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The Battery Show Japan Showcase Presentation.pdf
The document presents the applications and benefits of roll-to-roll atomic layer deposition (ALD) in lithium-ion battery manufacturing, highlighting its ability to enhance stability, suppress dendrite growth, and improve contact interfaces. Beneq, a leading supplier of ALD solutions, discusses their extensive experience and the technological advancements that enable mass production of functional coatings for battery components. It emphasizes the importance of ALD in developing next-generation batteries and associated energy devices.
The Battery Show Japan Showcase Presentation.pdf
- 1. Roll-to-Roll ALD Coatingsfor Battery Cell Interfaces Battery Japan 2023 September 13-15,2023 Makuhari Messe Dr. Andrew Cook, Beneq
- 2. 06/10/2023 BENEQ • Supplier ofALD Equipment and Services • Headquarters & ALD Fab in Espoo Finland with 40+ ALD systems for service & production • 30+ years of industrial ALD experience at your service
- 3. 06/10/2023 What is AtomicLayer Deposition (ALD)?
- 4. 06/10/2023 ALD Characteristics Conform 3Dcoating Self limiting surface reactions Precise thickness and composition control
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- 6. 06/10/2023 ALD for Batteries- background • Lot of research has been done since 2010 about ALD on Lithium-Ion Batteries • Overall, ALD introduction to battery manufacturing has been slow and limited by the availability of production scale ALD systems. • One focus area has been coating of the cathode active materials as particles • Now many research groups are interested in comparing coating ALD on particles with ALD on electrodes. • More recently several groups have started research on ALD use for Solid State Lithium Batteries • Beneq has a long experience with R2R ALD on other application areas, and is now applying that know-how to offer R2R ALD solutions for battery manufacturing
- 7. 06/10/2023 Li ion battery– ALD can help to Adopted from: Ye Jin, Han Yu, and Xinhua Liang Appl. Phys. Rev. 8, 031301 (2021); https://doi.org/10.1063/5.0048337 Improve stability of SEI layer Suppress dendrite growth Improve wettability Inhibit transition metal dissolution Separator SSE Stop particle cracking Improve interfacial contact Improve thermal stability Inhibit transformation and pulverisation Anode Cathode Cu Foil Al Foil
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- 9. 06/10/2023 Solution: Functional ALDLayers Encapsulation & dendrite suppression https://doi.org/10.1021/acsami.8b08585 https://doi.org/10.1016/j.nanoen.2017.02.043 Anode Coating https://doi.org/10.1002/er.5371 Separator Protective Coating https://doi.org/10.1007/s11051-014-2745-z Cathode Protection • Protective coatings on cathodes • Anode coatings • Dendrite growth suppression • Protective coatings on separator films
- 10. 06/10/2023 ALD Al2O3 coatingon NCM811 cathode foils As received samples • Samples were coated by spatial ALD • ALD coated samples show increased specific capacity and significant increases in cycling stability Half Cell – Coin Cell Test Long cycling conditions: 0.5C, 3.0 – 4.4 V
- 11. 06/10/2023 Enhanced Electrochemical Stability- ALD Al2O3 on LiNi0.5Mn1.5O4 cathode • <1 nm ALD Al2O3 coated LMNO cathode outperforms uncoated reference material in terms of capacity retention by mitigating unwanted side reactions with electrolyte decomposition products J. Song et al., J. Nanopart Res., 2014, 16, 2745. https://doi.org/10.1007/s11051-014-2745-z
- 12. 06/10/2023 Improved discharge capacitywith HfO2 and SnO2 ALD coatings 3.5x capacity discharge improvement B. Ahmed, et al., Nano Energy, 2017, 34, 249. https://doi.org/10.1016/j.nanoen.2017.02.043 HfO2 and SnO2 ALD on MXene Non-coated MXene
