CV, Research and Teaching Statements

1. CURRICULUM VITA
Last Name, Name: AKBAR, Demiral
Birth Date : 05 October 1970
Present Address : Hacettepe University Technology Development Zone
Management Inc., Advance Technology Research Center
Beytepe Campus, 06800-Beytepe/Ankara
Tel. (Mobile) : +90 (546) 216 5421
E-mail : dakbar@hacettepe.edu.tr OR demiralakbar2014@gmail.com
EDUCATION
Ph.D. Middle East Technical University, Department of Physics,
Ankara, Turkey, (September 2001- March 2006). Dissertation:
“The Non-uniform Argon DC Glow Discharge System
parameters Measured with Fast Three Couples of Double Probe”
M.Sc. University of Mosul, Department of Physics,
(September 1994- October 1996). Dissertation: “Experimental
Study of Plasma Parameters in Air and Nitrogen Glow discharge
Using Probe Technique”
B.Sc. University of Mosul, Department of Physics.
(September 1989- July 1993)
AWARDS
1993 Highest ranking student in the physics department.
2005 Graduate Student Award for Outstanding Research
Contributions, 14th
SMMIB.
2009 Plasma Antenna Applications. Two Awards: From Defense
Ministry and one from Industry
ACADEMICS POSITIONS HELD
• ASSOCIATE PROF. : Hacettepe University Teknopolis, Advance Technology research
Center, Ankara, Turkey, (January 2013- )
• HONORARY ASSOCIATE: University of Wisconsin Department of Electrical and Computer
Engineering, Madison, Wisconsin, USA, (August 2011-
December 2012)
• ASSISTANT PROF. : Çankırı Karatekin University, Department of
Physics, Çankırı, Turkey, (August 2010- September 2011).
• RESEARCH ASSOCIATE : Middle East Technical University, Department of
Physics, Ankara, Turkey, (February 2008- August 2011).
Forschungszentrum Jülich GmbH-Germany (1st
Nov. 2004 -1st
March 2005).
• POST DOCTORAL : Middle East Technical University, Department of
Physics, Ankara, Turkey, (July 2006- February 2008).
• TEACHING ASSISTANT : Middle East Technical University, Department of
Physics, Ankara, Turkey, (September 2001 - August 2006).
• TEACHER : Private High School, Ankara, Turkey, (December 1998
- September 2001).
• INSTRUCTOR : Technical Institute of Kirkuk, Department of Electric &
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2. Electronic (September 1997- August 1998).
PUBLICATIONS
IN JOURNALS OF SCIENCE CITATION INDEX
1. U. Gungur, S. Bilikmen, and D. Akbar, “Comparison of nitrogen electron-heating mode
transitions at (13.56 and 40.68) MHz RF capacitively coupled plasmas”, Submitted 2015.
2. D. Akbar, “Surface Modification of Polypropylene (PP) Using Single and Dual High Radio
Frequency Capacitive Coupled Argon Plasma Discharge”, Applied Surface Science, Accepted
2015. DOI: 10.1016/j.apsusc.2015.11.191.
3. D. Akbar, “Investigation of single and dual RF capacitively coupled nitrogen plasma discharges
using optical emission spectroscopy” IEEE Transaction on Plasma Science, Vol. 42, No.8,
P.2058-2064, DOI: 10.1109/TPS.2014.2331337 August 2014.
4. D. Akbar and U. Gungur “Study of high radio frequency plasma discharge effects on carbon
fiber using Raman spectroscopy” Surface Coating Technology, Vol.240, P. 233-242, 2014.
5. U. Gungur, S. Bilikmen, and D. Akbar “High frequency capacitively coupled RF plasma
discharge effects on the structure of PAN-based carbon fiber” J Theor Appl Phys., Vol. 8, P.127-
135, DOI: 10.1007/s40094-014-0127-7, 2014.
6. D. Akbar and H. Altan, “Characterization of polypropylene treated under dual-RF plasma using
terahertz time-domain spectroscopy” J Mater Sci., Vol. 48, P.8209-8214, DOI 10.1007/s10853-
013-7632-y, 2013.
7. A.A. Azooz, D. Akbar, S. Bilikmen, “Langmuir double probe RF plasma compensation using
simulation method” Acta Technica, Vol. 55, P. 357, 2010.
8. D. Akbar, S. Bilikmen,” The Influence of a Longitudinal Magnetic Fields on a Non-
Uniform Positive Column” Contribution to Plasma Physics, Vol. 47, p.710, 2007.
