HGS-Company profile .Justin yun

HAPPY GLOBAL SOLUTION CO., LTD. Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 1
COMPANY PROFILE2 0 1 5
HAPPY GLOBAL SOLUTION CO., LTD. Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ
hgs@happysolution.co.kr
www.hgs.co.kr
www.happysolution.co.kr

TEL, FAX
Tel:(031)373-4689,
(031)374-4689
Fax:(031)375-4689
COMPANY HAPPY GLOBAL SOLUTION CO., LTD.
(HGS)
PRESIDENT Hea Keun Yun
FOUNDED
ADDRESS
E-mail, Website
hgs@happysolution.co.kr
www.hgs.co.kr
HQ in Korea:
#46-3, Woesammi-ro 5beon-gil,
Osan-Si, Gyeonggi-do, Korea
447-230
Aug. 10, 2006
(Incorporated on May 15, 2009)
Company Overview

TEL, FAX, Mobile
(512)419-7808 : Office
(512)419-7884 : Fax
(512)468-6032 : Mobile
Austin, Texas
COMPANY HAPPY GLOBAL SOLUTION CO., LTD.
(HGS US)
PRESIDENT
FOUNDED Dec. 5th
, 2012
ADDRESS
Company overview of US branch
E-mail, Website
Justin@happysolution.co.kr
www.hgs.co.kr
8900 Shoal Creek Blvd., Bldg. 100,
Suite 113, Austin, TX 78757
Contact
Person
Hunter Lee (Austin)
Justin Yun (Washington D.C. )
Yong Hugh
ADDRESS 14631 Lee Highway Suite 212
Centreville, VA. 20121
TEL, FAX, Mobile
(703)815-8188 : Office
(703)815-9898 : Fax
(301)910-2929 : Mobile
Washington, D.C.

R & D Institute
R & D
President
Management
Headquarters
Nat’l policy/Industrial
/Commercial Project
Internal ERP Sys control,
CAD
Accounting
Accounting,
General Affairs
Int’l / Local Sales
C/S
Int’l/Local Robot Installation,
After Sales Service
Sales/CSRobot Business
Manufacturing, Repair Sales, C/S Materials, Accounting
FFU, Pivot, Blade,
Robot Analysis Sys, etc.
Overhaul
Robot (VHP+, XP, HP+,
Producer, Kawasaki, etc.),
HD Motor, etc.
MaterialsSalesManufacturing
Office Admin.
Organization
Sales, Overhaul
Sale(Robot Overhaul,
Parts Sourcing/Resale)
HGS US Branch
Sales of Industrial Robot
신규 사업부New Business
Planning, Design
Executive Director
Facility Improvement

Disassembling Hub Repair Motor Repair Assembling Performance Test
(48hrs cycle test)
Motor torque, Vibration Test Moving Repeatability Test Repeatability Test Sensor
- Sensitivity : 0.01mm
- X, Y, Z-axis sensing
- Measurement : Vertical,
Horizontality, Height
- Spec : within ±0.1mm
- 48hrs repeated test
-Torque, Vibration test
after repair
-Electrical Status(R, L, I) Test
-Coil, Resolver check
VHP+ ROBOT
VHP+ Robot is Vacuum Robot used for 200mm, 300mm ETCH, CVD, METAL Process. It is wafer
transfer Robot moving Arm by 2 units of 3ph AC Servo Motor.
Repair Technology
Lead time: within 4~5 days
In repair
shop
Release
out
54321

Particles from upper bearing
Particles dropping down to lower bearing
Moving conditions improvement and life time extension by Cover,
which is self-designed by HGS, preventing particles.
Insert Cover
to prevent particles
PRODUCER ARM
Producer Arm is mainly used to 300mm CVD Process and is equipped with Robot Hub and transfer wafer in
motion of Forward/Backward/Left/Right.
Repair Technology
Lead time : within 2~3 days
Disassembling
4
AssemblingRepair
Assembling Cover to prevent
particles w/ producer arm
Pics. of Cover equipped
with producer arm
321
In repair
shop
Release
out
Analysis of
failure cause

