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Joo Chul Yoon
with Prof. Scott T. Dunham
Electrical Engineering
University of Washington
Molecular Dynamics Simulations
Simulation Setup
Force Calculation and MD Potential
Integration Method
Introduction to MD
MD Simulations of Silicon Recrystallization
SW Potential
Tersoff Potential
Contents
Simulation Preparation
Introduction to Molecular Dynamics
Calculate how a system of particles evolves in time
Consider a set of atoms with positions /velocities
and the potential energy function of the system
Predict the next positions of particles
over some short time interval
by solving Newtonian mechanics
Basic MD Algorithm
Set initial conditions and
Get new forces
Solve the equations of motion
numerically over a short step
Is ?
Calculate results and finish
)
( 0
t
i
r )
( 0
t
i
v
)
( i
i r
F
)
(
)
( t
t
t i
i 

 r
r
)
(
)
( t
t
t i
i 

 v
v
t

t
t
t 


max
t
t 
Constructing neighboring cells
Simulation Cell
Boundary Condition
Initial atom velocities
MD Time step
Simulation Setup
Temperature Control
Simulation Cell
Open boundary
for a molecule or nanocluster in vacuum
not for a continuous medium
usually using orthogonal cells
Fixed boundary
fixed boundary atoms
completely unphysical
Periodic boundary conditions
obtaining bulk properties
Periodic boundary conditions
An atom moving out of boundary
comes back on the other side
cut
r
considered in force calculation
2
L
rcut 
pair potential calculation
atoms move per time step
)
N
( 2
O

Constructing neighboring cells

A
2
.
0

not necessary to search all atoms
Verlet neighbor list
containing all neighbor atoms within
updating every time steps
2
t
N
r
r L
cut
L



v
L
r
L
N
where
i
L
r
cut
r
skin
Linked cell method
Constructing neighbor cells
divide MD cell into smaller subcells :
The length of subcell is chosen so that
n
n
n 

L
r
n
L
l 

l
L: the length of MD cell
3
/ n
N
NC 
going through 27 atom pairs
C
NN
instead )!
1
( 
N
N
where
26 skin cells
)
N
(
O

reducing it to
L
r
Constructing neighboring cells
Simulation Cell
Boundary Condition
Initial atom velocities
MD Time step
Simulation Setup
Temperature Control
Initial Velocities
The probability of finding a particle with speed
Maxwell-Boltzmann distribution















 T
k
m
T
k
m
P B
x
B
x /
2
1
exp
2
)
( 2
2
/
1
v
v

Generate random initial atom velocities
2
2
1
2
3
v
m
T
kB 
scaling T with equipartition theorem
MD Time Step
1/20 of the nearest atom distance


 t
r/
In practice fs.
4

t
MD is limited to <~100 ns
Too long : energy is not conserved
t

Temperature Control
Velocity Scaling
Nose-Hoover thermostat
Scale velocities to the target T
Efficient, but limited by energy transfer
Larger system takes longer to equilibrate
Fictitious degree of freedom is added
Produces canonical ensemble (NVT)
Unwanted kinetic effects from T oscillation
Verlet Method
Integration Method
Predictor-Corrector
Finite difference method
Numerical approximation of the integral over time
Better long-tem energy conservation
Not for forces depending on the velocities
Long-term energy drift (error is linear in time)
Good local energy conservation (minimal fluctuation)
))
(
(
1
)
( t
m
r
F
r
a 
2
)
(
2
1
)
(
)
(
)
( t
t
t
t
t
t 





 r
a
v
r
r
t
t
t
t
t 




 )
(
2
1
)
(
)
2
/
( r
a
v
v
))
(
(
1
)
( t
t
m
t
t 



 r
a
a
t
t
t
t
t
t
t 







 )
(
2
1
)
2
/
(
)
( a
v
v
Verlet Method
From the initial ,
)
(t
i
r )
(t
i
v
Obtain the positions and velocities at t
t 

