7. THIN FILM DEPOSITION
• A thin film is a layer
of materials ranging
from monolayer to
several micrometer
thickness
• It involves deposition
of individual
molecules or atoms
8. LITHOGRAPHY PROCEDURE
• Lithography consist of patterning substrate by
employing the interaction of beams of photons
or particles with materials
9. PHOTOLITHOGRAPHY
• PHOTO meaning light
• LITHO meaning stone
• GRAPHY meaning write
That is ‘’PRINTING WITH LIGHT’’
Alphonse Poitevin invented this technique in 1855
10.
11. ETCHING
• Process that removes material from surface after
lithography is done
• Etching removes those part of substrate which
was not masked
• It also removes the part of resist which was
exposed to light to give fine patterns.
13. Application of nanofabrication
“Size matters”
Use in manufacturing of PCB, Microcontrollers, MOSFET,
MEMS which are used in large scale in smartphones,
computers and other electronic devices
14. References
1. Introduction to Nanofabrication by ErliChen,Center for
Imaging and Mesoscale Structure Harvard University
2. Nano-fabrication,Richard Langford richard.langford@tcd.ie
Ex 2006
3. M.D. Austin H. Ge W. Wu M. Li Z. Yu D. Wasserman S.A.
Lyon S‥Y Chou "Fabrication of 5nm linewidth and 14nm
pitch features by nanoimprint lithography" <em>Appl. Phys.
Lett.</em> vol. 84 no. 26 pp. 5299 2004.