Introducing the new XFlash 6 detectors for energy-dispersive X-ray spectrometry on scanning and transmission electron microscopes. Elemental analysis taken to the next level - enjoy!

1. A new generation in EDS performance
The new Slim-line XFlash® 6 series
QUANTAX – EDS with Slim-line Technology for SEM and TEM
Sam Scheller, Global Product Manager EDS/SEM, Bruker Nano GmbH
Innovation with Integrity

2. Overview
• Brief introduction to the new XFlash® 6 family for SEM and TEM
• XFlash® 6 Series – the Ideal Detector for Every Application
• Detector Sizes from 10 mm² to 100 mm² for SEM and TEM
• Highest Throughput for Fastest Results
• Best Energy Resolution for Challenging Tasks
• Slim-line, Compact and Flexible
• ESPRIT – the Ideal Analytical Software Suite for SEM and TEM
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3. Introduction
XFlash® 6 family for SEM and TEM
Excellence in X-Ray Analysis for the Electron Microscope
● Save time – New slim line technology detectors and high performance pulse
processing get the job done faster
● Save effort – motorized detector movement and light weight design make detector
handling easier
● Gain more precision – large area SDDs and high energy resolution provide the
highest quality spectra for reliable and precise analysis
● Gain more reliability – the world most comprehensive atomic database ensures most
dependable low energy peak identification
● Gain more accuracy – the most sophisticated algorithms for quantification and the
unique combinability of standardless and standard based methods provide highest
accuracy results
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4. XFlash® 6 Series
The Ideal Detector for Every Application
Wide range of detector sizes
● 10, 30, 60 and 100 mm² area detectors for ideal measurement conditions
from micro- and nanoanalysis
Best throughput for fastest measurements
● Over 1,5 Mcps input
● Over 600 kcps output
● New SVE 6 pulse processor with advanced processing features
Best energy resolution for low energy analysis
● 121eV limited edition
● 123eV ultimate class
● 126eV premium class
● 129eV standard class
Slim-line detector technology – for more counts
● Shortest detector-sample distance for best solid angle
● Best take-off angle in TEM for lowest background and better LOD
More compact design and low weight – less than 3.75kg
● High precision motorized fully integrated slider
● New heat sink body geometry with more cooling capacity
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5. XFlash® 6 Series
Detector Sizes from 10 to 100 mm²
XFlash® 6 for SEM XFlash® 6T for TEM
The XFlash® 6 detector series for SEM, FIB- The XFlash® 6T detectors for TEM and
SEM and µ-probes, provides maximum STEM are designed for minimum
flexibility for all analytical conditions mechanical and electromagnetic
interference. The design provides optimum
take-off angle and avoid the necessity for
sample tilt.
Area 10 mm² 30 mm² 60 mm² 100 mm²
SEM XFlash® 6|10 XFlash® 6|30 XFlash® 6|60 XFlash® 6|100
TEM XFlash® 6T|30 XFlash® 6T|60
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6. XFlash® 6 Series for SEMs and µ-Probes
The XFlash® 6|10
The ultimate resolution SDD in the Market
● Best energy resolution on the market
● Best light element/low energy
performance
Guaranteed resolutions
129 eV Standard (B-Am)
126 eV Premium (Be-Am)
123 eV Ultimate (Be-Am)
121 eV Limited (Be-Am)
XFlash 6|10 121 eV
Area: 10mm²
Max Input: 1,500 kcps
Typical Resolution Mn Kα: 120eV
F Kα: 47 eV
C Kα: 38 eV
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7. XFlash® 6 Series for SEMs
The XFlash® 6|30
The versatile medium sized SDD
● For micro- and nanoanalysis
● For high count rate spectral imaging
● Ideal partner for fast EBSD analysis
Guaranteed resolutions
129 eV Standard (B-Am)
126 eV Premium (Be-Am)
123 eV Ultimate (Be-Am)
XFlash 6|30 123 eV
Area: 30mm²
Max Input: 1,500 kcps
Resolution Mn Kα < 123 eV
F Kα: 53 eV
C Kα: 45 eV
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8. XFlash® 6 Series for SEMs
The XFlash® 6|60
Large solid angle SDD for nanoanalysis
● 60 mm² for low beam energies
● Ideal for nanoparticles and biological
samples
● Ideal partner for high resolution EBSD
Guaranteed resolutions
129 eV Standard (B-Am)
126 eV Premium (Be-Am)
XFlash 6|60 126 eV
Area: 60mm²
Max Input: 1,500 kcps
Typical Resolution Mn Kα: <125eV
F Kα: 60 eV
C Kα: 51 eV
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9. XFlash® 6 Series for SEMs
The XFlash® 6|100
Largest area SDD for low x-ray yield
analysis (cold-FEG)
● 100 mm² for special analytical conditions
● Ideal for low beam current cold FEG-SEMs
● And for sensitive sample analysis
Guaranteed resolution
129 eV Standard (B-Am)
XFlash 6|100 129 eV
Area: 100mm²
Max Input: 1,500 kcps
Typical Resolution Mn Kα: <127eV
F Kα: 67 eV
C Kα: 57 eV
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10. XFlash® 6 Series for TEMs and S/TEMs
The XFlash® 6T|30
