Good overview of Digital Holographic Microscope showing why it is the premier instrument for studying MEMS and MOEMS. Nothing else comes close to its capabilities. Contact NanoAndMore USA, Inc., exclusive distributor for USA. usa@nanoandmore.com

1. DHM: a MEMS Analyzer
DHM is a integrated and unique tool for
dynamical 3D and electrical measurement
on MEMS MOEMS and micro system.

2. ©Lyncée Tec
A unique integrated MEMS Analyzer
A 3D optical profiler
Interferometric resolution out of plane
Diffraction limited in plane resolution
A Stroboscopic synchronization
Waveform generator or external sync for
mems excitation signal
Continuous frequency range from static
to 25Mhz
MEMS Live Analysis Toolbox
In & out of plane motions
Frequency response
Electrical analysis
Product Description
Out of plane displacement vs Frequency
Micro mirror at 18kHz

3. ©Lyncée Tec
Access a wide range of sample
Capture
Fast Vertical Motion
Interact in real time
with your device
Characterize
complex
geometry & movement
Measure in
Any environment
DHM provide a solution for each
Challenge us with your sample
Analyze in Live
your measurements
Unique Features
Investigate
non linear
resonances
DHM + Stroboscopic Module
Ready from MEMS Characterization

4. ©Lyncée Tec
Slow Motion Stroboscopic Real Time
Interact in real time with your device and analyze
it in live thanks to :
The full field measurement & strictly non scanning acquisition.
Koala live measurement visualization and analysis tool.
Unique Features
Click to play video full screen

5. ©Lyncée Tec
Measure in any Environment
With an optimal optical quality :
• trough windows
• In vacuum
Unique conception enabling to use any objective.
Corrected for most standard thickness of cover glass
Immersion objectives, Long working distance
Including for high NA/resolution objectives
Unique Features
• In liquids
• In presence of electrical probes
Interferometric objectives :
internal reference
DHM unique design with an
external reference arm.
Cover glass correction
To achieve Optimal quality
Source : MicroscopyU, Nikon

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Complex geometry & movement (1)
Pass trough point sensor limitation
complex geometry : sacrificial holes, grid with multiple devices
complex movement : combined in and out of plane with tilt of suspended
structure
DHM’s Full Field Acquisition
Simultaneously measure million of points
A Single Sensor records full device information
Unique Features
Optical Shutter.
Click to play video full screen
Gyroscope, 5 kHz
Presence of sacrificial holes

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Complex geometry & movement (2)
DHM simultaneously measure a grid of device.
statistical analysis :
De-phasing between elements
Collapse voltage for membranes
Resonance frequency variability
Unique Features
cMUT @ 200kHz
Analyze Dephasing between device
Click to play video full screen cMUT, Statistical distribution of collapse voltage

8. ©Lyncée Tec
Fast Vertical Motion
Micro Mirror at resonance frequency 18.2KHZ
Laser pulse at 100ns, we observe interference pattern.
DHM is able to measure device with vertical motions up to
several meters per second.
Short laser pulse length down to 7.5ns allows DHM to freeze device
movement
Relevant for MEMS at low frequencies. They have usually large and fast
vertical displacement
Unique Features
Laser pulse at 10ns, no
interference pattern.

9. ©Lyncée Tec
Study of Non Linear Resonances
Stroboscopic module with dedicated electronics
Frequency scan with continuous sweep of excitation frequency
Frequency approach form upward and downward
Unique Features
Courtesy of Bosch GmbH)
High Frequency Mirror
A non linear response

10. ©Lyncée Tec
DHM : A Versatile System
VCSEL
• Fast design testing
2-axis miroir
• Multiple excitation signals
for complex system control
SG-MOSFET Memory
• Efficient failure analysis
Gyroscope
• Measurement in vacuum
through transparent windows
AFM cantilever
• Resonance Frequency Analysis
Fabry-Perot
• Quality control
Variable capacitor
• Full field measurement for
complex movement analysis
Membranes
HF mirror
• Short laser pulses for high
vertical speed
cMut
• Full field measurements for
statistical analysis

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MEMS Analysis toolboxes
Dynamical Analysis
3D Dynamical topography
In and out of plane by several methods
Correlation
Edge detection
Corner detection
Resonance frequency analysis
Intensity scan
Frequency scan & bode analysis
Fourier analysis
Highly customizable graphical analysis
Any combination of measurement
ready for export & printing
Raw data available for your
analysis
Roughness
According to ISO Standard
Reflectometry
Get topography of (semi)-
transparent patterns
Remote Koala
Interface & Customize your
experiment
C++, C#, labview or matlab
interface

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MEMS Toolbox: 3D dynamical topography tools
4.5 kHz
27 kHz
79 kHz
87 kHz
MEMS toolbox
Click on frequency
To play movies

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MEMS Toolbox: displacements
Combined in and out-of-plane deccorelation:
Automated tracking of the in-plane displacement
Automated follow up of the out of plane measurement area
MEMS toolbox
Click to play video full screen

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Fast resonances analysis
Intensity analysis
Fast determination of resonance
frequencies
Up to 10 frequency increment per
second
MEMS toolbox

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•Amplitude and Phase Bode analysis
Sine wave excitation of increasing (decreasing) frequencies
Determination of resonance frequencies
Calculation of Amplitude and phase Bode diagrams
Resonance Quality factor measurements calculation
Scan speed (resolution dependants, typically up to 10 measurements per second)
MEMS toolbox

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Fourier resonances analysis
Fourier analysis
Determination of resonance
Quality factor measurement
Impulse response (slow)
Chirp (fast but a priori knowledge of resonance range)
MEMS toolbox
Excitation Signal with a signal comprising high
frequency
FOURIER transfom of temporal response
Temporal response of the device

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MEMS toolbox
Highly customizable graphical

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There is definitely more with DHM
Measure your MEMS
Interact with your device
Measure in any condition
Access high speed motion
Characterize Complex movement
& geometry
Study Non linear resonances
Analyze your MEMS
3D dynamical topography
In and out of plane Analysis
Frequency Analysis
Data exportation
Price Competitive
Only one instrument to explore your MEMS
No need of complex calibration
Easy to use, low training cost
Fast measurement, High instrument disponibilities

19. ©Lyncée Tec
Lyncee Tec – a pioneer company
Lyncee Tec
Leader in holographic microscopy
Owner of the key patents of the technology
10 years of market experience
A team of experts
To give you the appropriate support
To work with you to offer you the customized solution to meet your needs
Competent After Sales Service
A reliable Partner focusing on continuous improvement

20. ©Lyncée Tec
Do not hesitate to contact
us !
Thank you