Kensington provides wafer handling robots and precision motion control solutions to help customers maximize productivity and profits. The EFEM system is a configurable subsystem that can be used in various semiconductor processing applications like metrology, wafer processing, and lithography. It uses the BOLTS interface to handle different wafer sizes and substrate shapes. Kensington is committed to providing reliable and innovative robots and stages with a guarantee on every product.

2. Kensington’s success is connected to the success
of our customers’ business. That’s one of the
reasons why so many companies count on
Kensington for a comprehensive, customer-
focused approach that helps them maximize
productivity and profits with wafer handling robots
and precision motion control solutions, stages.

3. EFEM is an integrated sub-system for a wide range of
semiconductor process applications, and had been
deployed in the following applications areas Metrology;
Dry Wafer Processing; Wet Wafer Processing;
Lithography; Wafer Level Packaging. The EFEM is
configurable for different wafer sizes as well as different
substrate shapes and formats while using the BOLTS
interface.

5.  Unibody frame for simple and sturdy foundation
 Configurable using Kensington full line of Multilink Robots, Pre-
Aligners and FOUP Load Ports
 SEMI Complaint and CE Certified
 Three sizes – 2 FOUP Wide, 3 FOUP Wide and 4 FOUP Wide
 BOLTS interface for ADO as well as alternative substrate
handling platforms
 Class 1 Cleanliness
 Options
 BOLTS interface for non-wafer applications
 BOLTS interface for small wafer applications
 Chemical Filtration
 AMHS Options
 Programmable lights, light tower and buttons

6. Kensington is committed to
providing the most reliable and
innovative wafer handling
robots and precision motion
control stages, we put or
guarantee on every product we
touch.

7. EFEM Configurable For A Wide Range Of
Semiconductor Substrate Processing Applications

8. Sales – Kensington Robots
& Stages, Newport PM500
Stages, Spare Parts
sales@kensingtonlabs.com
Service - Kensington robot
and stage repairs, Newport
PM500 stage repairs
service@kensingtonlabs.com
Kensington Laboratories, LLC
6200 Village Parkway
Dublin , CA 94568
Phone: 510.324.0126
Fax: 510.324.0130
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800