2. www.NanoScopeServices.co.ukNanoScope Copyright 2015
The NanoScope Intro
Depth of knowledge and experience
Career microscopy vendor specialists in FIB (focused ion beam), SEM (Scanning
Electron Microscopy) and TEM (transmission electron microscopy) and support
techniques for Semiconductor applications.
We ran the EU service labs for FEI Company and Micrion Corporation since 1993 and
independently as NanoScope since 2005.
>95% 1st time success rates every year – if it will yield less we’ll tell you BEFORE beam
down. We know what the ‘best’ looks like as we are the engineers the vendors used to
give their training courses.
Bristol based – EU wide and now Israel
Unique Live Microscopy over-the-web capability for cost/time/documentation savings.
Fast turnaround, complex issues with high service are our prime services
An independent European supplier of expert, fast-turn
Nano-Surgery & Advanced Microscopy enabled support services
3. www.NanoScopeServices.co.ukNanoScope Copyright 2015
Who do I call? the options are…
Test House
‘Semi’ mindset/ high
focus/ quick support
Generalists/users/
customers
Easy escalation – in
house or partner
But.
Expensive (you’re in the
building)
Yield?
Technologist
‘Semi’ mindset/ high
focus/ quick support
EXPERT – tools and
techniques
Easy escalation – in
house or partner
Less expensive – you
only get what you
need.
Better yield, shorter
time to result
Better phone book
University
‘Teaching’ mindset
User or even ‘learner’
Limited escalation
possible
Can be inexpensive
Slow (1-2 weeks)
Some ‘older tools’
4. www.NanoScopeServices.co.ukNanoScope Copyright 2015
Shorten your development time and
reduce your risks and your costs
World class results, supplied by the hour – just when you need them
For Chip Designers needing urgent layout/verification design changes
prove your mask change before tape out - “Your 1st Silicon Emergency Service”
For Production Engineers out of spec and in a hurry
Support your SEM with exact site, 3D process metrology in <18 hours - ‘QwikQual’
For Failure Analysts we offer a suite of expert techniques
FIB and Microscopy enabled ‘FA Services’
For High-end materials/contamination/failure issues
our exact-site analysis technique escalation process -‘Right on Target’
For Reliability Engineers reducing costs and meeting compliance
simple cost reduction service -‘Low Cost Pre-Conditioning and MSL level testing’
with a seamless ‘full Reliability menu option’ via our partner to follow
6. www.NanoScopeServices.co.ukNanoScope Copyright 2015
Shortening time to market
Reducing risk
For verifying and localising a problem – electrical debug
Adding probe pads for electrical debug/fault-finding on a new design
For verifying a metal fix
Confirm design revisions after 1st Silicon (1st time right guarantee)
Prove a mask change before committing $$$’s and months to mask
changes.
Go for small lots - for board/customer tests while waiting for new silicon
Even 10’s of devices – missed a ship date? how about sending 20 devices
now?
What’s the yield going to be? After 20 years of circuit edit we offer a yield
prediction and a confidence interval. Get the right answer for the right budget
in the right time.
Below 28nm’s mask costs are likely to > double – ‘dual patterning’ or ‘triple
patterning’ – EUV will not be ready for 2 years (min)
7. www.NanoScopeServices.co.ukNanoScope Copyright 2015
Shortening time to market
Unique capabilities available
WL-CSP & RDL through-edit capability
Ultra-low /long copper track deposition
CSAM and
X-ray
microscopy
Check the package
De-cap and
Die checks
Check +
improve
the fix
Do the
FIX
(versions?)
Re-pass,
Encapsulate
or Globtop
Open the package
Check and
follow up
Rapid
Redo?
-till result
Close the package
“Your 1st Silicon Emergency Service”
Do the best fix No failures
9. www.NanoScopeServices.co.ukNanoScope Copyright 2015
Rapid process qualification data
Unique location 3D process metrology data for accelerating
process ‘ramp up’ or for customer qualifications.
Its got to be
• FAST
• Independent
• From the right location
• Correct (Accurate)
• Referenced to traceable standards
• Reasonably priced
How do I do that?
• BEFORE – Sign up to our ‘QwikQual’ service (agreed PO limits, NDA’s etc)
• TODAY
– FIRST Ship the sample to us to arrive at NanoScope just after 8am – not before (or before 5pm
for next day work) 2 sections max. Call us for taxi or bike courier contacts
– SECOND – Email us your sectioning job instructions (guidelines on website) and telephone us
to advise that there is a project arriving. (dedicated number)
• TOMORROW
– We run the job before ‘start of day’
– results emailed to you before 10AM
• AFTERWARDS
– PO – draw down to agreed limit
• You can watch on the web with ‘LiveFIB’ if you want.
11. www.NanoScopeServices.co.ukNanoScope Copyright 2015
Advanced microscopy as standard
Ext Visual examination (optical) ☑
Build a test socket board ☑
Electrical testing (Basic) ☑
Xray package analysis ☑
CSAM Analysis ☑
Decapsulation (inc.Cu w/laser, polyimide, MEMS Gels) ☑
Internal Optical inspection ☑
Anti-counterfeit check (Partnered with ELTEK) ☑
FIB/SEM internal inspection ☑
Adding FIB probe pads (electrical debug) ☑
FIB Sectioning and imaging (w/wo iterative slicing) ☑
Process Metrology (inc.SI/SE imaging) ☑
SEM EDS studies ☑
FIBxTEM Sectioning and extraction ☑
TEM imaging analysis (TEM/STEM) – BF/DF ☑
TEM Xray or EELS or EFTEM elemental analysis ☑
Report ☑
Each analysis can be specified for 3
levels of detail, depending on time-line
and budget.