9. I.R. Rafatov, D. Akbar, and S. Bilikmen, “Modelling of non-uniform DC driven glow
discharge in argon gas” Physics Letters A, Vol. 367, p. 114, 2007.
10. D. Akbar and S. Bilikmen, “Ambipolar diffusion in direct- current positive column with
variations in radius of discharge tube” Chinese Physics Letters, Vol.23, No.9, p. 2498, 2006.
11. D. Akbar, S. Bilikmen, and H. Akbar, “Spatial variations of non-uniform argon glow
discharge” Czechoslovak Journal of Physics, Vol.56, 601, 2006.
12. D. Akbar and S. Bilikmen, “Non-uniform axial electric field in argon glow discharge plasma”
Chinese Physics Letters, Vol.23, No.25, p.1234, 2006.
IN CONFERENCE PROCEEDINGS:
1. S.H. Kim, D. Akbar, J.L. Shohet, B.N. Moon, W.J. Choi, Y.M. Sung “Numerical Investigation
of Optimum Conditions for Magnetic Neutral Loop Discharge Plasma Production”, AVS 59th
Annual International Symposium and Exhibition, October 28-November 2, Tampa, Florida, USA,
2012.
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3. 2. E. Aydin, N. D. Sankir, H. Unver, E. Uluer, D. Akbar, S. Bilikmen “ Effects of Dual RF Plasma
Treatment on Polyimide Films Used as Flexible Substrate for Solar Cell Applications”, IUPAC
World Polymer Congress, June 24- 26, Blacksburg, VA., USA, 2012.
3. D. Mansuroglu, D. Akbar, S. Bilikmen, “Surface Modification of Polypropylene by Single and
Dual Radio Frequency Plasma”, NANO-TR, 8th Nanoscience and Nanotechnology Congress,
June 25-29, p.494, Ankara, TURKEY, 2012.
4. D. Akbar, U. Gungur, and S. Bilikmen “Surface Modification of PAN-based Carbon Fiber Using
Single and Dual High Frequency RF-PECVD”, 64th
Gaseous Electronics Conference, APS
Vol.56, No.15, P.72. November 14-18, Salt Lake, Utah, USA, 2011.
5. N. D. Sankir, E. Aydin, H. Unver , D. Akbar, S. Bilikmen “Molybdenum Thin Films for High
Temperature Photovoltaic Fabrication Process” VIII Minsk International Seminar “Heat Pipes,
Heat Pumps, Refrigerators, Power Sources”, Minsk, Belarus, September 12–15, 2011.
6. E. Yurdanur Tasel, K. E. Eseller, H. Berberoglu, D. Akbar, S. Bilikmen “Investigation of
Materials with Different Lattice Structure under Different Time Delays and Integration Times
using Double Pulse LIBS” (EMSLIBS 2011) 6th
Euro-Mediterranean Symposium on Laser-
Induced Breakdown Spectroscopy, P.60. 11-15 September, Çeşme, Izmir, Turkey, 2011.
7. E. Yurdanur Tasel, K. E. Eseller, H. Berberoglu, D. Akbar, S. Bilikmen “Aerosol Particle
Analysis by LIBS” (EMSLIBS 2011) 6th
Euro-Mediterranean Symposium on Laser-Induced
Breakdown Spectroscopy, P.153. 11-15 September, Çeşme, Izmir, Turkey, 2011.
8. D. Akbar “Diagnostic of high frequency single and dual RF-PECVD using OES” ICPIG 2011
Conference, 28th
August- 2nd
September, Belfast, Northern Ireland, UK, 2011.
9. D. Akbar, U. Gungur, and S. Bilikmen, “Surface Modification of Carbon Fiber with High
Frequency Single and Dual RF Capacitive Coupled Plasma”, GEC&ICRP 2010, APS Vol. 55,
No.7, 4-8 October, Paris, France, 2010.
10. D. Akbar, “Optical Emission Spectroscopy of Nitrogen Gas in the High Frequency Single and
Dual RF-PECVD”, GEC&ICRP 2010, APS Vol. 55, No.7, 4-8 October, Paris, France, 2010.
11. K. Çınar, G. Karaoglan, Z. Tosun, D. Akbar, and H. Altan, “ Characterization of Air-Nitrogen-
Argon DC Glow Discharge Plasma with THz Time Domain Spectroscopy”, Terahertz and mid
infrared radiation: basic research and practical applications (TERA-MIR ), Workshop
Proceedings, P. 37-38, 2009.
