The NGS 3500L provides low cost automated defect detection and classification as well as dimensional metrology for MEMS, Semiconductors, wafers, optics and other parts with small features. It also has capability for measuring roughness and 3D dimensions.

1. NGS 3500 Advanced Metrology System Hologenix, Inc. Huntington Beach, CA USA 714-903-5999 [email_address]

2. Optical Defect Detection, Classification, and Dimensional Metrology

4. Defect Detection – SiC Wafer – 10X Objective

5. Defect Detection – SiC Wafer – 10X Objective

6. Pattern Masking/ Defect Detection - Slider

7. Missing / Faint Object Detection - Slider The system can detect, and classify any missing pattern/ object and indicate to what degree it is fainted or partially missing.

9. Graphical Data/ Defect Maps/ Image Archival

16. User Interface