1. A Study on Segregating Acid and Alkaline Exhaust Flow for a Semiconductor Fab
ABSTRACT
According to the chemical characteristics, the exhaust air of semiconductor fab can be divided into
four categories i.e. acid exhaust air, aklin exhaust air e, solvent exhaust air, and general exhaust air. The
exhaust air must be properly treated before releasing to the atmosphere. However, if the acid exhaust air
and akline exhaust air mixed, amine particles will be produced. These particles could become white
smoke , resulting environmental problem, and degrade the performance of central wet scrubber. This
paper aims to discuss the mechanism of forming white smoke. Real case study are presented.
