1. Understand principle of microsystems and feed back systems
Know the different methods of micro fabrication.
Enhance his knowledge in semiconductor manufacturing processes
Introduction& Micro Fabrication
Introduction to Micro System design, Material properties, micro fabrication
technologies. Bulk Processes – Surface Processes – Sacrificial Processes and
Bonding Processes – Special machining: Laser beam micro machining –
Electrical Discharge Machining – Ultrasonic Machining – Electro chemical
Machining. Electron beam machining.
Semi-Conductors Manufacturing
Basic requirements – clean room – yield model – Wafer IC manufacturing –
feature micro fabrication technologies – PSM – IC industry – New Materials –
Bonding and layer transfer – devices – micro fabrication industries.
TEXT BOOK
Sami Franssila, “Introduction to Micro Fabrication”, John Wiley and sons Ltd.,
UK, 2004, ISBN: 978-0-470-85106-7
REFERENCES:
Madore J, “Fundamental of Micro Fabrication”, CRC Press, 2002
Mark J. Jackson, “Microfabrication and Nano manufacturing”, CRC Press, 2006
Peter Van Zant, “Microchip fabrication”, McGraw Hill, 2004
