Tegal equipment spare parts

Item Tegal Equipment/Parts
2 10 Profacture PRO‐80‐679‐012 Switch Opt SLTD IC=1800UA, Tegal 80‐679‐012,
3 2 Semi‐Parts SPI‐99‐224‐001 Center Sensor, CSN‐1, PCB, Tegal 99‐224‐001,
4 2 Tegal 59‐011‐001, Linkage Top PL Latch, 416899
5 2 Tegal CW1078‐W00304RW Spatula Drive, 99‐200‐003 PCB Board,
6 23 Tegal 80‐202‐046, Gromnet, 5/16ID, 7/16DIA Hole, 329146
7 33‐367‐002 GROUND RING,MESH
8 37‐221‐003 UPPER ELECTRODE
9 39‐741‐011 ELECTRODE, LOWER 4"
10 39‐832‐005 ELCTD TEMP CONT ANDZD T/15XXE
11 40‐297‐002 QUARTZ PIN 903, lot of 10
12 5 Tegal 55‐005‐001 Drive Loader Belt 329147
13 80‐095‐278RW PCB MICROPRCS CONTROLLER W/SLOW PROM
14 80‐202‐357 O‐RING, GRY SILICON, LOT OF 10
15 901E Monthly PM O‐ring kit, Tegal P/N
16 93‐220‐001 REV.A
17 98‐176‐001 / PCB SNS‐1 SENSOR 15 90X / TEGAL
18 99‐002‐004 / PCB MOTHERBOARD 415 / TEGAL
19 99‐003‐002 / PCB PROCESS AUTOMATION / TEGAL
20 99‐004‐001 / PCB AUTO END POINT DETECT / TEGAL
21 99‐013‐001 / PCB 3 SET POINT TIMER 60HZ 515 / TEGAL
22 99‐054‐001 / PCB AUTOTUNE AT‐1.5 415 / TEGAL
23 99‐089‐001 / PCB E6S‐1 SENSOR BLANK / TEGAL
24 99‐106‐001 / PCB AUTOTUNE SLUG ATS‐1 415 421 515 / TEGAL
25 99‐125‐008 / PCB SENSOR / TEGAL
26 99‐165‐002 / PCB ESI‐2 ELEVATOR SENSOR 900 / TEGAL
27 99‐173‐008 /RFG‐8 GENERATOR BOARD / TEGAL
28 99‐187‐001 / PCB AUTOTUNE ATO‐1 90X / TEGAL
29 99‐187‐002 / PCB AUTOTUNE 2 ATO‐2 90X / TEGAL
Pls email us for the availability of the Tegal Parts sales@semistarcorp.com
ID-OEME www.semistarcorp.com sales@semistarcorp.com

30 99‐197‐001 / PCB SSL‐1 SLOTTED SENSOR 90X / TEGAL
31 ADM‐3 POWER MONITOR PCB FOR TEGAL 9XXe SYSTEMS PN: 99‐209‐003
32 AH1486 ‐ INDONESIA ‐ KANTOOR NEDERLANDSE HANDELSBANK ‐ DUTCH TRADE BANK, TEGAL
33 ANTIQUE MAP SUMATRA SIAK LAMPONG BATTAKS ~ JAVA CHERIBON TEGAL BANTAM
34 Applied Ceramics 40‐588‐003B Insulator Outer Tegal 95‐00054A
35 Applied Ceramics 40‐753‐004‐3 Disc Top Oblated Stripper Tegal New Surplus
36 APPLIED CERAMICS TEGAL RING, INSULATOR , OUTER
37 ATI‐3 AUTOTUNE PCB FOR TEGAL 1500e/1600 SYSTEMS PN: 99‐196‐003 J
38 Bearing TEGAL 80‐200‐121 flanged SS DOOR T915
39 Berlin 1974 6 stamps fine used Tegal airport ect
40 BURKS 81‐007‐145 SEAL PUMP TEGAL SEAL 1/2 TEPOLITE TGL‐1013 PHANTOM 407098
41 Carrier ring 4 inch, Tegal P/N
42 CAT 99‐142‐001 PCB ADIS‐1 TEGAL 915
43 CD1009‐00301 / 903E MICROPROCESSOR BOARD FOR PLASMA ETCHER / TEGAL
44 CERAMIC STANDOFF 1/2 OD X 3/4 LG 6‐32 (TEGAL) 80‐170‐013
45 Collabrx Tegal CD1043‐00205 Industrial Main Controller Control Module/plug‐in