Leak Check
▪ Leak, Scratch check area
: Hub, Top flange
▪ Spec of Leak detector
- 1.0e-10 He (Max.)
- 1.0e-8 Vacuum Pressure(Max.)
Repair Technology
Lead Time: within 4~5days
XP ROBOT
Disassembling Hub Repair Motor Repair Assembling Performance
Test
(48hrs cycle test)
Leak Check
Outsourcing
cleaning parts
7654321
XP Robot is Vacuum Robot used for 300mm METAL Process and it is wafer transfer Robot
moving Arm by 4 units of 3ph AC Servo Motor.
Motor torque, Vibration Test
-Torque, Vibration test
after repair
-Electrical Status(R, L, I) Test
-Coil, Resolver check
Moving Repeatability Test
In repair
shop
Release
out

Disassembly Motor Replacement HUB and Arm Repair Assembly Performance Test
(48hrs cycle test)
Encoder Check Repeatability Test
Comparison tests for
-Commend pulse
-Feed back pulse
-
HP ROBOT
HP Robot is Vacuum Robot used for Tool for 200mm Endura process. It is wafer transfer Robot moving an Arm by 2-
axis. The robot is consisted as 2 units of Stepping motors, which is capable for precision control, and a Harmonic
Gear that makes conversion with low-speed and high-torque.
Repair Technology
Lead time : within 2~3 days
입고 출고
1
Sensor output Test
- Sensor board lamp lights
2 43 5

Repair Technology
Lead time: within 6wks
Disassembling Assembling Final InspectionRepair
KAWASAKI ROBOT
▪Wafer Transfer Robot
▪Equipment: AMAT
▪Process: CMP, CVD
▪Wafer Size: 300mm
▪Environment: ATM
▪Precision of repeatability:
within ± 0.1mm
▪CMP FI Robot 3NS411
▪Producer FI Robot 3N
200mm Arm
▪CMP FI Controller 3NS411
▪Producer FI Controller 3NS410
◆ Repair Ass’y
Outside, Functional
Inspection
Disassembling-Robot,
Controller
Cleaning, Replacing Parts
Repair, Overhaul
Zeroing,
Calibration
Cycle, Functional Test
-Blade Flatness, I/O signal
-Motion range, repeatability
-Hand unit linear
-Wafer transfer
Report
-Work scope
-Detailed Test Data
-Replacement Parts List
4321 65
◆ Features
In repair
shop
Release
out
Test
Analysis of
failure cause

Arm Level Path inspection Repeatability movement Vibration Measurement
- Vibration check jig- Vertical / Horizontality
- Spec : ±0.1 mm
- 200 times Cycle test
- Arm’s placement
Repeatability check after repair
2 weeks
YASKAWA ROBOT
Disassembly Exchange part Assembly Cycle TESTRepeatability CheckCleaning
Incoming
Release
7654321
Parts Repair
Various kinds of Yaskawa robots could be repaired for semiconductor process.
Repair Technology

HAPPY GLOBAL SOLUTION CO., LTD. Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 11HAPPY GLOBAL SOLUTION CO., LTD. Copyrightⓒ2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights
reserved.
1
MAG7 ROBOT
MAGNATRAN 7.1 MAGNATRAN 7.1 Armset
Lead time: within 1wk
Disassembling
Disassemble
components (T1/T2
Assembly,
Z axis assembly)
Assembling
Adjustment
Gap Calibration
Data Uploading
Final InspectionRepair
Cleaning,
Part
Replaceme
nt
Analysis of
failure cause
Visual / Functional
Inspection
Test
Cycle, Functional Test
High/Low speed,
Slippage test
Vacuum
leak test.
Robot configuration
I/O map data
Communication
In repair
shop
Release
out
2 31 4 5 6
• Brooks Automation Vacuum Robot
• Wafer: 200mm / 300mm
• Transfer Arm: Dual / Single Armset
• Exchange Program Available
  OEM: Inova, Altus, Jusung, IPS,
Lam Research(Lam 2300),
Novellus, ULVAC, etc.
Repair Technology

