Short portfolio for LV tailoring Software company.

1. LV tailoring software portfolio 4/20/2010 1 LV Tailoring Software Semiconductor and Medical industry projects

2. 4/20/2010 2 LV Tailoring Software ARM retical cleaner modification for variable pressure based PR: PC ARM retical cleaner modification for variable pressure based PR: Flexible RT system allowing fast tracking of tool robotic arm position and switching mask cleaning pressure accordingly (20 to 60 psi). System was implemented in order to support mask cleaning quality issues. Configuration: 1. Nozzle proximity switch – trigger for image acquisition. 2. USB camera connected to Labview based program looking for distinctive pattern. 3. Pattern acquisition success – LTP port send triggering to smart valve to 60 psi 4. Pattern acquisition failure – LTP port send triggering to smart valve to 20 psi Introduction of the system reduced head count N-3 and increased throughput 4 times.

3. Advanced matching in CDSEM metrology Tool/layer CDSEM qualification matching procedures are strict – 1nm for critical layers at line, space and pitch measurements for 65nm and up modes. Significant feature roughness as result of CD size reduction will decrease repeatability of the measurement and impact of measurement gate placement will be exclusively high, which is complicate comparison matching procedures. Common way to deal with listed above restrictions is to increase measurement set or….. just through away non correlated parts of scanned images - our approach giving possibility to detect non correlated scans and exclude them from overall measurement result. 4/20/2010 3 LV Tailoring Software Advanced matching in CDSEM metrology

4. Typical example of no correlated scans for Poly lines On the top we could see correlation function shift which could easily compensated to increase "true" measurement precision. 4/20/2010 4 LV Tailoring Software Advanced matching in CDSEM metrology

5. 4/20/2010 5 LV Tailoring Software Resolution Monitor for CDSEM Resolution Monitor for CDSEM Resolution estimation approach based on image processing techniques involved spatial transforms, spectral FFT and basic morphology operations. As mean for image sharpness (resolution) estimation chosen a STP carbon targets attached to every CDSEM toolset, used for beam alignment procedure. 1. High density of the targets and relatively high resemblance virtually permit us to perform statistic sampling on non unique targets - thus remove charging impact. 2. Second stage require FFT transform of the images to define spectral distribution. 3. Low pass filter applied for high frequency noise reduction 4. Applied threshold turns 8 bit image to binary one in order to allow morphological operations 5. Basic morphology operations such as erosion and dilation require for closure of isolated regions. 6. Radius of binary circle (in pixels) will be representation of image resolution and upon conversion result could be estimated in nm, even possible astigmatism impact will be detected.

6. 4/20/2010 6 LV Tailoring Software Remote CDSEM control Center Remote CDSEM control Center Ability for tool remote control have various aspects and already widely introduced as part of full Fab automation concept. Unfortunately every manufacturer using different standards and communication solution. Here we tried to unify remote control for every tool in Clean Room environment. Our concept based on the most widely used Monitor/Keyboard/Mouse interface and we are prepared to give appropriate solution for every tool with such configuration. Our system based on the HW configuration including conventional HW video/PS2 multiplier, CAT5 remote switch, signal coder/converter to optical communication signal, fiber optic communication cable and decoder/converter to conventional format effectively replicating monitor image of chosen tool and feed back input device signals (keyboard, mouse). Development of remote central operation system based on Hitachi CDSEM completed in 2007. This concept could be transferable to any set of equipment with minimal configuration changes (Defect metrology, Labs...etc) with option to connect to Remote operation program developed by IT department. In this case significant cost saving were archived - 15% of the cost of original manufacturer.

7. 4/20/2010 7 LV Tailoring Software Remote CDSEM control Center Actual pictures from the FabX floor. As result – improved CDSEM utilization and N-1 head count reduction. Instant access outside of clean room for engineering – improvement in quality and R&D activity.

