Linear Motor, Ball screw

1. Linear Shaft Motor VS other Linear Motors

4. Output Efficiency F - V S605Q Specification Curve

6. US Patent 06,040,642 US Patent 2006162650A

7. Fleming’s law of motion u w v u w v u w v u w v u w v u w v Ｓ N Ｎ S Ｓ N Ｎ S Ｓ N Ｎ S

8. Magnetic field distribution Simulated by FEM Actual

15. (Coil) Ineffective use of flux Cylindrical type Effective use of flux Magnets Coil Magnetic Flux Magnets Magnetic Flux Coil

18. Linear Motor Type Flat & Cylindrical type with core Coreless Flat Coreless Cylindrical Linear Shaft Motor Power Output High Low High Stiffness High Low High Absorption force Very High None None Result of adsorption force Need more space for assembly No effect No effect Cogging Large None None

20. Motor: S435Q Maximum velocity: 6.3m/sec Acceleration: 13.5G Payload: 20kg (44lbs) Stroke: 800mm 2’7” Encoder: Heidenhain Resolution: 1µm Driver: Servoland SVDM 40P Guide: LM guide

21. Velocity fluctuation is under 0.01%. Motor: 2-S160T in parallel Maximum velocity: 8 µm /sec Payload: 25kg (55 lbs) Encoder: Heidenhain Resolution: 10 nm Driver: Delta Tau P-Mac Guide: Air bearing

22. Motor: S435Q Maximum velocity: 5m/sec Acceleration: 20G Payload: 1.7kg (4 lbs) Encoder: Mitsutoyo Resolution: 0.5 µm Driver: Servoland SVDM 40P Guide: LM guide

23. Stage: GTX 250 Motor: S200Q Velocity: 100mm/sec Acceleration: 1G Payload: 25kg (55 lbs) Velocity fluctuation is under 0.006%. Encoder: Heidenhain Resolution: 0.1µm Driver: Servoland SVDM 5P Guide: Air bearing

24. Motor: 2- S320D in parallel Payload: 25kg (55 lbs) Guide: Air bearing Encoder: Heidenhain Resolution: 1 nm Driver: Delta Tau P-Mac

25. Following error is very small. Maximum following error is under 100 nm . Red line: command velocity Blue line: actual velocity Following error Stage: GTX 250 Motor: 2-S160T in parallel Maximum Velocity: 3mm/sec Payload: 10kg (22 lbs) Encoder: SONY BS78 TS13 Resolution: 0.14nm Driver: P-Mac U-mac system Guide: Air bearing