically studied this phenomenon.[130] They held an optimized attitude towards this kind of TFETs in low-power applications. However, we still suggest that the excessive charges in the vdW junction regions should be avoided. In conclusion, the covalently bonded lateral HJ TFETs can work stably. However, they suffer from interface and fabrication problems. The vertical vdW HJ TFETs can be easily realized by exfoliation methods. But they are not stable. Slight interlayer displacements may cause significant tunneling degradations. Until now, the low current density characteristic induced by various problems still impedes the TFET applications. There- fore, through simulations, we will introduce some improve- ment strategies focused on the TFET on-state behavior. 6. Improvement Strategies Along the emerging challenges towards low-dimensional HJ TFETs, improvement strategies are also growing rapidly in these years. First one is the electrostatic doping achieved by multigate structure. Compared with MOSFETs, the doping requirement is much stricter in TFETs. Steep doping pro- files are needed in order to obtain short tunneling lengths and high Ion. Unlike bulk materials, atom densities in low- dimensional materials are extremely low. Only several foreign atoms are enough to realize heavy doping. Thus, the number of doping atoms should be carefully supervised. On the other hand, the DOS in low-dimensional materials are also very low compared to bulk materials, making the electrostatic doping a feasible method. The graphene nanoribbon chemical doping technology is relative mature now. However, the doping sites inside the ribbon and the densities of impurities are still cannot to be precisely controlled. Besides, additional defects such as Adv. Electron. Mater. 2018, 1800569 Figure 8. a) Interface states in graphene wide–narrow ribbon HJ and their impacts in TFET behaviors. Reproduced with permission.[43] Copyright 2016, IEEE. b) Interface regions in the band structure of the WSe2 bilayer–monolayer HJ. Reproduced with permission.[126] Copyright 2016, Nature Publishing Group. c) Ideal and realistic HJ band structure comparisons. The shapes of the transition regions are unpredictable. d) Current density variations along gate voltage in the WSe2–SnSe2 lateral vdW TFET with or without considering the lattice constant mismatch and secondary band minima. Reproduced with permission.[127] Copyright 2017, IEEE.
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Verlag GmbH & Co. KGaA, Weinheim 1800569 (10 of 15) www.advelectronicmat.de the Stone–Wales defects are also easy to be induced during the doping process.[131,132] In comparisons, the electrostatic doping can overcome all these technology issues well.[133] Besides, the p- and n-type doping switching, threshold variation immunity, and bandgap dopant state elimination can also be achieved.[134] In the multigate structure, the gate materials can also be varied to induce work function engineering strategy. Adopting gates with different work functions in different regions, built- in potential profiles are thus generated prior to gate voltages. Wang at al. had simulated an SWCNT TFET with this strategy (Figure 9a).[135] The left gate segment was used to bend the band structure at the source–channel interface. The middle one was used to build blocking barrier. The right one was to restrain leakage current caused by reverse tunneling. Without any gate voltage, the tunneling junction and blocking barrier had been constructed on the uniform SWCNT. The work function engi- neering is especially suitable for enhancing band bending in the tunneling region. As we mentioned above, the HJ interface states will cause Fermi level pinning and hamper tunneling at on-state. When the work function of the gate above the tunneling region is reduced, an additional built-in potential is exerted on top of this region, restraining the pinning effectively.[43] Besides, to establish the built-in potential and enhance band bending, Raad et al. alternatively buried a metallic layer in the oxide region between gate and source electrode.