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This is a presentation I gave about MEMS processing at Tyndall in 2008. It goes over the various fabrication possibilities at Tyndall.
I personally like slide 3 and 4 trying to hook the history of watch making in with MEMS fabrication. This drive to go smaller and smaller with watch making can also be seen in electronics. Coincidentally, the first MEMS device was a time-keeping pendulum.