Whiteboard2Boardroom showcases innovations from Kansas City area universities, hospitals and corporations. W2B is a program on UMKC Innovation Center.

1. Liquid-based Atomic Layer
Deposition
February 26, 2019

2. What is the problem?
• COST
• High cost of Atomic
Layer Deposition (ALD)
• ALD has many applications including:
– Lithium batteries – electrode coatings
– Solar cells
– Microelectronics
– Fuel cells
– Biomedical applications
– Filtration/remediation

3. How does product/service solve problem?
• Metal oxide
powders are
coated to improve
performance and
stability
• This invention uses a liquid organic solvent for the
chemical precursor coating
• Current state of
the art is vapor
deposition

4. What is the market use?
• Growth in ALD driven by component
miniaturization
• ALD is largely present in almost all-high end
products in industries such as:
– Cathode powder coatings (e.g. niobia on NCA, NMC)
– Microelectronics (e.g. CNTs coated with ZnO) = 40%
– Solar cells (e.g. CNTs coated with TiO2)
– Fuel cells
– Biomedical applications
– Flexible electronic devices

5. What competition exists?
• Adeka Corp, Applied Materials Inc, ASM
International N.V.,ATMI Inc. Beneq Oy,
Cambridge NanoTech Inc, Hitachi Kokusai
Electric Inc, Kurt J. Lesker Co, Metryx Ltd,
Novellus Systems Inc,Oxford Instruments plc,
Picosun Oy, Praxair Technology Inc, Sigma-
Aldrich Co. LLC
• $1.1 B world wide market
• 21.5% CAGR
• Aluminum oxide coatings = $330 M

6. What is the status of the intellectual property?
• PCT pending
• Inventor: Yangchuan (Chad) Xing

7. What is the stage of development?
• Investigate feasibility of non-battery
applications
• Inventor Chad Xing wants to start a
company to pursue the battery
application

8. What is needed for further development?
• Management with expertise in materials
• SBIRs
• Investment