Kanomax FMT Presents a New Method for Determining the Size Distribution of Particles in CMP Slurries by
Steven L. Kosier, Ph.D.,President,Kanomax FMT, Inc.
A Novel Method for Measuring the Sizes and Concentrationskanomaxfmt
The document describes a new liquid nanoparticle sizing (LNS) system that can measure the sizes and concentrations of particles as small as 5 nm in colloidal suspensions. The system works by nebulizing the liquid suspension into an aerosol and then using scanning mobility particle sizing to analyze the particles. The LNS provides direct measurement of particle number concentrations and can detect small changes in particle size distributions. It has demonstrated accurate sizing for particles from 5-500 nm and measurement of filter retention for particles as small as 10 nm. The system allows detailed analysis of polishing slurries and effects of handling on particle size distributions.
This document discusses techniques for characterizing nanobubbles, including dynamic light scattering (DLS), nanoparticle tracking analysis (NTA), and resonant mass measurement (RMM). DLS and NTA can measure nanobubble size distributions but DLS results may be influenced by contaminants. RMM can distinguish nanobubbles from contaminating particles by measuring buoyant mass. The document also examines measuring nanobubble zeta potential to characterize surface charge and stability. A variety of techniques provide complementary characterization of nanobubbles but RMM can uniquely discriminate bubbles from other particle types of similar size.
Turbidity poster presentation final editKala Drake
Turbidity is caused by particles suspended in water that scatter light, making the water appear cloudy. For a school project, students developed methods to measure turbidity without expensive laboratory equipment. They created a series of standard solutions by mixing specific ratios of barium chloride and sulfuric acid, known as McFarland standards, which produce consistent levels of turbidity. The students then calibrated a simple turbidity tube and a spectrophotometer using the McFarland standards and measured turbidity in pond water samples. Both methods produced similar results, with the tube suitable for field use but less precise and the spectrophotometer more accurate but requiring a lab setting.
Nanoparticle Tracking Analysis (particle by particle technique)Anson Ho
NanoSight visualizes, measures and characterizes virtually all nanoparticles. Pls contact A&P Instrument Co.Ltd in Hong Kong for detail. Email: anson@anp.com.hk
The document provides an overview of the particle characterization laboratory at Penn State's Materials Research Institute. It describes various techniques for particle sizing, zeta potential measurement, porosity analysis, and more. A range of instrumentation is available, including light scattering, sedimentation, microscopy, and rheology equipment. The laboratory offers services and consultation to characterize materials and solve testing needs.
Introduction to Powder Size Analysis for Cell Culture MediaKurt Sundgren
This technical bulletin discusses particle size analysis in dry powder cell culture media production. It provides an overview of SAFC Biosciences' particle size analysis capabilities using sieving and laser diffraction, which measure particle size distributions from 10 nm to 3000 μm. It also discusses how particle size variability can affect material properties like flowability, mixing, and solubility. Statistical analysis of particle size distributions is important to fully characterize samples and communicate results. Understanding these relationships helps ensure a consistent, high-quality product.
This document summarizes nanoparticle tracking analysis (NTA), a technique used to characterize nanoparticles between 10-1000 nm in size. NTA works by analyzing the Brownian motion of nanoparticles in a liquid using light scattering and microscopy. It can determine particle size distribution, concentration, and other properties like surface charge. NTA has advantages over other techniques like measuring each particle individually and not requiring assumptions about optical properties. It has applications in fields like nanotoxicology, drug delivery, and materials characterization.
Accurately Measure Concentration of Nanoparticles in ColloidsHORIBA Particle
In this presentation, Dr. Jan "Kuba" Tatarkiewicz discusses the influence of various experimental parameters determined by different methods to measure the concentration of particles in colloids, especially in poly-dispersed and poly-material samples. Dr. Tatarkiewicz compares the principles of measurements for established technologies such as transmission electron microscopy (TEM), flow cytometry (FC), resistive pulse sensing (Coulter), nanoparticle tracking analysis (NTA) as well as improvements introduced to the latter by multispectral advanced nanoparticle tracking analysis (MANTA). Dr. Tatarkiewicz will present experimental results obtained for standardized samples and colloids encountered in research studies in diverse fields of interest.
