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Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
1
Lecture 7 – The fabrication of semiconductor
nanostructures I
Introduction
In this lecture we will look at the techniques used to fabricate
semiconductor
nanostructures. The well-established epitaxial methods used to
produce
quantum wells will be described. The main techniques applied
to produce
quantum wires and quantum dots will be discussed, with a
comparison of their
relative advantages and disadvantages. In the next lecture we
will look in
detail at the most successful technique used to produce quantum
dots, self-
organisation.
Epitaxial techniques
There are two well established epitaxial growth techniques used
to produce
high quality quantum wells: molecular beam epitaxy (MBE) and
metal organic
vapour phase epitaxy (MOVPE).
The following figure shows the main components of an MBE
reactor.
The reactor consists of an ultra-high vacuum chamber with a
number of
effusion cells, each containing a different element. Each cell
has a mechanical
shutter placed in front of its opening. In operation the cells are
heated to a
temperature where the elements start to evaporate, producing a
beam of
atoms which leave the cells. These beams are aimed at a heated
substrate
which consists of a thin wafer of a suitable bulk semiconductor.
The incident
beams combine at the surface of the substrate and a
semiconductor is
deposited atomic-layer by atomic-layer. The substrate is rotated
to ensure
even growth over its surface. By opening the mechanical
shutters in front of
certain cells it is possible to control which semiconductor is
deposited. For
example opening the shutters in front of the Ga and As cells
results in the
growth of GaAs. Shutting the Ga cell and opening the Al cell
switches to the
growth of AlAs. Because the shutters can be operated very
rapidly in
comparison to the rate at which material is deposited, it is
possible to grow
An MBE reactor
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
2
very thin layers with very sharp interfaces between layers. The
following figure
shows a transmission electron microscope image of a quantum
well sample
containing five wells of different thicknesses. The thinnest well
has a
thickness of only 1nm. Other cells in the MBE reactor may
contain elements
used to dope the semiconductor and it is possible to monitor the
growth as it
proceeds by observing the electron diffraction pattern produced
by the
surface.
The second epitaxial growth technique is metal organic vapour
phase epitaxy
(MOVPE). In this technique the required elements are carried,
as a
component of gaseous compounds, to a suitable chamber where
they mix as
the gases flow over the surface of a heated substrate. The
compounds
breakdown to deposit the semiconductor on the surface of the
substrate with
the remaining waste gases being removed from the chamber.
Valves in the
gas lines leading to the chamber allow the gases flowing into
the reactor to be
switched on and off. A suitable switching sequence allows
layered structures
to be deposited. Because it is difficult to switch a gas flow
quickly, and
because the growth rate with MOVPE is faster than for MBE,
the latter
technique is generally capable of growing thinner layers with
more abrupt
interfaces. However the faster growth rate of MOVPE has
advantages in
commercial production where it is necessary to deposit the
material as quickly
as possible. MOVPE has a number of safety implications as the
gases are
highly toxic. The following figure shows a schematic diagram
of the main
components of a MOVPE system.
A cross sectional transmission electron microscopy (TEM)
image of an InGaAs-
InP quantum well structure containing five wells of different
thicknesses.
Main components of a MOVPE system (From Davies)
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
3
Requirements for semiconductor nanostructures
Before we look at the various techniques that have been used to
produce
quantum wires and dots, it is useful to consider what properties
ideal
structures should exhibit. This will help in analysing the
relative advantages
and disadvantages of each technique.
The main requirements of a semiconductor nanostructure can be
summarised
as follows
• Size. For many applications we require all the electrons and
holes to be in
their lowest energy state, implying negligible thermal excitation
to higher
states. The amount of thermal excitation is controlled by the
ratio of the
energy spacing between the confined states and the thermal
energy, given
by kT. At room temperature the thermal energy is 25meV and a
rule of
thumb is that the level separation should be at least three times
this value
(~75meV). As the spacing between the states is controlled by
the size of
the structure (see lecture 5 for the case of a quantum well) this
places
requirements on the size of the nanostructure.
• Quality. Defects may increase the probability of carriers
recombining non-
radiatively. Structures with a large number of defects may be
very
inefficient light producers. For optical applications
nanostructures with low
defect numbers are required.
• Uniformity. Devices generally contain a large number of
nanostructures.
Ideally all the nanostructures should be identical otherwise they
will all emit
light at slightly different energies.
• Density. It should be possible to produce dense arrays of
nanostructures.
• Growth compatibility. Industry uses MBE and MOVPE
extensively.
Nanostructures will find more applications if they can be
produced using
either or both of these techniques.
• Confinement potential. The depth of the potential wells which
confine the
electrons and holes must be relatively deep. If this is not case
then at room
temperature carriers will be thermally excited out of the
nanostructure.
• Electron and/or hole confinement. For electrical applications
it is
generally only necessary for either electrons or holes to be
trapped
(confined) within the nanostructure. For electro-optical
applications it is
necessary for both types of carrier to be confined.
• p-i-n structures. Many applications require the electrical
injection of
carriers into the nanostructure or the transfer of carriers,
initially created in
a nanostructure, to an external electrical circuit. This can be
achieved if the
nanostructure can be incorporated within the intrinsic region of
a p-i-n
structure.
Fabrication of semiconductor quantum wires and quantum dots
Lithography and etching
This starts with an epitaxially grown two dimensional system to
provide
confinement along the growth direction. Lithography (etch
resist, optical
lithography with a mask or electron beam lithography) is then
used to define a
pattern on the surface consisting of either wires or dots. These
are
subsequently etched using a plasma, resulting in free standing
dots or wires.
The structure can subsequently be returned to a growth reactor
to be
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
4
overgrown and incorporated in a p-i-n device. The main stages
of this
technique are shown in the following figure. The main
disadvantage of this
technique is that the surface is damaged during the etching
stage. The
resultant defects produce an optically dead layer where non-
radiative
recombination is the dominant electron-hole recombination
process. This
dead layer has an almost constant width so becomes
increasingly important
as the size of the structure decreases. For the small sizes
required for
practical nanostructures the dead layer occupies all of the
structure which is
consequently optically dead.
Cleaved edge overgrowth
A quantum well is initially grown and then the sample is
cleaved in the growth
reactor along a plane parallel to the growth direction. The
sample is then
rotated through 90° and a second quantum well followed by a
barrier is grown.
The growth sequence is shown in the following figure.
The two quantum wells form a T-shaped structure. At the
intersection of the
two wells the effective well width is slightly larger. Because the
confined
energy levels depend on the inverse of well width squared (see
Lecture 5) the
intersection region has a slightly lower potential and hence
electrons and
holes become trapped there – a quantum wire is formed. If
during the initial
growth multiple wells are grown then the overgrowth of the
final well results in
a linear array of wires. A second cleave followed by a further
overgrowth can
be used to produce quantum dots.
The surfaces produced by cleaving are clean, in contrast to the
dirty surface
formed by etching. Hence cleaved edge overgrowth dots and
wires have a
(a) (b) (c) (d)(a) (b) (c) (d)
The main stages in forming lithographically defined dots. (a)
growth of a 2D quantum
well. (b) surface coating with etch resist. (c) exposure of resist
to form pattern (d)
etching to form dot or wire.
(a) (b) (c) (d)(a) (b) (c) (d)
The steps involved in the cleaved edge overgrowth of a quantum
wire. (a) initial
quantum well growth (b) cleavage to form a perfect surface (c)
rotation (d) growth
of the second quantum well.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
5
high optical quality. Their main disadvantage is that the
potential at the
intersection of the wells is not much smaller than in the wells.
The carriers are
only weakly confined in the intersection region and at room
temperature their
thermal energy is sufficient to allow them to escape. These
structures are
therefore generally suitable for studying physics at low
temperatures but not
for device applications, which need to work at room
temperature. In addition
the cleaving step is a difficult, non-standard process.
Growth on Vicinal Substrates
Semiconductors are crystalline materials with a periodic
structure. Only when
a semiconductor crystal is cut in certain directions will it have a
flat surface.
For other directions the surface will consists of a series of steps
(think about a
brick wall). Epitaxial growth is usually performed on flat
surfaces. However the
use of stepped surfaces (so-called vicinal surfaces) can be used
to produce
quantum wires. The size of the steps is determined by the
direction along
which the surface is formed but are typically ~20nm or less.
The above figure shows the main steps in the growth of vicinal
quantum
wires. Starting with the stepped surface (a) the wire
semiconductor is initially
deposited epitaxially (b). Growth tends to occur in the corner of
the steps as it
here that the highest density of atomic bonds occurs. As the
growth proceeds
the semiconductor spreads out from the initial corner. When
approximately
half of the step width has been covered growth is switched to
the barrier
material (c) which is used to cover the remainder of the step.
Growth can then
be switched back to the wire semiconductor to increase the
height of the wire
(d). This growth cycle is repeated until the desired vertical
height is obtained.
Finally the wire is overgrown with a thick layer of the barrier
material (e).
Although very thin wires can be produced using this technique
the growth has
to be very well controlled so that exactly the same fraction of
the step is
covered during each cycle. In addition the coverage on different
steps varies
and it is difficult to ensure that the original steps are uniform.
The resultant
wires tend not to exhibit good uniformity.
Growth on patterned substrates
This starts with a flat semiconductor substrate which is coated
with an etch
resist and then exposed using either optical or electron beam
lithography to
produce an array of parallel stripes. The regions between the
stripes are then
etched in a suitable acid. Because the acid etches different
crystal directions
at different rates, a v-shaped groove is obtained. The patterned
substrate is
then cleaned and transferred to a growth reactor.
(a) (b) (c) (d) (e)(a) (b) (c) (d) (e)
The main steps in the growth of vicinal quantum wires (a)
original stepped surface
(b) growth occurs in corners of steps, sufficient material
deposited to cover ~1/2
of step (c) remainder of step filled in with first material (d)
more wire material
deposited to increase thickness of wire (e) final over growth of
wire.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
6
Quantum wires are usually formed from GaAs, with AlGaAs as
the barrier
material. Initially the AlGaAs barrier is deposited. This grows
uniformly over
the whole structure and may sharpen the bottom of the groove
which, after
the etching, has a rounded profile. Next a thin layer of GaAs is
deposited.
Although this again grows over the whole surface, the growth
rate at the
bottom of the groove is faster than that on the sides of the
grooves due to the
different crystal surfaces. A quantum well is formed with a
spatial modulation
of its thickness, being thicker at the bottom of the groove. In a
similar manner
to cleaved edge overgrowth, this thicker region results in a
potential minimum
forming a quantum wire. A second AlGaAs barrier layer can
now be grown;
this re-sharpens the groove after the formation of the wire, after
which further
wires can be grown. The main steps of this technique, resulting
in v-groove
quantum wires, are shown in the above figure.
The following figure shows a cross sectional transmission
electron
microscope image of a multiple v-groove quantum wire
structure. The wires
have a crescent cross section.
(a) (b) (c) (d)
The main steps in the formation of v-groove quantum wires (a)
original patterned
substrate, (b) growth of barrier semiconductor (c) growth of
wire semiconductor,
greater growth at bottom of groove (d) growth of second barrier,
re-sharpening of
groove.
A cross sectional transmission electron micrograph of three v-
groove quantum
wires. The wires have a maximum thickness of approximately
8nm.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
7
Because the quantum wire is not next to the original etched
surface, v-groove
quantum wires exhibit good optical efficiencies. However it is
difficult to
control the inplane size of the wires as this is mainly
determined by the shape
of the groove. The uniformity of the wire along its length is
also influenced by
the original groove quality. For achievable wire sizes the energy
level
spacings are typically 20~30meV, some what less than required
for room
temperature operating devices. However in some cases careful
control of the
groove cross-section has lead to slightly larger level spacings.
A further
disadvantage of v-groove quantum wires is their complicated
structure. In
addition to the wire there are quantum wells formed on the sides
of the groove
(side wall wells) and on the region between the grooves (top
wells). These
wells may capture carriers, reducing the fraction which
recombine in the wire
and also producing additional features in the emission spectra.
Although the
top wells and some of the side wells can be removed by etching
after growth
this requires a further fabrication step and the structure may
need to be
returned to the reactor to complete the growth of a p-i-n
structure.
By initially patterning the substrate not with a single array of
stripes but with
two perpendicular arrays to give a two dimensional array of
squares, the
subsequent etching forms an array of pyramidal shaped pits.
Epitaxial growth
now results in the formation of quantum dots at the bottom of
each pit.
Strain induced dots and wires
If a semiconductor is subjected to strain its band structure is
modified. In
particular by applying the correct sign of strain the band gap
may be reduced.
If strain is only applied to a small region of the semiconductor
then a local
reduction of the band gap may occur, resulting in the formation
of a wire or
dot. In practise a local strain is produced by depositing a thin
layer of a
different material (e.g. carbon) on the surface of the
semiconductor. This will
have a very different atomic spacing to the semiconductor so to
fit together
both the atomic positions in the carbon layer and the surface
region of the
semiconductor will alter. This alteration constitutes a strain. If
the carbon layer
is patterned by lithography and then etched to leave only stripes
or dots, the
local strain field produces a wire or dot in the underlying
semiconductor. The
remaining isolated pieces of carbon are known as stressors. It is
necessary to
place a quantum well near to the surface of the semiconductor
to provide
confinement along the growth direction. The steps in the
production of strain
induced dots and wires are shown in the following figure.
(a) (b) (c)(a) (b) (c)
Steps in the formation of strain induced nanostructures (a)
initial quantum well (b)
deposition of carbon layer (c) formation of stressors by
lithography and etching.
The resultant, localised strain field (dashed lines) forms a wire
or dot in the
quantum well.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
8
Although this technique involves an etching step, only the
carbon layer is
etched, the etching is kept away from the optically active
quantum well. Hence
defect formation is not a problem as is the case for the etched
dots and wires
described above. However the strain fields only produce a weak
modulation of
the band gap and so the confinement potential is relatively
small. At room
temperature carriers are thermally excited from the dots or
wires.
Electrostatically induced dots and wires
If a thin metal layer is deposited on the surface of a
semiconductor (a
Schottky contact) then a voltage can be applied between the
metal and the
semiconductor. This voltage has the effect of either raising or
lowering the
energies of the conduction and valence bands near the surface,
with respect
to their energies deeper in the semiconductor. If the bands are
raised then a
potential minimum is created for holes near to the surface.
Alternatively if the
bands are lowered a potential minimum for electrons is created.
This is shown
in the following figure.
If the metal layer used to make the Schottky contact is patterned
using
lithography and etching, then the resultant shapes can be used to
locally
modulate the conduction and valence bands, forming quantum
wires or
quantum dots. An added sophistication is to form two slightly
separated metal
strips on the semiconductor surface, a so-called split gate. By
applying
appropriate voltages a potential minimum is created in the
region between the
gates, the width of which is determined by the size of the
applied voltage.
Hence a wire of variable width is created.
Electrostatically induced nanostructures form clean systems as
only the metal
needs to be etched, not the semiconductor. However the
potential minima are
not very deep and the spacing between the energy levels is
small, they are
hence only suitable for low temperature operation. Their main
limitation
however is that only electrons or holes are confined in a given
structure, they
are hence not suitable for optical applications.
V
V
The effect of applying a voltage to a Schottky contacted
semiconductor
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
9
Quantum well width fluctuations
The width of a quantum well is not constant but exhibits a
spatial fluctuation
(see the following figure). Because the confined energy levels
depend upon
the well width, potential minima are formed for electrons and
holes at points
where the well width is above its average value. These
fluctuations confine
the carriers within the plane of the dot (the well provides
confinement along
the growth direction) to give a quantum dot. Although these
dots have good
optical properties their confining potential is very small, as are
the spacings
between the confined levels. The inplane size of the dots is
virtually
impossible to control (the well width fluctuations are essentially
random) and
the spread of dot sizes is very large. These dots have no device
prospects.
Thermally annealed quantum wells
A GaAs-AlGaAs well is grown using standard epitaxial
techniques. A very
finely focussed laser beam is then used to locally heat the
surface. This
produces a diffusion of Al from the AlGaAs into the GaAs well,
causing an
increase in the band gap. By scanning the beam round the edges
of a square
a potential barrier is produced surrounding the unilluminated
centre of the
square. Carriers optically excited within this square are
confined by the
potential barrier and the quantum well, forming a quantum dot.
Quantum wires
can also be formed by scanning the laser beam along the edges
of a
rectangle. Because the minimum size of the focussed laser beam
is ~1µm the
minimum size of the dots is fairly large (~100nm). This results
in very closely
spaced energy levels and, in addition, the annealing processes
can affect the
optical quality of the semiconductor. This technique also
requires specialised,
non-standard equipment.
Semiconductor nanocrystals
Very small semiconductor particles, which act as quantum dots,
can be
formed in a glass matrix by heating the glass with a small
percentage of a
suitable semiconductor. Dots with radii between 1~40nm are
formed, the
radius being a function of the temperature and heating time. The
main
limitation of these dots is that, because they are formed in an
insulating glass
matrix, the electrical injection of carriers is not possible.
Quantum well width fluctuations. The electrons and holes are
localised in
regions where the well width is above its average value (blue
dashed line).
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
10
Colloidal quantum dots
These are formed by injecting organometal reagents into a hot
solvent.
Nanoscale crystallites grown in the solution with sizes in the
range 1~10nm.
Subsequent chemical and physical processing can be used to
select a subset
of the crystallites with good size uniformity. The dots are
formed from II-IV
semiconductors, including CdS, CdSe and CdTe. The dots
exhibit good
optical properties but as they are free standing the electrical
injection of
carriers is not possible.
Summary and conclusions
In this lecture we have looked briefly at the two established
epitaxial
techniques (MBE and MOVPE) used to grow two dimensional
quantum wells.
We then considered the main requirements for the properties of
semiconductor nanostructures, before discussing the various
techniques
which have been developed to produce quantum wires and
quantum dots. Of
the techniques used to produce wires the most important are the
v-groove
and electrostatic induced ones. Only the former technique has
been applied to
room temperature device applications (mainly lasers) although
it still has a
number of disadvantages. For quantum dots, growth on
patterned substrates,
strain induced structures, electrostatic induced structures,
quantum well width
fluctuations, quantum well thermal annealing and colloidal dots
have all been
used to study physics in zero-dimensional systems (generally at
very low
temperatures). However none of these techniques has so far
been suitable for
room temperature device applications. We will see in the next
lecture that self-
organised techniques come the closest to producing ideal dots.
Further reading
The epitaxial techniques of MBE and MOVPE are discussed in
Davies ‘The
Physics of Low-Dimensional semiconductors’. Bimberg,
Grundmann and
Ledentsov ‘Quantum Dot Heterostructures’ discuss some of the
requirements
for semiconductor nanostructures. Some of the numerous
fabrication
techniques developed to produce wires and dots are described in
the
previously mention books and in the book by Weisbuch and
Vinter ‘Quantum
Semiconductor Structures’
More information can be obtained from a number of research
papers.
Suggestions are
• A close look on single quantum dots, A Zrenner, Journal of
Chemical
Physics Volume 112 page 7790 (2000). Provides an overview of
many of
the techniques used to prepare quantum dots. Many useful
references.
• Photoluminescence from a single GaAs/AlGaAs quantum dot,
K Brunner
et al Physical Review Letters Volume 69 Page 3216 (1992).
Thermally
annealed dots.
• Quantum size effect in semiconductor microcrystals, A
Ekimov et al Solid
State Communications Volume 56 Page 921 (1985).
Semiconductor
nanocrystals.