46 CollabRx/Tegal CD1043‐00601 Industrial Main Controller Control Module/Plug‐In
47 COLOSSLOTH CD Troum MZ412 Merzbow Schloss Tegal Coil Sutcliffe Jugend Whitehouse
48 Comdel T1000E/RF RF Signal Generator Supply Tegal T‐1000E
49 Comdel T1000E/RF RF Signal Generator Supply Tegal T‐1000E
50 CR1113‐00301EX / MATCHING NETWORK / TEGAL
51 Curved indexer block, Tegal P/N 8100‐1091
52 Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 Used Working
53 Edwards W185‐08‐001 Mechanical Vacuum Throttle Valve 1850 ISO200 Tegal 6500 Used
54 Endpoint cable, Fiber Optic, Tegal P/N 80‐207‐159
55 EPROM Firmware Load/Unload, Tegal P/N 26‐003‐001
56 GCA 66635‐14 Circulating System Tegal Precision Scientific Not Working As‐Is
57 GCA Tegal (66635‐14) Circulating System (‐15C‐to +85C)
58 Integrated Circuit Support ICS‐40‐297‐002 Quartz Pin, Tegal 40‐297‐002,

59 ISEL ROBOTIK ATMOSPHERIC ELEVATOR 10‐27‐0037/0038 TEGAL 80‐055‐717
60 Japan Occupation of Netherlands Indies 5sen Postal Card Tegal Merdeka
61 KYOCERA 300MM ESC PN XAS‐13758 002 FOR TEGAL ETCH
62 Laser BARR 2202 TEGAL 80‐506‐003 endpoint filter 520/10nm CWL / FWHM, 25mm Di
63 Lot of 10 Tegal 80‐202‐189, O‐R Viton 7, 1/4ID 1/8W, D70,
64 LOT OF 2 NEW ‐ Tegal Quartz PIN P/N 40‐297‐001
65 Lot of 3 Tegal 41‐137‐001, Chuck, BTTM Flag 903, 410518
66 Lot of 5 Tegal 80‐202‐190, O‐R Viton 10, 1/2ID 3/16W, D70,
67 LOT OF 6 NEW TEGAL 80‐200‐121 DOUBLE SHIELD BEARING FLANGE
68 Lot of 6 Semi Parts SPI‐ 80‐ 200‐342, Band Connector, Tegal 80‐200‐342,
69 Manifold weldment, 3 line with ultratorr fitting, Tegal P/N 33‐091‐001
70 Manifold weldment, 4 line with ultratorr fitting, Tegal P/N
71 Manual for Tegal 801/803
72 manual for Tegal 804
73 MBE‐4 PCB FOR TEGAL 9XXe CONTROLLERS PN: 99‐207‐004
74 MOTOR, Belt drive Barber Coleman, Tegal P/N
75 NEW Sealed ‐ TEGAL INTERFACE BOARD 99‐173‐003
76 NEW TEGAL 50‐013‐001 SCREW LEAD ELEVATOR FOR TEGAL 901/903 8.5" L 1/2" DIAMETER
77 NEW Tegal Industrial Heated Upper Electrode Chamber Assembly Unit 39‐700‐007
78 NEW Tegal Industrial Lab Plasma Etcher Upper Body Chamber Ring w/Viewing Port #2
79 NEW Tegal Industrial Lab Upper Body Chamber Ring w/Viewing Side Ports 39‐662‐002
80 New Tegal TGL 99‐013‐001 Rev. G SET‐1 Circuit Board TGL 99‐013‐001
81 New Tegal TGL 99‐106‐001 PCB ATS Auto Tune Slug / 99‐106‐001 Rev.K
82 New Tegal TGL 99‐106‐001 PCB ATS Auto Tune Slug Printed Circuit Board
83 NOS ‐ (2) IN STOCK ‐ TEGAL 901 BELT(S) ‐ Long & Short ‐ 2 come in each package