[136] The position deviation in the buried layer did not affect the device performance sig- nificantly. They also suggested that small work function in the buried layer is suitable for superior device behaviors. The TFET performance can be improved by the multi- gate. Similarly, it can also be improved by multidielectrics. Ilatikhameneh and co-workers had proposed the dielectric engineered TFET (DE-TFET) concept in their works.[7,133,137] The engineering is realized through a low-k dielectric sandwich by two high-k ones (Figure 9b). When different voltages were exerted on the two gates, the electric field in the low-k dielectric would be higher (about 0.9 V nm−1 ), according to the displace- ment vector continuous equation εlowElow = εhighEhigh. Conse- quently, the band structure below the low-k dielectric was more significantly twisted, resulting in a shorter tunneling length at on-state. Besides, the DE-TFETs offered advantages on oxide thickness fluctuation compared to conventional TFETs. Most low-dimensional transistors especially TFETs are believed to suffer from contact issue. In an ideal metal–semiconductor junction, the Schottky barrier is formed either for electrons or holes. To reduce the contact resistance, the barrier height should be effectively modulated. However, this modulation is commonly hard to be realized because of severe chemical interactions that are hard to avoid at the interfaces of the metals and the 2D mate- rials.[138,139] These chemical interactions often cause a Fermi level pinning effect, leading to unchanged Schottky barriers. Recently, we reported a creation of vdW metal–semiconductor junction in which the atomically flat Au thin film was laminated onto the MoS2 without direct chemical bonding.[16] The Fermi level pin- ning effect was thus avoided, making the Schottky barrier mod- ulation follow the Schottky–Mott model again. To restrain the Fermi level pinning, an alternative method of replacing device contacts by vdW HJs had been proposed by Shin et al.[103] They observed that graphene did rarely induce any Schottky barrier or Fermi pinning on MoS2 due to the vdW interactions (Figure 9c). Graphene was able to tune its own Fermi level according to the MoS2’s without making any barrier. Similar graphene/WSe2 vdW HJ had also been used as contact by Avsar et al.,[102] resulting in an average barrier height of only 80 meV. We believe that the vdW contacts will be used widespread in the future. 7. Quantum Transport Modeling toward TFETs Both the solving of emerging problems and the proposing of improvement strategies need simulation and modeling as theoretical guidance. Accuracy of the modeling will influence the exploring directions to a great extent. Here, we will introduce the quantum transport simulation theory based on the NEGF method. As mentioned above, the carrier injection mechanism in TFETs is BTBT, from the VBM of the source to the CBM of the channel due to tunneling inside the forbidden gap. Therefore, it is a quantum-mechanical behavior essentially.[140] The strictest treat- ment on BTBT is to solve the Schrodinger equation directly, such Adv. Electron. Mater. 2018, 1800569 Figure 9. Schematic illustrations of a) gate work function engineering, b) dielectric engineering, and c) vdW contact strategy to improve TFET performance. Reproduced with permission.[103,135,137] c) Copyright 2018, American Chemical Society; a) Copyright 2014, IEEE; and b) Copyright 2015, IEEE, respectively.
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Verlag GmbH & Co. KGaA, Weinheim 1800569 (11 of 15) www.advelectronicmat.de as the Schrodinger–Poisson solver. If a closed system is investi- gated, the Hamiltonian will be compact because of the periodic boundary conditions and thus the Schrodinger equation can be solved easily. In fact, for TFETs and other transistors, they are commonly connected with left and right contacts which may be much larger in sizes compared with the channel regions, leading to complex Hamiltonian (Figure 10a). The most fascinating prop- erty of the NEGF approach is to reduce the complex Hamiltonian to the size which is consistent with the channel, via the concept of self-energy which is used in many-body physics to describe electron–electron and electron–phonon interactions. The NEGF approach is believed the most efficient and rigorous approach in nanoscale electronic device transport simulations and it is par- ticularly suitable for TFET modeling and simulations.