View recorded webinars:
http://bit.ly/particlewebinars
A Novel Method for Measuring the Sizes and Concentrationskanomaxfmt
The document describes a new liquid nanoparticle sizing (LNS) system that can measure the sizes and concentrations of particles as small as 5 nm in colloidal suspensions. The system works by nebulizing the liquid suspension into an aerosol and then using scanning mobility particle sizing to analyze the particles. The LNS provides direct measurement of particle number concentrations and can detect small changes in particle size distributions. It has demonstrated accurate sizing for particles from 5-500 nm and measurement of filter retention for particles as small as 10 nm. The system allows detailed analysis of polishing slurries and effects of handling on particle size distributions.
This document discusses techniques for characterizing nanobubbles, including dynamic light scattering (DLS), nanoparticle tracking analysis (NTA), and resonant mass measurement (RMM). DLS and NTA can measure nanobubble size distributions but DLS results may be influenced by contaminants. RMM can distinguish nanobubbles from contaminating particles by measuring buoyant mass. The document also examines measuring nanobubble zeta potential to characterize surface charge and stability. A variety of techniques provide complementary characterization of nanobubbles but RMM can uniquely discriminate bubbles from other particle types of similar size.
Turbidity poster presentation final editKala Drake
Turbidity is caused by particles suspended in water that scatter light, making the water appear cloudy. For a school project, students developed methods to measure turbidity without expensive laboratory equipment. They created a series of standard solutions by mixing specific ratios of barium chloride and sulfuric acid, known as McFarland standards, which produce consistent levels of turbidity. The students then calibrated a simple turbidity tube and a spectrophotometer using the McFarland standards and measured turbidity in pond water samples. Both methods produced similar results, with the tube suitable for field use but less precise and the spectrophotometer more accurate but requiring a lab setting.
Nanoparticle Tracking Analysis (particle by particle technique)Anson Ho
NanoSight visualizes, measures and characterizes virtually all nanoparticles. Pls contact A&P Instrument Co.Ltd in Hong Kong for detail. Email: anson@anp.com.hk
The document provides an overview of the particle characterization laboratory at Penn State's Materials Research Institute. It describes various techniques for particle sizing, zeta potential measurement, porosity analysis, and more. A range of instrumentation is available, including light scattering, sedimentation, microscopy, and rheology equipment. The laboratory offers services and consultation to characterize materials and solve testing needs.
Introduction to Powder Size Analysis for Cell Culture MediaKurt Sundgren
This technical bulletin discusses particle size analysis in dry powder cell culture media production. It provides an overview of SAFC Biosciences' particle size analysis capabilities using sieving and laser diffraction, which measure particle size distributions from 10 nm to 3000 μm. It also discusses how particle size variability can affect material properties like flowability, mixing, and solubility. Statistical analysis of particle size distributions is important to fully characterize samples and communicate results. Understanding these relationships helps ensure a consistent, high-quality product.
This document summarizes nanoparticle tracking analysis (NTA), a technique used to characterize nanoparticles between 10-1000 nm in size. NTA works by analyzing the Brownian motion of nanoparticles in a liquid using light scattering and microscopy. It can determine particle size distribution, concentration, and other properties like surface charge. NTA has advantages over other techniques like measuring each particle individually and not requiring assumptions about optical properties. It has applications in fields like nanotoxicology, drug delivery, and materials characterization.
Accurately Measure Concentration of Nanoparticles in ColloidsHORIBA Particle
In this presentation, Dr. Jan "Kuba" Tatarkiewicz discusses the influence of various experimental parameters determined by different methods to measure the concentration of particles in colloids, especially in poly-dispersed and poly-material samples. Dr. Tatarkiewicz compares the principles of measurements for established technologies such as transmission electron microscopy (TEM), flow cytometry (FC), resistive pulse sensing (Coulter), nanoparticle tracking analysis (NTA) as well as improvements introduced to the latter by multispectral advanced nanoparticle tracking analysis (MANTA). Dr. Tatarkiewicz will present experimental results obtained for standardized samples and colloids encountered in research studies in diverse fields of interest.
View recorded webinars:
http://bit.ly/particlewebinars
Kanomax FMT and the Kanomax Group have unique aerosol expertise and can deliver powerful solutions to your nanoparticle measurement challenges. Let’s get started - connect with us today! Read the PDF of LNS Model 9310 Brochure!