84 NOS ‐ (4) IN STOCK ‐ TEGAL BELT DRIVE(S) #30‐101‐001 B
85 OEM Part TEGAL 39‐34‐005 Chamber body 903E
86 OEM Part TEGAL 39‐341‐005 CHAMBER BODY
87 OEM Part TEGAL 40‐297‐110C TEGAL 40‐297‐110C Pin Ceramic 901

88 PCB, Process Control, Tegal P/N 99‐019‐02
89 PCB, Sensor with cables, Tegal P/N 99‐089‐001
90 PCB, TEGAL Main, Tegal P/N 99‐114‐001, 99‐117‐001
91 PCB, Tegal P/N 99‐095‐001
92 Photocell, Tegal P/N 80‐500‐007
93 RFPP RF Plasma Products T‐501 RF Generator Tegal CR1087‐20101 Untested As‐Is
94 RFPP RF Plasma Products T‐502S RF Generator Tegal CR1087‐20101 Untested As‐Is
95 SEALED Tegal XJET‐14004‐2 HGST Carrier 6500 Centring Ring Assembly
96 Semi Parts SPI‐99‐247‐003ALT Spatula Inerface SPI‐3, Tegal 99‐247‐003
97 Sensor, Cybeq, Siltec, Tegal P/N 0121‐6260‐100
98 Sensor, E4 Ring Present, Tegal P/N
99 Sensor, temperature, Tegal P/N
100 SET OF BELT GROMMET FOR SHUTTLE TEGAL 901 903
101 SET OF BELTS FOR SENDER RECEIVER TEGAL 901 903
102 Shaft, Tegal P/N 50‐007‐001
103 SMC / Tegal 98‐008‐01 Rev‐B PCB Assy ULUSP‐98008‐01
104 Spectron Engineering SE130WB Lab/Industrial Optical Assembly Unit
105 Swagelok/NuPro SS‐8BAK‐1C‐2228 6LV‐BNBW4‐C Bellows Valve Assembly
106 Switch, Tegal P/N 80‐678‐004
107 Switch, Tegal P/N 80‐678‐014
108 TEGAL # 83‐126‐002 Rev. B CONTROLLER AUX / RF 50566‐02‐ISS2 Original Board
109 TEGAL # 83‐126‐003 Rev. A CONTROLLER AUX / RF 50566‐02‐ISS2 Original Board
110 TEGAL # 83‐126‐003 Rev. B CONTROLLER AUX / RF 50566‐02‐ISS3 Original Board
111 TEGAL # 83‐126‐003 Rev. C CONTROLLER AUX / RF 50566‐02‐ISS5 Original Board
112 Tegal , RF Match
113 Tegal , RF Match
114 Tegal / Bay Pneumatic 80‐095‐217 BES‐530‐8‐8‐24‐OMT‐R BES‐530‐8‐PCB Pneumatic
115 TEGAL / CollabRx Part # 99‐185‐002 Control Module Board
116 Tegal 00755601 Temperature Display Board, PCB

117 TEGAL 03601‐22‐040 / 0360122040 (USED TESTED CLEANED)
118 Tegal 045‐048 Temperature Probe Assembly for 903e
119 Tegal 1512e Industrial RIE Plasma Etcher System w/Modules Assembly For CI‐4222
120 Tegal 1512e Industrial RIE Plasma Etcher System w/Modules Assembly For CI‐4222
121 Tegal 200 / 2279 PlasmaLine Barrel Etcher Asher Chamber Unit
122 TEGAL 211 PLASMA‐ASHER
123 Tegal 211 Plasmaline Industrial Semiconductor Etcher Asher Chamber Unit PARTS
124 TEGAL 26‐003‐001B‐LMC‐U7 / 26003001BLMCU7 (USED TESTED CLEANED)
125 TEGAL 26‐003‐001‐LMC‐U7 / 26003001LMCU7 (USED TESTED CLEANED)
126 Tegal 30‐251‐001 RF Conn Assy ‐ Lot of 4