• Luminescence from excited states in strain induced InGaAs
quantum dots,
H Lipsanen et al, Physical Review B Volume 51 page 13868
(1995). Strain
induced dots.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
11
• One-dimensional conduction in the two-dimensional electron
gas in a
GaAs-AlGaAs heterojunction, T J Thornton et al, Physical
Review Letters
Volume 56 Page 1198 (1986). Electrostatically induced wires.
• Synthesis and characterisation of nearly monodispersive CdE
(E=S, Se,
Te) semiconductor nanocrystallites, C B Murray et al, Journal
of the
Americal Chemical Society Volume 115 Page 8706 (1993).
Colloidal
quantum dots.
• Formation of a high quality two-dimensional electron gas on
cleaved
GaAs, L N Pfeiffer et al, Applied Physics Letters Volume 56
Page 1697
(1990). Cleaved edge overgrowth of quantum wires.
• Patterned quantum well heterostructures grown by OMCVD on
non-planar
substrates - applications to extremely narrow SQW lasers, R
Bhat et al
Journal of Crystal Growth Volume 93 Page 850 (1988). V-
groove quantum
wires.
• Molecular beam epitaxy growth of tilted GaAs AlAs
superlattices by
deposition of fractional monolayers on vicinal (001) substrates,
J M Gaines
et al, Journal of Vacuum Science and Technology B Volume 6
Page 1381
(1988). Growth of quantum wires on vicinal surfaces.
• Self-limiting growth of quantum dot heterostructures on
nonplanar {111}B
substrates, A Hartmann et al Applied Physics Letters Volume 71
Page
1314 (1997). Growth of quantum dots on patterned substrates.
• Homogeneous linewidths in the optical spectrum of a single
gallium
arsenide quantum dot, D Gammon et al, Science Volume 273
Page 87
(1996). Dots formed from quantum well width fluctuations.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
12
Lecture 8 – The fabrication of semiconductor
nanostructures II
Introduction
In this lecture we will look at the most successful technique
developed so-far
to fabricate semiconductor quantum dots – self-assembly. The
use of this
technique will be described and some of the properties of
resultant dots will
be discussed.
The growth of strained semiconductor layers
Generally when growing quantum wells it is arranged that the
well, barrier and
substrate semiconductors have the same atomic spacing (lattice
constant).
For example GaAs and AlGaAs have almost identical lattice
constants. GaAs
quantum wells with AlGaAs barriers can therefore be grown on
GaAs
substrates. If we try to grow a semiconductor which has a very
different lattice
constant to that of the substrate, then initially it adjusts its
lattice constant to fit
that of the substrate and the semiconductor will be strained.
However to strain
a material requires energy. Hence as the thickness of the
semiconductor
increases energy will build up. Eventually there is sufficient
energy to break
the atomic bonds of the semiconductor and dislocations (a
discontinuity of the
crystal lattice) form. Beyond this point the semiconductor can
grow with its
own lattice constant, strain energy no longer builds up. The
thickness of
semiconductor which can be grown before dislocations form is
known as the
critical thickness. The critical thickness is a function of the
semiconductor
being grown and also the degree of lattice mismatch between
this
semiconductor and the underlying semiconductor or substrate.
Dislocations provide a very efficient mechanism for non-
radiative carrier
recombination. Hence a structure which contains dislocations
will, in general,
have a very poor optical efficiency. When growing strained
semiconductor
layers it is therefore important not to exceed the critical
thickness.
A good example of a strained semiconductor system is InxGa1-
xAs-GaAs.
When growing quantum wells InxGa1-xAs forms the wells, as it
has the smaller
band gap, with GaAs forming the barriers. As the In
composition of InxGa1-xAs
increases the lattice mismatch between InxGa1-xAs and GaAs
also increases.
Because InxGa1-xAs-GaAs quantum wells are generally grown
on a GaAs
substrate the InxGa1-xAs wells are strained to fit the GaAs
lattice constant.
For low In compositions (x~0.2) it is possible to grow quantum
wells with
thicknesses up to a few 10s nm before the critical thickness is
reached.
However for higher x the critical thickness decreases rapidly.
Self-assembled growth of quantum dots
The lattice mismatch between InAs and GaAs is very large (7%)
and the
critical thickness for the growth of an InAs layer on GaAs is
expected to be
very small (of the order of a few atomic layers). When InAs is
first deposited
on GaAs it grows as a highly strained, flat layer (two
dimensional growth).
However for certain growth conditions before dislocations start
to form the
growth changes to three dimensions in the form of small
islands. These
islands form the quantum dots and sit on the original two
dimensional layer,
which is known as the wetting layer.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
13
This behaviour in which the growth transforms from two to
three dimensional
is known as the Stranski-Krastanow growth mode. It is caused
by a trade off
between elastic and surface energy. All surfaces have an
associated energy
because of their incomplete atomic bonds. The surface energy is
directly
proportional to the area of the surface. Hence the surface after
the islands
start to form has a greater energy than the original flat surface.
However
within the islands the lattice constant of the semiconductor can
start to shift
back to its bulk value, hence reducing the elastic energy (note
this shift is
gradually and increases with distance along the growth
direction, there are no
dislocations formed - see following figure). Because the
reduction in elastic
energy is greater than the increase in surface energy the
transformation to
three dimensional growth represents the lowest energy, and
hence most
favourable, state. Following the growth of the dots they are
generally
overgrown by the barrier semiconductor GaAs. The following
figure shows the
main steps in the formation of self-assembled quantum dots.
InAs
GaAs
(a)
(b)
(c)
(d)
InAs
GaAs
(a)
(b)
(c)
(d)
LHS - change in the lattice spacing for atoms in a self-
assembled quantum dot.
RHS the main stages in the formation of a self assembled dot:
(a) GaAs substrate
(with buffer layer), (b) initial 2D growth of InAs (c)
transformation above critical
thickness to 3D island-like growth (d) over growth of dots with
GaAs.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
14
The Physical Properties of Self-Assembled Dots
The physical properties of self assembled dots (e.g. size, shape
and density)
depend to some extent on the conditions used to growth them
(e.g.
temperature and growth rate). Typically they have a base size
between
10~30nm, a height of 5~20nm and a density of
1x1010~1x1012cm-2. However
values outside this range may be possible by carefully
controlling the growth
conditions. Because of their small size the energy separation
between their
confined levels is relatively large (40~70meV). They contain no
dislocations
and so exhibit excellent optical properties. They have a high
two dimensional
density and multiple layers can be grown (see below). They are
grown entirely
by an epitaxial process and can easily be incorporated within
the intrinsic
region of a p-i-n structure. Their confinement potential is
relatively deep (100-
300meV) and both electrons and holes are confined. Uniformity
is reasonable
but could be better (see below). The following figure shows a
cross-sectional
transmission electron microscope (TEM) image of a typical
quantum dot. This
is a bare dot which has not been over grown with GaAs (it is
difficult to obtain
similar images of over grown dots as there is very little contrast
between InAs
and GaAs in the TEM images).
The following figure shows an AFM image of quantum dot
sample. Again the
dots have not been overgrown with GaAs.
A cross-sectional TEM image of an InAs quantum dot grown on
GaAs. The base of
the dot is approximately 18nm.
An AFM image of a quantum dot sample. Note the
exaggerated vertical scale.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
15
The shape and composition of self assembled quantum dots
Although extensively studied there is still considerable
uncertainty as to the
precise shape of self assembled quantum dots. Various shapes
have been
claimed including pyramids, truncated pyramids, cones and
lenses (part of a
sphere). One problem in determining the shape is that it is
difficult to study
dots which have been overgrown. Although bare dots can be
studied using
AFM and related surface techniques, there is some evidence that
the dot
shape may change when they are overgrown. It may be that the
shape of self
assembled quantum dots depends upon the precise growth
conditions.
A further complication is the composition of the dots. The dots
can either be
grown using pure InAs or the alloy InGaAs. However even when
grown with
InAs there is evidence that the dots consist of InGaAs
indicating the diffusion
of Ga into the dots from the surrounding GaAs. The Ga
composition in the
dots is unlikely to be uniform leading to a highly complicated
system which is
difficult to model theoretically (see below).
Multiple quantum dot layers
Once one layer of dots has been deposited and overgrown with
GaAs a flat
surface is formed upon which a second layer can be deposited.
It is hence
possible to grow multiple layers of dots. When the first dot
layer is deposited
the positions of the dots are reasonably random. As the InAs in
the dots
gradually returns to its bulk lattice constant as the dot height
increases, the
initial GaAs deposited on top of the dot will be slightly
strained. A strain field
will be produced in the GaAs above each dot, although this will
gradually
decrease to zero as the thickness of the GaAs is increased.
However if, when
the next dot layer is deposited, these strain fields are still
present (only a thin
GaAs layer has been grown) they may act as nucleation sites for
the next
layer of dots. In this case the dots are vertically aligned and
stacks of aligned
dots may be formed with 10 or more dots in a stack. This
alignment only
occurs when successive dot layers are separated by very thin
GaAs layers
(<10nm). For thicker GaAs layers the strain field is essentially
zero when the
next layer is deposited and the dots form at random positions.
The following
figure shows a cross sectional transmission electron microscope
image of a
sample containing 10 dot layers with each layer separated by
9nm of GaAs.
The vertical alignment of the dots into stacks can be clearly
seem. This
alignment may be important for the electronic and optical
properties as it is
possible that electrons and holes may be able to move between
the dots in a
stack.
A cross sectional TEM image of vertically aligned quantum
dots.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
16
Dot uniformity
The growth of self assembled dots is a semi-random process.
Dots at different
positions on the surface will start to form at slightly different
times as the
amount of InAs deposited will not be totally uniform. This
results in the final
shape and size (and possibly composition) varying slightly from
dot to dot. As
the energies of the confined energy states are a function of the
dot size,
shape and composition these will also vary from dot to dot.
The emission from a single dot will consist of a very sharp line
(similar to the
emission from an atom). However most experiments on self
assembled
quantum dots probe a large number of dots. For example a
typical
photoluminescence experiment will use a laser beam focussed to
a diameter
of 250µm. If the dot density is 1x1011cm-2 the area of the laser
beam will
contain ~50 million dots, each of which will contribute to the
measured
spectrum. As each dot will emit light at a slightly different
energy the sharp
emission from each dot will merge into a broad, featureless
emission. This is
known as inhomogeneous broadening. Only if the number of
dots probed can
be reduced significantly (e.g. by reducing the diameter of the
laser beam - see
later lectures) will the individual sharp emission lines be
observed.
The non-uniformity of self-assembled quantum dots and the
resultant
inhomogeneous broadening of the optical spectra is a
disadvantage for a
number of potential device applications. For example the
absorption is spread
out over a wide energy range instead of being concentrated at a
single
energy. The inhomogeneous broadening also complicates
fundamental
physics studies; as will be discussed in later lectures. However
there are
some applications (e.g. optical memories) which make use of
the
inhomogeneous broadening. The following figure shows
photoluminescence
spectra of different numbers of quantum dots. This is achieved
by evaporating
an opaque metal mask on the sample surface in which holes of
different sizes
are formed. By shining the laser beam through these different
size holes,
different numbers of dots can be probed.
Photoluminescence spectra of different numbers of quantum
dots.
From Gammon MRS Bulletin Feb. 1998 Page 44
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
17
Theoretical modelling of self-assembled quantum dots
Self assembled quantum dots have a high degree of strain and
this strain is
non-uniform. In addition they have a complicated shape. This
makes the
calculation of the confined energy levels very difficult. The
following figures
show the distribution of strain, calculated for pyramidal shaped
dots, and the
shapes of the wavefunctions for the lowest energy electron and
hole states.
As we will see in later lectures the optical spectra of the
quantum dots are
very complicated and difficult to interpret. Hence it is still not
possible to test
the predictions of the various available theoretical models. In
addition many of
the input parameters required for the models (e.g. the exact dot
size, shape
and composition) are still not well known.
The strain distribution in self assembled quantum dots: (a)
through the wetting
layer, (b) through the dot. From Stier et al PRB 59, 5688
(1999).
Electron and hole wavefunctions for the lowest energy confined
quantum dot
states. From Stier et al ibid.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
18
Different self assembled quantum dot systems
The most commonly studied self assembled system consists of
InAs or
InGaAs dots grown within a GaAs matrix. The band gap of bulk
InAs is 0.4eV
but quantum confinement and strain increase this to between
0.95 and 1.4eV,
the precise value being dependent on the shape and size of the
dots. This
energy range correspond to wavelengths 1300~900nm, which is
in the near
infrared region of the electromagnetic spectrum.
The emission energy can be increased if InAs or InGaAs dots
are grown in an
AlGaAs matrix. This allows energies up to ~1.8eV (≡690nm) to
be obtained. Al
can also be added to the dots to increase their emission energy
(AlInAs-
AlGaAs dots).
Self assembled dots have also been fabricated from other
semiconductor
combinations where there is sufficient lattice mismatch.
Examples include InP
dots in GaInP (emission energy ~1.6-1.9eV [~775-650nm]), Ge
dots in Si and
InSb, GaSb or AlSb dots in GaAs (emission energy ~1.0-1.3eV
[~1200-
950nm]). More recently there have been attempts to grow dots
in the wide
band gap nitride semiconductors GaN, InN and AlN.
Summary and Conclusions
In this lecture we have looked at the most promising method for
producing
quantum dots suitable for electro-optical applications. The main
properties of
quantum dots prepared using the self-assembly technique are
compared with
other types of dots and wires in the following table. Self-
assembled dots
satisfy the majority of requirements for device applications,
possibly with the
exception of uniformity. As we will see in later lectures, a
number of devices
based on self assembled quantum dots have now been
demonstrated.
Further reading
'Quantum Dot Heterostructures' by Bimberg et al provides a
comprehensive
overview of the self-assembly technique including a discussion
of optical,
electrical and structural studies and devices based on these
quantum dots.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
19
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Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
20
Lecture 9 – Modulation doping and transport
phenomena in semiconductor nanostructures
Introduction
Using a technique known as modulation doping it is possible to
obtain
extremely high carrier mobilities in semiconductor
nanostructures. This has a
number of practical applications and also leads to the
observation of a
number of highly novel transport related phenomena.
Modulation Doping
We saw in Lecture 2 that in a bulk semiconductor the carrier
mobility is limited
by phonon scattering at high temperatures and scattering from
charged
impurity atoms at low temperatures. The temperature
dependence of the
electrical mobility hence has the following form.
Although the low temperature mobility can be increased by
reducing the
impurity density this lowers the electrical conductivity as it is
these impurities
which provide the free carriers (doping).
In a semiconductor nanostructure however it is possible to
spatially separate
the dopant atoms and the resultant free carriers, significantly
reducing this
scattering mechanism. This leads to very high low temperature
carrier
mobilities. This arrangement, which is known as remote or
modulation doping,
is shown schematically for n-type doping of a quantum well in
the following
figure. In this case the donor atoms are placed only in the wider
band gap
barrier material, the quantum well is undoped1. However the
electrons
released by the donor atoms in the barrier transfer into the
lower energy well
states, resulting in a spatial separation of the free electrons and
the charged
donor atoms. The confined electrons in the quantum well are
said to form a
two-dimensional electron gas (2DEG); a two-dimensional hole
gas can
similarly be formed by doping the barriers p-type. The non-zero
charge
1 This is simply achieved during MBE growth by only opening
the shutter in front of the cell
containing the dopant atoms during growth of the barriers. In
MOVPE the gas carrying the dopant
atoms is similarly switched.
M
ob
ili
ty
Temperature
Phonon
scattering
Impurity
scattering
M
ob
ili
ty
Temperature
Phonon
scattering
Impurity
scattering
Temperature dependence of electrical mobility for a
semiconductor
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
21
present in both the barriers and the well2 adds an electrostatic
potential
energy which results in a bending of the band edges, as
indicated in figure
(b). This band bending allows the formation of a modulation
doping induced
2DEG at a single interface (a single heterojunction) between
two different
semiconductors, as shown in figure (c). Here the combined
effects of the
conduction band offset and the band bending result in the
formation of a
triangular shaped potential well which restricts the motion of
the electrons to
two dimensions.
In a modulation doped structure the barrier region immediately
adjacent to the
well is generally undoped, forming a spacer layer, which further
separates the
charged dopant atoms and the free carriers. By optimising both
the width of
this spacer layer and the structural uniformity of the interface,
and by
2 The total charge of the structure remains zero but there are
equal and opposite charges in the well and
barriers.
(a) (b) (c)
Donor atom Free electron
(a) process of n-type modulation doping in a quantum well, (b)
as (a) but also showing the
effects on the band edges of the non-zero space charges, (c)
modulation doping of a single
heterostructure.
0.1 1 10 100
1
10
100
1000
1980
1982
1989
GaAs-AlGaAs
single heterojunctions
Clean bulk GaAs
Bulk GaAs
El
ec
tro
n
M
ob
ili
ty
(c
m
2 V
-1
s-1
)
Temperature (K)
Temperature dependence of the mobility of bulk GaAs (standard
and clean) and three GaAs-
AlGaAs single heterostructures (numbers give the
corresponding years). Data taken from
Stanley et al (Appl. Phys. Lett. 58, 478 (1991)) and Pfeiffer et
al (ibid 55, 1888 (1989))
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
22
minimising unintentional background impurities, it is possible
to achieve
extremely high low temperature mobilities. The previous figure
compares the
temperature variation of the electron mobility of standard bulk
GaAs, a very
clean bulk specimen of GaAs and a series of GaAs-AlGaAs
single
heterojunctions. At high temperatures, where mobility is limited
by phonon
scattering, the mobilities of the different structures are very
similar. At low
temperatures the mobility of bulk GaAs is increased in the
cleaner material
where a lower impurity density reduces the charged impurity
scattering.
However the absence of doping results in a low carrier density
and, as a
consequence, a low electrical conductivity. It is therefore not
possible to
achieve both a high conductivity and high mobility in a bulk
semiconductor.
Modulation doping however results in both high free carrier
densities and low
temperature mobilities more than two orders of magnitude
larger than those of
clean bulk GaAs and almost four orders of magnitude larger
than ‘standard’
bulk GaAs. The data for the different heterojunctions presented
in the figure
demonstrates how the low temperature mobility of a single
heterojunction has
increased over time, reflecting optimisation of the structure, the
use of purer
source materials and cleaner MBE growth reactors. The ability
to produce
2DEGs of extremely high mobility has allowed the observation
of a range of
interesting physical processes, a number of which will be
discussed later in
this lecture and the following lecture.
Modulation doping is now used extensively to provide the
channel of field
effect transistors (FETs), particularly for high frequency
applications. Such
devices are known as high electron mobility transistors
(HEMTs) or
modulation doped field effect transistors (MODFETs). Although
the use of
modulation doping provides negligible enhancement of the room
temperature
carrier mobility, the free carriers are confined to a two
dimensional sheet in
contrast to a layer of non-zero thickness for conventional
doping. This precise
positioning of the carriers results in devices exhibiting more
linear
characteristics and, for still unclear reasons, these devices also
exhibit lower
noise. III-V semiconductor HEMTs or MODFETs operating up
to ~300GHz are
achievable with applications including mobile communications
and satellite
signal reception.
The Hall effect in bulk semiconductors
The following figure shows the geometry used to study the Hall
effect. A
current Ix flows along a semiconductor bar to give a current
density Jx (=Ix/wh).