The first SDD for aberration corrected S/TEM
● All-rounder S/TEM analysis with 30 mm²
● Ideal for aberration corrected S/TEM
Guaranteed resolutions
129 eV Standard (B-Am)
126 eV Premium (Be-Am)
123 eV Ultimate (Be-Am)
XFlash 6T|30 123 eV
Area: 30mm²
Max Input: 1,500 kcps
Resolution Mn Kα < 123 eV
F Kα: 53 eV
C Kα: 45 eV
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11. XFlash® 6 Series for TEMs and S/TEMs
The XFlash® 6T|60
Large solid angle SDD for Å-scale
TEM analysis
● 60 mm² detector for low X-ray yield
conditions
● Å-scale analysis in aberration corrected
STEMs
Guaranteed resolutions
129 eV Standard (B-Am)
126 eV Premium (Be-Am)
XFlash 6T|60 126 eV
Area: 60mm²
Max Input: 1,500 kcps
Typical Resolution Mn Kα: <125eV
F Kα: 60 eV
C Kα: 51 eV
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12. XFlash® 6 Series
Highest Throughput for Fastest Results
The new SVE 6 Signal Processing Unit
● Key to the performance of new QUANTAX
● Superior processing speed
● Guaranteed reliable results at any count rate
● Up to 600 kcps output at 1500 kcps input
Highest throughput on the market
● High input count rates (IPCR) for fast results
● IPCR plus long acquisition for trace element detection
● In low IPCR situation (e.g. TEM or cold FEG-SEM) low dead time leads to better
statistics or shorter overall acquisition times
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13. XFlash® 6 Series
Highest Throughput for Fastest Results
XFlash 6
700000
Max. throughput XFlash® detectors
600000
500000
400000
Max. throughput of other
OPCR
small area detectors
300000
Max. throughput of other
large area detectors
200000
XSPV 60 Output (cps) XSPV 130 Output (cps)
100000
XSPV 275 Output (cps) XSPV 400 Output (cps)
XSPV 600 Output (cps)
0
0 200000 400000 600000 800000 1000000 1200000 1400000
IPCR
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14. XFlash® 6 Series
Highest Throughput for Fastest Results
Pitchblende sample:
● 25 kV
● 50x magnification
● Xflash® 6|30
● 200 kcps input
● 1000 x 750 pixel per
HyperMap
● 2,7 µm per pixel
● 8 µs per pixel
● 60 seconds
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15. XFlash® 6 Series
Best Energy Resolution for Tricky Tasks
MnF sample: 120eV
● 15 kV
● XFlash® 6|10
● 100 seconds
● 5 kcps input:
120 eV
● 100 kcps input:
121 eV
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16. XFlash® 6 Series
Best Energy Resolution for Tricky Tasks
XFlash® 6 Resolution
Excellent energy resolution
specifically in the low energy range
is essential for the ambitious tasks
of nano-analysis.
The typical resolution curve of a
121 eV XFlash® exactly follows
the theoretical curve of the
fundamental limit for the energy
resolution.
Other SDD with external field
effect transistor (FET) deviate from
this curve in the challenging low
energy range.
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17. XFlash® 6 Series
Best Energy Resolution for Tricky Tasks
XFlash® 6 Resolution Classes
All resolutions are specified exceeding ISO 15632:2002 requirements.
Limited Edition
● Limited, unrivalled 121 eV
XFlash® 6|10
Ultimate Class
● Ultimate class: 123 eV
Typical Resolutions for XFlash® Classes:
XFlash® 6|10
Premium Class
● Premium class: 126 eV
XFlash® 6|10, 6|30 and 6|60
Standard Class 121 47 38
● Standard class: 129 eV
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18. XFlash® 6 Series
Best Energy Resolution for Tricky Tasks
The outstanding energy resolution of the XFlash® 6 provides the basis for optimum
peak deconvolution and light element performance. It is necessary for reaching the
very light elements down to and below boron. These two spectra show a boron nitride
spectrum acquired by a 121 eV (red) and 129 eV (blue) detector.
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19. XFlash® 6 Series
Best Energy Resolution for Tricky Tasks
60µm
The combination of excellent hardware and software in QUANTAX, allows to solve
analytical challenges like never before. This boron map of a weld seam shows different
borides, which can easily be distinguished by their boron content. Red being the
highest concentration, is chromium boride, green being chromium nickel boride, and
blue being tri-nickel boride. This map was acquired with a XFlash® 6|60 126 eV detector
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20. XFlash® 6 Series
Resolution Stability
To keep measurement times short, measuring at higher count rates is often desired –
however, this comes with a compromise in energy resolution.
This reduces detection limits and accuracy, as deconvolution becomes more difficult.
With XFlash® 6 such a compromise is lower, as resolution is kept to higher count rates
than with other SDDs with external FETs.
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21. XFlash® 6 Series
Slim-line and Solid Angle
Solid angle
X-rays radiate in all directions.
Simply put: the solid angle is the portion
of a hemisphere above or below a sample
that the detector sees.