))
(
(
1
)
( t
m
r
F
r
a 
2
2
)
(
)
(
)
(
)
( t
t
t
t
t
t
t
P







a
v
r
r
t
t
t
t
t
P




 )
(
)
(
)
( a
v
v
t
t
t
t
t iii
P




 )
(
)
(
)
( r
a
a
: 3rd order derivatives
Predictor-Corrector Method
from the initial ,
)
(t
i
r
)
( t
t
i 

v
predict , using a Taylor series
)
( t
t
i 

r
)
(t
i
v
iii
r
Predictor Step
)
(
2
)
(
)
(
2
0 t
t
t
C
t
t
t
t P









 a
r
r
)
(
)
(
)
( 1 t
t
t
C
t
t
t
t P









 a
v
v
: constants depending accuracy
)
(
)
(
)
( t
t
t
t
t
t P
C








 a
a
a
m
t
t
P
C ))
(
(
)
(



r
F
r
a
get corrected acceleration
using error in acceleration
correct positions and velocities
n
C
Corrector Step
Predictor-Corrector Method
ij
N
i
j ij
ij
i
r
r
u
U r̂
)
(
)
r
(
F 
 





The force on an atom is determined by
: potential function
: number of atoms in the system
: vector distance between
atoms i and j
Force Calculation
)
r
(
U
N
ij
r
MD Potential
Classical Potential
...
)
,
,
(
)
,
(
)
(
,
,
3
,
2
1 


 

 k
j
i
k
j
i
j
i
j
i
i
i
U
U
U
U r
r
r
r
r
r
: Single particle potential
Ex) external electric field, zero if no external force
: Pair potential only depending on
: Three-body potential with an angular dependence
)
( ij
ij r
U
i
r
F 










 
 j k
jki
j
ji
ij
i
i V
V
V )
(
F
1
U
2
U
3
U
Using Classical Potential
Born-Oppenheimer Approximation
Consider electron motion for fixed nuclei ( )
Assume total wavefunction as )
,
(
)
(
)
,
( i
i
i R
r
R
r
R 
 



: Nuclei wavefunction
: Electron wavefunction
parametrically depending on
)
( i
R

)
,
( i
R
r

i
R
0

M
me
The equation of motion for nuclei is given by
 

i
i
i
i
N U
M
P
H )
(
2
2
R (approximated to classical motion)
Empirical Potential
Semi-empirical Potential
Ab-initio MD
MD Potential Models
functional form for the potential
fitting the parameters to experimental data
Ex) Lennard-Jones, Morse, Born-Mayer
calculate the electronic wavefunction
for fixed atomic positions from QM
Ex) EAM, Glue Model, Tersoff
direct QM calculation of electronic structure
Ex) Car-Parrinello using plane-wave psuedopotential
Stillinger-Weber Potential
works fine with crystalline and liquid silicon
)
,
,
(
)
,
(
,
,
3
,
2 k
j
i
k
j
i
j
i
j
i
U
U
U r
r
r
r
r 
 

)
/
(
)
( 2
2 
 ij
ij r
f
r
U 
)
/
,
/
,
/
(
)
,
,
( 3
3 


 k
j
i
k
j
i f
U r
r
r
r
r
r 
: energy and length units

 ,

Pair potential function

)
(
2 r
f
a
r
a
r
r
Br
A q
p


 


,
]
)
exp[(
)
( 1
a
r 
,
0

)
,
,
(
)
,
,
(
)
,
,
(
3 ijk
jk
ji
jik
ik
ij
k
j
i r
r
h
r
r
h
f 
 

r
r
r
)
,
,
( ikj
kj
ki r
r
h 

]
)
(
)
(
exp[
)
,
,
( 1
1 




 a
r
a
r
r
r
h ik
ij
jik
ik
ij 



2
)
3
1
(cos 
 jik

Three body potential function
Stillinger-Weber Potential
too low coordination in liquid silicon
incorrect surface structures
incorrect energy and structure for small clusters
Bond-order potential for Si, Ge, C
Limited by the cosine term
not for various equilibrium angles
2
)
3
1
(cos 
jik

forces the ideal tetrahedral angle
Stillinger-Weber Potential
bond strength dependence on local environment
Tersoff, Brenner
Tersoff Potential
environment dependence without
absolute minimum at the tetrahedral angle
The more neighbors, the weaker bondings
)
(
)
( ij
attractive
ijk
ij
repulsive r
U
b
r
U
U 

