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ES176 Austin_R_Sams_Final_Presentation.p
1. Smart Projectiles:
Using MEMS Accelerometers to
Capture and Examine Arrow
Behavior
Austin R. Sams
ES 176 Final Project
Harvard University
2. Problem Statement
• Limited options for collecting arrow flight data
• Current methods:
– Expensive
– Inaccurate
– Disrupt normal flight dynamics An accelerometer attached
externally to an arrow shaft.
[1]
3. Solution
• Capacitive MEMS
accelerometer attached to a
normal arrow nock
– Compatible with all arrows
– Usable by professionals and
recreational archers alike
– Low weight and placement
minimizes flight disruption
– Minimal material and
fabrication cost
– Comb formation ensures
reliable measurement
Port for
charging
and data
collection
Normal
arrow nock
MEMS
accelerometer and
electrical
components
7. Device Measurement
• Fixed voltage applied to metal
combs
• Current = Signal
• Collected via connection
to yellow metal comb shown
in cross section
• Mass is removed from
mobile comb
(orange) to calibrate
Metal
Silicon
Silicon
tethers
[2]
8. Summery
• Capacitive 3-axis comb accelerometer
• Attached to nock
– Accelerometer fits inside arrow shaft
• Measures forces experienced by arrows
• Data used to perfect technique
• Manufactured primarily with silicon and metal
9. Achievements
• Unimpeded flight dynamics
• Improved Measurement Accuracy
– Calibrated for accelerative forces experienced by
arrows
• Unprecedented compatibility
– Archer can place and reuse the device in any
arrow
10. References
[1] http://www.gcdataconcepts.com/images/setup1.jpg
[2] http://ic-garden.cn/wp-content/uploads/3-axis-Accelerometer.png (With edits)
[3] Zhang, D., & Wei, B. (2017). Advanced Mechatronics and MEMS Devices II. Cham: Springer
International Publishing.
[4] http://www.gracey.co.uk/downloads/accelerometers.pdf
[5] F. Chollet, H. Liu, A (not so) short introduction to MEMS (http://MEMScyclopedia.org/
introMEMS.html (18.2.2008))
[6] Andrejašicˇ, M. (2008). MEMS ACCELEROMETERS. Lecture presented at the University of Ljubljana.
[7] Habbal, F. (2017, November). Capacitance Sensing and Actuation. Lecture presented in Harvard
University.
[8] http://www.analog.com/en/products/MEMS/accelerometers/adxl346.html#product-overview
[9] Donahoe, R. V., Vcelak, J., Sabin, P. C., & Avis, J. E. (2015). U.S. Patent No. 9,005,057. Washington, DC:
U.S. Patent and Trademark Office.
[10] Frequenztechnik, M. (2001). Piezoelectric Accelerometers: Theory and Application. Retrieved
from http://www.gracey.co.uk/downloads/accelerometers.pdf
[11] Meyer, H. O. (n.d.). Applications of Physics to archery. Retrieved November 6, 2017, from https://
arxiv.org/pdf/1511.02250.pdf
Editor's Notes
1 Wash the wafer
2 Apply photoresist
3 Apply mask
4 Develop photo resist (PR)
5 Etch Si using ion mill etching
6 Remove PR
7 Repeat steps 1-4
8 Deposit Nitride
9 Remove PR
10 Repeat steps 1-4
11 Deposit Metal
12 Remove PR
13 Repeat steps 1-4
14 Etch using deep RIE Etching
15 Remove PR
16 Repeat steps 1-4
17 Etch to remove Nitride
18 Remove PR
19 Rotate wafer 90 degrees
20 Repeat steps 1-18