[140] The general form of the Green’s function is obtained from[141] G E EI HC L R ph 1 [ ] ( ) = − − Σ − Σ − Σ − (1) where the ΣL and ΣR are self-energy functions account for the open boundary conditions and HC is the Hamiltonian of the channel region in a device. In addition, electron–phonon interactions can be incorporated through the Σph. Here, it is neglected.[141] Note that the E in Equation (1) can be varied by the electrostatic potential in the channel. Once the Hamiltonian and self-energies are constructed, the transport characteristics are achieved through the solution of the Green’s function. The transmission spectrum of the system can be written as T E G G G G trace trace 1 2 2 1 ( ) ( ) ( ) = Γ Γ = Γ Γ + + (2) where the Γ1 and Γ1 are broadening functions. Finally, the cur- rent in the transmission formalism is obtained through I q h ET E F F / d 1 2 ∫ ( ) ( )( ) = − − (3) where F1 and F2 are the Fermi functions of the source and the drain. The carrier density can be obtained via the density matrix E F E A F E A d 2 0 1 1 0 2 2 ∫ ρ π µ µ [ ] ( ) ( ) = − + − (4) where A1 and A2 are left and right spectral functions. On the other hand, the carrier density can be included into the Poisson equation to renew the electrostatic potential through ε r r q r free fix φ ρ ρ ( ) ( ) ( ) ∇ ∇ = − + (5) where ε r ( ) is the dielectric constant, r ( ) φ is the electrostatic potential, and ρfix is the fixed charges which can be induced by doping. Until now, the self-consistent iteration procedure is constructed between the Schrodinger and Poisson equations (Figure 10b). The Hamiltonian used in the NEGF method is usually in a tight binding (TB) form in order to reduce the computational burden. It can be obtained either by a local atomic basis such as the sp3 d5 s* TB model used in Si material,[142,143] or by the effective-mass approximation and the k·p methods.[144–146] These methods have been successfully utilized to predict the quantum transport behav- iors of the devices based on traditional materials. However, for the emerging low-dimensional materials such as the phosphorene and tellurene,[66,147,148] the required orbital parameters are missing. Here, we introduce a Hamiltonian construction method which can eliminate the parameter restriction. Due to the Adv. Electron. Mater. 2018, 1800569 Figure 10. a) Hamiltonian simplification under open boundary conditions using the NEFG method. b) Poisson–Schrodinger solver. c) Multiscale simulation flow. d) Hamiltonian construction strategy for the MoS2-1T/MoS2-2H HJ. Reproduced with permission.[151] Copyright 2017, American Physical Society.
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Verlag GmbH Co. KGaA, Weinheim 1800569 (12 of 15) www.advelectronicmat.de extremely scaled sizes, the channel regions in TFETs can be simulated directly from the first-principles density functional theory (DFT). Then, the set of N Bloch wave functions nk ψ describing the VBM and CBM are transformed to a set of N Wannier functions through w V U e k nR BZ mn k mk m N ik R | 2 | d 3 1 ∑ π ψ ( ) = ∫ ( ) = − ⋅ (6) where U(k) is a unitary matrix and R is the Bravais lattice vector. Next, we choose the U(k) using some deliberate strat- egies to minimize the spatial spreads of the Wannier func- tions. Consequently, the Hamiltonian in TB form is obtained from these Wannier bases naturally. This procedure is called the maximally localized Wannier functions (MLWFs) method. Now, a multiscale simulation flow from the ab initio calculations to the quantum transport simulations has been constructed by the DFT, MLWF, and NEGF methods (Figure 10c).[141,149,150] It should be noted that the first-principles calculations require periodic units. As mentioned above, the TFET per- formance can be improved significantly by HJs which are not suitable for the first-principles calculations. This challenge had been conquered recently by Marian et al. who built the Ham- iltonian of the MoS2-1T/MoS2-2H interface.[151] They declared that attentions should be paid to the off-diagonal elements con- necting the two different materials and used the off-diagonal elements of the MoS2-2H’s in the interface (Figure 10d). 