PerfectEdge TEM membranes in Round Frame! Experience our PerfectEdge FREE evaluation pack. Easy manipulation and perfect handling by tweezers. PerfectEdge TEM membranes in Round Frame Specifications: 200 µm thick silicon wafer Industry standard 3mm diameter round frame 20 nm membrane thickness PerfectEdge offers easy manipulation and perfect handling by tweezers Fully compatible with standard TEM holders This evaluation package contains the following geometries or grid designs: Two (2) Single Square - 0.1mm Window One (1) Single Square - 0.5mm Window One (1) Single Square - 1mm Window Two (2) Symetric Grids - 3x3 0.1 mm Windows One (1) Asymetrical Gird - 3x3 Windows One (1) Slots - 2x: 1.0mm x 0.1mm Windows One (1) Slots Small - 2x: 1.0mm x 0.05mm Windows

1. Evaluation of SiN PerfectEdge TEM membranes
Summer 2014
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Customer Evaluation
Customer satisfaction reflects the expectations and experiences
that the customer has with a product or a service.
We asked a leading TEM manufacturer to evaluate our Silicon-
Nitride based PerfectEdge membranes
In the next slides we show their test results and remarks

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SmallTechSupplies TEM Membranes
SmallTechSupplies provides a suite of thin PerfectEdge TEM
Membranes that are based on Silicon Nitride stoichiometric films.
Two samples have been evaluated on a 200kV high resolution
Transmission Electron Microscope (TEM):
Single square 140 µm square TEM membrane (Type S) located in
position A3
9-window 140 µm x 140 µm TEM substrate (Type N) located in
position I3
Conventional TEM, EDS and EFTEM thickness maps have been
used to characterize the membranes

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One square has been measured at low mag showing a size of
127 µm x 128 µm.
Field of view is fully blocked above 53º in both tilting directions
using a Fischione 2020 tomography holder.
Cleanliness of the membranes was quite good, no significant dirt
was found.
General Characteristics

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Only one brake was found during the evaluation of the two
samples.
The grids feel thicker than standard Cu grids when handling.
No significant contamination of the membrane was detected.
General Characteristics

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EFTEM shows t/λ average
values of 0.125 on both
samples (what corresponds to
a thickness of around 12 nm)
General Characteristics

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HR-TEM
General Characteristics

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Stability
No detectable shrinkage during imaging
No brake of the membrane even after focusing the beam in a
small spot for some minutes.
Thickness decrease after some minutes of exposure to a focused
beam.

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Stability
EFTEM t/λ map
shows a thickness
reduction of almost
50% after some
minutes of exposure
to a focused beam

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EDS analysis
EDS shows a composition on atomic % of 50% Si, 46% N and
4% O

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