12. Z. Tosun, D. Akbar, H. Altan, “The Interaction of Terahertz Pulses with DC Glow Discharge
Plasma”, International Society of Infrared Millimeter, and Terahertz waves (IRMMW-THz), Vol.
1 and 2, P. 334-335, 2009.
13. D. Akbar, R. Turan, “Plasma Immersion Ion Implantation For Enhancement Steel and Metal
Surface Hardness and Corrosion Resistance”, PBII&D07 2-6 Sept., Leipzig, Germany, 2007.
14. D. Akbar, and S. Bilikmen, “Non-uniform axial electric field in argon glow discharge plasma”,
the 18th European Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG
XVIII), 12-16 July, Lecce, Italy, 2006.
15. D. Akbar, S. Bilikmen, “Spatial variations of non-uniform argon glow discharge using fast probe
System”, The 22nd symposium on Plasma Physics and Technology, 26-29.6.2006, Prague, Czech
Republic.
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4. 16. D. Akbar, S. Bilikmen, “Effects of non-uniform dc glow discharge system on argon positive
Column plasma”, 33rd European Physical Society Conference on plasma Physics, Roma, Italy,
June 19-23, 2006.
17. D. Akbar, and S. Bilikmen, “Fast Double Probe Technique and Effect of Non-Uniform Glow
Discharge System on Plasma Parameters”, 23th
International Physics Congress (TPS), Mugla,
Turkey, 13-16 Sept. 2005.
18. D. Akbar, and S. Bilikmen, “Development of Computer Controlled Double Probe and Discharge
System with Varying Diameters”, 14th
International Conference on Surface Modification of
Materials by Ion Beams (SMMIB), Kusadasi, Turkey, 04 Sept. 2005.
19. D. Akbar, and S. Bilikmen, “Characterization of Non-Uniform Magnetized Plasma
System”, 22th
International Physics Congress (TPS), Bodrum, Turkey, 14-17 Sept. 2004.
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5. RESEARCH EXPERIENCE
PLASMA PHYSICS AND ENGINEERING:
• August 2011- 2012: University of Wisconsin Department of Electrical and Computer
Engineering, Madison, Wisconsin, USA.
o Effects of plasma discharge systems (ECR, CCP and ICP) damages on low-k dielectric
materials (SiO2 and SiCOH) and compare it with VUV exposure at the Synchrotron
Radiation Center (SRC). Design NLD (Neutral Loop Plasma Discharge) and RFEA
(Retarding Field Ion Energy Analyzer).
• January 2010- Present: Middle East Technical University, Department of Physics, Ankara,
Turkey.
o Investigate single and dual RF capacitively coupled plasma discharge (CCP) effects and
surface modifications of different materials (Plasma Polymerization: Polypropylene,
KEVLAR, Carbon fiber etc.) using XRD, Ramman Spectroscopy, FTIR,.. etc.
o Investigate chemical reaction of many gases under plasma discharge conditions using
optical emission spectroscopy (OES).
• March 2011- Present: Member of Turkish Accelerator Center: Participate in designing new
free electron laser, RF and vacuum systems. Furthermore, I also participated in a research project
to perform excite-THz probe measurements of various semiconductor samples using the FEL
beam at Helmholtz-Zentrum Dresden-Rossendorf.
• February 2008- May2010:
RESEARCH ASSOCIATE:
o Middle East Technical University, Department of Physics, Ankara, Turkey. Study of
neutrino physics and dark matter with dedicated detector and DAQ (Data Acquisition)
systems at low energy and low background experiments.
o Private company (green house project): Decomposition of CO2 gas to its components by
using non-thermal low cost atmospheric plasma system (DC and MW discharges).
o Inductively and Capacitively Plasma discharge of Non-Uniform system.
o Plasma Antenna and its applications in Military and Industry fields.
• January 2006- 2010:
RESEARCH ASSOCIATE: Middle East Technical University, Department of Physics, Ankara,
Turkey. Develop a new Plasma Immersion Ion Implantation (PIII) technique to implant complex
and cylindrical metal surfaces. Exploring research initiatives that will benefit both government
and private sector efforts to increase the hardness and wear resistance.
RESEARCH ASSOCIATE: Middle East Technical University, Department of Physics, Ankara,
Turkey. Build a complete Dual RF Capacitively Coupled Plasma Enhanced Chemical Vapor
Deposition (PECVD) system for solar cells and semiconductor materials applications.