Basic – an initial investigation to check
specifically defined elements are in
order.
Intermediate – more in depth
investigation checking the specifics of
the product in line with the
specifications stated.
Detailed – a more involved
investigation to identify the route
cause of a specific problem.
We are happy to offer cost-free initial
consultancy to select your optimised
work flow.
13. www.NanoScopeServices.co.ukNanoScope Copyright 2015
NanoScope now offers 3, economical, turn-key reliability
services for our Semiconductor clients
MSL Evaluation
This identifies the classification level of non-hermetically sealed surface mounted solid state devices, which
may be sensitive to moisture induced stress. The basic test sequence is shown below The test is performed
to IPC/JEDEC Standard J-STD-020D.1
• Initial Visual Inspection
• 1st Acoustical Microscope (CSAM)
• Initial Bake – 24 hrs @ 125°C
• Moisture Soak – Temp/Humidity at required level
• Reflow (IR bake) X3 @260°c
• Final Visual Inspection
• 2nd Acoustical Microscope (CSAM)
• Optional written report
Device Pre-conditioning
This exposes a batch of devices to the upper limit of the MSL level specified prior to that batch undergoing
reliability testing. Pre-conditioning may use only steps 3, 4, and 5 only. The accelerated equivalent tests
are also available. Pre-conditioning is performed to JEDEC Standard JESD22-A113
High Temperature Storage
HTS is used to test for thermally activated failure mechanisms of solid state devices. The test is
performed to JESD22-A103 standard.
NanoScope acquired the MSL, Pre-con and HTS equipment from UNISEM Europe when it closed at the end
of 2013, and we are supported by the long-term experience of our ex-Unisem colleagues in delivering
these services.
Reliability
Services Pricing
MSL eval <25 devices
Price from ₤2,250
Device pre-conditioning
<250 devices
Price from ₤1,000
High Temp Storage
<250 devices
Price from ₤300
(MSL Eval and Pre-Con lots
may be combined)
14. www.NanoScopeServices.co.ukNanoScope Copyright 2015
INTRODUCING our advanced reliability testing partner
For a full turnkey service with even better savings, we have teamed up with
our close neighbour and collaborator RELTECH Ltd to offer a complete
portfolio of follow-on reliability tests.
Device Qualification Tests
High Temperature Operating Life (HTOL) JESD22-A108/JESD85
Early Life Failure Rate (ELFR) JESD22-A108/JESD74
Low Temperature Operating Life (LTOL) JESD22-A108
Non-Hermetic Package Qualification Tests
Temperature Humidity Bias (THB) JESD22-A101
Biased Highly Accelerated Temperature & Humidity Stress (HAST) JESD22-A110
Unbiased HAST (UHAST) JESD22-A118
Temperature Cycling (TC) JESD22-A104
All projects are completed to JEDEC Standard JESD47.
For customers booking MSL, HTS or Pre-con services with NanoScope who would like to
try Reltech, we can offer you a total solution at a preferential rate, with seamless transfer
of your pre-conditioned parts directly to Reltech and return shipping directly to you.
16. www.NanoScopeServices.co.ukNanoScope Copyright 2015
Enabled by FIB
FIB enables the ability to apply escalating
sequence of techniques to a unique single feature
by selectively modifying the sample format.
Put simply – we start cheap and go up stepwise
on a single feature until we have resolved the issue
On the surface
Various imaging
techniques (SIM,
SEM, TEM, AFM)
metrology and
analysis (EDS)
FIB X Sectioning
On a site
specific cross
section
FIB TEM Sectioning
and extraction
On a site
specific TEM
section
+ Diffraction, EELS
EDS etc
18. www.NanoScopeServices.co.ukNanoScope Copyright 2015
And our ‘LiveFIB’ video conferencing, now with Optical
microscopy as well
like having your own FIB instrument or Optical
microscope and operator.
see your sample imaged live at your desk.
real time consultancy (for you) and supervision
(from you).
instant visualisation of sample issues.
time and cost savings in job preparation, and
reduced travel.
comfortable and easy - can
be done from your home
or office (you just need a
web connection).
secure and safe.
better control.
send your samples today,
watch your fix
tomorrow.
OK – Services understood… what else?
19. www.NanoScopeServices.co.ukNanoScope Copyright 2015
OK – Services understood… what else?
Depth of knowledge
MEMS, Compound semiconductors, Materials Science, Nano-Research, Nano-
Lithography, Nano-prototyping.
Continued development
Patent pending new process for TEM section polishing technique
Patent # 1411434.2 presented at MMC2014
New products
We are also developing advanced microscopy hardware
New ex-situ TEM section extraction solution launched
New ‘Ease of Use’ - shorter time to result through partnership working
Support relationship building – customer advantage
New ideas here – all input welcome
Tell us what you need – some ideas on the sheet
MEMS failure analysis
Catalytic materials
and layers