8. DSQ (MicroScan)tracer: Flexible offline system allowing fast tracking of tool setting and run parameters (DSQ). System was implemented in order to support PCS review tasks and DSQ Features: 1. SPC style presentation of tool configuration settings per tool/product/layer/parameter. 2. Possibility for creation and load from local DB for repeatable analysis. 3. Excel style output. 4. Automatic analysis for "X“ sigma violation and report. 5. Interactive help. 4/20/2010 8 LV Tailoring Software DSQ tracer

9. Implant tracer Flexible online system allowing fast tracking of Implant errors and sorting per predefined algorithm. Features: 1. Automatic save of implant assists and errors. 2. Tracing of the recipes impacted by related errors. 2. Loading data from shared lcsamba.lc.xxxxx.comusc_logsmp server. 3. Excel style output. 6. Created in framework stile - allowing easy migration for other areas. 4/20/2010 9 LV Tailoring Software Implant tracer

10. QML tracker Flexible online system allowing fast tracking of QML errors and sorting per predefined parameters as well as mail notifications per configured requirements. Features: 1. High resolution of error tracking - name and count per predefined time range. 2. Loading data from shared QML server HD. 3. No maintenance - plug and play, simple reconfiguration with adding/subtracting tools and mail recipients. 4. Sending mail notification about occurred errors in tools daily. 6. Created in framework stile - allowing easy migration for other areas. 4/20/2010 10 LV Tailoring Software NSO_NSJ_Golden files comparison tool QML tracker NSO_NSJ_Golden files comparison tool Flexible online system allowing fast tracking of tool setting and comparison with golden one. System was implemented in order to replace historical tracker with no longer support from IT. Features: 1. Comparison of setting files of the stepper with golden one and matching comparison of setting files between steppers. 2. Loading data from tools (NSO and/or NSJ) per required configuration. 3. No maintenance - plug and play, simple reconfiguration with adding/subtracting tools and mail recipients. 4. Sending mail notification about differences in tool setting files daily. 5. Created in framework stile - allowing easy migration for other areas.

11. Polyimide log file analyzer/real time EP system Interactive PC based SW commutating duration of the process stage in the tool in real time and flagging if Queue-time exceeded defined by user thresholds. Main targeting – spin/develop defects. Algorithm, developed for SW used as prototype for real time EP system which was successfully developed and implemented. Features: 1. Possibility to use SC logs to monitor Queue-time of lot in real time 2. Possibility to use SC logs to monitor Queue-time offline (post analysis) 3. Possibility for define flexible thresholds per station. 4. Online/Offline alarm generation and possibility to download it to Excel. 5. Possibility to activate sound alarm.... 4/20/2010 11 LV Tailoring Software Polyimide log file analyzer/real time EP system

12. CMP log file alarm/warning analyzer– interactive PC based SW downloading alarms/warnings from CMP tools as well as from related station controllers and performing Pareto calculation per defined by user key words. Features: 1. Possibility to analyze SC logs. 2. Possibility to analyze CMP tool logs. 3. Possibility to download alarm/warning in Excel format. 4. Possibility to perform Pareto analysis per chosen by user keywords. 4/20/2010 12 LV Tailoring Software CMP log file alarm/warning analyzer

13. Advanced CDSEM NPI system Flexible offline system allowing fast creation of the New Product Class for CDSEM tool in very restricted time. System was implemented in order to support expected high loading for NPI type 1 and possible migration of current system out of FabX. Features: 1. Creation of full NPI CDSEM class in 2 minutes ( prerequisites (Alladin*.xml, *_fab.txt, Image templates in the tools and process definition file) should be ready prior to run of the program). 2. Distribution of class to every tool in CR. 3. Bug fix (1x1,2x1) of current NPI system. 4. Possibility to load in die coordinates. 5. Possibility to analyze possible errors. 6. Possibility to create NPI from home. 7. Visual representation of created product ( necessary help for sample plane creation and adjustment) 4/20/2010 13 LV Tailoring Software Advanced CDSEM NPI system

