This document discusses the development of e-beam lithography gold nanoparticle arrays for biosensor applications. It begins by explaining why biosensors are important for healthcare and environmental safety due to their potential for high performance, selectivity, sensitivity, low cost and fast detection. It then provides details on the fabrication process for the gold nanoparticle arrays using e-beam lithography on glass substrates. This includes steps like PMMA coating, e-beam exposure, development and gold deposition. Finally, it discusses future applications like developing biosensors for disease detection and cooperating with biochemistry groups to integrate recognition elements.

1. E-beam lithography gold nanoparticle
arrays for nano-biosensor
development
Maher Z. Ahmed
PhD research project

2.  Health care
 Environment safety
Why biosensor?
High performance bio and chemical sensor
Selective
Sensitive
Easy to use
Cheap
Fast

3. What is a biosensor?

4. •Enhance selectivity 
very high selective chemistry.
DNA strains or specialist
enzyme
The advanced new sensors Researches
•Enhance sensitivity 
•improving coupling between the chemical
detection and transducer
•improving transducer
Physics of nanoparticles offers a promising future in that field.
Top-Down approach Bottom-up approach

5. •Enhance sensitivity Signal Acquisition
The advanced new sensors Researches
advanced technology in optical spectroscopy instrumentations

6. Au
catcher or probe oligonucleotides
biotin-coupling group
S
Streptavidin,
biotin
biotin-terminated
thiol
biotin
Glass
substrate
complementary oligonucleotide target
Light
My Target biosensor?

7. Healthy Patient
Haes AJ, Chang L, Klein WL, Van Duyne RP. 2005. Detection of a biomarker
for Alzheimer’s disease from synthetic and clinical samples using a
nanoscale optical biosensor. J. Am. Chem. Soc. 127:2264–71

8. Songbo Xu PhD. thesis
Surface Plasmon Spectroscopy (SPS) to monitor the
bio chemistry reaction

9. Songbo Xu PhD. thesis
W. Knoll et al. : Colloids and Surfaces
A: Physicochem. Eng. Aspects 161
(2000)

10. 1- e-beam lithography system is a LEO 1530 field emission
scanning electron microscope (FE-SEM)
2- Solitec 5110 Spinner/Developer
3-Custom e-beam Deposition (Hoser)
4- Zeiss Axioskop2 Mat Microscope
E-beam lithography Nano gold particle arrays
Fabrication and characterization (NanoFab)

11. E-beam lithography Nano gold particle arrays
e
_
Glass substrata
PMMA
E-beam lithography
Developing
Chromium
Chromium
Gold
Lift Off

12. Signal Acquisition
Old sample cuvette
Needs for
New design
Minimum Volume target

13. Who Wants to Be a Millionaire?
Future Applications for our
optimum system

14. Cooperation with Dr. Bulent Mutus, Biochemistry Research
Group, U. Windsor
Au
AU
type 2 diabetes
indications enzyme
Cutting the double S-S bond
Type 2, where the body makes insulin but
cannot use it properly
Absorbance vs Wavelength in 100 μM GSH
0
0.05
0.1
0.15
0.2
0.25
0.3
400 450 500 550 600 650 700 750 800
Wavelength (nm)
Absorbance(a.u.)