• April 2006- 2007:
RESEARCH ASSOCIATE: Middle East Technical University, Department of Physics, Ankara,
Turkey. Using very high currents, the plasma confinement in the non-uniform system had been
achieved. In addition, Research assistant, Forschungszentrum Jülich GmbH-Germany (1st
Nov.
2004 -1st
March 2005): Current research in the TEXTOR- TOKAMAK system supported by
TUBITAK- Germany government corporation.
• September 2001- 2006:
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6. Applied Physics Ph.D. Program: Middle East Technical University, Department of Physics,
Ankara, Turkey. Constructing an untraditional non-uniform glow discharge plasma system, and
develop a new fast computer controlled double probe technique.
• October 1994- 1996:
Applied Physics M.Sc. Program: Mosul University, Department of Physics. Investigate DC
glow discharge system with single and double Langmuir probes.
OPTICS AND LASER:
RESEARCH ASSOCIATE:
• December 2007- Present:
CONSULTANT and PODUCTION MANAGER (Femtoteknik Engineering Ltd.
www.femtoteknik.com.tr): Manufacturing and developing a new plasma discharge, fiber and
diode laser systems.
• February 2008- May 2010: Middle East Technical University, Department of Physics, Ankara,
Turkey. A compact Terahertz (THz)-Time Domain Spectrometer has been developed. Then, we
used it at the first time as a spectroscopy system to investigate DC glow and RF discharges with
different gasses. This work was published as a chapter in book. To generate near IR wavelength,
Ti: Sapphire (Coherent) Verdi 5 ( 10 fs, 100 MHz repetition rate, Pumping (10W) , 532 nm) laser
system had been used in this project.
• February 2011- Present: Middle East Technical University, Department of Physics, Ankara,
Turkey. We used the LIBS system to investigate many materials under different time delays and
integration times using double pulse LIBS.
• January 2006- 2010: Middle East Technical University, Department of Physics, Ankara, Turkey.
Design and construct High Power Diode Pump Laser (DPSS), 2 W, 1064 nm, Q-switch.
SOLAR ENERGY:
• December 2007- Present:
CONSULTANT and PODUCTION MANAGER (Femtoteknik Engineering Ltd.
www.femtoteknik.com.tr): Install off-grid and on-grid industrial and home solar power systems.
• February 2008- May2010:
RESEARCH ASSOCIATE: Research Associate (as an expert) in GUNAM (Solar Energy
Research Center): Established and design new high technology thin film solar cells research
center (GUNAM) (2009-2010). This lab contains furnace PECVD, Cluster Type PECVD, Clean
Rooms (1000 and 10000 classes).
• January 2012- Present:
PV SOLAR ENERGY CONSULTANT (Hacettepe University Teknopolis
www.hacettepeteknokent.com.tr ): Responsible for monitoring (419 kW PV power station),
repairing and installation new system. Using several Solar Power simulation programs (PVSys.
PVGIS Simulation programs, and solar system design programs: Skelion, and Archelios)
calculate and design the most efficient On-Grid and Off- Grid PV power stations.
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7. INTERNATIONAL REFEREE AND EDITORIAL BOARD MEMBERSHIPS IN SCIENTIFIC
JOURNALS:
• Applied Physics Letters : Referee
• Review of Scientific Instruments : Referee
• IEEE Transactions on Plasma Science: Referee
• Surface & Coatings Technology : Referee
SPECIAL SKILLS/EXPERIENCE
• Design and construction of vacuum system: Design a glass or metal vacuum chambers, vacuum
control and leak detection.(since 1994).
• Develop DC and RF plasma discharge systems (since 1994).
• Develop and build THz-Time Domain Spectroscopy systems (2008)
• Develop the physical education setups, Ankara, Turkey (since February 2006): Mentoring
advanced high school students with a strong background in mathematics and science. Introduce
them to novel experiments and teach them the necessary background in physical sciences.
• Construct and build printed electronic circuit and low power sources (since 2001).
• Computer Controlled measurement instruments using DAQ and GPIB boards with the Lab View
graphical program (since 2001).
COMPUTER SKILLS
Solar Power simulation programs (PVSys. PVGIS Simulation programs, and solar system design
programs: Skelion, and Archelios), LabVIEW/CVI LabWindows, MATLAB, Mathematica,
MathCAD, Origin Lab, LUNIX, LaTeX/TeX, AutoCAD, Solid works, Sketch Up, Circuit Maker,
Website Design, Windows 9*/00/XP/NT/Vista.