A magnetic field B applied normal to the axis of the bar
produces a magnetic
force on each moving charge carrier given by qvB, where q is
the charge and
v the carrier drift velocity. This force causes the carrier motion
to be deflected
in a direction perpendicular to both the field and the original
motion as shown
in the figure. As a consequence of this deflection there is a
build up of the
charge carriers, and hence a non-zero space charge, along the
side of the
bar, which results in the creation of an electric field along the
y-axis, Ey. This
so-called Hall field produces an electrostatic force (qEy) on the
charge carriers
which opposes the magnetic force. Equilibrium is quickly
reached where the
two forces balance to give a zero net force.
/( ) / 1/( )y y x y x HqE qvB E vB J B nq or E J B nq R= ⇒ = =
= =
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
23
where the last step follows from the relationship Jx=nqv (see
Lecture 2). The
ratio Ey/(JxB) is known as the Hall coefficient and has a value
1/(nq). As Ey
produces a voltage between the sides of the bar, given by
Vy=wEy, all three
quantities Ey, Jx and B are easily determined allowing RH and
hence the
product nq to be found. A Hall measurement of a bulk
semiconductor hence
allows the carrier density n to be determined as well as the
majority carrier
type (electrons or holes) from the sign of RH.
The Quantum Hall Effect
The Hall effect can also be observed in a nanostructure
containing a 2DEG.
Experimentally the electric field along the sample, Ex, can also
be determined
by measuring Vx as shown in the previous figure. This allows
two resistivities
to be determined, defined as:
ρ ρxx
x
x
xy
y
x
E
J
E
J
= =
Because RH=Ey/(BJx), for a bulk semiconductor ρxy=RHB,
which increases
linearly with increasing magnetic field, with ρxx remaining
constant. However
for a two-dimensional system a very different behaviour is
observed, as
shown in the following figure. In this case although ρxy
increase with
increasing field, it does so in a step-like manner. In addition
ρxx oscillates
between zero and non-zero values, with zeros occurring at fields
where ρxy
forms a plateau. This surprising behaviour of a two-dimensional
system is
known as the Quantum Hall effect and was discovered in 1980
by Klaus von
Klitzing, for which he was awarded the 1985 Nobel Physics
Prize. The
Quantum Hall effect arises as a result of the form of the density
of states of a
two-dimensional system in a magnetic field. This corresponds to
that of a fully
quantised system, with quantisation in one direction resulting
from the
physical structure of the sample and quantisation in the
remaining two
directions provided by the magnetic field. Diagram (a) of the
following figure
shows the discrete energy levels for a perfect system. However
in any real
system the levels are broadened by carrier scattering events and
the energy
levels have the form given by the right hand diagrams. These
‘bands’ of states
VXVY
IX
JX
B
w
h Ex
Ey
The geometry of the Hall effect
0 1 2 3 4 5 6 7 8 9
0
2000
4000
6000
8000
10000
12000
14000
ρ
XY resistance (h/e
2)
1/7
1/6
1/5
1/4
1/3
1/2
(x60)ρxx
ρ
xy
R
es
is
ta
nc
e
(Ω
)
Magnetic Field (T)
An example of the integer quantum Hall
effect. Data taken from Paalanen et al,
Phys. Rev. B. 25, 5566 (1982)
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
24
have similarities with the energy bands in a solid (see Lecture
1) and as in
that case the electronic properties are a very sensitive function
of how the
charge carriers occupy the bands. Each band formed by the
magnetic field is
known as a Landau level and it can be shown that the
degeneracy of each
Landau level is given by
eB
h
Hence as the field is increased the degeneracy of each level also
increases.
Therefore for a given carrier density in the structure the number
of occupied
levels decreases with increasing field. In (c) the Landau level
degeneracy is
such that only the lowest two levels are occupied. This
corresponds to the
case of an insulator with completely filled bands followed by
completely empty
bands. In this case the structure has a zero conductivity
(σxx=0). In (b) the
field has been increased so that now the second Landau level is
only half
filled. Conductivity is possible for the electrons in this level
and hence σxx≠0.
Under conditions of high magnetic field the following
relationships relate the
conductivity and resistivity components
2
1xx
xx xy H
xy xy
R B
σ
ρ ρ
σ σ
≈ ≈ =
The first relationship shows that the zero conductivity values
obtained when
exactly an integer number of Landau levels are occupied results
in a zero
value for ρxx.
The plateau values of ρxy can be found by noting that if exactly
j Landau levels
are fully occupied then
S
eB
N j
h
=
where NS is the two dimensional carrier density. From the
above definition of
ρxy
(a) (b) (c)
Quantised energy levels of a two dimensional system placed in a
magnetic field (a) case of
zero level broadening (b) and (c) with level broadening and for
different occupations of the
levels up to the dashed line.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
25
2
1 25812.8
xy H
S
B h
R B
N e j e j
ρ = = = = Ω
The plateau values of ρxy are sample independent and are
related to the
fundamental constants h and e. Values for ρxy can be measured
to very high
accuracy and are now used as the basis for the resistance
standard and also
to calculate the fine structure constant α=µ0ce2/2h, where the
permeability of
free space, µ0, and the speed of light, c, are defined quantities.
The parameter j is known as the filling factor The quantum Hall
effect
discussed previously occurs for integer values of j and is
therefore known as
the integer quantum Hall effect. However, in samples with very
high carrier
mobilities, plateaus in ρxy and minima in ρxx are also observed
for fractional
values of j, giving rise to the fractional quantum Hall effect.
The discovery and
theoretical interpretation of the fractional quantum Hall effect,
which results
from the free carriers behaving collectively rather than as single
particles, lead
to the award of the 1998 Nobel Physics prize to Stormer, Tsui
and Laughlin.
An example of the fractional quantum Hall effect is given in the
above figure
which was recorded at very low temperatures for a very high
mobility GaAs-
AlGaAs single heterostructure. In addition to minima in ρxx and
plateaus in ρxy
for integer values of the filling factor, similar features are also
observed for
non-integer values, for example 3/5, 2/3, 3/7 etc.
Ballistic Carrier Transport
The carrier transport considered so far is controlled by a series
of random
scattering events (see Lecture 2). However the high carrier
mobilities which
can be obtained by the use of modulation doping correspond to
very long path
lengths between successive scattering events, lengths that can
significantly
An example of the fractional quantum Hall effect which where
the filling factor j has non
integer values. The integer quantum Hall effect is still observed
at low fields. Figure from
R Willet et al Phys. Rev. Lett. 59, 1776 (1987).
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
26
exceed the dimensions of a nanostructure. In this case a carrier
can pass
through the structure without experiencing a scattering event, a
process
known as ballistic transport. Ballistic transport conserves the
phase of the
charge carriers and leads to a number of novel phenomena, two
of which will
now be discussed.
When carriers travel ballistically along a quantum wire there is
no dependence
of the resultant current on the energy of the carriers. This
results from a
cancellation between the energy dependence of their velocity
(v=(2E/m*)1/2)
and the density of states, which in one dimension varies as E-
1/2 (see Lecture
6). For each subband occupied by carriers, a conductance equal
to 2e2/h is
obtained, a behaviour known as quantised conductance. If the
number of
occupied subbands is varied then the conductance of the wire
will exhibit a
step-like behaviour, with each step corresponding to a
conductance change of
2e2/h. Quantum conductance is most easily observed in
electrostatically
induced quantum wires (see Lecture 7). The gate voltage
determines the
width of the wire, which in turn controls the energy spacing
between the
subbands. For a given carrier density, reducing the subband
spacing results
in the population of a greater number of subbands and hence an
increased
conductance. The following figure shows quantum conductance
in a 400nm
long electrostatically induced quantum wire. These
measurements are
generally performed at very low temperatures to obtain the very
high
mobilities required for ballistic transport conditions. In contrast
to the plateau
values observed for ρxy in the quantum Hall effect, which are
independent of
the structure and quality of the device, the quantised
conductance values of a
quantum wire are very sensitive to any potential fluctuations
which result in
scattering events. This sensitivity prevents the use of quantum
conductance
as a resistance standard.
The inset to the above figure shows a structure in which a
quantum wire splits
into two wires which subsequently rejoin after having enclosed
an area A.
Under ballistic transport conditions the wavefunction of an
electron incident on
the loop will split into two components which, upon
recombining at the far side
-1.6 -1.4 -1.2 -1.0 -0.8 -0.6
0
2
4
6
8
10
12 Split gate
2D EG
O hmic co ntacts
Split gate
2D EG
O hmic co ntacts
C
on
du
ct
an
ce
(u
ni
ts
2
e2
/h
)
Split Gate Bias Voltage (V)
Example of quantum conductance in a
quantum wire defined electrostatically
from a 2DEG. The inset shows the
sample geometry. Data from Hamilton et
al, Appl. Phys. Lett. 60, 2782 (1992).
0 10 20 30 40 50 60 70 80
50
100
150
200
250
300
AA
R
es
is
ta
nc
e
(Ω
)
Magnetic Field (mT)
An example of the Aharonov-Bohm effect in
an electrostatically defined quantum ring.
The inset shows the sample geometry. Data
from Timp et al, Phys. Rev. B. 39, 6227
(1989).
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
27
of the loop, will interfere. If a magnetic field is now applied
normal to the plane
of the loop an additional phase difference is acquired or lost by
the
wavefunctions, depending upon the sense in which they traverse
the loop.
The phase difference increases by 2π when the magnetic flux
through the
loop, given by the area multiplied by the field (BA), changes by
h/e. Hence as
the magnetic field is increased the system will oscillate between
conditions of
constructive interference (corresponding to a high conductance)
and
destructive interference (corresponding to low conductance).
The change in
field (∆B) between two successive maxima (or minima) is given
by the
condition ∆BA=h/e, resulting in the conductance of the system
oscillating
periodically with increasing field. An example of this
behaviour, known as the
Aharonov-Bohm effect is shown in the previous figure for a
loop of diameter
1.8µm formed from the 2DEG of a GaAs-AlGaAs single
heterostructure by
patterning the surface with metal gates defined by electron
beam lithography.
Summary and Conclusions
In this lecture we have shown how modulation doping allows
the attainment of
very high carrier mobilities at low temperatures. This allows the
observation of
a number of novel effects including the integer and fractional
quantum Hall
effects. The high mobilities correspond to long average
distances between
scattering events and carriers may be able to pass through a
nanostructure
ballistically without undergoing a single scattering event. In
this case
processes which include quantised conductance and the
Aharonov-Bohm
effect are observable.
Further reading
The paper by Pfeiffer et al (Appl. Phys. Lett. 55, 1888 (1989))
describes the
optimisation of the MBE technique to give very high electron
mobilities.
Carrier scattering processes are discussed in detail in ‘The
Physics of Low
Dimensional Semiconductors’ by J H Davies. The discussion of
the integer
quantum Hall effect give in this lecture is relatively non-
mathematical. A more
detailed treatment which includes the importance of disorder is
given in ‘Band
theory and Electronic Properties of Solids’ by J Singleton
(OUP).
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
28
Lecture 10 Tunnelling and related processes in
semiconductor nanostructures
Introduction
Quantum mechanical tunnelling, in which a particle passes
through a
classically forbidden region, is the mechanism by which α
particles escape
from the nucleus during α decay and electrons escape from a
solid in
thermionic emission. Tunnelling can also be observed in
semiconductor
nanostructures where the ability to deposit very thin layers
permits the easy
production of tunnelling barriers. Tunnelling can be observed
either through a
single barrier or through two barriers separated by a quantum
well or quantum
dot. A range of novel physical processes are observed with a
number of
practical applications.
Tunnelling through a single square barrier
Consider the single square barrier of potential height V0 and
thickness a as
shown in the following figure. Such a structure can be easily
fabricated by
depositing a thin layer of a wide band gap semiconductor
between thicker
layers of a narrower band gap semiconductor. Away from the
barrier, and on
both sides, would normally be doped regions to provide a
reservoir of carriers.
By fabricating a suitable device an applied voltage can be used
to vary the
energy of the carriers and their ability to pass through the
barrier is indicated
by the magnitude of current flowing through the device.
The following figure shows the calculated transmission
probability for an
electron of energy E incident on a barrier of height 0.3eV and
thickness 10nm.
The classical result has a value of zero when the electron energy
is less than
the barrier height and one otherwise. In contrast the quantum
mechanical
result is non-zero for energies below that of the barrier height
indicating that
the electron can quantum mechanically tunnel through the
barrier, a region
where classically it would have negative kinetic energy. The
oscillations of the
probability for energies which exceed the barrier height are a
result of the
interference between waves which are reflected from the two
sides of the
barrier.
For electron energies less than the barrier height the
transmission probability
T can be approximated to
Vo
a
E
Schematic diagram of a single barrier tunnelling structure.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
29
*
0
2
0
2 ( )16
exp( 2 )
m V EE
T a where
V
κ κ
−
≈ − =
Because of the exponential function the transmission probability
is very
sensitive to both the energy of the electron and the width and
height of the
barrier.
Double barrier resonant tunnelling structures
Of greater practical interest than a single barrier tunnelling
structure is the
case of two barriers separated by a thin quantum well, known as
a double
barrier resonant tunnelling structure (DBRTS). A schematic
diagram of a
DBRTS is shown in the following figure. Quantised energy
levels are formed
in the quantum well as described in Lecture 5.
Calculated transmission coefficient as a function of electron
energy for a single barrier of height
0.3eV. taken from J H Davies ‘The Physics of Low-dimensional
semiconductors’ CUP
I
V
I
I
V
V
(a)
(b)
(d)
(c)
A double barrier resonant tunnelling structure.
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
30
The previous figure also shows a DBRTS for various applied
voltages. For the
sign of voltage shown electrons travel from left to right.
Electrons are first
incident on the left most barrier through which they must
tunnel. However at
low applied voltages their energy when they have tunnelled into
the well is
below that of the lowest confined state and the two barriers plus
the well
therefore behave as one effectively thick barrier; the tunnelling
probability and
hence the current is very low. As the voltage is increased the
energy of the
electrons tunnelling through the first barrier comes into
resonance with the
lowest state in the well. The effective barrier width is now
reduced and it
becomes much easier for the electrons to pass through the
structure. As a
result the current increases significantly. For further increase in
voltage the
resonance condition is lost and the current decreases. However
additional
resonances may be observed with higher energy confined states.
The figure
also shows the expected current-voltage characteristic of a
DBRTS indicating
the relationship between specific points on the characteristic
and the different
voltage conditions.
The previous figure shows experimental results obtained for a
DBRTS
consisting of a 20nm GaAs quantum well confined between
8.5nm AlGaAs
barriers. Resonances with five confined quantum well states are
observed.
Beyond each resonance a DBRTS exhibits a negative
differential resistance,
a region where the current decreases as the applied voltage is
increased.
Such a characteristic has a number of applications including the
generation
and mixing of microwave signals. Very high frequencies are
possible because
of the rapid transit time of the electrons through the structure.
DBRTS can also exhibit hysteresis in their current-voltage
characteristics,
particularly when the thicknesses of the two barriers are
asymmetrical. A
thinner first barrier allows carriers to tunnel easily into the well
but a thicker
second barrier impedes escape, resulting in charge build up in
the well. This
charge build up modifies the voltage dropped across the initial
part of the
structure and maintains the resonance condition to higher
voltages than would
0
10
20
30
40
50
60
0 1 2 3
0
10
20
30
40
x35
E4
E3
E2
E1
C
ur
re
nt
(m
A
)
Bias Voltage (V)
x100
C
ur
re
nt
(m
A
)
Bias Voltage (V)
Measured current voltage characteristics of a double barrier
resonant tunnelling
structure. Data supplied by P Buckle and W Tagg (University of
Sheffield).
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
31
occur in the case of an empty well. This broadened resonance is
only
observed as the voltage is increased allowing charge to
accumulate in the
well. If the voltage is taken above the resonance condition the
well empties
and decreasing the voltage results in a narrower resonance as
there is now
no charge accumulation. For such a structure the current follows
a different
path depending upon the direction in which the voltage is
varied; the current-
voltage characteristics exhibit a hysteresis. The inset to the
previous figure
shows the characteristics of an asymmetrical DBRTS with 8.5
and 13nm thick
Al0.33Ga0.67As barriers and a 7.5nm In0.11Ga0.89As quantum
well.
Two important figures of merit for a resonant tunnelling
structure are the
widths of the resonance and the ratio of the current at the peak
of the
resonance to that immediately after the resonance, the peak-to-
valley-ratio.
Once resonance has been reached with the lowest energy
confined quantum
well state it might be expected that current would continue to
flow for higher
voltages because of the continuum of states which exist as a
result of inplane
motion (see Lecture 5). However when an electron tunnels
through the first
barrier not only must energy be conserved but also the two
components of the
inplane momentum or wavevectors kx and ky. Conservation of
kx and ky
prevents tunnelling into higher continuum states as these
correspond to high
values of kx and ky whereas the tunnelling electrons will
generally have
relatively small inplane wavevectors. In fact the electrons to the
left of the first
barrier will have a range of initial energies, a result of their
density and the
Pauli exclusion principle, and hence a range of kx and ky
values. This range of
inplane wavevectors contributes to the width of the resonance.
That the current immediately after a resonance does not fall to
zero indicates
that additional non-resonant tunnelling is occurring. The precise
nature of
these additional processes is still unclear but may include
tunnelling via
impurity states in the barriers or phonon scattering which allows
electrons of
an initially incorrect energy to tunnel via the quantum well
states. In general
the peak-to-valley-ratio decreases as the device temperature is
increased.
Tunnelling via quantum dots – Coulomb blockade
The quantum well of a double barrier resonant tunnelling
structure can be
replaced by a quantum dot. In addition to the modification of
the energy level
structure the small size of a typical quantum dot results in a
new effect. A
small quantum dot will posses a relatively large capacitance. If
a quantum dot
already contains one or more electrons then a significant energy
is required to
add an additional electron as a result of the work that must be
done against
the repulsive electrostatic force between like charges. This
charging energy,
given by e2/2C where C is the dot capacitance, modifies the
energies of the
confined dot states which would occur for an uncharged system.
Charging
effects are most easily understood by referring to a structure of
the form
shown in the inset to the following figure, which consists of a
quantum dot
placed close to a reservoir of free electrons. Applying a voltage
to the metal
gate on the surface of the structure allows the energy of the dot
to be varied
with respect to the reservoir. If a given energy level in the dot
is below the
energy of the reservoir then electrons will tunnel from the
reservoir into the dot
level. Alternatively if the energy level is above the reservoir
then the level will
be unoccupied. Hence by varying the gate voltage the dot states
can be
sequentially filled with electrons. This filling can be monitored
by measuring
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
32
the capacitance of the
device which will exhibit a
characteristic feature each
time an additional electron
is added to the dot.
The main part of the
previous figure shows the
capacitance trace recorded
for a device containing an
ensemble of self assembled
quantum dots. These dots
have two confined electron
levels; the lowest (ground
state) able to hold two
electrons (degeneracy of
two) with the excited level
able to hold four electrons
(degeneracy of four). In the
absence of charging effects
only two features would be
observed in the capacitance
trace, one at the voltage
corresponding to the filling of the ground state, the other when
the voltage
reaches the value required for electrons to tunnel into the
excited state.
However once one electron has been loaded into the ground
state charging
effects result in an additional energy, and a higher voltage,
being required to
add the second electron. This leads to two distinct capacitance
features
corresponding to the filling of the ground state. Similarly four
distinct features
are expected as electrons are loaded into the excited state
although in the
present case inhomogeneous broadening prevents these being
individually
resolved. This charging behaviour is known as Coulomb
blockade and is
observed experimentally when the charging energy exceeds the
thermal
energy, kT.
