A comparison among MEMS thermal accelerometers reported from 1997 to 2021. https://www.orkg.org/orkg/comparison/R139972

1. Characteristics and Performance of MEMS
Thermal Convective Accelerometers
Mariana Amorim Fraga

2. Characteristics and Performance of MEMS Thermal
Convective Accelerometers
https://www.orkg.org/orkg/comparison/R139972

3. Visualization 1
https://www.orkg.org/orkg/comparison/R139972

4. Visualization 2
https://www.orkg.org/orkg/comparison/R139972

5. References
- Mukherjee, Rahul, Joydeep Basu, Pradip Mandal, and Prasanta Kumar Guha. “A Review of Micromachined Thermal Accelerometers.” Journal
of Micromechanics and Microengineering 27, no. 12 (November 16, 2017): 123002. doi:10.1088/1361-6439/aa964d.
- Wang, Xiaoyi, Wei Xu, Huahuang Luo, and Yi-Kuen Lee. “Theoretical Modeling, Numerical Simulations and Experimental Study of Micro
Thermal Convective Accelerometers.” Journal of Microelectromechanical Systems 28, no. 5 (October 2019): 790–798.
doi:10.1109/jmems.2019.2930065.
- Wang, Xiaoyi, Yi-Kuen Lee, and Wei Xu. “A Reliable Liquid-Based CMOS MEMS Micro Thermal Convective Accelerometer With Enhanced
Sensitivity and Limit of Detection.” Journal of Microelectromechanical Systems (2021): 1–7. doi:10.1109/jmems.2021.3087617.