1. Ammonia and Acids with
one analyzer
Sensitivity at low ppb/ppt level
Web based User interface
Patented DMS-AIMS technology
Real-time AMC monitoring
for Ammonia and Acids
ENVI-AMC
For your SAFETY

2. The ENVI-AMC™ from Environics
provides real-time monitoring of
airborne molecular contamination
(AMC) in semiconductor processing.
The ENVI-AMC is designed for ultra-
low level detection of Ammonia and
Acids in ambient air, air handlers or
DUV process tools. The ENVI-AMC can
be configured to sample from 1 to 36
different locations. The analyzer is based
on patented DMS-AIMS technology.
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ELECTROMETER
ELECTROMETER
Real-time AMC monitoring
for Ammonia and Acids
ENVI-AMC
KEY FEATURES
ŸŸ Direct low ppb/ppt level measurement
ŸŸ Patented DMS-AIMS technology
ŸŸ Complete technical and service support
ŸŸ Continuous, unattended operation
ŸŸ Low maintenance for maximum uptime
ŸŸ No reagents, paper tape, or other
expensive consumables required for
operation
APPLICATION
ŸŸ Semiconductor Fabrication
ŸŸ Semiconductor Air Monitoring
ŸŸ Solar and Flat Panel Production
ŸŸ DUV Photoresist Development
ŸŸ High Purity Filter Manufacturing
ŸŸ Pharmaceutical Production & Sterilization
ENVI-AMC Real-time AMC monitoring for Ammonia and Acids

3. WEB INTERFACE
AUTOMATION SYSTEM
OTHER I/O’S
FILTER EFFICIENCY
PRODUCTION TOOLS
AMBIENT MONITORING
ENVI-AMC Real-time AMC monitoring for Ammonia and Acids
AMC monitoring in
Semiconductor industry
Airborne contaminants like ammonia and acids
cause expensive, yield-reducing and quality
degrading problems such as film and trace
corrosion, T-topping, bridging and unwanted
doping of silicon in semiconductor industry.
The Environics ENVI-AMC is designed for
ultra-low level detection of contaminants in
ambient air, air handlers or DUV process tools.
It is the most effective method for monitoring
pre and post filter efficiency as well as litho
tool environments, bay-chase areas and mask
storage areas.
The ENVI-AMC Analyzer is virtually drift free
and will be factory calibrated for the compounds
of interest for maximum accuracy and reliability.
Simple design without any moving parts
guarantee low initial investment and the lowest
maintenance and downtime of any current
analyzer system.
Detection based on AIMS2-DMS
The Sensor of ENVI Analyzer is based on AIMS2-
DMS technology developed by Environics.
AIMS2-DMS is an ion mobility spectrometer
which combines 2nd
order aspiration ion mobility
spectrometry with differential ion mobility
technique.
Ammonia and Acids with same
analyzer
AIMS2-DMS technology enables monitoring
of Ammonia and Acids with single analyzer.
ENVI-AMC can also detect hazardous chemical
contaminants at far lower concentrations than
traditional analyzers and react in real-time.
This gives the operator a longer safe response
window to take corrective action.
ENVI-AMC does not require the use of paper
tape, pre-concentrators or chemical reagents.
It also does not need radioactive source wipe
tests or radiation licenses required with older
monitoring systems.
User Interface and connectivity
ENVI-AMC analyzer can be connected to the
multipoint sampler or can be used as a single
point analyzer. ENVI-AMC rack analyzer can be
integrated to the part of existing measurement
systems. The measurement results, history data,
manuals and settings are easily available from
analyzers own web based user interface and
with necessary industrial interfaces like RS232,
USB and ethernet. Measurement results can be
sent to external systems with 4-20mA output.
There are also relay outputs and digital inputs
available.

4. UI optimized for different devices
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TECHNICAL DATA
Measurable compounds Ammonia & Acids
(NH3
, Cl2
)
New compounds continu-
ously under development
(HCl, SO2
, HF, H2
S ex-
pected 2015)
Detection principle DMS-AIMS
Ionization Am-241, No lisence or
wipe test requiers
Sensitivity Low ppb/ppt range
0-50ppb, depending on
compounds
Measurement time seconds
Operating temperature 15 to +30°C (59 to 86 °F)
Humidity 30% to 50% RH (operat-
ing)
0% to 90% (storage)
Warm up time 20 minutes
Dimensions Approx. 178 x 440 x 517
mm
Approx. 7,01 x 17,32 x
20,36 in.
Weight Approx. 15 kg
COMMUNICATION
Data output • RS232, 4-20 mA
• Ethernet RJ45
• USB
• 4 digital inputs
• 8 relay outputs
• 4 pcs 4-20mA outputs,
extendable
User Interface • Web browser based User
Interface
• LCD Display
APPROVALS
• EMC
• CE
UTILITY REQUIREMENTS
Power 110-230 VAC (50-60 Hz)
Clean Dry Air
(CDA)
• Flow rate: 10l/min
• Dew point: -40°C
(-104 °F)
• Pressue: 300KPa preci-
sion regulated
• Particle free (1μm)
• No hydrocarbons
Environics Oy
Sammonkatu 12
P.O. Box 349
FI-50101 Mikkeli
FINLAND
tel. +358 201 430 430
fax. +358 201 430 440
sales@environics.fi
www.environics.fi