14. Advanced Overlay NPI system Flexible offline system allowing fast creation of the New Product Class for Overlay tool in very restricted time. System was implemented in order to support expected high loading for NPI type 1 and possible migration of current system out of FabX. Features: 1. Creation of full NPI Overlay class in 2 minutes ( prerequisites (tapeout*.xml,) should be ready prior to run of the program). 2. Distribution of class to every tool in CR. 3. Flexible configuration (1x1,2x1,2x2 steppers). 4. Possibility to load in die coordinates. 5. Possibility to analyze possible errors. 6. Possibility to create NPI from home. 7. Visual representation of created product ( necessary help for sample plane creation and adjustment) 8. Sampling plan optimization. 4/20/2010 14 LV Tailoring Software Advanced Overlay NPI system

15. WET support system based on Tadin Application Flexible online system allowing real time tracking of AWB tools and instant log of error events. System was implemented in order to support activities in Quality control in WET area. Features: 1. Online tracking of AWB tools with visual representation (replication of TadinAnnunciator). 2. Allow Error tracking. 3. Allow log of activities by technician per errors 4. Allow definition, logging activities and tracking of severe errors (could be incidental or coincidental) 5. Possibility get RFC per every error - no additional system needed. 4/20/2010 15 LV Tailoring Software WET support system based on Tadin Application

16. Archer(KLA) to Biorad LRD overlay converter Flexible support offline system allowing fast conversion of LRD ARCHER(KLA) data to format of Biorad overlay tool. Developed for REG metro group FabX Features: 1. Conversion of GER Raw LRD data file to RT format. 2. Flexible sorting (Fields, Sites) by X or Y scan by ascending or descending order. 3. Flexible automatic tool/test support (NSJ,QML/SLOT,SCAN...) 4/20/2010 16 LV Tailoring Software Archer(KLA) to Biorad LRD converter

17. Dry Etch flexible recipe tracking system Flexible offline system allowing fast tracking of recipe setting and sorting per predefined parameters. System was implemented in order to support multiple recipe run project in Oxa area FabX Features: 1. Creation local database for repeatable search. 2. Loading data from lcsamba.lc.xxxxx.comisc_logsxa....dnt.txt or from local DB created earlier. 3. Extensive search capabilities including multiple parameters search per logical operation (And or Or) 4. Sending parsed data to Excel. 5. Created in framework stile - allowing easy migration for other areas. 4/20/2010 17 LV Tailoring Software Dry Etch flexible recipe tracking development

18. CDSEM flexible recipe health error tracking system (SATI). Flexible offline system allowing fast tracking of recipe failures and sorting per predefined parameters. Features: 1. High resolution of error tracking - option for failure per measurement point implemented - significant addition to original specifications. 2. Creation local database for repeatable search. 3. Loading data from CDSEM tools - independent from SC. 4. Extensive search capabilities including multiple parameters search per logical operation (And or Or) 5. Sending parsed data and Graph for error distribution to Excel. 6. Created in framework stile - allowing easy migration for other areas. 4/20/2010 18 LV Tailoring Software CDSEM flexible recipe health error tracking system.

19. Focus Monitor New approach for monitoring of the Dose and/or Focus in Litho area – switching from traditional CDSEM metrology concept to CDSEM morphology. Detailed explanation of the project in presentation, as well as findings and next steps. SW application developed in order to confirm and validate approach. 4/20/2010 19 LV Tailoring Software Focus Monitor

20. 2D data analyzer Labview Tailoring software present product for processing Nexygen batch files as well as any 2D measurement files stored in the form of *.txt databases. One of the major advantages of LVTS design is ability for Multi Signal Graph representation of the 2 dimensional data and on-fly interactive analytical operation based on extraction of the extremes values and mathematical computation of the all related parameters (areas, ratios, etc.. and all their derivatives). 4/20/2010 20 LV Tailoring Software 2D data analyzer