This document discusses various methods for measuring particle size, including microscopy, sieving, sedimentation techniques, the Coulter counter method, and laser diffraction. It provides details on each method, such as the typical particle size ranges they measure, advantages and disadvantages of each approach.
This document discusses optimizing radiation monitoring sampling systems. It begins with background on effluent monitoring and key terms. The document then describes typical system configurations, factors that influence sampling efficiency like flow rate and particle size, and challenges with sampling points. It recommends analyzing the particle stream, developing a model to determine transmission efficiency based on particle properties, and setting the optimum flow rate. Maintaining and periodically reviewing systems is important to ensure representative sampling and proper dose measurement.
A New Nanoparticle Characterization Technology for CMP Slurries - SEMICON Chi...kanomaxfmt
This document describes a new nanoparticle characterization technology called the Liquid Nanoparticle Sizer (LNS) system. The LNS uses a proprietary nanoparticle nebulizer and an annular flow ion mobility spectrometer to aerosolize and characterize nanoparticles as small as 10 nm directly from liquid samples. This allows the LNS to provide high-resolution multi-modal particle size distributions, concentration measurements, and detect even small shifts in particle modes, addressing limitations of other in-situ characterization techniques. The nebulizer design differentiates between liquid-borne and aerosolized particles for more accurate sizing. The LNS provides a new method for online monitoring and process control of colloidal systems.
This document discusses various methods for measuring particle size, including laser diffraction, sedimentation, sieve analysis, electrical sensing, and microscopy. Laser diffraction has become one of the most widely used techniques as it has a wide dynamic range, is very fast and reliable, and can be used for dry powders, aerosols and emulsions without requiring calibration. The document reviews the advantages and disadvantages of different particle measurement techniques and emphasizes selecting the appropriate technique for the specific application.
Micromeritics is the study of particle size, shape, and other characteristics of small particles. Key methods to determine particle size include optical microscopy, sieving, sedimentation, and conductivity. Particle size affects properties like density, surface area, and flow. True density measures only the particle material, while bulk and tapped density account for interparticle voids. Flow properties like angle of repose, Carr's index, and Hausner ratio are important for uniform dosing in manufacturing.
Post CMP Clean Effluent End pointing and Monitoring with the LNS Systemkanomaxfmt
The document discusses using the Liquid Nanoparticle Sizing (LNS) system to monitor post-CMP cleaning effluent. It notes that CMP introduces contaminants that must be removed and that cleaning rate depends on particle size and slurry type. It then describes how the LNS allows real-time monitoring of particle size distribution and concentration in effluent. An experiment showed the LNS monitoring effluent from a wafer cleaned with different slurries, finding that cleaning rate varied with both particle size and slurry type. The LNS provides advantages over other methods like providing absolute concentration measurements.
A New Method for Determining the Size Distribution of Particles in CMP Slurrieskanomaxfmt
This document describes a new method for measuring the particle size distribution (PSD) of CMP slurries. The method uses a nebulizer to turn the slurry sample into an aerosol, which is then analyzed using a scanning mobility particle sizer (SMPS) to directly measure the number and size of individual particles from 3 nm to microns in diameter. This provides more accurate PSD measurements than traditional light scattering techniques. Test results show the method can detect multi-modal distributions and small changes in PSD, which has benefits for quality control and detecting contamination. The direct counting approach also avoids assumptions about particle shape or concentration weighting made by other methods.
The document discusses in situ particle system size analysis using various sensors and technologies:
- It describes several sensors (LSRA, PMS, ECA, PAT Sensor Systems, IPAS, APAS) that can provide undiluted, real-time measurements of particle and droplet sizes in processes.
- The key technology is 3D ORM (optical back reflection measurement) which uses a rotating, depth moving laser focus to measure particle sizes without needing sample dilution.
- In situ sensors allow monitoring of how particle systems change under actual process conditions compared to laboratory measurements on samples.
The document discusses gel permeation chromatography (GPC), which separates molecules by size as they pass through a column of porous beads. It describes the basic components and working principles of GPC, including how larger molecules have shorter residence times in the column than smaller molecules. Applications include determining relative molecular weight and molecular weight distribution of polymer samples, and separating substances like sugars, polypeptides, proteins, and polymers.