The larger the solid angle of a detector,
the more sample radiation is collected.
There are basically two methods to
improve solid angle:
1. Increase the detector chip size – this
leads to a linear increase of solid angle
(left side).
2. Decrease the detector sample distance
– this squares the solid angle when the
distance is halved (right side).
Bruker uses both methods to provide best
solid angle in relation to chip area.
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22. XFlash® 6 Series
Slim-line and Solid Angle
Slim-line technology – ultra thin
detector fingers, providing:
● Maximized solid angle
● Clearance of other detectors
● Optimized take-off angle for TEM
● 3 standard optimized finger lengths
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23. XFlash® 6 Series
Slim-line and Take-off Angle
Take-off angle (TOA)
● The angle under which the detector “looks” at the sample.
● The higher the take-off angle:
● the less the spectrum is affected by absorption and
● the better is the peak to background (P/B) ratio.
● Common take-off angles of XFlash® 6 slim-line detectors are in the range of
30-45°for SEM and 11–26°for TEM.
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24. XFlash® 6 Series
Compact Design and Low Weight
Advantages of compact and
light-weight design:
● New high-precision motorized slider
● Exact repositioning of the detector
● New larger surface area heat sink
● Reduced overall height
● Low weight - less than 3.75 kg
● Minimal interference with the electron
microscope
● Optionally available with welded bellows
(standard for TEM)
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25. XFlash® 6 Series
Flexibility of the VZ-Adapter
Maximum measurement flexibility
through VZ (variable Z)-Adapter:
● Tilt and move the detector into the
optimum working distance
● Maximized solid angle and count rate
● Optimized in-situ adjustment of
combined EDS and EBSD measurements
● Now optionally available with bellows
● Possibility of on-site upgrades
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26. ESPRIT – the Ideal Analytical Software
Suite for SEM and TEM
Real-time spectrometry
● Instant spectrum visibility and live quantification
● Simultaneous acquisition of multiple spectra, even from multiple detectors
Light element / low energy analysis
● Most comprehensive database containing K, L, M and N lines for accurate element
identification
● TQuant – optimized standardless low energy range quantification
Hybrid quantification
● Unique combination of standardless and standard-based quantification
● Customizable for most reliable and precise chemical quantification
HyperMap
● The database contains a spectrum for each pixel
● Enables on- and offline processing
● Live background removal and deconvolution
Automation of routines
● Automate virtually any measurement and analysis
● Optimize your instrument usage
● Unattended operation whether during the day, at night or over the weekend
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27. The New QUANTAX XFlash® 6 Series
ESPRIT – Real Time Spectrometry
Real Time Spectrometry
To utilize the speed of the XFlash® 6, it is necessary to have software capable of keeping
up with the high throughput. We developed real-time spectrometry to be able to do
exactly this: see the spectrum results instantly as you move the analysis position.
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28. The New QUANTAX XFlash® 6 Series
ESPRIT – Real Time Spectrometry
Live Quantification
As you are acquiring, Esprit can perform quantification live while you measure and update
results as statistics improve.
Everything is done automatically, but if desired, you can review the quantification or
perform it interactively.
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29. The New QUANTAX XFlash® 6 Series
ESPRIT – Light Element Analysis
Light Element and Low
Energy Analysis
• Correct element
identification based on
the most comprehensive
atomic database
• Includes all relevant
line positions and
relative intensities for
safe element
identification, also in
the low energy range C / at% N / at% O / at%
• TQuant low energy
3 kV 73.1 10.6 16.3
quantification procedure
• Reliable standardless 5 kV 70.2 11.6 18.2
quantification results
at the low energy end Theory 71.1 13.3 15.5
of the spectrum
Nylon spectra and quantification
results (hydrogen content neglected)
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30. The New QUANTAX XFlash® 6 Series
ESPRIT – Hybrid Quantification
Esprit offers a number of
possibilities for quantification:
● True standardless P/B ZAF
● True standardless XPP (θρz)
● Standard based P/B ZAF
● Standard based XPP (θρz)
Plus Hybrid:
● A combination of both:
● Use standards for tricky elements
● Analyze standardlessly where no
standard is available
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31. The New QUANTAX XFlash® 6 Series
ESPRIT – HyperMap
HyperMap
● A spectrum is saved for every pixel in
the element map.
● This data is accessible at any time.
● Enables on- and offline processing
● Live background removal and
deconvolution
● Fast QMap also possible
● Up to 4096 x 4096 per database (map)
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32. Kearsley et al. 2011,
Salge et al. 2011
HyperMap: 4096x3072 pixel, 2 nA, 12keV, 1.4 Mcps, 210 s
11 counts/pixel

33. The New QUANTAX XFlash® 6 Series
ESPRIT – Automation of Routines
Automation with Jobs
To utilize the speed of the XFlash® 6 further,
Esprit has an Automation module for routine
analysis. It is easily set up and performs
long unattended runs. Return to the lab
after a night’s unattended measurement run
to find all results on disk or compiled into a
report. Using the tiling function, large
mosaics can be created for overview
generation
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34. Innovation with Integrity
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