Coulomb blockade effects can also be observed in transport
processes where
carriers tunnel through a quantum dot. Suitable dots may be
formed
electrostatically using split gates to define the dot and to
provide tunnelling
barriers between the dot and the surrounding 2DEG which forms
a reservoir
of carriers. An additional gate electrode allows the energy of
the dot to be
varied with respect to the carrier reservoirs. The relatively large
dot size
results in Coulomb charging energies that are much larger than
the
confinement energies. The former therefore dominate the
energetics of the
system. The inset to the following figure shows a schematic
diagram of the
structure where a small bias voltage has been applied between
the left and
right two-dimensional carrier reservoirs. The dot initially
contains N electrons
resulting in an energy indicated by the lower horizontal line. An
additional
electron can tunnel into the dot from the left hand reservoir but
this increases
the dot energy by the charging energy. Hence this process is
only
energetically possible if the energy of the dot with N+1
electrons lies below
the maximum energy of the electrons in the left hand reservoir.
Tunnelling of
this additional electron into the right hand reservoir may
subsequently occur
-1.0 -0.8 -0.6 -0.4 -0.2 0.0 0.2 0.4
2.10
2.12
2.14
2.16
2.18
2.20
2.22
2.24
f r e e e l e c t r o n s
q u a n t u m d o t
b l o c k in g b a r r ie r
g a te
Excited state
Ground state
C
ap
ac
ita
nc
e
(n
F)
Voltage (V)
Structure and results from a device in which a
controllable number of electrons can be loaded on to
a quantum dot. Figure redrawn from Fricke et al
Europhysics Lett. 36, 197 (1996).
Module PHY6002 Inorganic Semiconductor Nanostructures
Lectures 7, 8, 9 and 10
33
but only if the N+1 dot energy
lies above the maximum
energy of this reservoir. If
these two conditions are
satisfied, requiring that the
N+1 dot energy lie between
the energy maxima of the two
reservoirs, a sequential flow
of single electrons through
the structure occurs; the
system exhibits a non-zero
conductance. As the gate
voltage is used to vary the
dot energy, the condition for
sequential tunnelling will be
satisfied for different values
of N and a series of
conductance peaks will be
observed, an example is
shown in the above figure for
a dot of radius 300nm. This
large dot size results in a
large capacitance and a correspondingly small charging energy
(0.6meV for
the present example). Hence measurements must be performed
at very low
temperatures in order to satisfy the condition e2/2C>>kT. Two
practical
applications of Coulomb blockade will be described in a later
lecture.
Summary and Conclusions
In this lecture we have seen that it is possible to fabricate
tunnelling structures
based on semiconductor nanostructures. Double barrier resonant
tunnelling
structures give very non-linear current-voltage characteristics
and display
negative differential resistance. Because the transit time of
carriers through
such a structure is very short they have a number of applications
including
high frequency microwave oscillators and mixers. Tunnelling
structures
containing a quantum dot display an added complication due to
the charge of
the carriers; the Coulomb blockade effect.
Further reading
For a fuller, mathematical treatment of Coulomb blockade the
following
articles may be useful, ‘Artificial Atoms’ by M A Kastner,
Physics Today 24
January 1993 and ‘Single electron charging effects in
semiconductor quantum
dots’ by L P Kouenhoven et al Zeitschrift für Physik B
Condensed Matter 85,
367 (1991).
The generally mathematics of quantum mechanical tunnelling is
described in
quantum mechanics text books and also with respect to the
present subject in
‘The Physics of Low-Dimensional semiconductors’ by J H
Davies CUP. Finally
‘Low-Dimensional Semiconductors materials, physics,
technology, devices’ by
M J Kelly OUP discusses applications of resonant tunnelling
structures.
-0.60 -0.58 -0.56 -0.54 -0.52 -0.50
0.0
0.5
1.0
N
N+1
eV
C
on
du
ct
an
ce
(e
2 /h
)
Gate Voltage (V)
Coulomb blockade effect observed for tunnelling
through an electrostatically defined quantum dot.
The measurement temperature is 10mK. The inset
shows the carrier tunnelling steps and the energy
levels of the system. Data redrawn from L P
Kouwenhoven, et al Z. Phys. B. 85, 367 (1991).
Financial Management • Autumn 2004 • pages 5 - 37
Why Has IPO Underpricing
Changed Over Time?
Tim Loughran and Jay Ritter*
In the 1980s, the average first-day return on initial public
offerings (IPOs) was 7%. The
average first-day return doubled to almost 15% during 1990-
1998, before jumping to 65%
during the internet bubble years of 1999-2000 and then
reverting to 12% during 2001-2003.
We attribute much of the higher underpricing during the bubble
period to a changing issuer
objective function. We argue that in the later periods there was
less focus on maximizing IPO
proceeds due to an increased emphasis on research coverage.
Furthermore, allocations of
hot IPOs to the personal brokerage accounts of issuing firm
executives created an incentive
to seek rather than avoid underwriters with a reputation for
severe underpricing.
What explains the severe underpricing of initial public offerings
in 1999-2000, when the average
first-day return of 65% exceeded any level previously seen
before? In this article, we address
this and the related question of why IPO underpricing doubled
from 7% during 1980-1989 to
almost 15% during 1990-1998 before reverting to 12% during
the post-bubble period of 2001-
2003. Our goal is to explain low-frequency movements in
underpricing (or first-day returns) that
occur less often than hot and cold issue markets.
We examine three hypotheses for the change in underpricing: 1)
the changing risk composition
hypothesis, 2) the realignment of incentives hypothesis, and 3) a
new hypothesis, the changing
issuer objective function hypothesis. The changing issuer
objective function hypothesis has
two components, the spinning hypothesis and the analyst lust
hypothesis.
The changing risk composition hypothesis, introduced by Ritter
(1984), assumes that riskier
IPOs will be underpriced by more than less-risky IPOs. This
prediction follows from models
where underpricing arises as an equilibrium condition to induce
investors to participate in the
IPO market. If the proportion of IPOs that represent risky stocks
increases, there should be
greater average underpricing. Risk can reflect either
technological or valuation uncertainty.
Although there have been some changes in the characteristics of
firms going public, these
changes are found to be too minor to explain much of the
variation in underpricing over time if
there is a stationary risk-return relation.
The realignment of incentives and the changing issuer objective
function hypotheses both
We thank Hsuan-Chi Chen, Harry DeAngelo, Craig Dunbar,
Todd Houge, Josh Lerner, Lemma Senbet and James
Seward (the Editors), Toshio Serita, Ivo Welch, Ayako Yasuda,
and Donghang Zhang; seminar participants at the
2002 Chicago NBER behavioral finance meetings, the 2002
Tokyo PACAP/APFA/FMA meetings, the 2003 AFA
meetings, Boston College, Cornell, Gothenburg, Indiana,
Michigan State, Penn State, Stanford, the Stockholm
School of Economics, Vanderbilt, NYU, SMU, TCU, and the
Universities of Alabama, California (Berkeley), Colorado,
Houston, Illinois, Iowa, Notre Dame, and Pennsylvania, and
several anonymous referees; and especially Alexander
Ljungqvist for useful comments. Chris Barry, Laura Field, Paul
Gompers, Josh Lerner, Alexander Ljungqvist, Scott
Smart, Li-Anne Woo, and Chad Zutter generously provided IPO
data. Bruce Foerster assisted us in ranking underwriters.
Underwriter ranks are available online at
http://bear.cba.ufl.edu/ritter/rank.htm. Donghang Zhang
supplied useful
research assistance.
*Tim Loughran is a Professor of Finance at the University of
Notre Dame. Jay Ritter is the Cordell Professor of
Finance at the University of Florida.
Financial Management • Autumn 2004 6
posit changes over time in the willingness of issuing firms to
accept underpricing. Both
hypotheses assume that underwriters benefit from rent-seeking
behavior that occurs when
there is excessive underpricing.
The realignment of incentives hypothesis, introduced by
Ljungqvist and Wilhelm (2003),
argues that the managers of issuing firms acquiesced in leaving
money on the table during
the 1999-2000 bubble period. (Money on the table is the change
between the offer price and
the first closing market price, multiplied by the number of
shares sold.) The hypothesized
reasons for the increased acquiescence are reduced chief
executive officer (CEO) ownership,
fewer IPOs containing secondary shares, increased ownership
fragmentation, and an
increased frequency and size of “friends and family” share
allocations. These changes made
issuing firm decision-makers less motivated to bargain for a
higher offer price.
The realignment of incentives hypothesis is similar to the
changing risk composition
hypothesis in that it is changes in the characteristics of
ownership, rather than any
nonstationarities in the pricing relations, that are associated
with changes in average
underpricing. It differs from the changing risk composition
hypothesis, however, in that
underpricing is not determined solely by the investor demand
side of the market.
In our empirical work, we find little support for the realignment
of incentives hypothesis as
an explanation for substantial changes in underpricing. We find
no relation between the
inclusion of secondary shares in an IPO and underpricing. And
although CEO fractional
ownership was lower during the internet bubble period, the CEO
dollar ownership (the market
value of the CEO’s holdings) was substantially higher, resulting
in increased incentives to
avoid underpricing. Furthermore, it is possible that changes in
the characteristics of
ownership may be partly a response to higher underpricing as
well as a cause. Ljungqvist
and Wilhelm (2003) do not provide an explanation for why
these changes occurred.
The changing issuer objective function hypothesis argues that,
holding constant the
level of managerial ownership and other characteristics, issuing
firms became more willing to
accept underpricing. We hypothesize that, during our sample
period, there are two reasons
for why issuers became more willing to leave money on the
table. The first reason is an
increased emphasis on analyst coverage. As issuers placed more
importance on hiring a lead
underwriter with a highly ranked analyst to cover the firm, they
became less concerned
about avoiding underwriters with a reputation for excessive
underpricing. We call this desire
to hire an underwriter with an influential but bullish analyst the
analyst lust hypothesis.
This results in each issuer facing a local oligopoly of
underwriters, no matter how many
competing underwriters there are in total, because there are
typically only five Institutional
Investor all-star analysts covering any industry. As Hoberg
(2003) shows, the more market
power that underwriters have, the more underpricing there will
be in equilibrium.
The second reason for a greater willingness to leave money on
the table by issuers is the
co-opting of decision-makers through side payments. Beginning
in the 1990s, underwriters
set up personal brokerage accounts for venture capitalists and
the executives of issuing
firms in order to allocate hot IPOs to them. By the end of the
decade, this practice, known as
spinning, had become commonplace. The purpose of these side
payments is to influence the
issuer’s choice of lead underwriter. These payments create an
incentive to seek, rather than
avoid, underwriters with a reputation for severe underpricing.
We call this the spinning
hypothesis. In the post-bubble period, increased regulatory
scrutiny reduced spinning
dramatically. This is one of several explanations why
underpricing dropped back to an average
of 12%. The reduction in spinning removed the incentive for
issuers to choose investment
bankers who underprice. Investment bankers responded by
underpricing less in the post-
bubble period.
Loughran & Ritter • Why Has IPO Underpricing Changed Over
Time? 7
The contributions of our research are three-fold. First, we
develop the changing issuer
objective function hypothesis for the increased underpricing of
IPOs during the 1990s and
the bubble periods. Second, we document many patterns
regarding the evolution of the US
IPO market during the last two decades. Much of the data has
been or will be posted on a
website for other researchers to use. Many, although not all, of
these patterns have been
previously documented, especially for the first two subperiods.
Third, we formally test the
ability of the changing risk composition, realignment of
incentives, and changing issuer
objective function hypotheses to explain the changes in
underpricing from 1980-1989 (“the
1980s”) to 1990-1998 (“the 1990s”), 1999-2000 (“the internet
bubble”), and 2001-2003 (“the
post-bubble period”).
Much of the increased underpricing in the bubble period is
consistent with the predictions
of the changing issuer objective function hypothesis. In multiple
regression tests, the
changing risk composition and the realignment of incentives
hypotheses have little success
at explaining the increase in first-day returns from the 1980s to
the 1990s, to the bubble
period, or to the post-bubble period. The regression results
show that only part of the
increase in the bubble period is attributable to the increased
fraction of tech and internet
stocks going public. Consistent with the changing issuer
objective function hypothesis,
underpricing became much more severe when there was a top-
tier lead underwriter in the
latter time periods. These conclusions are not substantially
altered after controlling for the
endogeneity of underwriter choice.
The rest of this article is as follows. In Section I, we present
our changing issuer objective
function hypothesis. In Section II, we describe our data. In
Section III, we report year-by-
year mean and median first-day returns and valuations. In
Section IV, we report average first-
day returns for various univariate sorts. In Section V, we report
multiple regression results
with first-day returns as the dependent variable. Section VI
discusses alternative explanations
for the high underpricing of IPOs during the internet bubble
period. Section VII presents our
conclusions. Four appendices provide detailed descriptions of
our data on founding dates,
post-issue shares outstanding, underwriter rankings, and
internet IPO identification.
I. Causes of a Changing Issuer Objective Function
Most models of IPO underpricing are based on asymmetric
information. There are two
agency explanations of underpricing in the IPO literature. Baron
(1982) presents a model of
underpricing where issuers delegate the pricing decision to
underwriters. Investment bankers
find it less costly to market an IPO that is underpriced.
Loughran and Ritter (2002) instead
emphasize the quid pro quos that underwriters receive from
buy-side clients in return for
allocating underpriced IPOs to them. The managers of issuing
firms care less about
underpricing if they are simultaneously receiving good news
about their personal wealth
increasing. This argument, however, does not explain why
issuers hire underwriters who will
ex post exploit issuers’ psychology. Neither does the
realignment of incentives hypothesis.
One can view issuers as seeking to maximize a weighted
average of IPO proceeds, the
proceeds from future sales (both insider sales and follow-on
offerings), and side payments
from underwriters to the people who will choose the lead
underwriter:
α
1
IPO Proceeds + α
2
Proceeds from Future Sales + (1 - α
1
- α
2
)Side Payments (1)
Financial Management • Autumn 2004 8
The changing issuer objective function hypothesis states that
issuers choosing an
underwriter in some periods put less weight on IPO proceeds
and more weight on the proceeds
from future sales and side payments.
In Equation (1), IPO proceeds are a function of the choice of
underwriter and underwriting
contract (auction or bookbuilding) at the start of the process
and, several months later, the
bargaining at the pricing meeting for IPOs when bookbuilding is
used. Loughran and Ritter
(2002) provide a prospect theory analysis of the bargaining at
the pricing meeting. The
Ljungqvist and Wilhelm (2003) realignment of incentives
hypothesis can also be viewed as
a theory of the bargaining at the pricing meeting. Neither of
these theories, though, explains
why an issuing firm would choose an underwriter that would, at
the pricing meeting, propose
an offer price that leaves more money on the table than
necessary. In contrast, the changing
issuer objective function hypothesis does provide a theory for
the choice of underwriter at
the start of the process. Before discussing the analyst lust and
spinning hypotheses in more
detail, we explain why underwriters want to underprice.
A. Why Underwriters Want to Underprice IPOs
Underwriters, as intermediaries, advise the issuer on pricing the
issue, both at the time of
issuing a preliminary prospectus that includes a file price range,
and at the pricing meeting
when the final offer price is set. If underwriters receive
compensation from both the issuer
(the gross spread) and investors, they have an incentive to
recommend a lower offer price
than if the compensation was merely the gross spread.
Bookbuilding is the mechanism used to price and allocate IPOs
for 99.9% of our sample,
with auctions used for the other 0.1%. In the case of
bookbuilding, underwriters can decide
to whom to allocate shares if there is excess demand.
Benveniste and Wilhelm (1997) and
Sherman and Titman (2002) emphasize that underwriter
discretion can be used to the benefit
of issuing firms. Underwriters can reduce the average amount of
underpricing, thereby
increasing the expected proceeds to issuers, by favoring regular
investors who provide
information about their demand that is useful in pricing an IPO.
Shares can be allocated to
those who are likely to be buy-and-hold investors, minimizing
any costs associated with
price support.
Underwriter discretion can completely eliminate the winner’s
curse problem if underwriters
allocate shares in hot issues only to those investors who are
willing to buy other IPOs. As
Ritter and Welch (2002) note, if underwriters used their
discretion to bundle IPOs, problems
caused by asymmetric information could be nearly eliminated.
The resulting average level of
underpricing should then be no more than several percent. Thus,
given the use of
bookbuilding, the joint hypothesis that issuers desire to
maximize their proceeds and that
underwriters act in the best interests of issuers can be rejected
whenever average
underpricing exceeds several percent.
Although underwriter discretion in allocating IPOs can be
desirable for issuing firms, it
can also be disadvantageous if conflict of interest problems are
not controlled. Underwriters
acknowledge that in the late 1990s IPOs were allocated to
investors largely on the basis of
past and future commission business on other trades. In 1998-
2000, for example, Robertson
Stephens allocated IPOs to institutional clients almost
exclusively on the basis of the amount
of commission business generated during the prior 18 months,
according to its January 9,
2003 settlement with the NASD and SEC. Credit Suisse First
Boston (CSFB) received
commission business equal to as much as 65% of the profits that
some investors received
Loughran & Ritter • Why Has IPO Underpricing Changed Over
Time? 9
from certain hot IPOs, such as the December 1999 IPO of VA
Linux.1 The VA Linux IPO was
priced at $30 per share, with a 7% gross spread equal to $2.10
per share. For an investor who
was allocated shares at $30, and who then sold at the closing
market price of $239.25, the
capital gains would have amounted to $209.25 per share. If the
investor then traded shares to
generate commissions of one-half of this profit, the total
underwriter compensation per
share was $2.10 plus $104.625, or $106.725.
The receipt of commissions by underwriting firms in return for
hot IPO allocations violates
NASD Rule 2110 on “Free Riding and Withholding.” Because
the underwriter has an economic
interest (a share of the profits) in the IPO after it has been
allocated, there is not a “full
distribution” of the security. This is economically equivalent to
withholding shares and
selling them at a price higher than the offer price, in violation
of Rule 2110. But if the NASD
(a self-regulatory organization) did not enforce its rules,
underwriters might find it optimal to
violate the rules. Evidence consistent with commission business
affecting IPO allocations is
contained in Reuter (2004).
The willingness of buy-side clients to generate commissions by
sending trades to integrated
securities firms depends on the amount of money left on the
table in IPOs. Underwriters have an
incentive to underprice IPOs if they receive commission
business in return for leaving money on
the table. But the incentive to underprice presumably would
have been as great in the 1980s as
during the internet bubble period, unless there was a “supply”
shift in the willingness of firms to
hire underwriters with a history of underpricing. We argue that
such a shift did indeed occur,
resulting in increased underpricing.
B. The Analyst Lust Explanation of Underpricing
We hypothesize that issuing firms have increasingly chosen
their lead underwriter largely
on the basis of expected analyst coverage. Providing research
coverage is expensive for
investment bankers; the largest brokerage firms each spent close
to $1 billion per year on
equity research during the bubble (Rynecki, 2002). These costs
are covered partly by charging
issuers of securities explicit (gross spread) and implicit
(underpricing) fees. The more that
issuing firms see analyst coverage as important, the more they
are willing to pay these costs.
There are several reasons for our opinion that analyst lust was
more important during the
1990s and bubble period than in the 1980s. First, the investment
bankers and venture
capitalists we have talked to are unanimous in their agreement.