SOP AssemblingSOP Disassembling Performance
Test
Remote Plasma Source
MKS Remote Plasma source (ASTRON Series, Revolution Series)
In repair
shop
Release
out
41
ASTRON® Series ASTRON®i Siries
ASTRON®ex Series R*evolution Series
32
New Al Block &
Consumable parts
replacement
1
Features
- Actual power monitoring through SPMS
- New parts overhaul (Block, Nozzle, Board etc..)
- Clean Efficiency increased through Al block internal structure
alteration
New Anodizing Coating Full Auto System Test function
- Repeatability test program
- Key parameter testing
- Auto ignition & burning test
- Coating method improvement
- Protect of Worn out
Repair Technology

SOP Disassembling MOSFET Leds
Bending Jig
SOP Assembling Performance
Test
RF Generator
AE, MKS RF Generator, Matching Network , Remote Plasma source DC Power Supply, Ozone
Generator, Micro Wave generator.
In repair
shop
Release
out
4321
AE RFG,APEX Series MKS Spectrum Series
MKS OB-1,2 Series MKS Genesis Series
- Main parts replaced (Power Pack, Drive Excite, MOS FET, Capacitor, etc.)
- Lifetime extension
- Test and calibration based on OEM spec.
Our strength of RF Generator and RPS Repair
 Short lead time for all worldwide customers (Maximum 2 weeks)
 Price Competitiveness
 Repaired with Technical Know-how of RF and Electrical and Electronics experts
 A lot of repair experience with domestic and international customers
Features
Repair Technology

REMOTE PLASMA SOURCE
SERIESType Model Capacity
ASTRON® AX7650 / AX7651 / AX7657 / FI20620 /
FI20620-1
2ℓ
ASTRON®i AX7670-16 / AX7670-19 / AX7670-21 /
AX7670-30
3ℓ
ASTRON®e AX7680 / FI80130
ASTRON®ex AX7685 / FI80131 / FI80132 / FI80133
4ℓ,6ℓ
ASTRON®hf-s AX7645 RH,PS 15ℓ
ASTRONhf AX7635 (LCD) 22ℓ
R*evolution AX-7690LAM-23 / AX-7690PSK-01 /
AX-7690NOV-01
4ℓ,7500 W
XStream 6K / 8K
LS3200
Repair Technology

HD Motor is used to work conveyer in LCD manufacturing line. It is Ultra-high torque output of
2400N/m in max. and available to high precision position control.
HD MOTOR
 Maker : SHINKO
 Max. torque : 2400 N/m
 Mass : 340kg
 Max. speed : 30 RPM
 Power : 220 V, Ø3
 Max. Current : 85 A
 Accuracy : 0.0004˚
Moving Test ZigMobile cart w/ lift
Pics. of
disassemble
and spread
out
Operation
waveforms
after repair
<Resolver tuning 후 Feedback data>
(In spec: ±10%)
Repair Technology

ELA Driver
<ELA Driver>
 Feature
- 100~110V ±10% Input
- Control NSK Motor type : SSB014 series
- Position/Torque Control
 Repair Sequence
- Condition check & fail parts Search
- Parts, Capacitor, Resister, IC supply
- Fail parts replace
- Var Resistor, Capacitor turning
- Circuit test
- Completion test with Robot
Condition Check Parts supply Parts Replace Circuit test Completion Test
Lead time: within 1month
In repair
shop
Release
out
54321
Repair Technology

For unexpected Robot failure …!!
Robot Analysis System
Robot Analysis System developed to provide information and alarm of the operating conditions and status
and breakdown phenomenon of the Robot, used in semiconductor and LCD equipment, and determine its
own problems before they occur, so that users know.
Wafer mfg. Schedule
“Facility down,
Manufacturing loss”
“Increased amount of damaged wafer “
Material Loss
Personnel Loss
Production Loss
Wafer Broken!!
Home Calibration Position Error
Facility down for failure Robot
Robot Spare urgently needed
Key factor analysis for
diagnosis of the robot
Analysis of key items &
Optimization of the data
Display of result
after data analysis
for Robot status
Central monitoring,
On-line for each facility
“ What’s the
happy solution?? ”
Wafer broken for Robot failure
R&D, Products

