2. ACS30MS
Die Characteristics
DIE DIMENSIONS: PASSIVATION:
Size: 2390µm x 2390µm (94 mils x 94 mils) Type: Phosphorous Silicon Glass (PSG)
Thickness: 525µm ±25µm (20.6 mils ±1 mil) Thickness: 1.30µm ±0.15µm
Bond Pad: 110µm x 110µm (4.3 x 4.3 mils)
SPECIAL INSTRUCTIONS
METALLIZATION: AI Bond VCC First
Metal 1 Thickness: 0.7µm ±0.1µm
ADDITIONAL INFORMATION:
Metal 2 Thickness: 1.0µm ±0.1µm
Worst Case Current Density: <2.0 x 105 A/cm2
SUBSTRATE POTENTIAL Transistor Count: 86
Unbiased Insulator
Metallization Mask Layout
ACS30MS
B A VCC
(2) (1) (14) NC
C (3) (12) H
D (4) (11) G
NC NC
E (5) NC
(6) (7) (8) NC
F GND Y
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