22. Interpolation type

23. Points visualization

24. Axis definition

25. Unrestricted addition of cursors and their basic representation User capable to load unrestricted amount of data .Load the data performed by Pressing Load button and all required for representation channels could be chosen in Select channels for view window. By choosing “File” or “Folder” user have possibility to load populated *.txt folder or review just one file at a time. Mathematical Engine: Mathematical engine for LVTS data mining SW based on determination of the Peaks and Valleys of the function. For any represented of data set we need to define points of interest (minimum and maximum of the function) and let the program know which one of them are used in calculation and what kind of math transformation required to receive required result. The process of definition of the “rule set” we called recipe creation. Recipe in our program based on simple .txt file You could create the recipe by simply filling points of interest or their derivatives (areas, ratios and any other standard mathematical operation) into form of equation. Then you saving it and the program are ready to apply certain “rule set” on the 2D data array. By carefully reviewing expected points of interests in the process of recipe creation you choose required parameters. For example we need to extract value of the function at first maximum and integral (area) between first and second local maximums. In this case we have 2 independent sets of equation - first representing initial local maximum and second – area between first and second local maximums. Please refer to listed below examples for clarification. Program automatically defines 6 type of point of interest: Amplitude of the valley (local minimum), time of the valley and it’s 2’nd derivative. Same operations with peaks (local maximums). You also could define areas in the recipe (including partial areas between extremes). Upon calculation of the 2D data by applied equation, you are getting results data which could be easily review in SPC or Box plot form. It is also possible to apply statistical tests (Z-test and T-test) to check the validity of results. Limits definition – for validity check of received results you could define UCL and LCL I the recipe as well as give the program to define limits using auto calculation based on sigma value the obtained results (any multiplier of sigma). Another important part of the mathematical engine is preprocessing – by defining the max value of requested extremes you could effectively filter unrelated noise of 2D function. Also you could define the effective filtering window for extreme calculation. Report generation: By performing all mathematical calculation it is possible to create standardized report which could include all related data and images. You need just to fill up the necessary batch information and add the comments. Report will be stored in .html format. User have full command on allowed fields except result representation and Pass/Fail flag which is defined as statistical limits in recipe or automatically computed from data sequence. We have full flexibility in data report creation and representation, additional templates could be suggested by customer. 4/20/2010 21 LV Tailoring Software 2D data analyzer

27. UCL/LCL could be defined from recipe or alternatively by sigma calculation of result data set with manual multiplication (n*sigma).

28. Mean and Sigma representation

29. Bar charts for each result.

30. Statistical T-test.

31. Statistical Z-test.

32. Flexible result representation – you could put just one set of result on Graph or Multiple set of result from Select result to view window.

33. Important feature - possibility to use totally different set of data an result processes by different recipes just by pressing Hold button – so you could multiply graph representation and represent it in the same report. 4/20/2010 22 LV Tailoring Software 2D data analyzer

34. Solid State Device Tester In this project we archived interactive control over Solid State device (MOSFET transistor) through GPIB communication over 2 Agilent power supply sources and Keithley power generator. Simulating various transistor modes system are capable to log output data up to 1 ksamples per sec and represent signal (Ids) in real time. 4/20/2010 23 LV Tailoring Software Solid State Device Tester

35. Defect Classifier Purpose of this project is archive some level of automation in defect classification routine. All defect classifiers existed on the market has limited capabilities in process defects recognitions due to the fact that existed hierarchy in Defect Metro based of diversification of the process issues, not necessary visual representation of the defect itself. Here we tried to combine visual classification approach with the fact that not just defect itself but it's surrounding are vital to classify inconsistency according to process requirement. 4/20/2010 24 LV Tailoring Software Defect Classifier

36. Thank you for your attention 4/20/2010 25 LV Tailoring Software