NanoFocus µsurf product line and technology brochure

1. rf
µsu nology
tech

2. Application area of the µsurf Technology
Structure depth
1 mm
µsurf –
areal
100 µm confocal
microscopy
Geometry
10 µm
1 µm
100 nm
Roughness Flatness
10 nm
1 nm
1 µm 10 µm 100 µm 1 mm 10 mm 100 mm
Structure width
2

3. Industrial metrology for laboratory and production
The robust µsurf sensor technol-
ogy is based on the CMP tech-
nology (Confocal-Multi-Pinhole)
of NanoFocus.
Within seconds, topography,
roughness and layer thickness
in the micro and nanometer
ranges are acquired.
3

4. Technology
1. Principle
The confocal microscope from NanoFocus comprises
an LED light source (1), a rotating multi-pinhole disc ➊
(2), an objective lens with a piezo drive (3) and a CCD
camera (5).
The LED source is focused through the mulit-pinhole
disc (MPD) and the objective lens on to the sample
surface (4), which reflects the light. The reflected light
is reduced by the pinhole of the MPD to that part ➎
which is in focus, and this falls on the CCD camera.
➋
The sketch shows a point on the surface being imaged
through one pinhole of the MPD. The MPD has a large
number of such holes arranged in a special pattern.
The rotation of the MPD enables seamless scanning of
the entire surface of the sample within the image field. ➊ LED source
➋ Multi-pinhole disc
➌
➌ Objective lens
➍ Sample
➎ CCD camera
➍
2. The Confocal Curve
An image from a conventional optical microscope
contains sharp and blurred detail.InIn contrast, lightthe
focus – reflected in is captured
by the CCD camera.
confocal image, the blurred detail (unfocused) is filtered
out by the operation of the MPD.
Microscope image (left): out of focus
Confocal Curve:
Only light from the focal plane reaches the CCDlight is captured
In focus – reflected camera, points the focal range comes the precision
from
displayed as well as in focus
of the height values.
by the CCD camera. points. Confocal image (right): Only
with the intensity following the confocal curve. Thus the Objective lens
in focus points displayed.
confocal microsocope is capable of high resolution in
the nanometer range. The precision of the height values Confocal Curve:
Out of focus
from the focal range comes the precision
follows from the focal range of the confocal curve. Focal planes of the height values.
Objective lens
Sample FWHM
Height z
Out of focus – reflected light in focus
In focus – reflected light is captured is masked out. Out of focus
by the CCD camera. Focal planes
FWHM
Sample FWHM
Height z
Confocal Curve: Out of focus
Out of focus – reflected light in focus
from the focal range comes the precision
is masked out.
of the height values. Objective lens
Objective lens FWHM
Signal strength I
Out of focus
Out of focus
Focal planes Objective lens
Focal planes
Sample FWHM Sample
Signal strength I
Height z
Out of focus – reflected light in focus
is masked out.
Focal planes
FWHM
Sample
4 Out of focus
Objective lens

5. 3. Confocal Image Stack
Each confocal image is a horizontal slice through the topography of the sample. Capturing of images at
different focal heights produces a stack of such images, achieved by the confocal microscope throught
precise vertical displacement of the objective lens by means of a piezo drive. 200 to 400 confocal images are
generally captured within a few seconds, after which the software reconstructs an exact three-dimensional
height image from the stack of confocal images. Therefore, service heights are measured, not calculated.
Height z
Measurement process: Image stack: Results:
The objective lens is dis- Up to 1,000 individual The surface topography
placed in height by a piezo confocal images is reconstructed from the
drive. are captured. confocal images.
4. Quantitative analysis and reports
The measured values are transferred to the analysis program containing standardize analysis methods,
such as ISO 25178 or ISO 4287 roughness (2D and 3D parameters), form, translucent film thickness and
microgeometry. Results are automatically transferred to a pre-formatted report.
Color-scaled height display Single profile from the measurement Automatically produced
measurement report
5