: environment-dependent parameter
weakening the pair interaction
when coordination number increases
ijk
b
cluster-functional potential
)]
(
)
(
)[
( ij
A
ij
ij
R
ij
ij
C
ij r
f
b
r
f
a
r
f
U 

r
R Ae
r
f 1
)
( 


r
A Be
r
f 2
)
( 



repulsive part
attractive part

)
(r
fC
D
R
r 

,
1
D
R
r
D
R
D
R
r









 
 ,
)
(
2
sin
2
1
2
1 
D
R
r 

,
0

potential cutoff function
where
Tersoff Potential
n
n
ij
n
ij
b 2
/
1
)
1
( 

 

]
)
(
exp[
)
(
)
( 3
3
3
,
ik
ij
jik
ik
j
i
k
C
ij r
r
g
r
f 
 




2
2
2
2
2
)
cos
(
1
)
(







h
d
c
d
c
g
n
n
ij
n
ij
a 2
/
1
)
1
( 

 

]
)
(
exp[
)
( 3
3
3
,
ik
ij
ik
j
i
k
C
ij r
r
r
f 
 



Tersoff Potential
Simulation Setup
Force Calculation and MD Potential
Integration Method
Introduction to MD
MD Simulations of Silicon Recrystallization
SW Potential
Tersoff Potential
Contents
Simulation Preparation
MD Simulation Setup
 5 TC layer
1 static layer
4 x 4 x 13 cells
Initial Setup
MD Simulation Setup
Ion Implantation(1 keV) Cooling to 0K
System Preparation
Recrystallization
1200 K for 0.5 ns
Recrystallization
Crystal Rate a/c interface displacement
SW Potential 1200K
6 TC layer
MD Simulation Setup
Initial Setup
5 x 5 x 13 cells
1 static layer

System Preparation
Ion Implantation(1 keV) Cooled to 0K
MD Simulation Setup
Recrystallization
1900 K for 0.85 ns
Recrystallization
Tersoff Potential 1900K
Crystal Rate a/c interface displacement
Recrystallization
Tersoff Potential 1900K
SW Potential 1200K
Crystal Rate
Recrystallization
Tersoff Potential 1900K
SW Potential 1200K
a/c interface displacement
6 TC layer
MD Simulation Setup
Initial Setup
2 x 2 x 13 cells
1 static layer

Recrystallization
1800 K for 20 ns
Tersoff Potential
Melting temperature of Tersoff: about 2547K
Potential energy per particle versus temperature:
the system with a/c interface is heated by
adding energy at a rate of 1000K/ns
Tersoff Potential
As in recrystallized Si :
0.82 in amorphized Si
0.20 in crystalline Si
ps
100
/
A
2
o
ps
100
/
A
2
o
Tersoff Potential
As in recrystallized Si :
0.82
in amorphized Si
0.20
in crystalline Si
ps
100
/
A
2
o
ps
100
/
A
2
o
Summary
Review Molecular Dynamics
MD simulation for recrystallization of Si
with SW, Tersoff with As