127 Tegal 31‐086‐006 Wafer Etcher Microprocessor Mag Phase RF Input Output Module
128 Tegal 3152140‐00B PEP 250‐T Industrial Z‐Match Antenna Tuner Module
129 Tegal 33‐527‐001 Bellow Chuck New Surplus
130 Tegal 37‐231‐602 Chuck Ring Used Working
131 Tegal 37‐423‐001 Rev.4 Industrial Lab Metal Disk w/ Dual Protruding Modules
132 Tegal 37‐441‐004 Cooling Flange 6500 HRe Dual Frequency Etch System Used Working
133 Tegal 39‐680‐003 Showerhead Electrode Cone Head Vented for 903e
134 Tegal 39‐680‐003 Showerhead Electrode Cone Head Vented for 903e Aluminum 9"
135 Tegal 39‐680‐003, Electrode, Non‐anodize shower head Tegal 903, Aluminum,
136 Tegal 39‐767‐002 Insulator Coupling,
137 Tegal 40‐046‐001 Quartz Window Rev. D ‐ Lot of 2
138 Tegal 40‐140‐003D, Ring, Insultator, Ceramic,
139 Tegal 40‐297‐002 903e Pin for Plasma Etcher
140 Tegal 40‐606‐004 Ceramic Liner HRE2
141 TEGAL 41‐215‐001 GASKET GROUND RING RETAINER FOR USE WITH SOLID GROUND NEW
142 Tegal 41‐238‐008 RF Shield React Fill
143 Tegal 41‐399‐001 Gasket, RF‐90Xe
144 TEGAL 415 PLASMA ASHER
145 Tegal 42‐841‐001 Rev.B Industrial Upper Chamber Assembly 39‐700‐007 Rev.A PARTS

146 Tegal 46‐952‐002 Stripper Gas Panel UFC‐1100A As‐Is
147 TEGAL 50566‐02 AUX RF Controller Control Module Board 83‐126‐003
148 Tegal 50566‐02‐ISS3 AUX/RF Controller Control Module/Board/Card 83‐126‐003
149 TEGAL 50590 01
150 TEGAL 50590 01 PCB
151 Tegal 50590‐01 Wafer Etcher Main Controller 80‐095 CD1043 Daughter Board PCB
152 TEGAL 515 PLASMA ASHER (With Warranty)
153 TEGAL 58‐027‐001
154 Tegal 701 Inline Automatic Wafer RF Plasma Etcher Tested Working As‐Is
155 Tegal 701 Plasma Inline Wafer RF Etcher As Is for Parts
156 TEGAL 80‐055‐104 Metric Strip Chart Paper Lot of 2
157 TEGAL 80‐055‐621 VARIAN TV‐1001 NAVIGATOR MODEL # 9698931 TURBO PUMP
158 Tegal 80‐095‐270 50555‐01 ISS‐8 Wafer Etcher CD1043 Main Controller Module Board
159 Tegal 80‐202‐186, Timing Belt, 410368
160 Tegal 803 Inline Automatic Wafer RF Plasma Etcher Tested Working As‐Is
161 Tegal 803 Inline Automatic Wafer RF Plasma Etcher Untested As Is
162 Tegal 803 Inline Wafer Automatic RF Plasma Etcher ‐ UNTESTED ‐ As Is / For Parts
163 Tegal 80‐500‐002 Photocell 250V 55K ‐ Lot of 2
164 Tegal 81‐007‐138 Bellow Plug for Plasma Etcher 900 Series
165 Tegal 81‐105‐223 Heater 120V 60Hz ‐ Lot of 2
166 Tegal 83‐126‐003 Rev.C Industrial/Laboratory Controller Aux Board Assy
167 Tegal 900 Circuit boards Lot
168 Tegal 900 series upper Chamber, complete
169 Tegal 901 PCB ENDPOINT DETECTOR 99‐181‐006 REV A EPD‐6 WAFER Semiconductor