6. Exact and reliable 3D
measurement data
The µsurf technology offers various advantages for Additionally, in an independent third party study
the characterization of technical surfaces in the micro performed by the National Institute of Standards and
and nanometer ranges. Technology (NIST), comparing intererometry, laser
confocal, and NanoFocus’ Multi-Pinhole Confocal,
Both measurements of an electron beam structured the µsurf technology acheived the highest correlation
roll, one done with the µsurf technology and the other (99 %) to tactile systems. With such high correlation to
a SEM, have comparable resolution. Contrary to the traditional methods, historical data on 2D parameters
SEM (x,y), µsurf offers the data in true 3-dimensional is no longer obsolete. All the while acquiring surface
coordinates (x,y,z). Only with this quantitative data data a lot faster, without damaging the measurement
can an exact analysis of 3D surface parameters be sample.
performed, delivering a larger range of information
about the surface texture.
Comparison of a SEM and a µsurf confocal microscope
REM µsurf
Structured Surface (100×90 µm), REM: Alcan Research Center, Neuhausen.
Correlation of tactile systems and the µsurf confocal microscope
1
Sign. A
(µm)
tactile
0
-1
1
Sign. B
(µm)
µsurf
0
-1
0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3
Profile length (µm)
99% correlation (KKF)
Best system in the comparison study at NIST, 2005
6

7. Meaningful measurement results
within seconds
The µsurf systems do not require preparation of charts, profiles and 3D pictures. With the automation
the surface of the measurement sample. When the software µsoft automation, measurements can be
sample is positioned under the objective, the clearly processed at a high throughput rate with highest
arranged user interface leads the operator through the efficiency and without user influence.
measurement process in just a few clicks. Afterwards,
the settings of the measurement parameters can be
used for serial measurements. Already after a few
seconds the µsurf technology provides meaningful
data for further analysis.
Contrary to other techniques,
the µsurf technology delivers
When measurement data is imported into the report meaningful measurements
and analyses in a few
templates of the µsoft analysis software, a full meas- seconds. Easy handling and
urement report is automatically generated. The output intelligent software guarantee
maximum efficiency.
analysis parameters can be modified and displayed as
7

8. Robust precision metrology
for industrial applications
The µsurf technology was developed especially for Of the many that employ the µsurf technology, Thyssen
use in the typically rough production environment. The Krupp Steel AG, a customer and research partner of
robust design and features, such as integrated spring NanoFocus AG, trusts in the µsurf at their Rolling Mills
feet, guarantee reliable and correct measurement to get repeatable measurements on the fly.
results. Environmental influences, such as vibrations,
dust or splash water, do not affect the precision or From steel to solar, medicine to machine tools,
accuracy. automotibiles to airplanes, electronics to optics, manu-
facturers, printers, forensic specialists, researchers,
Historical use of the µsurf technology, deployed in and physicians worldwide trust in NanoFocus µsurf
support of high-paced production inspection, has confocal technology to get them precise, accurate,
forged its reputation as a tool to produce high precision and reliable data everytime.
measurements repeatedly in less-than-ideal conditions.
8

9. Hightech – Made in Germany
Made in Germany
The components used for
NanoFocus designs, develops, and produces complete NanoFocus measurement
systems have to go through
3D measurement solutions, hardware and software. strict selection and validation
processes to guarantee
highest quality levels.
The components that the µsurf systems are built
from, at the manufacturing facility in Oberhausen,
Germany, are of the highest quality standards. They
must be low-maintenance and durable, such as the
high performance LED used as the light source. Com-
ponents like these guarantee the economic usage of
a measurement system that is always ready to use.
9

