Nippon Pulse presentation what is nanopositioning

What is Nanopositioning ?

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Precision In Applications
Required
Approximate Comparative
Positioning Activity Precision
Dimension
(Micrometers)

Automobile Chassis Assembly 1000 Thickness of a dime

Electronic PCB Assembly 100 Thickness of paper

Typical Machining Tolerances 10 Diameter of small cell
Read/write heads in disk drives 1 Wavelength of light
Critical dimension of newest
Scanning Interferometers 0.100 (100 nm)
computer chips
Biological Cell micromanipulation
Critical dimension of newest
Adaptive optics 0.100 (100 nm)
computer chips
Optical fiber alignment
Microlithography
0.010 (10 nm) A Few Widths of a Molecule
Hubble Space Telescope Sold & Serviced By:

Integrated Circuits Inspection 0.001 (1 nm) A Few Diameters Of Atoms Toll Free Phone: 877-378-0240

Thin-Film Surface Coating
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0.0001 (100 pm) A Single Atomic Layer www.servo2go.com

Exactly what is a Nanometer?
• One billionth of a meter - 1,000,000,000
• Water molecule > 1 nanometer
• Typical germ ~ 1000 nanometers
• Human hair ~ 100,000 nanometer
• Carbon Nanotube = 1 nanometer wide

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Nanopositioning Requirements
What is the Client’s understanding of
their Nanopositioning application?

1. Accuracy
2. Precision
3. Resolution
4. Smoothness
5. Constant Velocity Scanning
6. Repeatability
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Nanopositioning Requirements
Motion Control Applications must be:
1. Predictable
2. Verifiable
3. Controllable

Design Considerations:
• Accuracy
– Stiffness
– Environment Sold & Serviced By:

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Design Considerations

• Accuracy

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Accuracy
Accuracy vs. Precision
• Accuracy doesn’t mean Precision

• Accuracy represents the ability to get
closest to a defined point.

• Precision is the ability to execute a
move and return to the same point
(regardless of accuracy).
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Accuracy
Accuracy vs. Precision

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Accuracy
Resolution
While Resolution is not Accuracy…

It is part of what makes up
Accuracy

Two parts of Resolution
1. Electrical Resolution
2. Mechanical Resolution
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• Accuracy
– Stiffness

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What Exactly is Stiffness?

M
O

OT
RV

OR
SE

STIFFNESS

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Stiffness

M
O

OT
RV

OR
SE

STIFFNESS

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Stiffness
Six Degrees of Error Freedom
Encoder Resolution doesn’t define the
Accuracy of a Complete Machine
1. Pitch
2. Roll
3. Yaw
4. Flatness
5. Straightness
6. Scale
The combined interacting effects of all contributing
factors must be analyzed before total system
precision can be determined. Sold & Serviced By:

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Stiffness
Six Degrees of Error Freedom

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Stiffness
Mounting / Drive location

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Stiffness
Servo

• Servo Stiffness
– Bandwidth
• Servo sampling rate for current & position loops

– Encoder resolution

– Mechanical Stiffness
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Stiffness
Motor

• Motor Stiffness
– Mechanical stiffness

– Ability to respond to commanded motion

– Flux pattern (Magnetic Servo)

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• Accuracy
–Stiffness
–Environment

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Environment
Other Error Causing Factors
• Thermal expansion errors
• Abbé offsets
• Feedback Position
• Cosine errors
• Lost motion
• Orthogonality
• External forces
• Viberation
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Environment
Thermal Expansion Errors

Thermal expansion coefficients of motion
elements must be considered when
selection high-precision platforms.

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Environment
Abbé Offsets
Abbé errors result from a positioning measuring
device (typically a linear encoder) being offset
from the point of work (end-effector)

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Environment
Position Feedback Control Schemes

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Environment
Cosine Errors

Cosine errors occur when a positioning
feedback scale is not in perfect parallel
alignment with the motion of the
moving carriage.

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Environment
Lost Motion (hysteresis)

• Any system that reacts and recovers
differently when varying directional
forces are applied will exhibit lost
motion.
– Ballscrew backlash

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Environment
Orthogonality

Orthogonality – The degree to which
stages are aligned with their motion at
right angles to one another.

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Environment
External forces

• Side Loading

• Motor resistance

• System harmonics Sold & Serviced By:

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Vibration – Nearby Conditions

• Other machinery

• Road traffic

• Building sway
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Nippon Pulse presentation what is nanopositioning

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