170 Tegal 901e Plasma Etcher #2
171 Tegal 901e Plasma Etcher 901e Plasma Etcher #1 with ENI ACG‐10 RF Power Supply
172 Tegal 903 Showerhead Profacture Pro‐37‐221‐002 Electrode Upper 903E,
173 Tegal 903 Showerhead Tech Star Industries TSI‐TG221‐002, Electrode Upper,
174 TEGAL 903e ALUMINUM UPPER ELECTRODE, NEW PN: 39‐680‐003 Rev F

175 TEGAL 903e ALUMINUM UPPER ELECTRODE, NOS PN: 39‐680‐003 Rev D
176 Tegal 903E CW 1078‐40203 Send/Receive Sender/Receiver Spatula Drive/Driver
177 Tegal 903e Operations and Maintenance Manual for Plasma Production Etcher
178 TEGAL 903e PLASMA ETCHER EIA‐3 ELEVATOR PCB P/N 99‐246‐003
179 Tegal 903E PLASMA ETCHER PCB, 50590‐01
180 Tegal 903e Plasma ETCHER Quartz Pins, Set of 6, 40‐297‐002
181 Tegal 915 Batch Photoresist Stripper Plasma Barrel Etcher Asher Treatment System
182 Tegal 93‐137‐009, RF Cable, 410522
183 Tegal 94‐400‐001, Harness Sensor, 410517
184 Tegal 94‐484‐001 Cable Assy, 410506
185 TEGAL 980 ANODIZED UPPER ELECTRODE, NOS PN: 37‐198‐003 Rev B
187 Tegal 98‐176‐001 B 99‐176‐001 K Wafer Plasma Etcher Sensor SNS Board Assembly
188 Tegal 98‐244‐001 Rev. A (original TEGAL board)
189 Tegal 98‐354‐002 CPU Transition Board VME PCB Card Used Working
190 Tegal 98‐363‐00 VME Backplane Board PCB CTC‐ML Used Working
191 Tegal 98‐429‐001 PCB, Working When Removed
194 TEGAL 99‐045‐001‐AUT1 / 99045001AUT1 (USED TESTED CLEANED)
198 TEGAL 99‐050‐002‐PRC‐2 / 99050002PRC2 (USED TESTED CLEANED)
200 Tegal 99‐052‐001 PCB, AUX‐1, 99‐049‐001 PCB, 410363
201 TEGAL 99‐081‐001 Gas control interface, GCS‐1 PCB assy, used PCB board
202 TEGAL 99‐081‐001 Gas control interface, GCS‐1 PCB board assy
203 TEGAL 99‐082‐003 gas control logic, GCL‐3 PCB board assy

204 Tegal 99‐089‐001 Sensor and Cables for 903 or 915 Etcher/Asher
206 Tegal 99‐096‐09 DIP Board PCB Rev. G Untested As‐Is
207 Tegal 99‐099‐001 PCB
208 TEGAL 99‐104‐001 PCB ELEVATOR CONTROL FAB 98‐104‐001
209 Tegal 99‐104‐001, PCB Elevator Control, FAB 98‐104‐001
210 TEGAL 99‐112‐001 Top display control, TDC‐1 PCB board assy
211 Tegal 99‐126‐005 IGC‐5 Gas Control PCB Rev. N
212 Tegal 99‐126‐005 IGC‐5 PCB Rev. J for 901E and 903E
213 Tegal 99‐126‐006 Interface Board PCB ICG‐6 Untested AS‐IS
214 Tegal 99‐126‐006 PCB, IGC‐6, Gas Interface, 98‐126‐005
215 Tegal 99‐126‐006 PCB, IGC‐6, Gas Interface, 98‐126‐006,
216 Tegal 99‐126‐006 PCB, IGC‐6, Gas Interface, 98‐126‐006,
217 Tegal 99‐138‐001 PCB Assembly, FAB 98‐138‐001,