- 13. 06/10/2023 Li Dendrite Suppressionand Encapsulation by ALD ZrO2 • ALD-ZrO2 coated Li anode: ✓ 4% lower degradation in electrochemical properties ✓ +10 Ah/kg capacity increase at 8C current rate • Excellent dendrite suppression • Excellent tolerance to air exposure • Excellent heat tolerance P.K. Alaboina, et al. ACS Appl. Mater Interfaces 2018, 10, 32801 https://doi.org/10.1021/acsami.8b08585
- 14. 06/10/2023 R2R ALD Al2O3coating on separator 200% increase in electrolyte uptake compared to untreated Celgard J-W Lee et al., Int. J. Energy Res., 2020, 44, 7035. https://doi.org/10.1002/er.5371 Improved wettability
- 15. 06/10/2023 Al2O3 ALD interfaceLayer for Garnet SSE Interfacial impedance 1710 Ω cm2 => 1 Ω cm2 X. Han, et al., Nature Materials, 2017, 16, 572. https://www.nature.com/articles/nmat4821 Li SSE
- 16. 06/10/2023 BENEQ ALD systems Research& Development Equipment Beneq R2 Beneq TFS200 Beneq TFS500
- 17. 06/10/2023 BENEQ ALD systems 3D& Batch Beneq P400A Beneq P800 Beneq P1500
- 18. 06/10/2023 Offering: R2R GenesisALD System • Web Material: Copper, Aluminum, Stainless steel, polymer, paper and other substrates suitable for vacuum coating • Web width, max.: 420 mm • Machine Speed: • Production Minimum 0.1 m/min • Production Maximum 10 m/min • ALD Materials: Al2O3, TiO2, ZnO, ZnS, SiO2 and more • Process temp., max: 250°C Optional designs for wider webs and line integration available Genesis ALD in collaboration with R2R Production
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- 20. 06/10/2023 R2R ALD processprinciple
- 21. 06/10/2023 Why roll-to-roll ALD? •Conformal and thin coating deposited in very controllable manner • You get the coating where you want it – on external surfaces, but not between the particles • Does not impact the previous casting step • Without compromising electrical conductivity between cathode particles • High through-put • Significant improvement of battery performance
- 22. 06/10/2023 Development Services –Application Development • Dedicated team of ALD and application experts - mainly PhD and MSc level • Wide variety of ALD equipment and processes available • Accumulated process and application knowhow from the past 35 years • ALD-123TM process successfully used with dozens of customers annually
- 23. 06/10/2023 ALD systems usedin development services trials • TFS 200 and SCS-1000 systems are currently used for ALD development services for coating battery samples
- 24. 06/10/2023 Summary • ALD isan enabling technology for future batteries • ALD technology introduction has been hindered by lack of production scale equipment • Most applications need films in the range of 1-20 nm → well suited for Roll-to-Roll ALD • Beneq R2R ALD technology offers a straightforward scale-up path to mass-production • Protective coatings on anode, cathode and separator • Coating on particles in R2R mode • Suitable for 3D structures • R&D / Pilot scale equipment exist already, larger production systems available as custom design
- 25. 6.10.2023 Let Beneq poweryour emerging Green Energy devices with thin film interfacial engineering by Atomic Layer Deposition (ALD): Perovskite Solar Cells Fuel Cells Supercapacitors Battery Japan 2023 Booth E6-39 Li-ion Batteries www.beneq.com Olarinluoma 9, 02200 Espoo, Finland Contact us about a demo on your products!
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- 28. by knowing ourcustomers’ needs. Add value as a caring community. Make it together one step at a time. Keep improving and encourage others to learn. Stay curious To fulfill our mission, we: www.beneq.com | +358 9 7599 530 firstname.lastname@beneq.com Beneq is the home of atomic layer deposition. In 1984, we established the world’s first industrial production using ALD. Today, we lead the market with products for R&D (TFS 200, TFS 500, R2), semiconductor device fabrication (Transform®, Transform® 300, and ProdigyTM), 3D and batch production (P400A, P800, P1500), ultra-fast spatial ALD (C2R), and roll-to-roll ALD (Genesis).