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Porous ceramic vacuum chuck

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Wilson Wu

Porous Ceramic Vacuum Chuck Table for Semiconductor Wafer Handling

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POROUS CERAMIC VACUUM CHUCK APPLICATIONS: WAFER DICING WAFER GRINDING WAFER INSPECTION THIN FILM EPITAXY MICROFABRICATION … HIGH FLATNESS AND PARALLILSIM UNIFORM CHUCKING FORCE FLEXIBLE DESIGN AND FAST DELIVERY WWW.CHUCK-TABLE.COM

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Porous ceramic vacuum chuck

  • 1. POROUS CERAMIC VACUUM CHUCK APPLICATIONS: WAFER DICING WAFER GRINDING WAFER INSPECTION THIN FILM EPITAXY MICROFABRICATION … HIGH FLATNESS AND PARALLILSIM UNIFORM CHUCKING FORCE FLEXIBLE DESIGN AND FAST DELIVERY WWW.CHUCK-TABLE.COM