This document describes VISpION, an optical sensor system that uses fractal analysis to summarize complex materials or processes. It offers advantages over traditional sensors like working in ambiguous environments. The system calculates fractal dimensions to represent criteria like surface texture. Several potential applications are described, like engine block casting inspection. The document outlines purchase conditions and contact information.
The document discusses various methods for synthesizing nanomaterials, including top-down and bottom-up approaches. Top-down approaches begin with bulk materials and make them smaller through processes like lithography or milling. Bottom-up approaches build materials up from atomic or molecular levels using chemical synthesis or self-assembly. Specific bottom-up methods discussed include sol-gel processing, chemical vapor deposition, and chemical reduction of metal salts to produce colloidal nanoparticles. The document compares advantages and limitations of different nanomaterial synthesis techniques.
POLYMERS: MOLECULAR WEIGHT DETERMINATION GEL PERMEATION CHROMATOGRAPY /SECsana shaikh
Gel permeation chromatography (GPC) is used to determine the molecular weight distribution of polymers. GPC separates polymer molecules of different sizes as they pass through columns containing porous gel beads. Smaller molecules penetrate deeper into the pores than larger molecules, allowing separation by "effective size in solution." Detectors then provide data used to calculate number average molecular weight, weight average molecular weight, and molecular weight distribution. GPC is a convenient and common technique for characterizing polymer molecular weights.
This document provides a basic introduction to particle characterization, including defining what a particle is, reasons for measuring particle properties, important properties to measure such as size and shape, and concepts such as equivalent spheres and weighted distributions. Particle size is identified as one of the most important properties to measure due to its influence on material properties and applications. Different measurement techniques provide size distributions weighted by number, volume, or intensity.
Scale-up of high area filters for microfiltration of biological fluids - Poin...MilliporeSigma
Scale-up of high area filters for biological fluid microfiltration requires accounting for multiple factors to ensure reliable scaling. Key factors include variability in membrane and device properties, process conditions, and non-membrane pressure losses. High area filters have increased productivity but scaling is more complex. Proper device design and narrowing the performance range of small-scale devices improves scaling accuracy. Accounting for pleat density, height, and support permeability is important. High area filters scale linearly for plugging streams but non-linearly for streams where surface caking occurs. A scaling tool with identical pleat structure confirms expected performance.
The Coulter Principle for Cellular & Biological Applications Kira Shapiro
The document discusses how the Coulter Principle, which uses electrical impedance to measure particulate volume, can be used to characterize particles and aggregates in biological and cellular applications down to sizes as small as 0.4 microns, including uses in studying cell death, determining sperm health, and characterizing particles in protein formulations that may cause immunogenicity if not removed. It also outlines how the Coulter Principle competes favorably with other techniques for providing accurate counts of particulates below 10 microns in size for regulatory purposes.
A Multiscale Simulation Approach for Diesel Particulate Filter Design Based o...Ries Bouwman
This document discusses a multiscale simulation approach for diesel particulate filter design using OpenFOAM and DexaSIM. It describes reconstructing filter material microstructures from CT scans and simulating soot deposition, porosity, and permeability at the microscopic scale. These microscopic properties are then used in macroscopic simulations of the entire exhaust system to determine overall filter performance. The approach aims to provide a detailed link between microscopic material changes and resulting macroscopic filter behavior to improve design through simulations rather than experiments.
GENOA and HyperWorks Integration for Advance Composite Product Design and Ana...Altair
1. The document describes a methodology for multi-scale progressive failure analysis of composite materials using GENOA software. It involves modeling materials from micro-scale constituents up to the full product scale.
2. Case studies are presented applying the methodology to problems like composite tube crushing, chopped fiber characterization, and adhesive lap shear joint analysis. Good agreement was shown between simulations and tests.
3. The methodology accounts for defects from micro-scale like fiber waviness or agglomerations and predicts their effects on material properties and failure modes. Damage criteria are applied at multiple scales to simulate progressive failure.
Build the Next Generation of Apps with the Einstein 1 Platform.
Rejoignez Philippe Ozil pour une session de workshops qui vous guidera à travers les détails de la plateforme Einstein 1, l'importance des données pour la création d'applications d'intelligence artificielle et les différents outils et technologies que Salesforce propose pour vous apporter tous les bénéfices de l'IA.