218 Tegal 99‐160‐006 Industrial/Laboratory Controller Board Assembly
219 Tegal 99‐160‐006 Rev.E Industrial/Laboratory RFI‐6 Controller Board Assembly
220 Tegal 99‐169‐005 PHC‐5 Wafer Etcher Detector Light Sensor Photocell Board PCB
221 Tegal 99‐173‐003 RFG‐3 PCB ‐ Lot of 2
222 Tegal 99‐173‐004 PCB, RFG‐4, RF Gen Interface,
223 TEGAL 99‐173‐004 REV D RFG‐4 RFG4 GENERATOR BOARD >
226 Tegal 99‐173‐04 PCM I/O RF GEN for 903 or 915 Etcher/Asher
227 Tegal 99‐174‐007 Rev.1 BPL‐7 Industrial PCB Printed Circuit Board Card Unit
228 Tegal 99‐174‐008 REV A BPL‐8 Wafer Module Driver Controller I/O Interface Board
229 Tegal 99‐174‐008 REV. A BPL‐8 Wafer Etcher Interface Main I/O Backplane Board
230 Tegal 99‐174‐008 REV‐F BLP‐8 Industrial PCB Printed Circuit Board Card Unit
231 Tegal 99‐184‐004 MIC‐4 Main Controller Module CD1043 Interface Connector Board
232 Tegal 99‐185‐002 MMI‐2 Wafer Etcher CD1043 Main Controller Rear Interface Board

233 Tegal 99‐186‐001 Rev. 2A Interface Board PCB Att‐1 Untested As‐Is
234 Tegal 99‐187‐002 ATO‐2 Interface Board PCB Rev. B Untested As‐Is
235 Tegal 99‐196‐002 ATI‐2 PCB Rev. F
236 Tegal 99‐196‐002 ATI‐2 PCB Rev. W
237 Tegal 99‐196‐002 RW ATI‐2 PCB Rev. P
238 Tegal 99‐196‐003 ATI‐3 Microprocessor Controller Module RF Processor Board Assy
239 Tegal 99‐196‐003 Rev.A Industrial ATI‐3 Auto‐Tune Board Assembly Unit
240 Tegal 99‐200‐005 PCB, SIS‐5, Sensor Interface, 98‐200‐002,
241 Tegal 99‐200‐005 Sensor Interface PCB SIS‐5
242 TEGAL 99‐200‐300 REV. B, PCB SENSOR INTERFACE.
243 Tegal 99‐201‐001 IIQ‐1 REV D Wafer Chamber Etcher System Driver Interface Board
244 Tegal 99‐203‐004 Rev G MNP‐4 Control Board
245 Tegal 99‐204‐001 Rev. E OMD‐1 Wafer Elevator Handling Selector Driver PCB Board
246 Tegal 99‐207‐004 MBE‐4 Wafer Main Controller CD1043 Module PCB Daughter Board
247 Tegal 99‐207‐004/K MBE‐4 PCB
248 Tegal 99‐209‐002 Industrial AC/DC Power Monitor PCB Circuit Board Assembly
249 TEGAL 99‐214‐003 / G AME‐3
250 TEGAL 99‐214‐003RW Rev. A RWK‐PCB ANE‐3 AUTOTUNE 3
251 Tegal 99‐217‐001 SOH‐1 Wafer Elevator Motor Transfer Selector PCB Board
252 Tegal 99‐219‐001 Wafer Elevator 15‐Pin Interface Sensor Controller PCB Board
253 Tegal 99‐223‐002 PCB, DSN‐2, Dual Sensor,
256 Tegal 99‐228‐001 PCB, FLS‐1, Flag Sensor, 98‐228‐001,
257 Tegal 99‐228‐001 PCB, FLS‐1, Flag Sensor, 98‐228‐001,
258 Tegal 99‐231‐001 ITP‐1 Wafer Etcher CE1029 DC Module Power Supply Board PCB
259 Tegal 99‐232‐003 Rev.5 M0C‐3 Plug‐In PCB Circuit Board Assembly Module