Supporting this, in the early
1970s Morgan Stanley had “no research business to speak of,”
even though it was a major
IPO underwriter (Schack, 2002). As we will show, the number
of managing underwriters in
1See the January 22, 2002 SEC litigation release 17327 and
news release (available on the SEC website at
http://www.sec.gov), and the NASD Regulation news release
(available at http://www.nasdr.com). The NASD
Regulation news release states that “For example, after a CSFB
customer obtained an allocation of 13,500 shares
in the VA Linux IPO, the customer sold two million shares of
Compaq and paid CSFB $.50 a share—or $1
million—as a purported brokerage commission. The customer
immediately repurchased the shares through other
firms at normal commission rates of $.06 per share at a loss of
$1.2 million on the Compaq sale and repurchase
because of the $1 million paid to CSFB. On that same day,
however, the customer sold the VA Linux IPO shares,
making a one-day profit of $3.3 million.”
According to paragraphs 48 and 49 of the SEC complaint, for
the July 20, 1999 IPO of Gadzoox, which CSFB
lead managed, “at least 261,025 shares were allocated to
customers that were willing to funnel a portion of their
IPO profits to CSFB.” CSFB distributed approximately 3.4
million of the 4.025 million offer, which went from
an offer price of $21 to a closing price of $74.8125, up 256%.
The following day, July 21, 1999, CSFB was the
lead manager on MP3, which was priced at $28 and closed at
$63.3125, up 126%. “CSFB distributed 7.2 million
of the 10.35 million MP3 shares offered through underwriters.
Of the 7.2 million MP3 shares distributed by
CSFB, at least 520,170 shares were allocated to customers that
were willing to funnel a portion of their trading
profits to CSFB.”
Financial Management • Autumn 2004 10
IPO syndicates has increased over time. Investment bankers
note that co-managers are
included in a syndicate almost exclusively to provide research
coverage. Indeed, by 2000 co-
managers were generally not even invited to participate in road
shows and the pricing meeting
at which the final offer price is determined.
Second, as valuations have increased, changes in growth rates
perceived in the financial
markets represent more dollars. Firm value can be decomposed
into the value of existing
assets in place plus the net present value of growth
opportunities. As the value of growth
opportunities increases relative to the value of assets in place,
issuing firms come to place
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Module PHY6002 Inorganic Semiconductor Nanostructures Lectur.docx
Module PHY6002 Inorganic Semiconductor Nanostructures Lectur.docx
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Module PHY6002 Inorganic Semiconductor Nanostructures Lectur.docx

  • 1. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 1 Lecture 7 – The fabrication of semiconductor nanostructures I Introduction In this lecture we will look at the techniques used to fabricate semiconductor nanostructures. The well-established epitaxial methods used to produce quantum wells will be described. The main techniques applied to produce quantum wires and quantum dots will be discussed, with a comparison of their relative advantages and disadvantages. In the next lecture we will look in detail at the most successful technique used to produce quantum dots, self- organisation. Epitaxial techniques There are two well established epitaxial growth techniques used to produce high quality quantum wells: molecular beam epitaxy (MBE) and metal organic vapour phase epitaxy (MOVPE). The following figure shows the main components of an MBE reactor.
  • 2. The reactor consists of an ultra-high vacuum chamber with a number of effusion cells, each containing a different element. Each cell has a mechanical shutter placed in front of its opening. In operation the cells are heated to a temperature where the elements start to evaporate, producing a beam of atoms which leave the cells. These beams are aimed at a heated substrate which consists of a thin wafer of a suitable bulk semiconductor. The incident beams combine at the surface of the substrate and a semiconductor is deposited atomic-layer by atomic-layer. The substrate is rotated to ensure even growth over its surface. By opening the mechanical shutters in front of certain cells it is possible to control which semiconductor is deposited. For example opening the shutters in front of the Ga and As cells results in the growth of GaAs. Shutting the Ga cell and opening the Al cell switches to the growth of AlAs. Because the shutters can be operated very rapidly in comparison to the rate at which material is deposited, it is possible to grow An MBE reactor Module PHY6002 Inorganic Semiconductor Nanostructures
  • 3. Lectures 7, 8, 9 and 10 2 very thin layers with very sharp interfaces between layers. The following figure shows a transmission electron microscope image of a quantum well sample containing five wells of different thicknesses. The thinnest well has a thickness of only 1nm. Other cells in the MBE reactor may contain elements used to dope the semiconductor and it is possible to monitor the growth as it proceeds by observing the electron diffraction pattern produced by the surface. The second epitaxial growth technique is metal organic vapour phase epitaxy (MOVPE). In this technique the required elements are carried, as a component of gaseous compounds, to a suitable chamber where they mix as the gases flow over the surface of a heated substrate. The compounds breakdown to deposit the semiconductor on the surface of the substrate with the remaining waste gases being removed from the chamber. Valves in the gas lines leading to the chamber allow the gases flowing into the reactor to be switched on and off. A suitable switching sequence allows layered structures to be deposited. Because it is difficult to switch a gas flow
  • 4. quickly, and because the growth rate with MOVPE is faster than for MBE, the latter technique is generally capable of growing thinner layers with more abrupt interfaces. However the faster growth rate of MOVPE has advantages in commercial production where it is necessary to deposit the material as quickly as possible. MOVPE has a number of safety implications as the gases are highly toxic. The following figure shows a schematic diagram of the main components of a MOVPE system. A cross sectional transmission electron microscopy (TEM) image of an InGaAs- InP quantum well structure containing five wells of different thicknesses. Main components of a MOVPE system (From Davies) Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 3 Requirements for semiconductor nanostructures Before we look at the various techniques that have been used to produce quantum wires and dots, it is useful to consider what properties ideal
  • 5. structures should exhibit. This will help in analysing the relative advantages and disadvantages of each technique. The main requirements of a semiconductor nanostructure can be summarised as follows • Size. For many applications we require all the electrons and holes to be in their lowest energy state, implying negligible thermal excitation to higher states. The amount of thermal excitation is controlled by the ratio of the energy spacing between the confined states and the thermal energy, given by kT. At room temperature the thermal energy is 25meV and a rule of thumb is that the level separation should be at least three times this value (~75meV). As the spacing between the states is controlled by the size of the structure (see lecture 5 for the case of a quantum well) this places requirements on the size of the nanostructure. • Quality. Defects may increase the probability of carriers recombining non- radiatively. Structures with a large number of defects may be very inefficient light producers. For optical applications nanostructures with low defect numbers are required. • Uniformity. Devices generally contain a large number of nanostructures. Ideally all the nanostructures should be identical otherwise they
  • 6. will all emit light at slightly different energies. • Density. It should be possible to produce dense arrays of nanostructures. • Growth compatibility. Industry uses MBE and MOVPE extensively. Nanostructures will find more applications if they can be produced using either or both of these techniques. • Confinement potential. The depth of the potential wells which confine the electrons and holes must be relatively deep. If this is not case then at room temperature carriers will be thermally excited out of the nanostructure. • Electron and/or hole confinement. For electrical applications it is generally only necessary for either electrons or holes to be trapped (confined) within the nanostructure. For electro-optical applications it is necessary for both types of carrier to be confined. • p-i-n structures. Many applications require the electrical injection of carriers into the nanostructure or the transfer of carriers, initially created in a nanostructure, to an external electrical circuit. This can be achieved if the nanostructure can be incorporated within the intrinsic region of a p-i-n structure.
  • 7. Fabrication of semiconductor quantum wires and quantum dots Lithography and etching This starts with an epitaxially grown two dimensional system to provide confinement along the growth direction. Lithography (etch resist, optical lithography with a mask or electron beam lithography) is then used to define a pattern on the surface consisting of either wires or dots. These are subsequently etched using a plasma, resulting in free standing dots or wires. The structure can subsequently be returned to a growth reactor to be Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 4 overgrown and incorporated in a p-i-n device. The main stages of this technique are shown in the following figure. The main disadvantage of this technique is that the surface is damaged during the etching stage. The resultant defects produce an optically dead layer where non- radiative recombination is the dominant electron-hole recombination process. This
  • 8. dead layer has an almost constant width so becomes increasingly important as the size of the structure decreases. For the small sizes required for practical nanostructures the dead layer occupies all of the structure which is consequently optically dead. Cleaved edge overgrowth A quantum well is initially grown and then the sample is cleaved in the growth reactor along a plane parallel to the growth direction. The sample is then rotated through 90° and a second quantum well followed by a barrier is grown. The growth sequence is shown in the following figure. The two quantum wells form a T-shaped structure. At the intersection of the two wells the effective well width is slightly larger. Because the confined energy levels depend on the inverse of well width squared (see Lecture 5) the intersection region has a slightly lower potential and hence electrons and holes become trapped there – a quantum wire is formed. If during the initial growth multiple wells are grown then the overgrowth of the final well results in a linear array of wires. A second cleave followed by a further overgrowth can be used to produce quantum dots. The surfaces produced by cleaving are clean, in contrast to the dirty surface
  • 9. formed by etching. Hence cleaved edge overgrowth dots and wires have a (a) (b) (c) (d)(a) (b) (c) (d) The main stages in forming lithographically defined dots. (a) growth of a 2D quantum well. (b) surface coating with etch resist. (c) exposure of resist to form pattern (d) etching to form dot or wire. (a) (b) (c) (d)(a) (b) (c) (d) The steps involved in the cleaved edge overgrowth of a quantum wire. (a) initial quantum well growth (b) cleavage to form a perfect surface (c) rotation (d) growth of the second quantum well. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 5 high optical quality. Their main disadvantage is that the potential at the intersection of the wells is not much smaller than in the wells. The carriers are only weakly confined in the intersection region and at room temperature their thermal energy is sufficient to allow them to escape. These structures are
  • 10. therefore generally suitable for studying physics at low temperatures but not for device applications, which need to work at room temperature. In addition the cleaving step is a difficult, non-standard process. Growth on Vicinal Substrates Semiconductors are crystalline materials with a periodic structure. Only when a semiconductor crystal is cut in certain directions will it have a flat surface. For other directions the surface will consists of a series of steps (think about a brick wall). Epitaxial growth is usually performed on flat surfaces. However the use of stepped surfaces (so-called vicinal surfaces) can be used to produce quantum wires. The size of the steps is determined by the direction along which the surface is formed but are typically ~20nm or less. The above figure shows the main steps in the growth of vicinal quantum wires. Starting with the stepped surface (a) the wire semiconductor is initially deposited epitaxially (b). Growth tends to occur in the corner of the steps as it here that the highest density of atomic bonds occurs. As the growth proceeds the semiconductor spreads out from the initial corner. When approximately half of the step width has been covered growth is switched to the barrier material (c) which is used to cover the remainder of the step. Growth can then
  • 11. be switched back to the wire semiconductor to increase the height of the wire (d). This growth cycle is repeated until the desired vertical height is obtained. Finally the wire is overgrown with a thick layer of the barrier material (e). Although very thin wires can be produced using this technique the growth has to be very well controlled so that exactly the same fraction of the step is covered during each cycle. In addition the coverage on different steps varies and it is difficult to ensure that the original steps are uniform. The resultant wires tend not to exhibit good uniformity. Growth on patterned substrates This starts with a flat semiconductor substrate which is coated with an etch resist and then exposed using either optical or electron beam lithography to produce an array of parallel stripes. The regions between the stripes are then etched in a suitable acid. Because the acid etches different crystal directions at different rates, a v-shaped groove is obtained. The patterned substrate is then cleaned and transferred to a growth reactor. (a) (b) (c) (d) (e)(a) (b) (c) (d) (e) The main steps in the growth of vicinal quantum wires (a) original stepped surface (b) growth occurs in corners of steps, sufficient material deposited to cover ~1/2 of step (c) remainder of step filled in with first material (d) more wire material
  • 12. deposited to increase thickness of wire (e) final over growth of wire. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 6 Quantum wires are usually formed from GaAs, with AlGaAs as the barrier material. Initially the AlGaAs barrier is deposited. This grows uniformly over the whole structure and may sharpen the bottom of the groove which, after the etching, has a rounded profile. Next a thin layer of GaAs is deposited. Although this again grows over the whole surface, the growth rate at the bottom of the groove is faster than that on the sides of the grooves due to the different crystal surfaces. A quantum well is formed with a spatial modulation of its thickness, being thicker at the bottom of the groove. In a similar manner to cleaved edge overgrowth, this thicker region results in a potential minimum forming a quantum wire. A second AlGaAs barrier layer can now be grown; this re-sharpens the groove after the formation of the wire, after which further wires can be grown. The main steps of this technique, resulting in v-groove quantum wires, are shown in the above figure.
  • 13. The following figure shows a cross sectional transmission electron microscope image of a multiple v-groove quantum wire structure. The wires have a crescent cross section. (a) (b) (c) (d) The main steps in the formation of v-groove quantum wires (a) original patterned substrate, (b) growth of barrier semiconductor (c) growth of wire semiconductor, greater growth at bottom of groove (d) growth of second barrier, re-sharpening of groove. A cross sectional transmission electron micrograph of three v- groove quantum wires. The wires have a maximum thickness of approximately 8nm. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 7 Because the quantum wire is not next to the original etched surface, v-groove quantum wires exhibit good optical efficiencies. However it is difficult to control the inplane size of the wires as this is mainly determined by the shape
  • 14. of the groove. The uniformity of the wire along its length is also influenced by the original groove quality. For achievable wire sizes the energy level spacings are typically 20~30meV, some what less than required for room temperature operating devices. However in some cases careful control of the groove cross-section has lead to slightly larger level spacings. A further disadvantage of v-groove quantum wires is their complicated structure. In addition to the wire there are quantum wells formed on the sides of the groove (side wall wells) and on the region between the grooves (top wells). These wells may capture carriers, reducing the fraction which recombine in the wire and also producing additional features in the emission spectra. Although the top wells and some of the side wells can be removed by etching after growth this requires a further fabrication step and the structure may need to be returned to the reactor to complete the growth of a p-i-n structure. By initially patterning the substrate not with a single array of stripes but with two perpendicular arrays to give a two dimensional array of squares, the subsequent etching forms an array of pyramidal shaped pits. Epitaxial growth now results in the formation of quantum dots at the bottom of each pit. Strain induced dots and wires
  • 15. If a semiconductor is subjected to strain its band structure is modified. In particular by applying the correct sign of strain the band gap may be reduced. If strain is only applied to a small region of the semiconductor then a local reduction of the band gap may occur, resulting in the formation of a wire or dot. In practise a local strain is produced by depositing a thin layer of a different material (e.g. carbon) on the surface of the semiconductor. This will have a very different atomic spacing to the semiconductor so to fit together both the atomic positions in the carbon layer and the surface region of the semiconductor will alter. This alteration constitutes a strain. If the carbon layer is patterned by lithography and then etched to leave only stripes or dots, the local strain field produces a wire or dot in the underlying semiconductor. The remaining isolated pieces of carbon are known as stressors. It is necessary to place a quantum well near to the surface of the semiconductor to provide confinement along the growth direction. The steps in the production of strain induced dots and wires are shown in the following figure. (a) (b) (c)(a) (b) (c) Steps in the formation of strain induced nanostructures (a) initial quantum well (b) deposition of carbon layer (c) formation of stressors by
  • 16. lithography and etching. The resultant, localised strain field (dashed lines) forms a wire or dot in the quantum well. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 8 Although this technique involves an etching step, only the carbon layer is etched, the etching is kept away from the optically active quantum well. Hence defect formation is not a problem as is the case for the etched dots and wires described above. However the strain fields only produce a weak modulation of the band gap and so the confinement potential is relatively small. At room temperature carriers are thermally excited from the dots or wires. Electrostatically induced dots and wires If a thin metal layer is deposited on the surface of a semiconductor (a Schottky contact) then a voltage can be applied between the metal and the semiconductor. This voltage has the effect of either raising or lowering the energies of the conduction and valence bands near the surface, with respect to their energies deeper in the semiconductor. If the bands are
  • 17. raised then a potential minimum is created for holes near to the surface. Alternatively if the bands are lowered a potential minimum for electrons is created. This is shown in the following figure. If the metal layer used to make the Schottky contact is patterned using lithography and etching, then the resultant shapes can be used to locally modulate the conduction and valence bands, forming quantum wires or quantum dots. An added sophistication is to form two slightly separated metal strips on the semiconductor surface, a so-called split gate. By applying appropriate voltages a potential minimum is created in the region between the gates, the width of which is determined by the size of the applied voltage. Hence a wire of variable width is created. Electrostatically induced nanostructures form clean systems as only the metal needs to be etched, not the semiconductor. However the potential minima are not very deep and the spacing between the energy levels is small, they are hence only suitable for low temperature operation. Their main limitation however is that only electrons or holes are confined in a given structure, they are hence not suitable for optical applications. V
  • 18. V The effect of applying a voltage to a Schottky contacted semiconductor Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 9 Quantum well width fluctuations The width of a quantum well is not constant but exhibits a spatial fluctuation (see the following figure). Because the confined energy levels depend upon the well width, potential minima are formed for electrons and holes at points where the well width is above its average value. These fluctuations confine the carriers within the plane of the dot (the well provides confinement along the growth direction) to give a quantum dot. Although these dots have good optical properties their confining potential is very small, as are the spacings between the confined levels. The inplane size of the dots is virtually impossible to control (the well width fluctuations are essentially random) and the spread of dot sizes is very large. These dots have no device prospects.
  • 19. Thermally annealed quantum wells A GaAs-AlGaAs well is grown using standard epitaxial techniques. A very finely focussed laser beam is then used to locally heat the surface. This produces a diffusion of Al from the AlGaAs into the GaAs well, causing an increase in the band gap. By scanning the beam round the edges of a square a potential barrier is produced surrounding the unilluminated centre of the square. Carriers optically excited within this square are confined by the potential barrier and the quantum well, forming a quantum dot. Quantum wires can also be formed by scanning the laser beam along the edges of a rectangle. Because the minimum size of the focussed laser beam is ~1µm the minimum size of the dots is fairly large (~100nm). This results in very closely spaced energy levels and, in addition, the annealing processes can affect the optical quality of the semiconductor. This technique also requires specialised, non-standard equipment. Semiconductor nanocrystals Very small semiconductor particles, which act as quantum dots, can be formed in a glass matrix by heating the glass with a small percentage of a suitable semiconductor. Dots with radii between 1~40nm are formed, the radius being a function of the temperature and heating time. The
  • 20. main limitation of these dots is that, because they are formed in an insulating glass matrix, the electrical injection of carriers is not possible. Quantum well width fluctuations. The electrons and holes are localised in regions where the well width is above its average value (blue dashed line). Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 10 Colloidal quantum dots These are formed by injecting organometal reagents into a hot solvent. Nanoscale crystallites grown in the solution with sizes in the range 1~10nm. Subsequent chemical and physical processing can be used to select a subset of the crystallites with good size uniformity. The dots are formed from II-IV semiconductors, including CdS, CdSe and CdTe. The dots exhibit good optical properties but as they are free standing the electrical injection of carriers is not possible. Summary and conclusions In this lecture we have looked briefly at the two established
  • 21. epitaxial techniques (MBE and MOVPE) used to grow two dimensional quantum wells. We then considered the main requirements for the properties of semiconductor nanostructures, before discussing the various techniques which have been developed to produce quantum wires and quantum dots. Of the techniques used to produce wires the most important are the v-groove and electrostatic induced ones. Only the former technique has been applied to room temperature device applications (mainly lasers) although it still has a number of disadvantages. For quantum dots, growth on patterned substrates, strain induced structures, electrostatic induced structures, quantum well width fluctuations, quantum well thermal annealing and colloidal dots have all been used to study physics in zero-dimensional systems (generally at very low temperatures). However none of these techniques has so far been suitable for room temperature device applications. We will see in the next lecture that self- organised techniques come the closest to producing ideal dots. Further reading The epitaxial techniques of MBE and MOVPE are discussed in Davies ‘The Physics of Low-Dimensional semiconductors’. Bimberg, Grundmann and Ledentsov ‘Quantum Dot Heterostructures’ discuss some of the requirements for semiconductor nanostructures. Some of the numerous
  • 22. fabrication techniques developed to produce wires and dots are described in the previously mention books and in the book by Weisbuch and Vinter ‘Quantum Semiconductor Structures’ More information can be obtained from a number of research papers. Suggestions are • A close look on single quantum dots, A Zrenner, Journal of Chemical Physics Volume 112 page 7790 (2000). Provides an overview of many of the techniques used to prepare quantum dots. Many useful references. • Photoluminescence from a single GaAs/AlGaAs quantum dot, K Brunner et al Physical Review Letters Volume 69 Page 3216 (1992). Thermally annealed dots. • Quantum size effect in semiconductor microcrystals, A Ekimov et al Solid State Communications Volume 56 Page 921 (1985). Semiconductor nanocrystals. • Luminescence from excited states in strain induced InGaAs quantum dots, H Lipsanen et al, Physical Review B Volume 51 page 13868 (1995). Strain induced dots.