10. Measurement and analysis conforming
to international standards
Standards are catalysts for innovations. One example
are the EN ISO 25178 standards.
Finally, this norm made a broad range of new analyses
possible that describe the surface characteristics and
their functions much more precisely. That´s why
NanoFocus continuously implements new standards
in the measurement systems and the software.
For NanoFocus it is not only important to design
measurement solutions conforming to international
standards. NanoFocus also uses its experts’ know-
ledge in the field of optical metrology to actively
support the development of new standards. Jet
another technical advantage of NanoFocus systems.
Conformity of the µsurf technology and software to international standards
µsurf
ISO 25178-6, ISO 5436-1, VDI 2655-1.2a
µsoft control (control and measurement software)
ISO 11562, ISO 4287 ISO 4288, ISO 5436-1, ISO 5436-2
,
µsoft analysis (analysis software)
EUR 15178 EN, ISO 1101, ISO 11562, ISO 12085, ISO 12181-1, ISO 12181-2, ISO 12780-1, ISO 12780-2,
ISO 12781-1, ISO 12781-2, ISO 1302, ISO 13565-1, ISO 25178-2, ISO 25178-6, ISO 4287 ISO 4288,
,
ISO 5436-1, ISO 5436-2, ISO/TS 16610-1, ISO/TS 16610-20, ISO/TS 16610-22, ISO/TS 16610-31,
ISO/TS 16610-40, ISO/TS 16610-41, ISO/TS 16610-49
10

11. Product groups
Produktkategorien
Standard
Standard Modular
The complete package The individual concept
NanoFocus´ standard systems, µsurf basic, µsurf Some measurement tasks are that complex, that
explorer and µsurf mobile, prove that the entrance they require a customized measurement system. The
Modular
into the micro and nanotechnology realm does not Integration
broad range of standardized components, as well as
have to be expensive and complicated. Unpack, plug the experience and competence of our hardware and
in, measure. It has never been that easy to perform software experts, allow NanoFocus to equip the µsurf
Standard
three dimensional analyses into the nanometer ranges. custom for specific requirements.
Produktkategorien
Integration
The µsurf standard systems are used in various indus- Business Solution
The custom systems are especially used for extremely
tries: to measure the roughness of medical blood pumps, challenging and specialized surfaces as well as in basic
for production control of electronic components for the research and in medical device manufacturing, where
Modular
automotive sector, the supporting production of complex Standard
strict norms have to be met.
electronic modules, the inspection of thinnest layers,
Business Solution
in metal processing or the paper and print industry. Dienstleistung
Integration Modular
Dienstleistung
Business Solution Integration
The fully developed, industry-specific solution Benefit from technical advance
Increasingly more industries request measurement The sensors and measurement heads of the µsurf
systems that meet the exacting requirements of their systems can be fully integrated in production processes.
Dienstleistung
products as well as their development and produc- Business Solution
Many industry partners of NanoFocus use the technol-
tion processes. NanoFocus´ business solutions offer ogy to equip their products with best components for
just this: industry-specific solutions, developed with three dimensional surface analysis. Besides metrology
key customers in those respective markets. That´s and medical technology, it is especially the forensic
how industry related knowledge and fully developed sector that is utilizing the µsurf sensors. For example,
NanoFocus technology are combined in the business Dienstleistung
the world’s leading company for forensic analyzing
solutions. The result is a system that is able to perform systems uses NanoFocus measuring heads for the
industry-specific and complex measurement tasks close precise analysis of bullets.
to production without investing in further customized
design.
One of these solutions is µsurf cylinder, which is used by
Applications of µsurf systems sorted by measurement tasks
premium car manufacturers worldwide for development
and production control of energy efficient and wear- µsurf basic
reduced engine cylinders. With the business solution µsurf explorer
µsurf solar, development processes of solar cells are µsurf custom, µsurf cylinder, µsurf solar
sped up, production processes are verified and the µsurf sensor
performance and quality of solar cells are improved Process development (R&D) Process control Production control
continuously.
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12. 3D measurement system for
laboratory and production
surf explorer
 lexible allround metrology
F
solution
 Compact design
 User-friendly concept
µsurf explorer is a flexible and user-friendly 3D measurement system for precise surface
analyses that can be used in measurement and testing laboratories, as well as in produc-
tion environments. The µsurf explorer, awarded for its compact design, delivers reliable 3D
measurement results quick and uncomplicated in a few steps.
Dental implant ground surface Step height measurement (50 nm)
12