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MolecularDynamics.ppt

  • 1. Joo Chul Yoon with Prof. Scott T. Dunham Electrical Engineering University of Washington Molecular Dynamics Simulations
  • 2. Simulation Setup Force Calculation and MD Potential Integration Method Introduction to MD MD Simulations of Silicon Recrystallization SW Potential Tersoff Potential Contents Simulation Preparation
  • 3. Introduction to Molecular Dynamics Calculate how a system of particles evolves in time Consider a set of atoms with positions /velocities and the potential energy function of the system Predict the next positions of particles over some short time interval by solving Newtonian mechanics
  • 4. Basic MD Algorithm Set initial conditions and Get new forces Solve the equations of motion numerically over a short step Is ? Calculate results and finish ) ( 0 t i r ) ( 0 t i v ) ( i i r F ) ( ) ( t t t i i    r r ) ( ) ( t t t i i    v v t  t t t    max t t 
  • 5. Constructing neighboring cells Simulation Cell Boundary Condition Initial atom velocities MD Time step Simulation Setup Temperature Control
  • 6. Simulation Cell Open boundary for a molecule or nanocluster in vacuum not for a continuous medium usually using orthogonal cells Fixed boundary fixed boundary atoms completely unphysical Periodic boundary conditions obtaining bulk properties
  • 7. Periodic boundary conditions An atom moving out of boundary comes back on the other side cut r considered in force calculation 2 L rcut 
  • 8. pair potential calculation atoms move per time step ) N ( 2 O  Constructing neighboring cells  A 2 . 0  not necessary to search all atoms Verlet neighbor list containing all neighbor atoms within updating every time steps 2 t N r r L cut L    v L r L N where i L r cut r skin
  • 9. Linked cell method Constructing neighbor cells divide MD cell into smaller subcells : The length of subcell is chosen so that n n n   L r n L l   l L: the length of MD cell 3 / n N NC  going through 27 atom pairs C NN instead )! 1 (  N N where 26 skin cells ) N ( O  reducing it to L r
  • 10. Constructing neighboring cells Simulation Cell Boundary Condition Initial atom velocities MD Time step Simulation Setup Temperature Control
  • 11. Initial Velocities The probability of finding a particle with speed Maxwell-Boltzmann distribution                 T k m T k m P B x B x / 2 1 exp 2 ) ( 2 2 / 1 v v  Generate random initial atom velocities 2 2 1 2 3 v m T kB  scaling T with equipartition theorem
  • 12. MD Time Step 1/20 of the nearest atom distance    t r/ In practice fs. 4  t MD is limited to <~100 ns Too long : energy is not conserved t 
  • 13. Temperature Control Velocity Scaling Nose-Hoover thermostat Scale velocities to the target T Efficient, but limited by energy transfer Larger system takes longer to equilibrate Fictitious degree of freedom is added Produces canonical ensemble (NVT) Unwanted kinetic effects from T oscillation
  • 14. Verlet Method Integration Method Predictor-Corrector Finite difference method Numerical approximation of the integral over time Better long-tem energy conservation Not for forces depending on the velocities Long-term energy drift (error is linear in time) Good local energy conservation (minimal fluctuation)
  • 15. )) ( ( 1 ) ( t m r F r a  2 ) ( 2 1 ) ( ) ( ) ( t t t t t t        r a v r r t t t t t       ) ( 2 1 ) ( ) 2 / ( r a v v )) ( ( 1 ) ( t t m t t      r a a t t t t t t t          ) ( 2 1 ) 2 / ( ) ( a v v Verlet Method From the initial , ) (t i r ) (t i v Obtain the positions and velocities at t t  
  • 16. )) ( ( 1 ) ( t m r F r a  2 2 ) ( ) ( ) ( ) ( t t t t t t t P        a v r r t t t t t P      ) ( ) ( ) ( a v v t t t t t iii P      ) ( ) ( ) ( r a a : 3rd order derivatives Predictor-Corrector Method from the initial , ) (t i r ) ( t t i   v predict , using a Taylor series ) ( t t i   r ) (t i v iii r Predictor Step
  • 17. ) ( 2 ) ( ) ( 2 0 t t t C t t t t P           a r r ) ( ) ( ) ( 1 t t t C t t t t P           a v v : constants depending accuracy ) ( ) ( ) ( t t t t t t P C          a a a m t t P C )) ( ( ) (    r F r a get corrected acceleration using error in acceleration correct positions and velocities n C Corrector Step Predictor-Corrector Method
  • 18. ij N i j ij ij i r r u U r̂ ) ( ) r ( F         The force on an atom is determined by : potential function : number of atoms in the system : vector distance between atoms i and j Force Calculation ) r ( U N ij r