Fine Warning Danger
Complete time
Position error
Backlash
Torque
Vibration
Custom Spec
Tek M Pos: 0.000sStop
21
a. Torque variation
A-axis
B-axis
Moving WaveMoving Wave
PositionPosition
R&D, Products

Configuration of Robot Analysis System
Ethernet
Driver
Capture Module1
Alar
m
PC Software3
Main Module2
Central Monitoring4
XP Robot
VHP/VHP+ Robot
Benefits for Robot Analysis System
①Detecting vibration and Torque problem of Robot
②Detecting sign of slip, particles and calibration
position error
③Preventive maintenance by catching signs of trouble
④Implementation of Remote integrated Control System (RCS)
R&D, Products

Portable Robot Analysis System
Robot Model Consist of Features
VHP ROBOT PRAS-V100
• Portable diagnostic case (1SET)
• Cable (1SET)
• S/W (1SET)
XP ROBOT PRAS-X100
Pictures Specification Benefits
• Easy to use and carry as a portable case.
• Large size of touched-screen.
• Available to save log record with Self-recording function
autonomously without disconnected FDC.
• Saving data to the huge storage of HDD.
(up to 50 year’s history)
• Estimate XP ROBOT in real-time.
• Update the S/W system continuously
S/W Composition
• OS : Windows7
• DB : MSSQL2008
• Robot analysis S/W
• FDC communication S/W
H/W composition
(Analysis system)
• Quad Processor MCU
• (DSP32bit/ARM32bit)
• LAN 10/100M 1CH
• USB2.0 1CH
• EEPROM 1Mb
<Portable analysis system>
<Diagnosed S/W screen>
• The Capture module is installed only at ordinary times. If
necessary, the portable detector can be connected to
measure.
• PRAS is utilized for a careful inspection of non regular
robots’ condition through PM cycle or pre-alarm.
• PRAS transmits the measured data to FDC in real-time.
R&D, Products

Belt Analysis System
.
Driver
Capture Module
Alarm
Laptop for Analysis
Main
(Calculation)
Module
Comprehensive
management by FDC
FDC
BMS
I. Main board V1.0
II. DSP Processor 150MHz
Single
III. EEPROM 1Mbit/ USB2.0
IV. LAN10/100M
V. EXT ALARM Port
VI. LED ALARM Display
Specification
제 원
• Belt Analysis System that is applied for driving parts of semiconductor and LCD facilities, diagnoses any problem or
breakdown.
• BAS detects problem autonomously before it occurs.
• Users recognize driving part’s information and BAS alerts the up-coming problem previously to users.
Patent : Registration No. 10-2012-0106812 (September 25th
2012)
Application No. 10-1223756 Analysis system of the belt and motor state with encoder
(January 11th
2013)
R&D, Products

XP HUB ASSEMBLY
• Used Facility and Process : AMAT Endura, 300mm Metal
• Part No : HGS-XPHPL(XP Hub Primary : OEM NO – 0010-19899)
HGS-XPHAL (XP Hub Auxiliary : OEM NO – 0010-19900)
• Production Range: All the parts (Hub Main Body, Soup, Magnet ring,
Magnet.)
• Applied Bearing : Optimized Bearings (Fala, Kaydon, RBC etc.)
• Minimizes the impact of the particles in the high-integrity
metal process.
• Lower price competitiveness compared to OEM’s products.
• Guarantees excellent process characteristics.
Specification
Feature
R&D, Products

XP ELBOW
• Improved problems related with dislocated elbow bearing.
(Drooping of elbow, particle occurrence, damage of elbow itself, and
damage of heater and blade in the process chamber, etc.)
• Semi-permanent performance guaranteed through structural
change and reinforcement of the apparatus in the former elbow.
 Prevents thermal expansion of elbow and elbow drooping in
case of vibrating in operation.
• Elbow
- Part No : 0040-04682(Upper), 0040-04680(Lower)
- Material : Aluminum
• Bearing
- Part No : KOYO SV5203-3ZZSTCS3
- Ball Type : Steel ball
New Type
Old Type
Specification
Feature
R&D, Products

