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4. ABSTRACT
Patch clamp is a well-developed lelectrophysiological recording
technique used to study ion channel function and regulation. The
conventional method of performing patch clamp technique employs a glass
micropipette onto the cell by manual manipulation. Despite this technique
is extremely sensitive and information-rich, but requires a highly-skilled
operator and is limited in throughput. Voltage clamp that determine the
behavior of the ion channel conductances responsible for the generation of
the action potential is the another method to record the flow of ionic current
across the cell membrance. The method is held a constant membrane
potential while the ionic current flowing through the membrane is measured.
The thesis presents cell-platforms and etcing pores on silicon by using
soft lithography and etching technique insteading of conventional glass
micropipette recording method. we successfully demonstrated practicability
of the process by the cells adhered on the platform and the etching pores on
the silicon chip by using ICP. The less laborious manipulation time saving
and high sampling throughput will be expected .In the future, we can
automatically real time controlled and changed in response to the cell’s
physiologic characteristics measured by ionic channel activities.
Keyword MEMS Patch clamp Voltage Clamp Soft lithography ICP
II
48. (Oxidation)
(oxidation) (SiO2)
(mask)
SiO2 10~20Å
SiO2 600
(thermal oxidation)
SiO2 56
SiO2 Wet Oxidation
Dry Oxidation
Si s + O2(g →SiO2 s ( 3.1)
Si s +2H2O g →SiO2 s + 2H2 g ( 3.2)
34
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