6. Type Probe Technique Best Resolution Penetration Uses and Constraints
Optical
Microscopy
Visible Light Detect reflected light
(opaque samples) or
transmitted light
(transparent samples).
Light focused using lenses.
~200 nm Surface or
volume (can
probe through
transparent
materials)
Scanning Electron
Microscopy (SEM)
Electrons Detect electrons back-
scattered by the sample.
Electrons focused using
electromagnets.
~1 nm Surface Sample must be in a
vacuum.
Transmission
Electron
Microscopy (TEM,
STEM)
Electrons Detect electrons scattered as
they move through the
sample.
Electrons focused using
electromagnets.
~0.05 nm Volume Samples must be <100 nm
thick.
Atomic Force
Microscopy (AFM)
Cantilever
Tip
Detect the electrostatic force
between the sample and the
probe tip.
~0.1 nm Surface Can be used to manipulate
atoms on the sample
surface.
7. It is a microscope that produces an image by using an
electron beam that scans the surface of a specimen inside a
vacuum chamber.
What can we study in a SEM?
Topography and morphology
Chemistry
Crystallography
Orientation of grains
In-situ experiments:
Reactions with atmosphere
Effects of temperature
“Easy” sample
preparation!!
“Big” samples!
8. AFM Cantilever Tip Ant Head Blood Cells
Diamond Thin Film
(Numerous Multifaceted Micro-
crystals)
Microstructure of a plain carbon
steel that contains 0.44 wt% of
carbon
Calcium Phosphate
Crystal
10. The SEM uses electrons instead of light to form an
image.
A beam of electrons is produced at the top of the
microscope by heating of a metallic filament.
The electron beam follows a vertical path through
the column of the microscope. It makes its way through
electromagnetic lenses which focus and direct the
beam down towards the sample.
Once it hits the sample, other electrons
( backscattered or secondary ) are ejected from the
sample. Detectors collect the secondary or
backscattered electrons, and convert them to a signal
that is sent to a viewing screen similar to the one in an
ordinary television, producing an image.
11.
12. Best resolution that can be obtained: size of the
electron spot on the sample surface
The introduction of FEG has dramatically improved the
resolution of SEM’s
The volume from which the signal electrons are
formed defines the resolution
SE image has higher resolution than a BSE image
Scanning speed:
a weak signal requires slow speed to improve signal-to-
noise ratio
when doing a slow scan drift in the electron beam can affect
the accuracy of the analysis
13. References
Fundamentals of materials Science and Engineering – William D. Callister
Physical Metallurgy – Robert W. Cahn
Physical Metallurgy and Advanced Materials – R. E. Smallman
Physical Metallurgy Principles – Robert E. Reedhill
http://en.wikipedia.org/scanning_electron_microscope