13. Ready for use everywhere
surf mobile
Mobile usage with battery 
Only 5.5 kg 
Motorized xyz axis 
The compact and portable µsurf mobile was developed for surface measurements on large
objects such as printing rolls and body parts. In a few minutes, the five kilogram, hand-carried
system is ready to operate, allowing for large-scale measurements on rolls along the radius
of curvature.
EDT roll Half tone printing roll Gravure printing roll
13

14. 3D microscopy for industrial research
surf basic
 Turreted optics
NEW
 75 mm height range
 opographical 3D view in
T
real color
µsurf basic is a 3D microscope optimized for the requirements of industrial and industry-oriented
research. The system compels through its high measurement speed and its flexibility, especially
when there are a lot of different measurement tasks to accomplish with various requirements.
Screw thread Rubbing wear Resistor
14

15. Measurement system made-to-order
surf custom
Modular concept 
Fully automatable 
For intricate surfaces 
µsurf custom is specifically designed to the requirements of an individual measurement task.
A large assortment of hardware and software components enables universal laboratory measure-
ment systems, as well as fully automated systems for quality control. Even with smallest height
structures, measurement results with nanometer accuracy are guaranteed – within seconds.
Implant Sensor membrane Micro lenses
15

16. Specialized solution for motor cylinders
surf cylinder
 Angulated optics
 or cylinder bores from
F
70 mm to 165 mm dia.
 ariable measurement
V
positioning (radial, axial)
µsurf cylinder is conceived to measure cylinder running surfaces in automotive industry. The
angulated optics dive into the cylinder bore, as controlled by a joystick. Every position in the
bore is accessable without destroying the engine. For repeating measurements and serial
inspections, automated measurement protocols are stored in a database. With the Linewalking
system as an additional automation solution, measurement processes can be performed even
more effectively and efficiently, with the track system attached to the engine block.
Honed structure AluSil surface Coated piston
16

17. Allround solution for solar cells
surf solar
Up to 12 area measurements 
in 1 minute
Simple and intuitive 
automation
µsurf solar is a high precision optical measurement solution for the broad range of solar
applications in laboratory and production. With portal configuration available up to the meter
range, whole thin film solar modules can be measured. A vacuum chuck for safe fixture and
the integration of specialized algorithms for better analysis of anti-reflecting surfaces guarantee
optimal measurement results. With the integrated automation function, measurement and
analysis cycles can be programmed quickly and easily.
Laser Scribes
Pyramid structure Finger measurement
17

18. OEM solution to integrate easily
surf sensor
 Simple integration
 Individual designs possible
 Ready to use immediately
The confocal µsurf area sensor is the heart of the µsurf 3D technology. It can be integrated
separately in production machines and analysis systems. Soft interfaces, in the form of software
development kits, enable the complete integration in a superior software solution.
Lasered structrure Milled structure Structure of a painting
18

19. Software
soft control soft analysis
With the easy-to-use software, µsoft control, measure- µsoft analysis is a comprehensive software package
ment data can be analyzed and visualized quickly. The for 2D and 3D surface analysis. The software always
user interface is separated in three areas, providing contains the latest standards and filter functions. The
a useful overview. The measurement assistant that versions Standard, XT and Premium are available based
controls the system is already integrated in µsoft on analysis demands.
control. From measuring to analyzing, only one
program is needed.
soft automation Stitch-Tool
With the µsoft automation, individual measurements In some cases, the measurement field of an objec-
and analyses can be automated in an easy way. All tive does not suffice for the evaluation of spacious
chosen parameters are saved in a measurement characteristics such as form, roughness or waviness.
template, so the user can start a measurement cycle To extend the total measurement area, neighboring
with one click. The measurement data is transferred measurement fields can be assembled to one suture-
to a database that forms the interface between the less measurement.
inspection system and a customized µsoft automation
analytics module.
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20. 07/07/2010. Technical data subject to change without notice. NanoFocus and μsurf are registered trademarks of NanoFocus AG. Design: nicolaygrafik.de
Are you interested in other NanoFocus-Technology?
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NanoFocus AG
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Phone ++1 804-228-4195 | Fax ++1 804-527-1816 | solutions@nanofocus-us.com
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Phone ++65 96849735 | alan.ong@nanofocus-ag.com