1. 2017 Summer REU Program
NanotechnologyCollaborativeInfrastructure-Southwest
Acknowledgement: This material is based upon work primarily supported by the National Science Foundation under award No. ECCS-1542160.
Small Pyramids for Light-Trapping in Silicon-based Heterojunction
Solar Cells
Andrew Atkins1, Justin Huxel2,3, Som Dahal3, Raymond Tsui3, Stuart Bowden3 and Trevor Thorton3
1Mesa Community College, Mesa, Arizona
2Central Arizona College, Coolidge, Arizona
3Arizona State University, Tempe, Arizona
Abstract
1. Introduction
2. Experiment
3. Results and Analysis
4. Conclusion and Further Work
References
A polished silicon surface reflects ~ 40% of incident light; through surface texturing the amount of light reflected is decreased to about 10%. Currently, conventional texturing
processes using dilute KOH result in pyramids of about 3-5 μm base dimension. This work was focused on developing a process for creating small, uniform pyramids of ~1 µm
across the surface of silicon wafers. The goal of this project was to determine if small pyramids were both effective in light trapping and reducing the surface recombination after
surface passivation. By decreasing the size of the pyramids, we can significantly reduce the surface area compared to conventional texturing which should significantly lower the
surface recombination and improve overall minority carrier lifetime. The texturing chemistry and texturing time were varied to achieve the small pyramids and the reflectance was
compared with the baseline process of ASU’s Solar Power Lab. We compared the pyramid size, the minority carrier lifetime after surface passivation and reflectivity of our
samples. Our results indicate that samples with the pyramid size of 1-1.75 µm have the highest minority carrier lifetime without compromising reflectance.
❖ The purpose of texturing is to reduce broadband reflectance of silicon. When light
gets reflected off the surface of a pyramid, the photons have an additional
opportunity to be absorbed in an adjacent pyramid (Fig 1.).
❖ The effects on texturing of the following factors are studied: (1) SDR times, (2) the
duration during which wafers are submerged in the texturing solution, and (3) the
amount of additive in the texturing solution. The additive (GP Solar Alkatex) is a
surfactant, allowing the solution to be better dispersed on the wafer surface.
❖ After texturing and proper chemical cleanings (RCA-B, Piranha and dilute HF) a
thin (~20 nm) of intrinsic amorphous silicon is deposited on both surfaces of the
wafers for surface passivation.
❖ After surface passivation, minority carrier lifetime is a measure of how long before
electron-hole pairs recombine non-radiatively (Fig 2.). This recombination means
that the photon generated charge carriers are lost and can’t contribute to the
production of power. The effect of texturing on lifetime is also studied.
Characterization:
Fabrication Process:
❖ The saw damage removal (SDR) bath is
a concentrated solution of 30% KOH. It
etches ~15µm of material on both sides
of the wafer to remove defects left by the
manufacturing process.
❖ The texturing process involves
submerging silicon wafers in a 2% KOH
bath. This dilute KOH solution causes
anisotropic etching to occur on the
surface resulting in pyramid textures.
❖ After texturing and cleaning the wafer, a
layer of amorphous silicon (a-Si) ~ 20
nm thick is deposited on the surface.
This helps to reduce the recombination
rate and increases lifetime.
❖ The pyramid size tuning through
texturing conditions is optimized and the
reflectance is measured for each
texturing conditions. Out of many
texturing conditions used to tune the
pyramid size, the one that are of interest
are listed in Table 1.
❖ Pyramid size is determined by scanning electron
microscopy using a Phenom World S.E.M
❖ Reflectance is determined in the wavelengths 300 nm to
1100 nm on a QEX 10 QE/reflectance measurement tool.
Figure 1. Principle of Light Trapping Figure 2. Process of Carrier Recombination
❖ We were able to achieve uniform pyramid textures ~ 1 um in size.
❖ These pyramids absorbed light as efficiently as larger pyramids.
❖ In addition, the MC lifetimes of small pyramid samples were
significantly higher in comparison to their larger pyramid counterparts.
❖ Further work is needed in utilizing this procedure in applications such as:
❖ Fabricating complete devices and testing the efficiency enhancement
❖ Spin-coating, as used in perovskite/silicon tandem solar cells.
❖ Aerosol Jet® printing techniques.
2. Saw Damage Removal (SDR)
3. Texturing: Different Conditions
4. Chemical Cleanings (RCA-B,
Piranha, & BOE)
5. Reflectivity Measurements
6. S.E.M (Pyramid
Measurements)
7. BOE Cleaning Bath
1. N-Type CZ Wafers
8. Surface Passivation (20nm of i-
a:Si (H))
9. Minority Carrier Lifetime
Measurement
Bulk Resistance
Texturing
Conditions
Texturing solution
composition at 80 oC
SDR Time (minutes) Texturing Time
(minutes)
Pyramid Size
( µm )
Reflectance(%) @
630nm
1 50 mL GP Solar + 800 ml
KOH+17 liters DI water
7 25 2µm - 5µm 8.01%
2 200 mL GP Solar + 800 ml
KOH+17 liters DI water
7 10 1µm – 1.75µm 8.36%
3 200 ml GP Solar+800 ml
KOH+17 Liters DI water
10 10 700nm – 1µm 8.15%
4 200 ml GP solar + 800 ml
KOH+ 17 liters DI water
12 10 1µm – 1.25µm 8.08%
Table 1. Texturing Conditions with Corresponding Measurements
Figure 3. SEM Images of pyramids on silicon surface with texturing condition 1 (left), and texturing
condition 2 (right)
Figure 4. Reflectivity Data Figure 5. Lifetime Data
❖ With the various texturing chemistry the pyramid sizes were tuned from 5µm to ~
1µm (Fig. 3).
❖ Reflectivity varied by less than 1% across the different conditions (Fig 4).
❖ Lifetime tests show that texturing condition 2 had significantly higher lifetimes in
comparison to condition 1 (Fig 5).
❖ The texturing condition details and the resulting pyramid size are listed in Table 1.
together with the reflectance at 630 nm.
❖ All these wafers were processed in a single lot.
❖ Condition 1 is the baseline procedure at ASU Solar Power Lab.
2.08 µm 2.68
µm
5.31 µm
2.26 µm
1.56 µm
1.15 µm
1.34 µm 1.72 µm
(Fig 1.) Bowden, Stuart & Honsberg, Christiana (2010). Light Trapping. http://www.pveducation.org/pvcdrom/5-design-of-
silicon-cells/light-trapping
(Fig 2.) Glitzky, Annegret, Alexander Mielke, Matthias Liero, & Reiner Nürnberg (2014). Modeling of Electronic Properties of
Interfaces in Solar Cells. http://www.wias-berlin.de/people/liero/d22/