  • 19. MD Potential Classical Potential ... ) , , ( ) , ( ) ( , , 3 , 2 1        k j i k j i j i j i i i U U U U r r r r r r : Single particle potential Ex) external electric field, zero if no external force : Pair potential only depending on : Three-body potential with an angular dependence ) ( ij ij r U i r F               j k jki j ji ij i i V V V ) ( F 1 U 2 U 3 U
  • 20. Using Classical Potential Born-Oppenheimer Approximation Consider electron motion for fixed nuclei ( ) Assume total wavefunction as ) , ( ) ( ) , ( i i i R r R r R       : Nuclei wavefunction : Electron wavefunction parametrically depending on ) ( i R  ) , ( i R r  i R 0  M me The equation of motion for nuclei is given by    i i i i N U M P H ) ( 2 2 R (approximated to classical motion)
  • 21. Empirical Potential Semi-empirical Potential Ab-initio MD MD Potential Models functional form for the potential fitting the parameters to experimental data Ex) Lennard-Jones, Morse, Born-Mayer calculate the electronic wavefunction for fixed atomic positions from QM Ex) EAM, Glue Model, Tersoff direct QM calculation of electronic structure Ex) Car-Parrinello using plane-wave psuedopotential
  • 22. Stillinger-Weber Potential works fine with crystalline and liquid silicon ) , , ( ) , ( , , 3 , 2 k j i k j i j i j i U U U r r r r r     ) / ( ) ( 2 2   ij ij r f r U  ) / , / , / ( ) , , ( 3 3     k j i k j i f U r r r r r r  : energy and length units   ,  Pair potential function  ) ( 2 r f a r a r r Br A q p       , ] ) exp[( ) ( 1 a r  , 0 
  • 23. ) , , ( ) , , ( ) , , ( 3 ijk jk ji jik ik ij k j i r r h r r h f     r r r ) , , ( ikj kj ki r r h   ] ) ( ) ( exp[ ) , , ( 1 1       a r a r r r h ik ij jik ik ij     2 ) 3 1 (cos   jik  Three body potential function Stillinger-Weber Potential
  • 24. too low coordination in liquid silicon incorrect surface structures incorrect energy and structure for small clusters Bond-order potential for Si, Ge, C Limited by the cosine term not for various equilibrium angles 2 ) 3 1 (cos  jik  forces the ideal tetrahedral angle Stillinger-Weber Potential bond strength dependence on local environment Tersoff, Brenner
  • 25. Tersoff Potential environment dependence without absolute minimum at the tetrahedral angle The more neighbors, the weaker bondings ) ( ) ( ij attractive ijk ij repulsive r U b r U U   : environment-dependent parameter weakening the pair interaction when coordination number increases ijk b cluster-functional potential
  • 26. )] ( ) ( )[ ( ij A ij ij R ij ij C ij r f b r f a r f U   r R Ae r f 1 ) (    r A Be r f 2 ) (     repulsive part attractive part  ) (r fC D R r   , 1 D R r D R D R r             , ) ( 2 sin 2 1 2 1  D R r   , 0  potential cutoff function where Tersoff Potential
  • 27. n n ij n ij b 2 / 1 ) 1 (      ] ) ( exp[ ) ( ) ( 3 3 3 , ik ij jik ik j i k C ij r r g r f        2 2 2 2 2 ) cos ( 1 ) (        h d c d c g n n ij n ij a 2 / 1 ) 1 (      ] ) ( exp[ ) ( 3 3 3 , ik ij ik j i k C ij r r r f       Tersoff Potential
  • 28. Simulation Setup Force Calculation and MD Potential Integration Method Introduction to MD MD Simulations of Silicon Recrystallization SW Potential Tersoff Potential Contents Simulation Preparation
  • 29. MD Simulation Setup  5 TC layer 1 static layer 4 x 4 x 13 cells Initial Setup
  • 30. MD Simulation Setup Ion Implantation(1 keV) Cooling to 0K System Preparation
  • 32. Recrystallization Crystal Rate a/c interface displacement SW Potential 1200K
  • 33. 6 TC layer MD Simulation Setup Initial Setup 5 x 5 x 13 cells 1 static layer 
  • 34. System Preparation Ion Implantation(1 keV) Cooled to 0K MD Simulation Setup
  • 36. Recrystallization Tersoff Potential 1900K Crystal Rate a/c interface displacement
  • 37. Recrystallization Tersoff Potential 1900K SW Potential 1200K Crystal Rate
  • 38. Recrystallization Tersoff Potential 1900K SW Potential 1200K a/c interface displacement
  • 39. 6 TC layer MD Simulation Setup Initial Setup 2 x 2 x 13 cells 1 static layer 
  • 41. Tersoff Potential Melting temperature of Tersoff: about 2547K Potential energy per particle versus temperature: the system with a/c interface is heated by adding energy at a rate of 1000K/ns
  • 42. Tersoff Potential As in recrystallized Si : 0.82 in amorphized Si 0.20 in crystalline Si ps 100 / A 2 o ps 100 / A 2 o
  • 43. Tersoff Potential As in recrystallized Si : 0.82 in amorphized Si 0.20 in crystalline Si ps 100 / A 2 o ps 100 / A 2 o
  • 44. Summary Review Molecular Dynamics MD simulation for recrystallization of Si with SW, Tersoff with As