  • 23. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 11 • One-dimensional conduction in the two-dimensional electron gas in a GaAs-AlGaAs heterojunction, T J Thornton et al, Physical Review Letters Volume 56 Page 1198 (1986). Electrostatically induced wires. • Synthesis and characterisation of nearly monodispersive CdE (E=S, Se, Te) semiconductor nanocrystallites, C B Murray et al, Journal of the Americal Chemical Society Volume 115 Page 8706 (1993). Colloidal quantum dots. • Formation of a high quality two-dimensional electron gas on cleaved GaAs, L N Pfeiffer et al, Applied Physics Letters Volume 56 Page 1697 (1990). Cleaved edge overgrowth of quantum wires. • Patterned quantum well heterostructures grown by OMCVD on non-planar substrates - applications to extremely narrow SQW lasers, R Bhat et al Journal of Crystal Growth Volume 93 Page 850 (1988). V- groove quantum wires. • Molecular beam epitaxy growth of tilted GaAs AlAs
  • 24. superlattices by deposition of fractional monolayers on vicinal (001) substrates, J M Gaines et al, Journal of Vacuum Science and Technology B Volume 6 Page 1381 (1988). Growth of quantum wires on vicinal surfaces. • Self-limiting growth of quantum dot heterostructures on nonplanar {111}B substrates, A Hartmann et al Applied Physics Letters Volume 71 Page 1314 (1997). Growth of quantum dots on patterned substrates. • Homogeneous linewidths in the optical spectrum of a single gallium arsenide quantum dot, D Gammon et al, Science Volume 273 Page 87 (1996). Dots formed from quantum well width fluctuations. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 12 Lecture 8 – The fabrication of semiconductor nanostructures II Introduction In this lecture we will look at the most successful technique developed so-far to fabricate semiconductor quantum dots – self-assembly. The use of this
  • 25. technique will be described and some of the properties of resultant dots will be discussed. The growth of strained semiconductor layers Generally when growing quantum wells it is arranged that the well, barrier and substrate semiconductors have the same atomic spacing (lattice constant). For example GaAs and AlGaAs have almost identical lattice constants. GaAs quantum wells with AlGaAs barriers can therefore be grown on GaAs substrates. If we try to grow a semiconductor which has a very different lattice constant to that of the substrate, then initially it adjusts its lattice constant to fit that of the substrate and the semiconductor will be strained. However to strain a material requires energy. Hence as the thickness of the semiconductor increases energy will build up. Eventually there is sufficient energy to break the atomic bonds of the semiconductor and dislocations (a discontinuity of the crystal lattice) form. Beyond this point the semiconductor can grow with its own lattice constant, strain energy no longer builds up. The thickness of semiconductor which can be grown before dislocations form is known as the critical thickness. The critical thickness is a function of the semiconductor being grown and also the degree of lattice mismatch between this semiconductor and the underlying semiconductor or substrate.
  • 26. Dislocations provide a very efficient mechanism for non- radiative carrier recombination. Hence a structure which contains dislocations will, in general, have a very poor optical efficiency. When growing strained semiconductor layers it is therefore important not to exceed the critical thickness. A good example of a strained semiconductor system is InxGa1- xAs-GaAs. When growing quantum wells InxGa1-xAs forms the wells, as it has the smaller band gap, with GaAs forming the barriers. As the In composition of InxGa1-xAs increases the lattice mismatch between InxGa1-xAs and GaAs also increases. Because InxGa1-xAs-GaAs quantum wells are generally grown on a GaAs substrate the InxGa1-xAs wells are strained to fit the GaAs lattice constant. For low In compositions (x~0.2) it is possible to grow quantum wells with thicknesses up to a few 10s nm before the critical thickness is reached. However for higher x the critical thickness decreases rapidly. Self-assembled growth of quantum dots The lattice mismatch between InAs and GaAs is very large (7%) and the critical thickness for the growth of an InAs layer on GaAs is expected to be very small (of the order of a few atomic layers). When InAs is first deposited on GaAs it grows as a highly strained, flat layer (two dimensional growth). However for certain growth conditions before dislocations start
  • 27. to form the growth changes to three dimensions in the form of small islands. These islands form the quantum dots and sit on the original two dimensional layer, which is known as the wetting layer. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 13 This behaviour in which the growth transforms from two to three dimensional is known as the Stranski-Krastanow growth mode. It is caused by a trade off between elastic and surface energy. All surfaces have an associated energy because of their incomplete atomic bonds. The surface energy is directly proportional to the area of the surface. Hence the surface after the islands start to form has a greater energy than the original flat surface. However within the islands the lattice constant of the semiconductor can start to shift back to its bulk value, hence reducing the elastic energy (note this shift is gradually and increases with distance along the growth direction, there are no dislocations formed - see following figure). Because the reduction in elastic energy is greater than the increase in surface energy the transformation to
  • 28. three dimensional growth represents the lowest energy, and hence most favourable, state. Following the growth of the dots they are generally overgrown by the barrier semiconductor GaAs. The following figure shows the main steps in the formation of self-assembled quantum dots. InAs GaAs (a) (b) (c) (d) InAs GaAs (a) (b) (c) (d) LHS - change in the lattice spacing for atoms in a self- assembled quantum dot. RHS the main stages in the formation of a self assembled dot:
  • 29. (a) GaAs substrate (with buffer layer), (b) initial 2D growth of InAs (c) transformation above critical thickness to 3D island-like growth (d) over growth of dots with GaAs. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 14 The Physical Properties of Self-Assembled Dots The physical properties of self assembled dots (e.g. size, shape and density) depend to some extent on the conditions used to growth them (e.g. temperature and growth rate). Typically they have a base size between 10~30nm, a height of 5~20nm and a density of 1x1010~1x1012cm-2. However values outside this range may be possible by carefully controlling the growth conditions. Because of their small size the energy separation between their confined levels is relatively large (40~70meV). They contain no dislocations and so exhibit excellent optical properties. They have a high two dimensional density and multiple layers can be grown (see below). They are grown entirely by an epitaxial process and can easily be incorporated within the intrinsic region of a p-i-n structure. Their confinement potential is relatively deep (100-
  • 30. 300meV) and both electrons and holes are confined. Uniformity is reasonable but could be better (see below). The following figure shows a cross-sectional transmission electron microscope (TEM) image of a typical quantum dot. This is a bare dot which has not been over grown with GaAs (it is difficult to obtain similar images of over grown dots as there is very little contrast between InAs and GaAs in the TEM images). The following figure shows an AFM image of quantum dot sample. Again the dots have not been overgrown with GaAs. A cross-sectional TEM image of an InAs quantum dot grown on GaAs. The base of the dot is approximately 18nm. An AFM image of a quantum dot sample. Note the exaggerated vertical scale. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 15 The shape and composition of self assembled quantum dots Although extensively studied there is still considerable uncertainty as to the
  • 31. precise shape of self assembled quantum dots. Various shapes have been claimed including pyramids, truncated pyramids, cones and lenses (part of a sphere). One problem in determining the shape is that it is difficult to study dots which have been overgrown. Although bare dots can be studied using AFM and related surface techniques, there is some evidence that the dot shape may change when they are overgrown. It may be that the shape of self assembled quantum dots depends upon the precise growth conditions. A further complication is the composition of the dots. The dots can either be grown using pure InAs or the alloy InGaAs. However even when grown with InAs there is evidence that the dots consist of InGaAs indicating the diffusion of Ga into the dots from the surrounding GaAs. The Ga composition in the dots is unlikely to be uniform leading to a highly complicated system which is difficult to model theoretically (see below). Multiple quantum dot layers Once one layer of dots has been deposited and overgrown with GaAs a flat surface is formed upon which a second layer can be deposited. It is hence possible to grow multiple layers of dots. When the first dot layer is deposited the positions of the dots are reasonably random. As the InAs in the dots gradually returns to its bulk lattice constant as the dot height
  • 32. increases, the initial GaAs deposited on top of the dot will be slightly strained. A strain field will be produced in the GaAs above each dot, although this will gradually decrease to zero as the thickness of the GaAs is increased. However if, when the next dot layer is deposited, these strain fields are still present (only a thin GaAs layer has been grown) they may act as nucleation sites for the next layer of dots. In this case the dots are vertically aligned and stacks of aligned dots may be formed with 10 or more dots in a stack. This alignment only occurs when successive dot layers are separated by very thin GaAs layers (<10nm). For thicker GaAs layers the strain field is essentially zero when the next layer is deposited and the dots form at random positions. The following figure shows a cross sectional transmission electron microscope image of a sample containing 10 dot layers with each layer separated by 9nm of GaAs. The vertical alignment of the dots into stacks can be clearly seem. This alignment may be important for the electronic and optical properties as it is possible that electrons and holes may be able to move between the dots in a stack. A cross sectional TEM image of vertically aligned quantum dots.
  • 33. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 16 Dot uniformity The growth of self assembled dots is a semi-random process. Dots at different positions on the surface will start to form at slightly different times as the amount of InAs deposited will not be totally uniform. This results in the final shape and size (and possibly composition) varying slightly from dot to dot. As the energies of the confined energy states are a function of the dot size, shape and composition these will also vary from dot to dot. The emission from a single dot will consist of a very sharp line (similar to the emission from an atom). However most experiments on self assembled quantum dots probe a large number of dots. For example a typical photoluminescence experiment will use a laser beam focussed to a diameter of 250µm. If the dot density is 1x1011cm-2 the area of the laser beam will contain ~50 million dots, each of which will contribute to the measured spectrum. As each dot will emit light at a slightly different energy the sharp emission from each dot will merge into a broad, featureless emission. This is
  • 34. known as inhomogeneous broadening. Only if the number of dots probed can be reduced significantly (e.g. by reducing the diameter of the laser beam - see later lectures) will the individual sharp emission lines be observed. The non-uniformity of self-assembled quantum dots and the resultant inhomogeneous broadening of the optical spectra is a disadvantage for a number of potential device applications. For example the absorption is spread out over a wide energy range instead of being concentrated at a single energy. The inhomogeneous broadening also complicates fundamental physics studies; as will be discussed in later lectures. However there are some applications (e.g. optical memories) which make use of the inhomogeneous broadening. The following figure shows photoluminescence spectra of different numbers of quantum dots. This is achieved by evaporating an opaque metal mask on the sample surface in which holes of different sizes are formed. By shining the laser beam through these different size holes, different numbers of dots can be probed. Photoluminescence spectra of different numbers of quantum dots. From Gammon MRS Bulletin Feb. 1998 Page 44
  • 35. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 17 Theoretical modelling of self-assembled quantum dots Self assembled quantum dots have a high degree of strain and this strain is non-uniform. In addition they have a complicated shape. This makes the calculation of the confined energy levels very difficult. The following figures show the distribution of strain, calculated for pyramidal shaped dots, and the shapes of the wavefunctions for the lowest energy electron and hole states. As we will see in later lectures the optical spectra of the quantum dots are very complicated and difficult to interpret. Hence it is still not possible to test the predictions of the various available theoretical models. In addition many of the input parameters required for the models (e.g. the exact dot size, shape and composition) are still not well known. The strain distribution in self assembled quantum dots: (a) through the wetting layer, (b) through the dot. From Stier et al PRB 59, 5688 (1999).
  • 36. Electron and hole wavefunctions for the lowest energy confined quantum dot states. From Stier et al ibid. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 18 Different self assembled quantum dot systems The most commonly studied self assembled system consists of InAs or InGaAs dots grown within a GaAs matrix. The band gap of bulk InAs is 0.4eV but quantum confinement and strain increase this to between 0.95 and 1.4eV, the precise value being dependent on the shape and size of the dots. This energy range correspond to wavelengths 1300~900nm, which is in the near infrared region of the electromagnetic spectrum. The emission energy can be increased if InAs or InGaAs dots are grown in an AlGaAs matrix. This allows energies up to ~1.8eV (≡690nm) to be obtained. Al can also be added to the dots to increase their emission energy (AlInAs- AlGaAs dots). Self assembled dots have also been fabricated from other semiconductor combinations where there is sufficient lattice mismatch. Examples include InP
  • 37. dots in GaInP (emission energy ~1.6-1.9eV [~775-650nm]), Ge dots in Si and InSb, GaSb or AlSb dots in GaAs (emission energy ~1.0-1.3eV [~1200- 950nm]). More recently there have been attempts to grow dots in the wide band gap nitride semiconductors GaN, InN and AlN. Summary and Conclusions In this lecture we have looked at the most promising method for producing quantum dots suitable for electro-optical applications. The main properties of quantum dots prepared using the self-assembly technique are compared with other types of dots and wires in the following table. Self- assembled dots satisfy the majority of requirements for device applications, possibly with the exception of uniformity. As we will see in later lectures, a number of devices based on self assembled quantum dots have now been demonstrated. Further reading 'Quantum Dot Heterostructures' by Bimberg et al provides a comprehensive overview of the self-assembly technique including a discussion of optical, electrical and structural studies and devices based on these quantum dots.
  • 38. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 19 Fa br ic at io n te ch ni qu e S pa ci n g of en er gy
  • 60. le hi gh - s em i co nt ro lla bl e Y es hi gh ye s ye s Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10
  • 61. 20 Lecture 9 – Modulation doping and transport phenomena in semiconductor nanostructures Introduction Using a technique known as modulation doping it is possible to obtain extremely high carrier mobilities in semiconductor nanostructures. This has a number of practical applications and also leads to the observation of a number of highly novel transport related phenomena. Modulation Doping We saw in Lecture 2 that in a bulk semiconductor the carrier mobility is limited by phonon scattering at high temperatures and scattering from charged impurity atoms at low temperatures. The temperature dependence of the electrical mobility hence has the following form. Although the low temperature mobility can be increased by reducing the impurity density this lowers the electrical conductivity as it is these impurities which provide the free carriers (doping). In a semiconductor nanostructure however it is possible to spatially separate the dopant atoms and the resultant free carriers, significantly reducing this scattering mechanism. This leads to very high low temperature carrier
  • 62. mobilities. This arrangement, which is known as remote or modulation doping, is shown schematically for n-type doping of a quantum well in the following figure. In this case the donor atoms are placed only in the wider band gap barrier material, the quantum well is undoped1. However the electrons released by the donor atoms in the barrier transfer into the lower energy well states, resulting in a spatial separation of the free electrons and the charged donor atoms. The confined electrons in the quantum well are said to form a two-dimensional electron gas (2DEG); a two-dimensional hole gas can similarly be formed by doping the barriers p-type. The non-zero charge 1 This is simply achieved during MBE growth by only opening the shutter in front of the cell containing the dopant atoms during growth of the barriers. In MOVPE the gas carrying the dopant atoms is similarly switched. M ob ili ty Temperature Phonon scattering
  • 63. Impurity scattering M ob ili ty Temperature Phonon scattering Impurity scattering Temperature dependence of electrical mobility for a semiconductor Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 21 present in both the barriers and the well2 adds an electrostatic potential energy which results in a bending of the band edges, as indicated in figure (b). This band bending allows the formation of a modulation doping induced 2DEG at a single interface (a single heterojunction) between two different
  • 64. semiconductors, as shown in figure (c). Here the combined effects of the conduction band offset and the band bending result in the formation of a triangular shaped potential well which restricts the motion of the electrons to two dimensions. In a modulation doped structure the barrier region immediately adjacent to the well is generally undoped, forming a spacer layer, which further separates the charged dopant atoms and the free carriers. By optimising both the width of this spacer layer and the structural uniformity of the interface, and by 2 The total charge of the structure remains zero but there are equal and opposite charges in the well and barriers. (a) (b) (c) Donor atom Free electron (a) process of n-type modulation doping in a quantum well, (b) as (a) but also showing the effects on the band edges of the non-zero space charges, (c) modulation doping of a single heterostructure. 0.1 1 10 100 1
  • 65. 10 100 1000 1980 1982 1989 GaAs-AlGaAs single heterojunctions Clean bulk GaAs Bulk GaAs El ec tro n M ob ili ty (c m 2 V
  • 66. -1 s-1 ) Temperature (K) Temperature dependence of the mobility of bulk GaAs (standard and clean) and three GaAs- AlGaAs single heterostructures (numbers give the corresponding years). Data taken from Stanley et al (Appl. Phys. Lett. 58, 478 (1991)) and Pfeiffer et al (ibid 55, 1888 (1989)) Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 22 minimising unintentional background impurities, it is possible to achieve extremely high low temperature mobilities. The previous figure compares the temperature variation of the electron mobility of standard bulk GaAs, a very clean bulk specimen of GaAs and a series of GaAs-AlGaAs single heterojunctions. At high temperatures, where mobility is limited by phonon scattering, the mobilities of the different structures are very similar. At low temperatures the mobility of bulk GaAs is increased in the cleaner material
  • 67. where a lower impurity density reduces the charged impurity scattering. However the absence of doping results in a low carrier density and, as a consequence, a low electrical conductivity. It is therefore not possible to achieve both a high conductivity and high mobility in a bulk semiconductor. Modulation doping however results in both high free carrier densities and low temperature mobilities more than two orders of magnitude larger than those of clean bulk GaAs and almost four orders of magnitude larger than ‘standard’ bulk GaAs. The data for the different heterojunctions presented in the figure demonstrates how the low temperature mobility of a single heterojunction has increased over time, reflecting optimisation of the structure, the use of purer source materials and cleaner MBE growth reactors. The ability to produce 2DEGs of extremely high mobility has allowed the observation of a range of interesting physical processes, a number of which will be discussed later in this lecture and the following lecture. Modulation doping is now used extensively to provide the channel of field effect transistors (FETs), particularly for high frequency applications. Such devices are known as high electron mobility transistors (HEMTs) or modulation doped field effect transistors (MODFETs). Although the use of modulation doping provides negligible enhancement of the room
  • 68. temperature carrier mobility, the free carriers are confined to a two dimensional sheet in contrast to a layer of non-zero thickness for conventional doping. This precise positioning of the carriers results in devices exhibiting more linear characteristics and, for still unclear reasons, these devices also exhibit lower noise. III-V semiconductor HEMTs or MODFETs operating up to ~300GHz are achievable with applications including mobile communications and satellite signal reception. The Hall effect in bulk semiconductors The following figure shows the geometry used to study the Hall effect. A current Ix flows along a semiconductor bar to give a current density Jx (=Ix/wh). A magnetic field B applied normal to the axis of the bar produces a magnetic force on each moving charge carrier given by qvB, where q is the charge and v the carrier drift velocity. This force causes the carrier motion to be deflected in a direction perpendicular to both the field and the original motion as shown in the figure. As a consequence of this deflection there is a build up of the charge carriers, and hence a non-zero space charge, along the side of the bar, which results in the creation of an electric field along the y-axis, Ey. This so-called Hall field produces an electrostatic force (qEy) on the charge carriers
  • 69. which opposes the magnetic force. Equilibrium is quickly reached where the two forces balance to give a zero net force. /( ) / 1/( )y y x y x HqE qvB E vB J B nq or E J B nq R= ⇒ = = = = Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 23 where the last step follows from the relationship Jx=nqv (see Lecture 2). The ratio Ey/(JxB) is known as the Hall coefficient and has a value 1/(nq). As Ey produces a voltage between the sides of the bar, given by Vy=wEy, all three quantities Ey, Jx and B are easily determined allowing RH and hence the product nq to be found. A Hall measurement of a bulk semiconductor hence allows the carrier density n to be determined as well as the majority carrier type (electrons or holes) from the sign of RH. The Quantum Hall Effect The Hall effect can also be observed in a nanostructure containing a 2DEG. Experimentally the electric field along the sample, Ex, can also be determined
  • 70. by measuring Vx as shown in the previous figure. This allows two resistivities to be determined, defined as: ρ ρxx x x xy y x E J E J = = Because RH=Ey/(BJx), for a bulk semiconductor ρxy=RHB, which increases linearly with increasing magnetic field, with ρxx remaining constant. However for a two-dimensional system a very different behaviour is observed, as shown in the following figure. In this case although ρxy increase with increasing field, it does so in a step-like manner. In addition ρxx oscillates between zero and non-zero values, with zeros occurring at fields
  • 71. where ρxy forms a plateau. This surprising behaviour of a two-dimensional system is known as the Quantum Hall effect and was discovered in 1980 by Klaus von Klitzing, for which he was awarded the 1985 Nobel Physics Prize. The Quantum Hall effect arises as a result of the form of the density of states of a two-dimensional system in a magnetic field. This corresponds to that of a fully quantised system, with quantisation in one direction resulting from the physical structure of the sample and quantisation in the remaining two directions provided by the magnetic field. Diagram (a) of the following figure shows the discrete energy levels for a perfect system. However in any real system the levels are broadened by carrier scattering events and the energy levels have the form given by the right hand diagrams. These ‘bands’ of states VXVY IX JX B w h Ex Ey
  • 72. The geometry of the Hall effect 0 1 2 3 4 5 6 7 8 9 0 2000 4000 6000 8000 10000 12000 14000 ρ XY resistance (h/e 2) 1/7 1/6 1/5 1/4 1/3 1/2 (x60)ρxx
  • 73. ρ xy R es is ta nc e (Ω ) Magnetic Field (T) An example of the integer quantum Hall effect. Data taken from Paalanen et al, Phys. Rev. B. 25, 5566 (1982) Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 24 have similarities with the energy bands in a solid (see Lecture 1) and as in that case the electronic properties are a very sensitive function of how the charge carriers occupy the bands. Each band formed by the
  • 74. magnetic field is known as a Landau level and it can be shown that the degeneracy of each Landau level is given by eB h Hence as the field is increased the degeneracy of each level also increases. Therefore for a given carrier density in the structure the number of occupied levels decreases with increasing field. In (c) the Landau level degeneracy is such that only the lowest two levels are occupied. This corresponds to the case of an insulator with completely filled bands followed by completely empty bands. In this case the structure has a zero conductivity (σxx=0). In (b) the field has been increased so that now the second Landau level is only half filled. Conductivity is possible for the electrons in this level and hence σxx≠0. Under conditions of high magnetic field the following relationships relate the conductivity and resistivity components 2 1xx xx xy H
  • 75. xy xy R B σ ρ ρ σ σ ≈ ≈ = The first relationship shows that the zero conductivity values obtained when exactly an integer number of Landau levels are occupied results in a zero value for ρxx. The plateau values of ρxy can be found by noting that if exactly j Landau levels are fully occupied then S eB N j h = where NS is the two dimensional carrier density. From the above definition of ρxy (a) (b) (c) Quantised energy levels of a two dimensional system placed in a
  • 76. magnetic field (a) case of zero level broadening (b) and (c) with level broadening and for different occupations of the levels up to the dashed line. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 25 2 1 25812.8 xy H S B h R B N e j e j ρ = = = = Ω The plateau values of ρxy are sample independent and are related to the fundamental constants h and e. Values for ρxy can be measured to very high accuracy and are now used as the basis for the resistance standard and also to calculate the fine structure constant α=µ0ce2/2h, where the permeability of free space, µ0, and the speed of light, c, are defined quantities.