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Kanomax FMT and the Kanomax Group have unique aerosol expertise and can deliver powerful solutions to your nanoparticle measurement challenges. Let’s get started - connect with us today! Read the PDF of LNS Model 9310 Brochure!
This document discusses various methods for measuring particle size, including microscopy, sieving, sedimentation techniques, the Coulter counter method, and laser diffraction. It provides details on each method, such as the typical particle size ranges they measure, advantages and disadvantages of each approach.
This document discusses optimizing radiation monitoring sampling systems. It begins with background on effluent monitoring and key terms. The document then describes typical system configurations, factors that influence sampling efficiency like flow rate and particle size, and challenges with sampling points. It recommends analyzing the particle stream, developing a model to determine transmission efficiency based on particle properties, and setting the optimum flow rate. Maintaining and periodically reviewing systems is important to ensure representative sampling and proper dose measurement.
A New Nanoparticle Characterization Technology for CMP Slurries - SEMICON Chi...kanomaxfmt
This document describes a new nanoparticle characterization technology called the Liquid Nanoparticle Sizer (LNS) system. The LNS uses a proprietary nanoparticle nebulizer and an annular flow ion mobility spectrometer to aerosolize and characterize nanoparticles as small as 10 nm directly from liquid samples. This allows the LNS to provide high-resolution multi-modal particle size distributions, concentration measurements, and detect even small shifts in particle modes, addressing limitations of other in-situ characterization techniques. The nebulizer design differentiates between liquid-borne and aerosolized particles for more accurate sizing. The LNS provides a new method for online monitoring and process control of colloidal systems.
This document discusses various methods for measuring particle size, including laser diffraction, sedimentation, sieve analysis, electrical sensing, and microscopy. Laser diffraction has become one of the most widely used techniques as it has a wide dynamic range, is very fast and reliable, and can be used for dry powders, aerosols and emulsions without requiring calibration. The document reviews the advantages and disadvantages of different particle measurement techniques and emphasizes selecting the appropriate technique for the specific application.
Micromeritics is the study of particle size, shape, and other characteristics of small particles. Key methods to determine particle size include optical microscopy, sieving, sedimentation, and conductivity. Particle size affects properties like density, surface area, and flow. True density measures only the particle material, while bulk and tapped density account for interparticle voids. Flow properties like angle of repose, Carr's index, and Hausner ratio are important for uniform dosing in manufacturing.
Post CMP Clean Effluent End pointing and Monitoring with the LNS Systemkanomaxfmt
The document discusses using the Liquid Nanoparticle Sizing (LNS) system to monitor post-CMP cleaning effluent. It notes that CMP introduces contaminants that must be removed and that cleaning rate depends on particle size and slurry type. It then describes how the LNS allows real-time monitoring of particle size distribution and concentration in effluent. An experiment showed the LNS monitoring effluent from a wafer cleaned with different slurries, finding that cleaning rate varied with both particle size and slurry type. The LNS provides advantages over other methods like providing absolute concentration measurements.
A New Method for Determining the Size Distribution of Particles in CMP Slurrieskanomaxfmt
This document describes a new method for measuring the particle size distribution (PSD) of CMP slurries. The method uses a nebulizer to turn the slurry sample into an aerosol, which is then analyzed using a scanning mobility particle sizer (SMPS) to directly measure the number and size of individual particles from 3 nm to microns in diameter. This provides more accurate PSD measurements than traditional light scattering techniques. Test results show the method can detect multi-modal distributions and small changes in PSD, which has benefits for quality control and detecting contamination. The direct counting approach also avoids assumptions about particle shape or concentration weighting made by other methods.
The document discusses in situ particle system size analysis using various sensors and technologies:
- It describes several sensors (LSRA, PMS, ECA, PAT Sensor Systems, IPAS, APAS) that can provide undiluted, real-time measurements of particle and droplet sizes in processes.
- The key technology is 3D ORM (optical back reflection measurement) which uses a rotating, depth moving laser focus to measure particle sizes without needing sample dilution.
- In situ sensors allow monitoring of how particle systems change under actual process conditions compared to laboratory measurements on samples.