Teaching Statement
Associate Prof. Dr. Demiral Akbar
My interest in teaching is to educate the next generation of students on how they can transfer
their imagination and ideas to reality. In doing so, I would like for them to find the connection
between the theoretical knowledge they learnt and the applications which they will develop.
In 1996, after I completed my M.Sc. in plasma physics, my first experience in teaching was
when I served as a lecturer in Electrical and Power Department, Technical Institute of Kirkuk,
Iraq. The courses I taught covered topics such as digital circuit design, operational amplifier
characteristics, DC and AC power systems. I enjoyed this experience very much, and the student
feedback and peer evaluations were very positive.
As first a PhD student and then a Post-Doctorate fellow at Department of Physics, Middle East
Technical University, , Ankara, Turkey, I had the opportunity to give lectures on various topics
in optics and laser physics which included a laboratory session. In this course, I helped students
to establish a link between optical phenomena and industrial applications.
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8. For a brief period I worked at a newly established university (Karatekin University, Cankiri,
Turkey), where the undergraduate students typically had no prior formal instruction in
introductory physics. However, after a few weeks of physics lectures based on classical
mechanics and electromagnetism, I was able to establish a solid foundation from which they
could continue their education. I remember one student in particular who said to me “we could
not imagine that these courses could be so enjoyable and this attractive,” words which still
motivate me today. I receive great intellectual pleasure from explaining physical concepts and
seeing students understand them.
Furthermore, from my more than twenty years’ experience on plasma system design, fabrication
and development, and ten years on laser and optical system development, I will be of great help
in other courses that may have a potential impact in future perspective of the department as
material science, laser and material interaction. Therefore, for my teaching, I would be happy to
teach fundamental physics and engineering courses in the existing curriculum, or courses related
to trending topics such as Plasma Reactors and Fusion (e.g. TOKAMAK and ITER), Material
Science, Energy Systems, as well as industrial topics such as 3-D Printing. The lectures will be
designed to assist in setting up new laboratories, which can introduce abilities to make the most
important tests, analysis and upgrades to existing systems.
To summarize, I feel reasonably comfortable in teaching any of the standard introductory
courses. In addition, it would be a great pleasure to teach specialized courses on topics that are
close to my research interests for advanced undergraduate and graduate students.
In conclusion, at your University, I am looking forward to helping to educate the next generation
of engineers and further advance teaching topics in Applied Physics and fields in Engineering.
Research Statement
Associate Prof. Dr. Demiral Akbar
My research interests lie at the frontier of magnetized/nonmagnetized experimental plasma
discharge (DC, RF, and MW), plasma surface interactions and modifications of materials,
diagnostics and spectroscopy (Optical Emission spectroscopy (OES), Terahertz Time Domain
Spectroscopy (THz-TDS), Raman Scattering, XRD, FTIR, etc.), laser technologies, and
renewable energy -- especially photovoltaic solar energy. I have extensive experience using
several solar power simulation programs, in order to design the most efficient On-Grid and Off-
Grid PV power stations.
My work at University of Wisconsin Department of Electrical and Computer Engineering,
Madison, Wisconsin, USA, was on the effects of plasma discharge system damages on low-k
dielectric materials. We investigated the effects of different plasma discharge systems (ECR,
CCP and ICP) damages on low-k dielectric materials (SiO2 and SiCOH), and compared it with
8

9. VUV exposure at the Synchrotron Radiation Center (SRC). Moreover, a new NLD (Neutral
Loop Plasma Discharge) reactor and RFEA (Retarding Field Ion Energy Analyzer) were
designed to be ready to use in these applications.
During my postdoc and research associate tenure at Middle East Technical University, I worked
on many nationally and internationally funded projects. A list of these projects are: 1) Study of
neutrino physics and dark matter with dedicated detector and DAQ (Data Acquisition) systems at
low energy and low background experiments. 2) Design and fabricate Dual RF Capacitively
Coupled Plasma Enhanced Chemical Vapor Deposition (PECVD) system for solar cells and
semiconductor materials applications. 3) To develop a compact Terahertz (THz)-Time Domain
Spectrometer. This system was used for the first time as a spectroscopy system to investigate DC
glow and RF discharges with different gases. The system was driven by a Ti: Sapphire pumped
(Coherent) Verdi 5 ( 10 fs, 100 MHz repetition rate, Pumping (5W) , 532 nm) laser system.4)
Design and construct High Power Diode Pump Laser (DPSS) with power output of 2 W, a lasing
wavelength of 1064 nm, and Q-switch operation at 1 kHz with nanosecond pulse duration for a
variety of applications. International project work was done initially at Forschungszentrum
Jülich GmbH-Germany research center to develop and design Fast Langmuir probe and
contribute in calculation (Signal Processing) of the obtained data from the TEXTOR-
TOKAMAK system during the ignition. Furthermore, I also participated in a research project to
perform excite-THz probe measurements of various semiconductor samples using the FEL beam
at Helmholtz-Zentrum Dresden-Rossendorf.
