This document summarizes an attempt to assemble a prototype hybrid fabrication system combining microelectromechanical systems (MEMS) and additive manufacturing (AM). It aims to leverage the strengths of both approaches to create micromirrors that can achieve both high performance and a wide range of movement. Specifically, single crystal silicon micromirrors fabricated using MEMS are combined with 3D printed polymer transmission structures to eliminate constraints of using just one material. The initial proof of concept demonstrated the hybrid approach is feasible and could enable applications requiring both speed and range of movement like optical tweezers additive manufacturing. Next steps include building an array of seven such mirror assemblies.

1. Scott Merry, North Seattle College
This work was performed in part under the auspices of the U.S. Department of Energy by Lawrence Livermore National Laboratory under Contract DE-AC52-07NA27344. LLNL-POST-658097.
This work was supported in part by the U.S. Department of Energy, Office of Science, Office of Workforce Development for Teachers and Scientists (WDTS) under the Community College Internships Program (CCI).
Attempt assembly of prototype hybrid fab
• MEMS – microelectromechanical systems
• AM – additive manufacturing
1.Purpose
Summary
Single material construction of
controllable micromirrors for directing light
forces a choice between either high
performance and limited movement transmission geometries, or
lower performance and wider range of shapes.
We eliminate constraints by using separate MEMS and AM parts,
allowing customization of mirror speed and range for different
applications. 1mm hexagonal mirrors are single crystal silicon,
while polymer transmission structures are 3D printed onto the
mirror underside using projection microstereolithography. An
electronic comb driven paddle on a PCB will form the base.
We built and tested a way to handle and place components.
• Hybrid AM/MEMS assembly is feasible
• Single material limits performance to either
speed or range
• Hybrid enables both
2.Results
• Proof of concept for further research
• Next step: array of 7 assemblies
• Applications: optical tweezers additive
manufacturing, communications, defense
3.Impact
Vacuum chuck holds assembly for precise placement onto base.
Note flexure of transmission structures under load, demonstrated
by applying a downward force to the assembly.
Specially fabricated steel vacuum chuck (above) mounted on
moveable xyz stage lifts entire assembly from inverted syringe.
1mm
The next challenge will be
aligning an array of 7
micromirror assemblies.
Optical tweezers based 3D
printing enables arrangement
of multiple material particles
in 3-space
Hexagonal mirror material is silicon crafted using MEMS methods.
Polymer transmission structures are 3D printed using AM.
Plastic tube on end of syringe needle is lowered over inverted
mirror. Vacuum is applied to lift mirror and hold it in the tube.
Syringe is then inverted and vacuum chuck lifts mirror from top
(see illustration below).
Robert Panas, Chris Harvey, Will Smith, Julie Jackson, LLNL Jonathan Hopkins, UCLA