A brief presentation about our anode layer ion beam sources. Their benefits, principle of operation and application examples.

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6. ION BEAM
MAGNETIC
FIELD
WATERGAS
GAS
DISCHARGE
S
N
N
S
S
N

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11. Parameter IBS-125 IBS-145 IBS-400 IBS-600 IBS-700 IBS-800
Supply voltage, kV 1.5-5
Mean ion energy Approx. ½ of supply voltage
Maximum beam current, A* 0.3 0.4 1.0 1.5 1.75 2.0
Gas efficiency, mA/sccm* 10
Electrode lifetime (Ar at
maximal current), hours** 200
Beam shape Hollow rectangular
Beam size, WхT, mm 100х42 120x42 375х42 575х42 675x42 775x42
Beam divergence angle 2°
Maximum operating
pressure, Pa 10
Work gas Ar, H2
, He, Xe, O2
, N2
, Ne, Cx
Hy
, CO2
, Cx
Fy
* Parameters measured in the following conditions:
Argon, voltage 3 kV, chamber pressure 0.1 Pa
** Electrodes are sputtered in inert gases except He only.

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TARGET
TARGET HOLDER
SUBSTRATES
IBS

20. TARGET
TARGET HOLDER
SUBSTRATES
IBS

22. Parameter Value
Voltage, kV 2.5..5
Beam shape Circular, tubular
Beam diameter, mm 20
Housing diameter, mm 52
Housing length, mm 80
Maximum beam current, mA* 160
Gas efficiency, mA/sccm* 6
Beam angle, maximum, º 2
Operating pressure range in the
chamber, Pa
0.001..10
Weight (kg) 0.3
*plasma-forming gas at 5 kV supply voltage: Ar
*Parameters measured in the following conditions: Argon, voltage 3 kV,
chamber pressure 0.1 Pa.

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ACTIVE GAS
MAGNETRON

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ACTIVE GAS
MAGNETRON

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