Recently, at Middle East Technical University, Department of Physics, Ankara, Turkey, I
developed a new concept (3rd
generation): capacitively coupled plasma discharge reactor for
surface modification of materials e.g. polymers, carbon fiber, thin film solar cells etc. In
addition, as a diagnostic tool, I used an optical emission spectroscopy technique to optimize our
home made high radio frequency CCP system. Furthermore, we compared the obtained results
with the computerized single and double Langmuir probes. The most important issue in this
reactor can be summarized as follows: by using dual high and low radio frequency generator
(40.68 MHz/ 2.1 MHz), the ion flux and ion energy can be controlled separately. Thus, we
believe that by using this kind of reactor, one of the most important problems to fabricate a
uniform device with nano scale dimensions can be solved. In addition, we found that the
materials could be treated faster than traditional plasma reactor, which is a very important factor
to avoid any damages on the surface of the treated samples.
During our studies to observe the radicals in the structure of the materials, we attempted to use a
near IR analysis tool in the sub-millimeter wavelength range (30 µm - 3 mm) for characterization
of the treated sample, the compact THz- TDS system.
Infuture work, I will try to convert this new generation dual RF capacitively coupled plasma
discharge reactor to fabricate a unique Plasma Assisted Atomic Layer Deposition (PA-ALD)
system, which nowadays is the most active topic in the scientific world.
Beside these works on plasma reactors, material processing and diagnostic systems, I am
planning to start new projects as follows:
1. Hall Thruster for Spacecraft and satellite Applications
The Hall thruster is an electric rocket engine, which accelerates ions in crossed electric and
magnetic fields in a quasi-neutral plasma. In this research project, I plan to solve and control the
spatial distribution of the plasma parameters, scaling thruster for low and high power levels, and
investigate the plasma instabilities in the crossed field plasma device. Furthermore, I plan to use
different plasma diagnostic tools e.g. Langmuir and energy analyzer, and B- Dot, and multi-
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10. sensor probe systems for measurements of spatial distribution of plasma parameters in the Hall
thruster channel.
2. Smart Plasma Antenna Technology:
Plasmas are conductive assemblies of charged and neutral particles and fields that exhibit
collective effects. Furthermore, plasmas carry electrical currents and generate magnetic fields.
The principle of a plasma antenna is that it is equal to the performance of a metal antenna but is
lighter. Moreover, the most important issue is that when a plasma antenna is turned off, it is
transparent. Thus, it can be used for military and radar applications. In general, the plasma
antenna technology employs ionized gas enclosed in a tube (or other enclosure) as the
conducting element of an antenna. This is one of the fundamental differences from traditional
antenna design, which generally employs solid metal wires as the conducting element.
3. Production and Development Hip and Knee Prostheses Materials Using 3-D Plasma
Immersion Ion Implantation and Deposition (PIII&D) Method :
Ion implantation is one of the main processes used in the semiconductor industry. It is used to
modify the surface properties of the semiconductor crystal to fabricate integrated circuits. In
recent years, ion implantation has been used to improve the wear resistance and hardness of the
metal surfaces. The most common use of PIII is for the nitrogen implantation of electro-
deposited hard chrome. PIII has been shown to increase wear life of hard chrome by a factor of
two to three and to reduce the friction coefficient by approximately 30 percent.
The most important advantage of the PIII system is that the implantation process of many
complex surfaces (zigzag) can be done in three dimensions with uniform ion distribution. In
addition, this important feature is not present in other traditional techniques. For this reason, this
state-of-the-art technology can be used in improving wear, fatigue and corrosion resistance of
large components and complex shapes, without requiring component manipulation, including
gears, bearings, shafts, steel forms, and biomedical pieces.
In conclusion, these research programs are conducted at the energy frontier of plasma science
and technology and has the goal of expanding our knowledge to discover new tools and
techniques for material processing and device production.
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