  • 77. The parameter j is known as the filling factor The quantum Hall effect discussed previously occurs for integer values of j and is therefore known as the integer quantum Hall effect. However, in samples with very high carrier mobilities, plateaus in ρxy and minima in ρxx are also observed for fractional values of j, giving rise to the fractional quantum Hall effect. The discovery and theoretical interpretation of the fractional quantum Hall effect, which results from the free carriers behaving collectively rather than as single particles, lead to the award of the 1998 Nobel Physics prize to Stormer, Tsui and Laughlin. An example of the fractional quantum Hall effect is given in the above figure which was recorded at very low temperatures for a very high mobility GaAs- AlGaAs single heterostructure. In addition to minima in ρxx and plateaus in ρxy for integer values of the filling factor, similar features are also observed for non-integer values, for example 3/5, 2/3, 3/7 etc. Ballistic Carrier Transport The carrier transport considered so far is controlled by a series of random scattering events (see Lecture 2). However the high carrier mobilities which can be obtained by the use of modulation doping correspond to very long path lengths between successive scattering events, lengths that can significantly
  • 78. An example of the fractional quantum Hall effect which where the filling factor j has non integer values. The integer quantum Hall effect is still observed at low fields. Figure from R Willet et al Phys. Rev. Lett. 59, 1776 (1987). Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 26 exceed the dimensions of a nanostructure. In this case a carrier can pass through the structure without experiencing a scattering event, a process known as ballistic transport. Ballistic transport conserves the phase of the charge carriers and leads to a number of novel phenomena, two of which will now be discussed. When carriers travel ballistically along a quantum wire there is no dependence of the resultant current on the energy of the carriers. This results from a cancellation between the energy dependence of their velocity (v=(2E/m*)1/2) and the density of states, which in one dimension varies as E- 1/2 (see Lecture 6). For each subband occupied by carriers, a conductance equal to 2e2/h is obtained, a behaviour known as quantised conductance. If the number of occupied subbands is varied then the conductance of the wire
  • 79. will exhibit a step-like behaviour, with each step corresponding to a conductance change of 2e2/h. Quantum conductance is most easily observed in electrostatically induced quantum wires (see Lecture 7). The gate voltage determines the width of the wire, which in turn controls the energy spacing between the subbands. For a given carrier density, reducing the subband spacing results in the population of a greater number of subbands and hence an increased conductance. The following figure shows quantum conductance in a 400nm long electrostatically induced quantum wire. These measurements are generally performed at very low temperatures to obtain the very high mobilities required for ballistic transport conditions. In contrast to the plateau values observed for ρxy in the quantum Hall effect, which are independent of the structure and quality of the device, the quantised conductance values of a quantum wire are very sensitive to any potential fluctuations which result in scattering events. This sensitivity prevents the use of quantum conductance as a resistance standard. The inset to the above figure shows a structure in which a quantum wire splits into two wires which subsequently rejoin after having enclosed an area A. Under ballistic transport conditions the wavefunction of an electron incident on
  • 80. the loop will split into two components which, upon recombining at the far side -1.6 -1.4 -1.2 -1.0 -0.8 -0.6 0 2 4 6 8 10 12 Split gate 2D EG O hmic co ntacts Split gate 2D EG O hmic co ntacts C on du ct an ce
  • 81. (u ni ts 2 e2 /h ) Split Gate Bias Voltage (V) Example of quantum conductance in a quantum wire defined electrostatically from a 2DEG. The inset shows the sample geometry. Data from Hamilton et al, Appl. Phys. Lett. 60, 2782 (1992). 0 10 20 30 40 50 60 70 80 50 100 150 200 250 300 AA
  • 82. R es is ta nc e (Ω ) Magnetic Field (mT) An example of the Aharonov-Bohm effect in an electrostatically defined quantum ring. The inset shows the sample geometry. Data from Timp et al, Phys. Rev. B. 39, 6227 (1989). Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 27 of the loop, will interfere. If a magnetic field is now applied normal to the plane of the loop an additional phase difference is acquired or lost by the wavefunctions, depending upon the sense in which they traverse the loop. The phase difference increases by 2π when the magnetic flux through the
  • 83. loop, given by the area multiplied by the field (BA), changes by h/e. Hence as the magnetic field is increased the system will oscillate between conditions of constructive interference (corresponding to a high conductance) and destructive interference (corresponding to low conductance). The change in field (∆B) between two successive maxima (or minima) is given by the condition ∆BA=h/e, resulting in the conductance of the system oscillating periodically with increasing field. An example of this behaviour, known as the Aharonov-Bohm effect is shown in the previous figure for a loop of diameter 1.8µm formed from the 2DEG of a GaAs-AlGaAs single heterostructure by patterning the surface with metal gates defined by electron beam lithography. Summary and Conclusions In this lecture we have shown how modulation doping allows the attainment of very high carrier mobilities at low temperatures. This allows the observation of a number of novel effects including the integer and fractional quantum Hall effects. The high mobilities correspond to long average distances between scattering events and carriers may be able to pass through a nanostructure ballistically without undergoing a single scattering event. In this case processes which include quantised conductance and the Aharonov-Bohm
  • 84. effect are observable. Further reading The paper by Pfeiffer et al (Appl. Phys. Lett. 55, 1888 (1989)) describes the optimisation of the MBE technique to give very high electron mobilities. Carrier scattering processes are discussed in detail in ‘The Physics of Low Dimensional Semiconductors’ by J H Davies. The discussion of the integer quantum Hall effect give in this lecture is relatively non- mathematical. A more detailed treatment which includes the importance of disorder is given in ‘Band theory and Electronic Properties of Solids’ by J Singleton (OUP). Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 28 Lecture 10 Tunnelling and related processes in semiconductor nanostructures Introduction Quantum mechanical tunnelling, in which a particle passes through a classically forbidden region, is the mechanism by which α particles escape from the nucleus during α decay and electrons escape from a solid in
  • 85. thermionic emission. Tunnelling can also be observed in semiconductor nanostructures where the ability to deposit very thin layers permits the easy production of tunnelling barriers. Tunnelling can be observed either through a single barrier or through two barriers separated by a quantum well or quantum dot. A range of novel physical processes are observed with a number of practical applications. Tunnelling through a single square barrier Consider the single square barrier of potential height V0 and thickness a as shown in the following figure. Such a structure can be easily fabricated by depositing a thin layer of a wide band gap semiconductor between thicker layers of a narrower band gap semiconductor. Away from the barrier, and on both sides, would normally be doped regions to provide a reservoir of carriers. By fabricating a suitable device an applied voltage can be used to vary the energy of the carriers and their ability to pass through the barrier is indicated by the magnitude of current flowing through the device. The following figure shows the calculated transmission probability for an electron of energy E incident on a barrier of height 0.3eV and thickness 10nm. The classical result has a value of zero when the electron energy is less than the barrier height and one otherwise. In contrast the quantum
  • 86. mechanical result is non-zero for energies below that of the barrier height indicating that the electron can quantum mechanically tunnel through the barrier, a region where classically it would have negative kinetic energy. The oscillations of the probability for energies which exceed the barrier height are a result of the interference between waves which are reflected from the two sides of the barrier. For electron energies less than the barrier height the transmission probability T can be approximated to Vo a E Schematic diagram of a single barrier tunnelling structure. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 29 * 0
  • 87. 2 0 2 ( )16 exp( 2 ) m V EE T a where V κ κ − ≈ − = Because of the exponential function the transmission probability is very sensitive to both the energy of the electron and the width and height of the barrier. Double barrier resonant tunnelling structures Of greater practical interest than a single barrier tunnelling structure is the case of two barriers separated by a thin quantum well, known as a double barrier resonant tunnelling structure (DBRTS). A schematic diagram of a DBRTS is shown in the following figure. Quantised energy levels are formed in the quantum well as described in Lecture 5.
  • 88. Calculated transmission coefficient as a function of electron energy for a single barrier of height 0.3eV. taken from J H Davies ‘The Physics of Low-dimensional semiconductors’ CUP I V I I V V (a) (b) (d) (c) A double barrier resonant tunnelling structure. Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 30
  • 89. The previous figure also shows a DBRTS for various applied voltages. For the sign of voltage shown electrons travel from left to right. Electrons are first incident on the left most barrier through which they must tunnel. However at low applied voltages their energy when they have tunnelled into the well is below that of the lowest confined state and the two barriers plus the well therefore behave as one effectively thick barrier; the tunnelling probability and hence the current is very low. As the voltage is increased the energy of the electrons tunnelling through the first barrier comes into resonance with the lowest state in the well. The effective barrier width is now reduced and it becomes much easier for the electrons to pass through the structure. As a result the current increases significantly. For further increase in voltage the resonance condition is lost and the current decreases. However additional resonances may be observed with higher energy confined states. The figure also shows the expected current-voltage characteristic of a DBRTS indicating the relationship between specific points on the characteristic and the different voltage conditions. The previous figure shows experimental results obtained for a DBRTS consisting of a 20nm GaAs quantum well confined between
  • 90. 8.5nm AlGaAs barriers. Resonances with five confined quantum well states are observed. Beyond each resonance a DBRTS exhibits a negative differential resistance, a region where the current decreases as the applied voltage is increased. Such a characteristic has a number of applications including the generation and mixing of microwave signals. Very high frequencies are possible because of the rapid transit time of the electrons through the structure. DBRTS can also exhibit hysteresis in their current-voltage characteristics, particularly when the thicknesses of the two barriers are asymmetrical. A thinner first barrier allows carriers to tunnel easily into the well but a thicker second barrier impedes escape, resulting in charge build up in the well. This charge build up modifies the voltage dropped across the initial part of the structure and maintains the resonance condition to higher voltages than would 0 10 20 30 40 50
  • 91. 60 0 1 2 3 0 10 20 30 40 x35 E4 E3 E2 E1 C ur re nt (m A )
  • 92. Bias Voltage (V) x100 C ur re nt (m A ) Bias Voltage (V) Measured current voltage characteristics of a double barrier resonant tunnelling structure. Data supplied by P Buckle and W Tagg (University of Sheffield). Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 31 occur in the case of an empty well. This broadened resonance is only observed as the voltage is increased allowing charge to
  • 93. accumulate in the well. If the voltage is taken above the resonance condition the well empties and decreasing the voltage results in a narrower resonance as there is now no charge accumulation. For such a structure the current follows a different path depending upon the direction in which the voltage is varied; the current- voltage characteristics exhibit a hysteresis. The inset to the previous figure shows the characteristics of an asymmetrical DBRTS with 8.5 and 13nm thick Al0.33Ga0.67As barriers and a 7.5nm In0.11Ga0.89As quantum well. Two important figures of merit for a resonant tunnelling structure are the widths of the resonance and the ratio of the current at the peak of the resonance to that immediately after the resonance, the peak-to- valley-ratio. Once resonance has been reached with the lowest energy confined quantum well state it might be expected that current would continue to flow for higher voltages because of the continuum of states which exist as a result of inplane motion (see Lecture 5). However when an electron tunnels through the first barrier not only must energy be conserved but also the two components of the inplane momentum or wavevectors kx and ky. Conservation of kx and ky prevents tunnelling into higher continuum states as these correspond to high values of kx and ky whereas the tunnelling electrons will
  • 94. generally have relatively small inplane wavevectors. In fact the electrons to the left of the first barrier will have a range of initial energies, a result of their density and the Pauli exclusion principle, and hence a range of kx and ky values. This range of inplane wavevectors contributes to the width of the resonance. That the current immediately after a resonance does not fall to zero indicates that additional non-resonant tunnelling is occurring. The precise nature of these additional processes is still unclear but may include tunnelling via impurity states in the barriers or phonon scattering which allows electrons of an initially incorrect energy to tunnel via the quantum well states. In general the peak-to-valley-ratio decreases as the device temperature is increased. Tunnelling via quantum dots – Coulomb blockade The quantum well of a double barrier resonant tunnelling structure can be replaced by a quantum dot. In addition to the modification of the energy level structure the small size of a typical quantum dot results in a new effect. A small quantum dot will posses a relatively large capacitance. If a quantum dot already contains one or more electrons then a significant energy is required to add an additional electron as a result of the work that must be done against the repulsive electrostatic force between like charges. This charging energy,
  • 95. given by e2/2C where C is the dot capacitance, modifies the energies of the confined dot states which would occur for an uncharged system. Charging effects are most easily understood by referring to a structure of the form shown in the inset to the following figure, which consists of a quantum dot placed close to a reservoir of free electrons. Applying a voltage to the metal gate on the surface of the structure allows the energy of the dot to be varied with respect to the reservoir. If a given energy level in the dot is below the energy of the reservoir then electrons will tunnel from the reservoir into the dot level. Alternatively if the energy level is above the reservoir then the level will be unoccupied. Hence by varying the gate voltage the dot states can be sequentially filled with electrons. This filling can be monitored by measuring Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 32 the capacitance of the device which will exhibit a characteristic feature each time an additional electron is added to the dot. The main part of the
  • 96. previous figure shows the capacitance trace recorded for a device containing an ensemble of self assembled quantum dots. These dots have two confined electron levels; the lowest (ground state) able to hold two electrons (degeneracy of two) with the excited level able to hold four electrons (degeneracy of four). In the absence of charging effects only two features would be observed in the capacitance trace, one at the voltage corresponding to the filling of the ground state, the other when the voltage reaches the value required for electrons to tunnel into the excited state. However once one electron has been loaded into the ground state charging effects result in an additional energy, and a higher voltage, being required to add the second electron. This leads to two distinct capacitance features corresponding to the filling of the ground state. Similarly four distinct features are expected as electrons are loaded into the excited state although in the present case inhomogeneous broadening prevents these being individually resolved. This charging behaviour is known as Coulomb blockade and is observed experimentally when the charging energy exceeds the
  • 97. thermal energy, kT. Coulomb blockade effects can also be observed in transport processes where carriers tunnel through a quantum dot. Suitable dots may be formed electrostatically using split gates to define the dot and to provide tunnelling barriers between the dot and the surrounding 2DEG which forms a reservoir of carriers. An additional gate electrode allows the energy of the dot to be varied with respect to the carrier reservoirs. The relatively large dot size results in Coulomb charging energies that are much larger than the confinement energies. The former therefore dominate the energetics of the system. The inset to the following figure shows a schematic diagram of the structure where a small bias voltage has been applied between the left and right two-dimensional carrier reservoirs. The dot initially contains N electrons resulting in an energy indicated by the lower horizontal line. An additional electron can tunnel into the dot from the left hand reservoir but this increases the dot energy by the charging energy. Hence this process is only energetically possible if the energy of the dot with N+1 electrons lies below the maximum energy of the electrons in the left hand reservoir. Tunnelling of this additional electron into the right hand reservoir may subsequently occur
  • 98. -1.0 -0.8 -0.6 -0.4 -0.2 0.0 0.2 0.4 2.10 2.12 2.14 2.16 2.18 2.20 2.22 2.24 f r e e e l e c t r o n s q u a n t u m d o t b l o c k in g b a r r ie r g a te Excited state Ground state C ap ac
  • 99. ita nc e (n F) Voltage (V) Structure and results from a device in which a controllable number of electrons can be loaded on to a quantum dot. Figure redrawn from Fricke et al Europhysics Lett. 36, 197 (1996). Module PHY6002 Inorganic Semiconductor Nanostructures Lectures 7, 8, 9 and 10 33 but only if the N+1 dot energy lies above the maximum energy of this reservoir. If these two conditions are satisfied, requiring that the N+1 dot energy lie between the energy maxima of the two reservoirs, a sequential flow of single electrons through the structure occurs; the system exhibits a non-zero conductance. As the gate voltage is used to vary the dot energy, the condition for sequential tunnelling will be
  • 100. satisfied for different values of N and a series of conductance peaks will be observed, an example is shown in the above figure for a dot of radius 300nm. This large dot size results in a large capacitance and a correspondingly small charging energy (0.6meV for the present example). Hence measurements must be performed at very low temperatures in order to satisfy the condition e2/2C>>kT. Two practical applications of Coulomb blockade will be described in a later lecture. Summary and Conclusions In this lecture we have seen that it is possible to fabricate tunnelling structures based on semiconductor nanostructures. Double barrier resonant tunnelling structures give very non-linear current-voltage characteristics and display negative differential resistance. Because the transit time of carriers through such a structure is very short they have a number of applications including high frequency microwave oscillators and mixers. Tunnelling structures containing a quantum dot display an added complication due to the charge of the carriers; the Coulomb blockade effect. Further reading For a fuller, mathematical treatment of Coulomb blockade the