E HUB
• Used Process: Apply to all processes
• Bearing Contact Point: 4 Points
• Fixing Bearing: Bearing’s inner and outer races are
fixed by upper, lower unit body.
• Material : Aluminum
• Compared to normal Hub, E hub makes less particle, and same
life time with upper and lower bearings.
 Guaranteed longer life time and optimized operation
• By increasing the contact point of the bearing, hub’s rotating
gets more stable.
(normal hub: 2 Points E-hub: 4 Points)
 Lower price competitiveness compared to
other companies’ products
Normal HUB E HUB
• Due to relatively short life time of
upper bearing compared to lower
bearing, the hub’s life time gets
shorter.
• Same life time of the upper and lower
bearing.
• E hub’s life is longer than normal hub.
FeatureSpecification
R&D, Products

VHP Top-Flange Cooling Line
VHP Top Flange Cooling Line makes the motor bearing and hub bearing’s lifetime longer by blocking the heat from VHP
Top-Flange to the Motor.
• Material : Top-Flange(Aluminum),
• Pipe : Cu Type, SUS Type
• Pipe Size: 8/3
• Velocity : 5m/s
• Lifetime : Semi-permanent
• Optimized cooling effect which improves the process capability
• Improving Robot’s lifetime led by bearing’s longer lifetime
• Practical and user friendly design
• Short lead time through our own design and manufacturing, and
good price competitiveness
• Impedance trend stabilized
• Motor’s lifetime improved
• CVD (Ultima, Producer SE)
• ETCH
• IMP
• DIFF
Specification
Feature
R&D, Products

Pivot(for VHP, HP) & any ARMS
Pivot combines the VHP ROBOT ARM and an area assembled with BLADE.
HGS provides improved Belt type Pivot from the existing Gear type Pivot.
R&D, Products
Existing Gear type Pivot Improved Belt type Pivot
Worn Gear
causes Particles, Clearance
Advantages of Belt type pivot
: Preventing Particles, life extension
HGS-VP2400L-TM
HGS-VP2400S-BF
Self-improved Pivot & Arms
Unit Price
Used from Apr. 2010
Reason for
improvement
Preventing Particles,
Moving Development,
Service life extension
BEARING Koyo, Kaydon
Material
Case: Aluminum
Handle: SUS304
Belt: Spring steel plate
Plating
Case: Electroless NI,
Handle: EP, Belt : -
Unit price ?
Used to ~ Jul. 2010
- -
BEARING -
Material
Case: Aluminum
Handle: SUS304
Belt: Spring steel plate
Plating
Case:
Handle: Belt :
Producer arm
Ultima ARM
VHP HUB ASS`Y
XP ARM, Pivot
XP HUB

HP Motor
HP motor is composed with the upper and lower motors, and is used in the Endura for 200mm process.
HP motor is installed Stepping motor(precise controlling) and Harmonic gear (low speed high torque), and an
encoder (resolution of 250).
• Phase control : 5-phase Stepping
• Max current consumption : 1.4A
• Resolution of Encoder : 250 CPR
• Resolution of Motor : 50000 PPR
• Harmonic Gear Reduction Ratio : 100:1
• Turn angle of the motor (including reducer) : 0.0072°
• High precision and high torque controlling available
* Compatible in the Endura 200mm facility
- The same form factor with the formal motor
- The same control method and spec with the formal motor
• Available to be more stable operation with 1/100 reducer in
the low speed.
• As a new substitute about discontinued models, the motor is
possible to be maintenance and replacement.
Specification
Feature
R&D, Products

FFU (Fan Filter Unit)
FFU mounted on the upper part of semiconductor facilities (primarily EFEM) required high cleanliness
level(Class-1) is an equipment, continuously injecting clean air. 1FAN and 2FAN type is produced in two
models.
R&D, Products
Specification
• Input Power: 100~240V, 50/60Hz
• Power consumption: Max 100W(1FAN), 200W(2FAN)
• Max. Air flow rate: 700CFM(1Blower)
• Material: Aluminum - 2T(Body), 3T(Top plate)
• Noise: approx. 60dB
• Solid basic Features
- 0.1um~0.2um particle Filtering
- Ultralight and Firmness by Aluminum body
• Periodical Filter replacement
- Replacement filters can be separated from the body.
• Customized-design for each facility
- Implementation of adaptive design and
fabrication for EFEM structure.
•Cost Effectiveness
- Much cost effective with the same specs.
than competitor's product.
Features
• Pressure Sensor
- Range: -100~3500Pa
- Resolution: 0.05 Pa
- Precision: 0.1%fs, 1%mv
- Built-in temp. compensating circuit
- Certificated: SCES047 in SWISS
•Preliminary, ULPA Filter
- Glass-Fiber
- Gasket: E.P.D.M
- Efficiency: 99.9999816%
- Certificated: ISO9001, UL
• Low Noise Brushless Motor
- Long life time, Low noise
- Max. RPM : 2600
- Certified: UL, CE
• Auto Fan Controller
- Running mode: Auto/Manual
- LCD Panel displaying running
status and Error