The document discusses gel permeation chromatography (GPC), which separates molecules by size as they pass through a column of porous beads. It describes the basic components and working principles of GPC, including how larger molecules have shorter residence times in the column than smaller molecules. Applications include determining relative molecular weight and molecular weight distribution of polymer samples, and separating substances like sugars, polypeptides, proteins, and polymers.
This document describes VISpION, an optical sensor system that uses fractal analysis to summarize complex materials or processes. It offers advantages over traditional sensors like working in ambiguous environments. The system calculates fractal dimensions to represent criteria like surface texture. Several potential applications are described, like engine block casting inspection. The document outlines purchase conditions and contact information.
The document discusses various methods for synthesizing nanomaterials, including top-down and bottom-up approaches. Top-down approaches begin with bulk materials and make them smaller through processes like lithography or milling. Bottom-up approaches build materials up from atomic or molecular levels using chemical synthesis or self-assembly. Specific bottom-up methods discussed include sol-gel processing, chemical vapor deposition, and chemical reduction of metal salts to produce colloidal nanoparticles. The document compares advantages and limitations of different nanomaterial synthesis techniques.
POLYMERS: MOLECULAR WEIGHT DETERMINATION GEL PERMEATION CHROMATOGRAPY /SECsana shaikh
Gel permeation chromatography (GPC) is used to determine the molecular weight distribution of polymers. GPC separates polymer molecules of different sizes as they pass through columns containing porous gel beads. Smaller molecules penetrate deeper into the pores than larger molecules, allowing separation by "effective size in solution." Detectors then provide data used to calculate number average molecular weight, weight average molecular weight, and molecular weight distribution. GPC is a convenient and common technique for characterizing polymer molecular weights.
This document provides a basic introduction to particle characterization, including defining what a particle is, reasons for measuring particle properties, important properties to measure such as size and shape, and concepts such as equivalent spheres and weighted distributions. Particle size is identified as one of the most important properties to measure due to its influence on material properties and applications. Different measurement techniques provide size distributions weighted by number, volume, or intensity.
Scale-up of high area filters for microfiltration of biological fluids - Poin...MilliporeSigma
Scale-up of high area filters for biological fluid microfiltration requires accounting for multiple factors to ensure reliable scaling. Key factors include variability in membrane and device properties, process conditions, and non-membrane pressure losses. High area filters have increased productivity but scaling is more complex. Proper device design and narrowing the performance range of small-scale devices improves scaling accuracy. Accounting for pleat density, height, and support permeability is important. High area filters scale linearly for plugging streams but non-linearly for streams where surface caking occurs. A scaling tool with identical pleat structure confirms expected performance.
The Coulter Principle for Cellular & Biological Applications Kira Shapiro
The document discusses how the Coulter Principle, which uses electrical impedance to measure particulate volume, can be used to characterize particles and aggregates in biological and cellular applications down to sizes as small as 0.4 microns, including uses in studying cell death, determining sperm health, and characterizing particles in protein formulations that may cause immunogenicity if not removed. It also outlines how the Coulter Principle competes favorably with other techniques for providing accurate counts of particulates below 10 microns in size for regulatory purposes.
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2. Case studies are presented applying the methodology to problems like composite tube crushing, chopped fiber characterization, and adhesive lap shear joint analysis. Good agreement was shown between simulations and tests.
3. The methodology accounts for defects from micro-scale like fiber waviness or agglomerations and predicts their effects on material properties and failure modes. Damage criteria are applied at multiple scales to simulate progressive failure.
Build the Next Generation of Apps with the Einstein 1 Platform.
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ICPT CMPUG 2018: A New Method for Determining the Size Distribution of Particles in CMP Slurries by Kanomax FMT
1. Steve Kosier*, David Blackford*, Derek Oberreit*,
Jacob Quant*, Siqin He*, and Gary Van Schooneveld**
*Kanomax FMT, Inc. White Bear Lake, MN USA
**CT Associates, Inc. Eden Prairie, MN USA
www.KanomaxFMT.com
Steve.Kosier@KanomaxFMT.com
A New Method for Determining the
Size Distribution of Particles in CMP
Slurries
World Leader in Sub-20nm Particle Measurement
2. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 2
Presentation Overview
• Liquid Nanoparticle Sizer (LNS) Overview,
Specs, and Principle of Operation
• Kanolysis software and parametrized slurry
metrics
• LNS Use Cases
– Engineering - Insight into slurry particle size
distributions and direct observation of
agglomeration.