  • 101. following articles may be useful, ‘Artificial Atoms’ by M A Kastner, Physics Today 24 January 1993 and ‘Single electron charging effects in semiconductor quantum dots’ by L P Kouenhoven et al Zeitschrift für Physik B Condensed Matter 85, 367 (1991). The generally mathematics of quantum mechanical tunnelling is described in quantum mechanics text books and also with respect to the present subject in ‘The Physics of Low-Dimensional semiconductors’ by J H Davies CUP. Finally ‘Low-Dimensional Semiconductors materials, physics, technology, devices’ by M J Kelly OUP discusses applications of resonant tunnelling structures. -0.60 -0.58 -0.56 -0.54 -0.52 -0.50 0.0 0.5 1.0 N N+1 eV C on
  • 102. du ct an ce (e 2 /h ) Gate Voltage (V) Coulomb blockade effect observed for tunnelling through an electrostatically defined quantum dot. The measurement temperature is 10mK. The inset shows the carrier tunnelling steps and the energy levels of the system. Data redrawn from L P Kouwenhoven, et al Z. Phys. B. 85, 367 (1991). Financial Management • Autumn 2004 • pages 5 - 37 Why Has IPO Underpricing Changed Over Time? Tim Loughran and Jay Ritter* In the 1980s, the average first-day return on initial public offerings (IPOs) was 7%. The average first-day return doubled to almost 15% during 1990- 1998, before jumping to 65%
  • 103. during the internet bubble years of 1999-2000 and then reverting to 12% during 2001-2003. We attribute much of the higher underpricing during the bubble period to a changing issuer objective function. We argue that in the later periods there was less focus on maximizing IPO proceeds due to an increased emphasis on research coverage. Furthermore, allocations of hot IPOs to the personal brokerage accounts of issuing firm executives created an incentive to seek rather than avoid underwriters with a reputation for severe underpricing. What explains the severe underpricing of initial public offerings in 1999-2000, when the average first-day return of 65% exceeded any level previously seen before? In this article, we address this and the related question of why IPO underpricing doubled from 7% during 1980-1989 to almost 15% during 1990-1998 before reverting to 12% during the post-bubble period of 2001- 2003. Our goal is to explain low-frequency movements in underpricing (or first-day returns) that occur less often than hot and cold issue markets. We examine three hypotheses for the change in underpricing: 1) the changing risk composition hypothesis, 2) the realignment of incentives hypothesis, and 3) a new hypothesis, the changing issuer objective function hypothesis. The changing issuer objective function hypothesis has two components, the spinning hypothesis and the analyst lust hypothesis. The changing risk composition hypothesis, introduced by Ritter (1984), assumes that riskier
  • 104. IPOs will be underpriced by more than less-risky IPOs. This prediction follows from models where underpricing arises as an equilibrium condition to induce investors to participate in the IPO market. If the proportion of IPOs that represent risky stocks increases, there should be greater average underpricing. Risk can reflect either technological or valuation uncertainty. Although there have been some changes in the characteristics of firms going public, these changes are found to be too minor to explain much of the variation in underpricing over time if there is a stationary risk-return relation. The realignment of incentives and the changing issuer objective function hypotheses both We thank Hsuan-Chi Chen, Harry DeAngelo, Craig Dunbar, Todd Houge, Josh Lerner, Lemma Senbet and James Seward (the Editors), Toshio Serita, Ivo Welch, Ayako Yasuda, and Donghang Zhang; seminar participants at the 2002 Chicago NBER behavioral finance meetings, the 2002 Tokyo PACAP/APFA/FMA meetings, the 2003 AFA meetings, Boston College, Cornell, Gothenburg, Indiana, Michigan State, Penn State, Stanford, the Stockholm School of Economics, Vanderbilt, NYU, SMU, TCU, and the Universities of Alabama, California (Berkeley), Colorado, Houston, Illinois, Iowa, Notre Dame, and Pennsylvania, and several anonymous referees; and especially Alexander Ljungqvist for useful comments. Chris Barry, Laura Field, Paul Gompers, Josh Lerner, Alexander Ljungqvist, Scott Smart, Li-Anne Woo, and Chad Zutter generously provided IPO data. Bruce Foerster assisted us in ranking underwriters. Underwriter ranks are available online at http://bear.cba.ufl.edu/ritter/rank.htm. Donghang Zhang supplied useful
  • 105. research assistance. *Tim Loughran is a Professor of Finance at the University of Notre Dame. Jay Ritter is the Cordell Professor of Finance at the University of Florida. Financial Management • Autumn 2004 6 posit changes over time in the willingness of issuing firms to accept underpricing. Both hypotheses assume that underwriters benefit from rent-seeking behavior that occurs when there is excessive underpricing. The realignment of incentives hypothesis, introduced by Ljungqvist and Wilhelm (2003), argues that the managers of issuing firms acquiesced in leaving money on the table during the 1999-2000 bubble period. (Money on the table is the change between the offer price and the first closing market price, multiplied by the number of shares sold.) The hypothesized reasons for the increased acquiescence are reduced chief executive officer (CEO) ownership, fewer IPOs containing secondary shares, increased ownership fragmentation, and an increased frequency and size of “friends and family” share allocations. These changes made issuing firm decision-makers less motivated to bargain for a higher offer price. The realignment of incentives hypothesis is similar to the changing risk composition hypothesis in that it is changes in the characteristics of
  • 106. ownership, rather than any nonstationarities in the pricing relations, that are associated with changes in average underpricing. It differs from the changing risk composition hypothesis, however, in that underpricing is not determined solely by the investor demand side of the market. In our empirical work, we find little support for the realignment of incentives hypothesis as an explanation for substantial changes in underpricing. We find no relation between the inclusion of secondary shares in an IPO and underpricing. And although CEO fractional ownership was lower during the internet bubble period, the CEO dollar ownership (the market value of the CEO’s holdings) was substantially higher, resulting in increased incentives to avoid underpricing. Furthermore, it is possible that changes in the characteristics of ownership may be partly a response to higher underpricing as well as a cause. Ljungqvist and Wilhelm (2003) do not provide an explanation for why these changes occurred. The changing issuer objective function hypothesis argues that, holding constant the level of managerial ownership and other characteristics, issuing firms became more willing to accept underpricing. We hypothesize that, during our sample period, there are two reasons for why issuers became more willing to leave money on the table. The first reason is an increased emphasis on analyst coverage. As issuers placed more importance on hiring a lead underwriter with a highly ranked analyst to cover the firm, they
  • 107. became less concerned about avoiding underwriters with a reputation for excessive underpricing. We call this desire to hire an underwriter with an influential but bullish analyst the analyst lust hypothesis. This results in each issuer facing a local oligopoly of underwriters, no matter how many competing underwriters there are in total, because there are typically only five Institutional Investor all-star analysts covering any industry. As Hoberg (2003) shows, the more market power that underwriters have, the more underpricing there will be in equilibrium. The second reason for a greater willingness to leave money on the table by issuers is the co-opting of decision-makers through side payments. Beginning in the 1990s, underwriters set up personal brokerage accounts for venture capitalists and the executives of issuing firms in order to allocate hot IPOs to them. By the end of the decade, this practice, known as spinning, had become commonplace. The purpose of these side payments is to influence the issuer’s choice of lead underwriter. These payments create an incentive to seek, rather than avoid, underwriters with a reputation for severe underpricing. We call this the spinning hypothesis. In the post-bubble period, increased regulatory scrutiny reduced spinning dramatically. This is one of several explanations why underpricing dropped back to an average of 12%. The reduction in spinning removed the incentive for issuers to choose investment bankers who underprice. Investment bankers responded by underpricing less in the post-
  • 108. bubble period. Loughran & Ritter • Why Has IPO Underpricing Changed Over Time? 7 The contributions of our research are three-fold. First, we develop the changing issuer objective function hypothesis for the increased underpricing of IPOs during the 1990s and the bubble periods. Second, we document many patterns regarding the evolution of the US IPO market during the last two decades. Much of the data has been or will be posted on a website for other researchers to use. Many, although not all, of these patterns have been previously documented, especially for the first two subperiods. Third, we formally test the ability of the changing risk composition, realignment of incentives, and changing issuer objective function hypotheses to explain the changes in underpricing from 1980-1989 (“the 1980s”) to 1990-1998 (“the 1990s”), 1999-2000 (“the internet bubble”), and 2001-2003 (“the post-bubble period”). Much of the increased underpricing in the bubble period is consistent with the predictions of the changing issuer objective function hypothesis. In multiple regression tests, the changing risk composition and the realignment of incentives hypotheses have little success at explaining the increase in first-day returns from the 1980s to the 1990s, to the bubble period, or to the post-bubble period. The regression results
  • 109. show that only part of the increase in the bubble period is attributable to the increased fraction of tech and internet stocks going public. Consistent with the changing issuer objective function hypothesis, underpricing became much more severe when there was a top- tier lead underwriter in the latter time periods. These conclusions are not substantially altered after controlling for the endogeneity of underwriter choice. The rest of this article is as follows. In Section I, we present our changing issuer objective function hypothesis. In Section II, we describe our data. In Section III, we report year-by- year mean and median first-day returns and valuations. In Section IV, we report average first- day returns for various univariate sorts. In Section V, we report multiple regression results with first-day returns as the dependent variable. Section VI discusses alternative explanations for the high underpricing of IPOs during the internet bubble period. Section VII presents our conclusions. Four appendices provide detailed descriptions of our data on founding dates, post-issue shares outstanding, underwriter rankings, and internet IPO identification. I. Causes of a Changing Issuer Objective Function Most models of IPO underpricing are based on asymmetric information. There are two agency explanations of underpricing in the IPO literature. Baron (1982) presents a model of underpricing where issuers delegate the pricing decision to underwriters. Investment bankers
  • 110. find it less costly to market an IPO that is underpriced. Loughran and Ritter (2002) instead emphasize the quid pro quos that underwriters receive from buy-side clients in return for allocating underpriced IPOs to them. The managers of issuing firms care less about underpricing if they are simultaneously receiving good news about their personal wealth increasing. This argument, however, does not explain why issuers hire underwriters who will ex post exploit issuers’ psychology. Neither does the realignment of incentives hypothesis. One can view issuers as seeking to maximize a weighted average of IPO proceeds, the proceeds from future sales (both insider sales and follow-on offerings), and side payments from underwriters to the people who will choose the lead underwriter: α 1 IPO Proceeds + α 2 Proceeds from Future Sales + (1 - α 1 - α 2 )Side Payments (1) Financial Management • Autumn 2004 8
  • 111. The changing issuer objective function hypothesis states that issuers choosing an underwriter in some periods put less weight on IPO proceeds and more weight on the proceeds from future sales and side payments. In Equation (1), IPO proceeds are a function of the choice of underwriter and underwriting contract (auction or bookbuilding) at the start of the process and, several months later, the bargaining at the pricing meeting for IPOs when bookbuilding is used. Loughran and Ritter (2002) provide a prospect theory analysis of the bargaining at the pricing meeting. The Ljungqvist and Wilhelm (2003) realignment of incentives hypothesis can also be viewed as a theory of the bargaining at the pricing meeting. Neither of these theories, though, explains why an issuing firm would choose an underwriter that would, at the pricing meeting, propose an offer price that leaves more money on the table than necessary. In contrast, the changing issuer objective function hypothesis does provide a theory for the choice of underwriter at the start of the process. Before discussing the analyst lust and spinning hypotheses in more detail, we explain why underwriters want to underprice. A. Why Underwriters Want to Underprice IPOs Underwriters, as intermediaries, advise the issuer on pricing the issue, both at the time of issuing a preliminary prospectus that includes a file price range, and at the pricing meeting when the final offer price is set. If underwriters receive
  • 112. compensation from both the issuer (the gross spread) and investors, they have an incentive to recommend a lower offer price than if the compensation was merely the gross spread. Bookbuilding is the mechanism used to price and allocate IPOs for 99.9% of our sample, with auctions used for the other 0.1%. In the case of bookbuilding, underwriters can decide to whom to allocate shares if there is excess demand. Benveniste and Wilhelm (1997) and Sherman and Titman (2002) emphasize that underwriter discretion can be used to the benefit of issuing firms. Underwriters can reduce the average amount of underpricing, thereby increasing the expected proceeds to issuers, by favoring regular investors who provide information about their demand that is useful in pricing an IPO. Shares can be allocated to those who are likely to be buy-and-hold investors, minimizing any costs associated with price support. Underwriter discretion can completely eliminate the winner’s curse problem if underwriters allocate shares in hot issues only to those investors who are willing to buy other IPOs. As Ritter and Welch (2002) note, if underwriters used their discretion to bundle IPOs, problems caused by asymmetric information could be nearly eliminated. The resulting average level of underpricing should then be no more than several percent. Thus, given the use of bookbuilding, the joint hypothesis that issuers desire to maximize their proceeds and that underwriters act in the best interests of issuers can be rejected
  • 113. whenever average underpricing exceeds several percent. Although underwriter discretion in allocating IPOs can be desirable for issuing firms, it can also be disadvantageous if conflict of interest problems are not controlled. Underwriters acknowledge that in the late 1990s IPOs were allocated to investors largely on the basis of past and future commission business on other trades. In 1998- 2000, for example, Robertson Stephens allocated IPOs to institutional clients almost exclusively on the basis of the amount of commission business generated during the prior 18 months, according to its January 9, 2003 settlement with the NASD and SEC. Credit Suisse First Boston (CSFB) received commission business equal to as much as 65% of the profits that some investors received Loughran & Ritter • Why Has IPO Underpricing Changed Over Time? 9 from certain hot IPOs, such as the December 1999 IPO of VA Linux.1 The VA Linux IPO was priced at $30 per share, with a 7% gross spread equal to $2.10 per share. For an investor who was allocated shares at $30, and who then sold at the closing market price of $239.25, the capital gains would have amounted to $209.25 per share. If the investor then traded shares to generate commissions of one-half of this profit, the total underwriter compensation per share was $2.10 plus $104.625, or $106.725.
  • 114. The receipt of commissions by underwriting firms in return for hot IPO allocations violates NASD Rule 2110 on “Free Riding and Withholding.” Because the underwriter has an economic interest (a share of the profits) in the IPO after it has been allocated, there is not a “full distribution” of the security. This is economically equivalent to withholding shares and selling them at a price higher than the offer price, in violation of Rule 2110. But if the NASD (a self-regulatory organization) did not enforce its rules, underwriters might find it optimal to violate the rules. Evidence consistent with commission business affecting IPO allocations is contained in Reuter (2004). The willingness of buy-side clients to generate commissions by sending trades to integrated securities firms depends on the amount of money left on the table in IPOs. Underwriters have an incentive to underprice IPOs if they receive commission business in return for leaving money on the table. But the incentive to underprice presumably would have been as great in the 1980s as during the internet bubble period, unless there was a “supply” shift in the willingness of firms to hire underwriters with a history of underpricing. We argue that such a shift did indeed occur, resulting in increased underpricing. B. The Analyst Lust Explanation of Underpricing We hypothesize that issuing firms have increasingly chosen their lead underwriter largely on the basis of expected analyst coverage. Providing research
  • 115. coverage is expensive for investment bankers; the largest brokerage firms each spent close to $1 billion per year on equity research during the bubble (Rynecki, 2002). These costs are covered partly by charging issuers of securities explicit (gross spread) and implicit (underpricing) fees. The more that issuing firms see analyst coverage as important, the more they are willing to pay these costs. There are several reasons for our opinion that analyst lust was more important during the 1990s and bubble period than in the 1980s. First, the investment bankers and venture capitalists we have talked to are unanimous in their agreement. Supporting this, in the early 1970s Morgan Stanley had “no research business to speak of,” even though it was a major IPO underwriter (Schack, 2002). As we will show, the number of managing underwriters in 1See the January 22, 2002 SEC litigation release 17327 and news release (available on the SEC website at http://www.sec.gov), and the NASD Regulation news release (available at http://www.nasdr.com). The NASD Regulation news release states that “For example, after a CSFB customer obtained an allocation of 13,500 shares in the VA Linux IPO, the customer sold two million shares of Compaq and paid CSFB $.50 a share—or $1 million—as a purported brokerage commission. The customer immediately repurchased the shares through other firms at normal commission rates of $.06 per share at a loss of $1.2 million on the Compaq sale and repurchase because of the $1 million paid to CSFB. On that same day, however, the customer sold the VA Linux IPO shares, making a one-day profit of $3.3 million.”
  • 116. According to paragraphs 48 and 49 of the SEC complaint, for the July 20, 1999 IPO of Gadzoox, which CSFB lead managed, “at least 261,025 shares were allocated to customers that were willing to funnel a portion of their IPO profits to CSFB.” CSFB distributed approximately 3.4 million of the 4.025 million offer, which went from an offer price of $21 to a closing price of $74.8125, up 256%. The following day, July 21, 1999, CSFB was the lead manager on MP3, which was priced at $28 and closed at $63.3125, up 126%. “CSFB distributed 7.2 million of the 10.35 million MP3 shares offered through underwriters. Of the 7.2 million MP3 shares distributed by CSFB, at least 520,170 shares were allocated to customers that were willing to funnel a portion of their trading profits to CSFB.” Financial Management • Autumn 2004 10 IPO syndicates has increased over time. Investment bankers note that co-managers are included in a syndicate almost exclusively to provide research coverage. Indeed, by 2000 co- managers were generally not even invited to participate in road shows and the pricing meeting at which the final offer price is determined. Second, as valuations have increased, changes in growth rates perceived in the financial markets represent more dollars. Firm value can be decomposed into the value of existing assets in place plus the net present value of growth opportunities. As the value of growth opportunities increases relative to the value of assets in place, issuing firms come to place