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Optical Resonant Frequency Detection Systemfor Mass-
Sensing MEMS Resonators
NNIN REU Intern: Kasia Gibson, Bioengineering, Northeastern University
NNIN Principal Investigator: Lih Y. Lin, Electrical Engineering, University of Washington-Seattle
NNIN Mentors:
 Ethan Keeler,Electrical Engineering, University of Washington-Seattle
 Peifeng Jing, Electrical Engineering, University of Washington-Seattle
 Conner Ballew, Electrical Engineering, University of Washington-Seattle
 Jingda Wu, Electrical Engineering, University of Washington-Seattle
Contacts:Gibson.kasia@gmail.com, lylin@uw.edu, e.keeler@live.com, peifengjing@gmail.com,
ckballew@uw.edu, albuswu@gmail.com
Abstract
Photonic crystal nanostructures are essential in combining two important technologies: optical
tweezers and MEMS resonators to allow effective trapping and enhanced-precision
measurements of cell mass. MEMS resonators measures the cell mass by detecting the resonant
frequency change of the resonant beam. Photonic crystal optical tweezers are applied to improve
the mass sensing capability of MEMS resonators by fixing the cell position with low light
intensity. This enables the investigation of a cell’s biophysical properties. A detection system
consists of a split photodiode and detection circuitry was built to measure the resonant
frequency of a micro-machined resonator. A laser beam incidents onto the vibrating resonator
and produces an optical deflection signal (ideally resembling a sinusoidal wave) upon hitting the
split photodiode. By using the circuit design software, Multisim, an effective circuit schematic
was created that would convert the output current of both photodiodes to an adequate voltage to
effectively view and measure the resonant frequency. During this process, simulations were
conducted, so that the behavior of the circuit could be predicted, before actual assembly. With
the usage of an Arduino microcontroller and programming software, the frequency of the
circuit’s sinusoidal wave could then be measured.

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GibsonUWA-Abstract-FINAL

  • 1. Optical Resonant Frequency Detection Systemfor Mass- Sensing MEMS Resonators NNIN REU Intern: Kasia Gibson, Bioengineering, Northeastern University NNIN Principal Investigator: Lih Y. Lin, Electrical Engineering, University of Washington-Seattle NNIN Mentors:  Ethan Keeler,Electrical Engineering, University of Washington-Seattle  Peifeng Jing, Electrical Engineering, University of Washington-Seattle  Conner Ballew, Electrical Engineering, University of Washington-Seattle  Jingda Wu, Electrical Engineering, University of Washington-Seattle Contacts:Gibson.kasia@gmail.com, lylin@uw.edu, e.keeler@live.com, peifengjing@gmail.com, ckballew@uw.edu, albuswu@gmail.com Abstract Photonic crystal nanostructures are essential in combining two important technologies: optical tweezers and MEMS resonators to allow effective trapping and enhanced-precision measurements of cell mass. MEMS resonators measures the cell mass by detecting the resonant frequency change of the resonant beam. Photonic crystal optical tweezers are applied to improve the mass sensing capability of MEMS resonators by fixing the cell position with low light intensity. This enables the investigation of a cell’s biophysical properties. A detection system consists of a split photodiode and detection circuitry was built to measure the resonant frequency of a micro-machined resonator. A laser beam incidents onto the vibrating resonator and produces an optical deflection signal (ideally resembling a sinusoidal wave) upon hitting the split photodiode. By using the circuit design software, Multisim, an effective circuit schematic was created that would convert the output current of both photodiodes to an adequate voltage to effectively view and measure the resonant frequency. During this process, simulations were conducted, so that the behavior of the circuit could be predicted, before actual assembly. With the usage of an Arduino microcontroller and programming software, the frequency of the circuit’s sinusoidal wave could then be measured.