– Operations - Slurry production and quality
monitoring tool (outgoing and incoming) with
standardized reporting.
• Summary
3. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 3
Liquid Nanoparticle Sizer (LNS)
LNS resolves multimodal peaks and provides actual (not relative) concentration
• Current in-situ
methods (Dynamic
Light Scattering,
Laser Diffraction) are
limited.
– Unable to
accurately resolve
multimodal
distributions without
a priori knowledge
of the sample
properties.
– Cannot provide
absolute
concentration, only
relative
concentration.
Reference: Litchy, M. et.al.: Pittcon 2012
CMP Slurry SEM Image
LNS
Dynamic Light Scattering Laser Diffraction
4. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 4
LNS measures main slurry distribution,
not tails
6 - 360 nm for LNS
Particles
[#/mL]
Particle
Diameter [nm]1 10 100 1000 10,000
Kanomax LNS
Measurement Range
5. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 5
Kanomax Model 9310
Liquid NanoParticle Sizer System
Particle Counting
Particle Size
Classification
Particle
Aerosolization
• 6 nm to 360 nm
particles are
individually
measured
regardless of
shape or
composition.
• 64 size bins per
decade are
sequentially
characterized.
• Complete
concentration vs.
particle size
distribution in
about 5 minutes.
• No a priori
assumptions about
the particles.
US Patents 8,272,253 and 8,573,034 cover this technology and are licensed to Kanomax FMT.
6. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 6
Many Advantages of the LNS System
Highly sensitive since individual particles are
counted.
Actual particle concentrations, not relative
concentrations, are measured directly.
Shape of the particle size distribution is
not assumed.
Technique is independent of optical
properties of the particles.
Suitable for on-line or off-line measurements.
Particle Counting
Particle Size
Classification
Particle
Aerosolization
7. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 7
Real Slurries often have several modes
Particle populations are generally log-normal
• Particle Populations
often follow Log-
Normal Distribution
• Log normal
distribution defined
by three variables
– Peak Diameter
– Geometric
Standard Deviation
– Total integrated
concentration
• Multimodal and
skewed distributions
not accurately
represented by
single mode
statistics
8. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 8
LNS handles multi-mode slurries
Multimodal Curve Fitting gives Parametrized Slurry Metrics
• Automatically
generated in Kanolysis
– Sum of single
distributions fit to raw
data
– Individual modes may
be defined by
separate log-normal
distributions
• Peak Diameter
• Geometric Standard
Deviation
• Total integrated
concentration
• Parametrized slurry
metrics are powerful
for slurry grading and
monitoring.
9. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 9
Kanolysis software streamlines
measurements
Fully customizable, but can be automated for routine analyses
System
manager
defines the
LNS system
9Intel CMP Consumables Metrology WorkshopIntel - Metrology Tool Vendor Confidential
Methods
define system
variables for a
measurement
Particle
Size
Distribution
data
displayed in
real time
Analysis
contains a
series of
methods used
for characteri-
zation
10. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 10
Engineering Use: Slurry Turnover Limit
Size profile vs number of slurry turnovers shows onset of agglomeration
• After too many slurry turnovers, the number of large diameter particles
increased to an unacceptable “Bad” limit. Peak Diameter also shifted larger.
Likely due to agglomeration effects.
• The LNS system was able to resolve this subtle difference
– Detect small shifts in individual modes
– Detect changes in ratios of mode concentrations
– Detect changes in mode shape (e.g. increased dimers)
Bad
Good
11. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 11
Operations Use: Standardized Reporting
Concise report summarizing the important aspects of the slurry sample
• Many important uses
in an industrial
setting
– Engineers can set
up standard
analyses that
technicians can run.
– Standardized slurry
metrics.
– Outgoing or
Incoming Quality
Control.
– Line monitor and
SPC.
12. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 12
Summary
• The LNS 9310 System from Kanomax
FMT is a versatile and easy to use tool
for advanced CMP Slurry
characterization and control.
– 6 nm to 360 nm particles are individually
measured regardless of shape or
composition.
– Complete concentration vs. particle size
distribution in about 5 minutes.