LOCK CHAIN CLAMP
R&D, Products
The existing lock chain clamp problem: It has a no lock for preventing loose bolted joints.
Features
* The same size with the existing goods
* It can be fastened with a wrench(spanner)
•Lock off -> It can be fastened to the same way as the existing Lock Clamp
•Lock on -> It can be maintained the locked state while it never reverses
No bolts loosening

Consisted of Existing materials Complemented materials Advantages after development
BODY AL Black Anodizing AL BLACK Anodizing + Teflon Coating Strengthening corrosion protection
SCREW SUS PEEK
Strengthening corrosion protection
Minimizing particle issue
SENSOR FT-KV1 (SUNX) FT-KV1 (SUNX) Localization of Sensor Align skill
AMP FX-301 FX-301
End-Effector BLADE
End-Effector is a module mounted at the end of Robot Arm and sensing wafer when Foub is docking over Road-port
Arm. It is developed to minimize particle issue and to strengthen corrosion protection by using complemented
materials than existing ones.
R&D, Products
Senser Align Jig
Peek Screw

REPEATABILITY JIG LEVEL & VIBRATION MEASUREMENT JIG
Measurement Jig
R&D, Products

∆ Thermal Spray, Plasma Spay
Coating Technology
in
Atmospheric Pressure
∆ Spray Coating Powder
Items Purity Particle Size
Al2O3 99.9% 100nm, 1~2um, 15~45um
Y2O3 99.9% 100nm, 1~2um, 15~45um
Al2O3-3%TiO2 99.9% 15~45 um
Al2O3-13%TiO2 99.9% 15~45 um
Al2O3-40%TiO2 99.9% 15~45 um
Al2O3-50%TiO2 99.9% 15~45 um
TiO2 99.9% 30~35 um, 50~80 um
Cr2O3 99.9% 30~35 um, 50~80 um
ZrO2-5.25%Y2O3(YSZ) 99.9% 100nm, 1~2um, 15~45um
ZrO2-8%Y2O3(YSZ) 99.9% 100nm, 1~2um, 15~45um
ZrO2-13%Y2O3(YSZ) 99.9% 100nm, 1~2um, 15~45um
WC-6%Co 99.9% 15~45 um
WC-12%Co 99.9% 15~45 um
WC-17%Co 99.9% 15~45 um
WC-10%Cr-4%Co 99.9% 15~45 um
Mo 99.9% 30~35 um, 50~80 um
Mo-30%NiCrBSi 99.9% 30~35 um, 50~80 um
Ni 99.9% 100nm, 1~2um, 15~45um
Ni-20%Cr 99.9% 15~45um
Cr3C2-NiCr 99.9% 30~35 um, 50~80 um
Al2O3-ZrO2 99.9% 30~35 um, 50~80 um
Al2O3-Y2O3 99.9% 100nm, 1~2um, 15~45um
Spray Coating & Sintering Powder
R&D, Products

∆ Deposition Service
∆ Physical Vapor Deposition(PVD)
∆ Product Image
Evaporation Source
Sputtering Target
Al
99.999%
Cu Cr Ti3O5
Pt
Au wireZnSeITOAu wireZnS
Ti Cu
Al ITO AZO
ZnSe IGZOTiNZnONb
∆ Bonding Service
Various electronic device is fabricated
by PVD process !!!
Sputtering target & Evaporation Source
R&D, Products

HGS-Company profile .Justin yun

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