AG Associates is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems. We are the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Processor. We are manufacturing the AccuThermo AW 410, AccuThermo AW 610, AccuThermo AW 810, AccuThermo AW 820, AccuThermo AW 830 , which are AtmosPress Rapid Thermal Processors and AccuThermo AW 610V, AccuThermo AW 820V, AccuThermo AW 860V , which are Vacuum Rapid Thermal Processors. Compared with traditional RTP system, our AccuThermo AW RTPs have the following key advantages. Unique process uniformity,system stability and consistent process cycle repeatability; Incomparable integrated process control system; 30 years proven product with thousands of customer-based installation; Customer-installation design; 2 to 4 weeks lead time guarantee; Patented Extended Range Pyrometer for precise temperature measurement; Advance AW Software with Power Summary Function; Much easy ERP Pyrometer calibration Real time GUI display; Programmed comprehensive calibration and analysis; Precise time-temperature profiles tailored to suit specific process requirement; Closed-loop temperature control with ERP Pyrometer or thermocouple temperature sensor; Fast heating and cooling rates unobtainable in conventional technologies; Elimination of external contamination; Small footprint and energy efficiency We also provide spare parts and professional technical service and support for AG Associates Heatpulse 210, Heatpulse 410, Minipulse 310, Heatpulse 610, Heatpulse 610 I desktop manual Rapid Thermal Annealing systems for end users all over the world. Please e-mail ( ) us for more information. We do not sell any used/refurbished AG Heatpulse 210,AG Heatpulse 410,AG Heatpulse 610 any more due to the linked reasons. sales@ag-rtp.com

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AccuThermo AW 410 | AccuThermo AW 610 | AccuThermo AW 810 | AccuThermo AW 820 | AccuThermo AW 830 | AccuThermo AW 610V | AccuThermo AW
Home AccuThermo AW 410 Atmosphere RTA RTP
Equipment
AccuThermo AW 410
AccuThermo AW 610 AccuThermo AW 410 is a desktop rapid thermal processor for 2 to 4 inch wafer ,which uses high-intensity, visible radiation to heat single wafer for sh
AccuThermo AW 810 at precisely controlled temperatures. These capabilities, combined with the heating chamber's cold-wall design, superior heating uniformity advanced te
AccuThermo AW 820 control technology and AW 900 new software, provide significant advantages over conventional furnace processing and conventional RTP systems.
AccuThermo AW 830
AccuThermo AW 610V
AccuThermo AW 820V
AccuThermo AW 860V
Parts
Heatpulse 210 Spare Parts
Heatpulse210 Manual
Minipulse 310 Spare Parts
Minipulse310 Manual
Heatpulse 410 Spare Parts
Heatpulse410 Manual
Heatpulse 610 Spare Parts
Heatpulse610 Manual
Heatoulse 610 I Spare
Parts
Heatpulse610I Manual Specification.
Service 1.1 Wafer Size 2 inch to 4 inch round configuration(Wafer Size 2 inch to 4 inch square is optional)
Heatpulse 210 Service 1.2 Single Wafer Process.
Heatpulse210 1.3 Aluminum chamber with water cooling and gold plating for better uniformity
Refurbishment
1.4 Extended Range Pyrometer(ERP) for high temperature sensor
Heatpulse210 Upgrade
Minipulse 310 Service 1.5 Isolated Quartz Tube for clean environment for wafer
Minipulse310 1.6 Bottom and top heating with Radiation heating lamp module
Refurbishment 1.7 Precise Temperature/Time control, Temperature measuring precision b 1b¤ C.
Minipulse 310 RTA 1.8 Multiple cycle processing capability
Upgrade 1.9 Steady Temp Range: 600b¤ C to 1250b¤ C for ERP pyrometer sensor(Optional), 100b¤ C to 800b¤ C for Thermocouple(Can not use thermoc
Heatpulse 410 Service to 750b¤ C for Si wafer due to the reaction between Si
Heatpulse 410
Refurbishment
wafer and thermocouple).
AG Associates 1.10 Steady state process time 0 to 3000 sec programmable
Heatpulse410 Upgrade 1.11 Temp Ramp-up Speed: 10b¤ C to 100b¤ C for wafer, Programmable
Heatpulse 610 Service 1.12 Ramp down speed 10b¤ C - 100b¤ C for wafer,Non-Progammable.
Heatpulse610 1.13 Pentium Computer with 17¡± LCD Monitor, standard keyboard and mouse.
Refurbishment 1.14 Software calibration and easy to be done.
AG 610 Rapid Thermal 1.15 More functions and I/O hardware ¡°exposed¡± for easier maintenance and trouble shooting.
Process Upgrate
1.16 It is easy to edit recipe with GUI and graph display.
Heatpulse 610 I Service
Heatpulse610I 1.17 Save all process data on the computer hard disk.
Refurbishment 1.18 A/D and D/A precision is 14 to 16 bits.
AG 610I Rapid Thermal 1.19 Detect in process and with color curve displayed on the screen.
Anneal Upgrade 1.20 Software has power summary function to detect either lamp failure or sensor failure.
RTA RTP RTO RTN 1.21 Software watch dogto eliminate machine damage duo to the computer locks up or freeze.
Articles 1.22 On line help function.
Rapid Thermal Process
Atmospheric Rapid
Thermal Processors
Vacuum Rapid Thermal
Processors
Why not sell used
Hearpulse 210/410/610
RTA
Temperature Measured vs.
Actual
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