Targetry capabilities at Scitech precision ltd

1. MICROTARGETS FOR HIGH POWER LASER
SYSTEMS

2. INTRODUCTION : SCITECH PRECISION LTD
• Scitech Precision: a spin out from STFC
Innovations
• Access to all of STFC Central Laser
Facility equipment and expertise
• 3 key business areas
• Laser micro targets
• Laser micro machining
• Phase plates
• Building targets for groups all over the
world

3. • High specification targets – complex 3D assemblies
• Hohlraum, cone, polar, shock geometries
• More than one target per shot
• Backlighters/Proton probes
• Specific alignment features and procedures
• Materials challenges (foams, diamond etc.)
• Pre-campaign proof of concept targets for other facilities
• Cryogenic targets
• High repetition rate target production and insertion
• Standard approach to specification planning, and delivery across groups
SCITECH PRECISION SOLUTIONS FOR RESEARCH AND DEVELOPMENT
Image: High micron backscattering image

4. SCITECH PRECISION: 40 YEARS OF TARGET PRODUCTION
• Scitech Precision is unique in Europe
• The only company offering a fully commercial service in target production
• 40 years experience in the production of complex high power targets
• Providing thousands of targets every year for groups on site
• And… for the needs of visiting researchers from the EU, USA and Asia
• Scitech has deep in house knowledge and experience in:
• Target design
• Micro engineering
• Laser microprocessing
• MEMS techniques
• Material deposition – PCD/CVD/ALD…
• Low density materials
• Phase plates
• Comprehensive metrology guarantees our target quality
Image: Expanded view of a indirect drive ICF target

5. SCITECH PRECISION LTD – SOME OF OUR CLIENT
COMPANIES

6. P1-1014-CS ELI-NP Target Fabrication Laboratory. Wednesday 29th October 2014. ELI-NP
Micro-assembly
SPECIFIC CAPABILITIES
Low-density materials
MEMS
Characterisation
Research and
Development
Project Planning
Material Deposition –
PVD/CVD/ALD …
Quality Control
Micro-machining
Target Design

7. MICRO-MACHINING
• Ultra precision CNC
• Surface roughness < 1µm
• Batch production of components for high rep rate
experiments
• Diamond point turning for ultra high precision
surfaces
• <50nm Ra
• Periodic structures for gratings etc.
• Bespoke lathes and mills for target development
• Jigs, fixtures, proof of concept
• Wire erosion
• Machining of hard materials, Ta, W etc.
• Complex geometries

8. WET CHEMISTRY AND LOW DENSITY
• Electroplating
• Component productions
• High quality on micro-structures
• Dip Coating
• Target Production <10nm
• Range of materials and geometries
• Etching (Wet)
• Target component production (MEMS)
• Mount and support production
• Low-Density Materials
• CH based foams for HRR
• Aerogels
• Low density metal foams

9. • Wide variety of materials can be processed
• Metals (Stainless Steel, Copper, Brass, Aluminum)
• Silicon, Ceramics, glass, polyimide
• Almost any shape hole can be machined
• Up to 500m thick in most materials (>2mm in some)
• High speed, little debris and small heat affected zone
• Flexibility of CAD-CAM allows rapid prototyping
and small batch manufacturing
• Enables complex mask manufacture for Excimer systems
LASER MICRO-MACHINING
Pyrolytic Carbon Kalrez® (Dupont)
Copper Targets

10. LASER MICRO-MACHINING
Laser Machined Aerogel (115m thick)
Industrial applications
• MEMS prototyping
• Wafer cutting/ scribing/ drilling (Si, Sapphire,
SiN)
• Circuit tuning, scribing and microvia drilling
• Probe card drilling
• Fuel injector drilling
• Solar panel and cell scribing
• Displays thin film scribing
• Aerosol atomizer drilling
• Gas sensor drilling
• Fibre stripping, cleaving & tip
lensing
7um square holes machined in glass 1000’s of holes /second

11. MICRO-ASSEMBLY
• Either manual or semi-
automated assembly for a wide
variation of target designs
• Bespoke jig design for complex
3D targets to ensure high
repeatability and ultra precise
assembly
• Advanced automated assembly
requires a very sophisticated
multi-axis manipulator or
robotic cluster

12. THIN FILM DEPOSITION
• Physical Vapour Deposition (PVD)
• Chemical Vapour Deposition (CVD)
• Co-deposits – planetary interior studies
• Thin carbon films – oncology experiments
• Thin metal foils – proton probing of samples
• Complex multilayers – broadband X-Ray
Backlighters
• Co-deposit and complex multilayer capabilities
• 4” wafer coating capabilities for MEMS
processing

13. MEMS - TARGET PRODUCTION
• A dedicated cleanroom complex ~2500 m2
• A complementary range of high precision lithographic
tools
• Mask production, alignment and pattern transfer
• Optical and E-beam lithography
• Thin film deposition equipment
• Etchers (especially deep reactive ion etching)
• High quality characterisation equipment
• AFM
• SEM
• Ellipsometry
• Contact angle measurement

14. • Beam shaping and profiling optics – “top hat” annular etc
• High damage thresholds for high power systems
• Custom plates for different: wavelength, beam diameter and required focal length
• Anti-reflection (AR) coatings to reduce transmission losses, eliminate unwanted, potentially harmful,
back-reflections.
• Coatings for phase plates, plain windows and lenses in two variants:
• Teflon-based technology - vacuum compatible
• Colloidal silica variant - atmospheric use
• Optics maximum - 300 mm in diameter
• Optical coatings - wavelengths from 200 nm to 1900 nm.
PHASE PLATES – PROFILING AND COATING

15. 4th PLAS@PAR Industry Day: Hot Plasmas & Diagnostics. October 21, 2016, Paris
CRYOGENIC TARGETRY
• Designed to provide thin film hydrogen and
deuterium targets
• Target formed in a removable growth chamber
• Mass flow controlled gas delivery system
• Temperature and pressure controlled to allow
transition through gas-liquid-solid phases

16. 4th PLAS@PAR Industry Day: Hot Plasmas & Diagnostics. October 21, 2016, Paris
Micro Injector Robot
• Low density foam targets are used to
study ion acceleration. Here arrays
are used with 36 targets per mount.
• The thickness of the foam is vitally
important and therefore the quantity
of liquid dispensed has to be precise.
This machine saves a lot of time:
• producing 720 targets in 30mins.
• The needle drops until it touches the
mount, creating a closed circuit
alerting the robot that the tip has
touched the mount. The fill
procedure then begins just 50µm
above the mount.

17. CHARACTERISATION AND QUALITY ASSURANCE
• Optical Microscopy
• Scanning Electron
Microscopy
• EDS, BSE, EBSD,
FIB
• Atomic Force
Microscopy
• White Light
Interferometry
• Confocal Microscopy
• Touch Probes
• Co-ordinate
Measuring Machines
• Optical
• Tactile
• X-Ray Diffraction
• X-Ray Fluorescence
• TERS
Co-ordinated Metrology Techniques:

18. • With dedicated cleanrooms we offer
• Laser micro targets, Laser micro machining, Phase plates, MEMS technologies
• High throughput target equipment
• Advanced metrology and characterisation in house to guarantee quality
• Phase plates for beam profiling
• MEMS processing for targets and other applications
• Laser micro machining offered commercially
• Lasers: 1064nm, 355nm, and Excimer
• Scitech Precision also:
• Work collaboratively to develop novel and unique target solutions worldwide
• We also offer Student, and PhD training
IN SUMMARY - EXPERTISE IN MULTIPLE TECHNOLOGIES
Image: Advanced fast ignition cone