8. Conclusion We have carried out a progress report on recently developed TFETs based on low-dimensional HJs. Compared with conven- tional MOSFETs, TFETs mainly work through the BTBT mech- anism, resulting in large Ion/Ioff ratios within small supply voltages. To boost the on- and off-state behaviors simultane- ously, HJs should be adopted in the TFET design. In general, we have introduced the state-of-art HJ strategies, including lateral width and thickness engineering, in-plane covalent syntheses, and vertical vdW stacking. Then, various novel TFETs based on these HJs are studied from structures to working mecha- nisms. Next, The emerging challenges and potential improve- ment methods toward these novel TFETs are introduced. As shown in Table 1, we want to conclude this report with a com- prehensive performance comparison of these TFETs: i) from simulations, the behaviors of the TFETs with HJs can meet the requirements of future electronics, proving the feasibility of TFET theoretically; ii) in both simulations and experiments, behaviors in HJ TFETs are much better than the uniform ones, indicating the correctness of doping HJs in TFETs; iii) after years of explorations and developments, the performance of Adv. Electron. Mater. 2018, 1800569 Table 1. Performance comparisons of the recently simulated or fabricated TFETs Main material Minimum SS [mV dec−1 ] Ion [µA µm−1 or µA µm−2 ] Ion/Ioff Voltage [V] Ref. Simulation GNR lateral HJ 15 2000 2 × 107 0.4 [28] 15 600 1 × 109 0.6 [43] Trilayer phosphorene 13 2 2 × 1011 0.9 [67] Black phosphorus 25 200 1 × 1014 0.6 [152] Trilayer/monolayer Phosphorene HJ – 1280 1 × 107 0.5 [69] Ge/Si nanowire HJ 8 10 1 × 108 0.5 [153] Monolayer WSe2 or WTe2 16 1000 1 × 107 0.8 [137] Experiment WSe2/SnSe2 vdW HJ 100 3 × 10−2 1 × 107 1 [85] MoS2/WSe2 vdW HJ 75 0.1 1 × 104 1 [87] NbS2/n-MoS2 vdW HJ 60 1 5 × 104 2 [103] Black phosphorus/MoS2 vdW HJ 51 1 × 10−3 1 × 104 1 [154] 55 1 2 × 106 3 [111] Ge/MoS2 vdW HJ 4 1 1 × 1010 1 [93] SnSe2/WSe2 vdW HJ 37 3 1 × 106 6 [113] InAs/Si nanowire HJ 70 10 1 × 107 0.8 [4] InAs/GaSb nanowire HJ 68 35 1 × 105 0.5 [155] Monolayer MoS2 3100 4 × 10−5 1 × 102 10 [10] L-shaped Si 34 1 × 10−3 1 × 105 2.5 [156] GeSn 60 4 1 × 107 1 [157] WSe2 260 0.2 1 × 106 1 [102] GNR lateral HJ 47 8.5 3 × 103 3 [105] Dirac-source HJ 40 40 1 × 106 0.5 [18] InAs/InGaAsSb/GaSb Nanowire 43 10.4 1 × 104 0.3 [158]
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Verlag GmbH Co. KGaA, Weinheim 1800569 (13 of 15) www.advelectronicmat.de experimentally realized TFETs has been comparable with the simulation results in some single index evaluations. However, no TFET exhibits a satisfactorily overall performance. Fatal drawbacks almost exist in each of them; iv) among these per- formance indexes, the Ion is the worst in experiments. No value even exceeds 100 µA µm−1, suggesting that the tunneling issue is still the most serious problem for TFETs. There is still a long way to realize TFET application. However, we hold an opti- mistic attitude towards this. At least, we have figured out one investigation direction from this report: keep improving the on-state behavior. Acknowledgements The authors acknowledge funding by the National Key Research and Development Program of Ministry of Science and Technology (Grant No. 2018YFB0406603), NSFC grant (Grant Nos. 61625401, 61574101, 61704051, 11604252, and U1632156), Hubei Province Natural Science Foundation (Grant No. 2016CFA028), the Natural Science Foundation of Hunan Province (Grant Nos. 2017RS3021 and 2017JJ3033), as well as the Ten Thousand Talents Program for Young Talents. Conflict of Interest The authors declare no conflict of interest. Keywords field-effect transistors, heterojunctions, low-dimensional materials, tunnel, van der Waals Received: August 26, 2018 Revised: September 20, 2018 Published online: [1] S. Sahay, M. J. Kumar, IEEE Trans. Electron Devices 2017, 64, 1330. [2] Y. Bin, C. H. J. Wann, E. D. Nowak, K. Noda, H. Chenming, IEEE Trans. Electron Devices 1997, 44, 627. [3] D. Hisamoto, L. Wen-Chin, J. Kedzierski, H. Takeuchi, K. Asano, C. Kuo, E. Anderson, K. Tsu-Jae, J. Bokor, H. 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