– No a priori assumptions about the
particles.
– Measures the main slurry distribution,
not the tail.
• The LNS System is useful in both
engineering and operations
environments.
• Kanolysis software provides flexibility
and workflow automation to boost
productivity.
Particle Counting
Particle Size
Classification
Particle
Aerosolization
15. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 15
Bibliography
Grant DC (2008). “A New Method for Determining the Size Distribution of the Working Particles in CMP Slurries,”
presented at the 2008 CMP Users Conference, sponsored by Levitronix.
Don Grant and Uwe Beuscher (2009), “Measurement of Sub-50 nm Particle Retention by UPW Filters”, Ultrapure Water
Journal, 26(11):34-40.
Blackford D and DC Grant (2009). “A proposal for measuring 20-nm particles in high-purity water using a new technology,”
Ultrapure Water, January 2009.
Grant DC, DC Chilcote and U Beuscher (2012). “Removal of 12 nm particles from UPW by a combination of Ultrafiltration
Modules and Microfiltration Cartridges,” Ultrapure Water Journal, May/June 2012.
Rastegar, A (2013). “Particle Control Challenges in UPW ”, presented at 2013 UPW Micro Conference
Patents US 8,272,253; US 8,573,034; US 7,852,465; Other patents pending
15Intel CMP Consumables Metrology WorkshopIntel - Metrology Tool Vendor Confidential
16. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 16
LNS Workflow
Easy sample preparation and automated analysis routines
Dilute
Sample to
0.1%
solids
Enter LNS
System
Information
Enter
Method
Parameters
Add
Methods to
Analysis
Rinse and
Insert
Tubing in
Sample
Vial
Measure
Particle Size
Distributions
Calibrate
Aerosolization
Flow Rate
Analyze
Data
Replicate samples or
samples measured at
varying dilution ratios or
other system parameters
17. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 17
Complex modal distributions are fitted
easily
Can use Number, Volume, Surface Area, or Mass Weighting
• Able to resolve multiple overlapping modes
18. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 18
Aerosolization
Sample Concentration Effects
• Each nebulized droplet
contains the same
concentration of Dissolved
Non-Volatile Residue
• Size of Precipitated Non-
Volatile Residue particle
proportional to the parent
droplet size
• High concentration of
Dissolved Non-Volatile
Residue may overlap native
particle size distribution
• Artifact dimers form when
two separate particles are
coincident in a single droplet
19. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 19
Liquid Nanoparticle Sizer (LNS)
Concentration Effects- Identifying artificial dimers
• Artificial dimers are
caused by the
presence of two
discrete colloid
particles within a single
droplet
• The probability of a
single droplet
containing multiple
particles is proportional
to droplet diameter and
colloid concentration:
P2+ C x Ddroplet
3
• Eliminating large
droplets allows for
higher concentrations
of discrete aerosolized
colloid particles
Native dimer Artifact dimer
20. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 20
Liquid Nanoparticle Sizer (LNS)
Principle of Operation – Nanoparticle Nebulizer
• Nanoparticle Nebulizer provides online dilution and
sample aerosolization
• Designed to nebulize droplets with a small peak
diameter and reduced concentration of large droplets
• Software controls dilution ratio by varying sample and
dilution water flow
21. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 21
Liquid Nanoparticle Sizer (LNS)
Principle of Operation – Ion Mobility Spectrometer
• Annular Flow Ion
Mobility Classifier
(AFIMC) acts as a
“bandpass” filter
based on particle
size
• Measurement of
particle
concentrations over
a range of selected
sizes provides
particle size
distribution
information
• Data inverted to
account for
charging and
detection efficiency
of the aerosol
particle counter
22. A New Method for Determining the Size Distribution of Particles in CMP Slurries,
Kanomax FMT, Confidential and Proprietary, Slide 22
Liquid Nanoparticle Sizer (LNS)
Principle of Operation - Condensation Particle Counter
• Used as particle detector
at the exit of the AFIMC
• Heated Saturator adds
butyl alcohol vapor to the
aerosol
• Cooled Condenser
causes the butyl alcohol
vapor to become
supersaturated
• Supersaturated butanol
vapor condenses onto
particles in the aerosol
making large droplets
• Droplets counted optically
using light scattering
(“Dry” particles are not
detected)