260 Tegal 99‐232‐003 Rev.P M0C‐4 Plug‐In PCB Circuit Board Assembly Module
261 Tegal 99‐232‐004 EX Plug‐In PCB Circuit Board Assembly Module

262 Tegal 99‐232‐004 Rev.T M0C‐4 Plug‐In PCB Circuit Board Assembly Module
263 Tegal 99‐235‐004 Rev E MCM‐4 Control Board
264 Tegal 99‐237‐002 Interface Board PCB EEP‐2 Untested AS‐IS
265 Tegal 99‐240‐004 ETS‐4 Wafer Etcher CD1043 Main Controller Daughter Board PCB
266 Tegal 99‐244‐001 INS‐1 98‐244 Wafer Chamber Etcher System Sensor Board Assembly
267 Tegal 99‐247‐002 Rev. M SPI‐2 PCB
268 TEGAL 99‐247‐003 REV D BOARD PCB >
269 Tegal 99‐253‐001 PMT‐1 Rev‐K Industrial Board Module Assy
270 Tegal 99‐261‐002 MFC‐2 Wafer Chamber Etcher Gas Delivery Interface Board PARTS
271 Tegal 99‐261‐002 REV.C MFC‐2 Wafer Etcher Gas Flow Control Interface PCB Board
272 Tegal 99‐261‐002 Rev.C‐MFC‐2 Industrial/Laboratory Connector Board Assy
273 Tegal 99‐261‐002 Rev.C‐MFC‐2 Industrial/Laboratory Connector Board Assy #2
274 Tegal 99‐287‐001D REV C SST PCB
275 TEGAL 99‐287‐003 SST‐3 Shuttle Interface
276 Tegal 99‐287‐003RW SST‐3 Shuttle Interface STDT/9XXE PCB
277 Tegal 99‐299‐001 REV. D MCR‐1 Wafer Etcher Transfer Driver Interface PCB Board
278 Tegal 99‐299‐001 REV. F MCR‐1 Wafer Etcher Transfer Driver Interface PCB Board
279 Tegal 99‐299‐001 Rev.F Industrial/Laboratory MCR‐1 Board Assembly Unit
280 Tegal 99‐299‐001RW Rev.F Industrial/Laboratory MCR‐1 Board Assembly Unit
281 Tegal 99‐318‐001/B Industrial/Laboratory CSI‐1 PCB Board Assembly
282 Tegal 99‐339‐001 PMC CPU Transition Board Plug‐In Module Assembly
283 Tegal 99‐340‐001/A PMC Serial Transition Board Plug‐In Module Assembly
284 Tegal 99‐341‐001 Industrial/Laboratory Console Interface Board PCB Assembly
285 Tegal 99‐343‐001/A Industrial/Laboratory Master Control Console Board Assembly
286 Tegal 99‐344‐001/C Industrial/Laboratory System Cable Interface Board Assy
287 Tegal 99‐360‐001 Processor Board VME PCB Card AOB‐1 98‐360‐001 Used Working
288 Tegal 99‐385‐001 DC/DC Converter Board PCB Rev. 4 6500 HRe Dual Frequency Used
289 Tegal 99‐385‐001 DC/DC Converter Board PCB Rev. A 6500 HRe Dual Frequency Used
290 Tegal 99‐385‐008 DC/DC Converter Board PCB Rev. E 6500 HRe Dual Frequency Used

291 Tegal 99‐395‐002 CIP‐2 CTC Board PCB Card 98‐395‐001 Used Working
292 TEGAL 9XX DAC‐SCAN PCB Part # 80‐095‐278 revA Original Tegal Board w/ 99‐207‐004
293 TEGAL 9XX DAC‐SCAN PCB Part # 99‐184‐001 Rev. 8 MIC‐1
294 Tegal 9XX PCB TMC‐3 TEMP MONITOR CONTROL, P/N 99‐138‐003, NOS
295 Tegal 9XX PCB TMC‐4 TEMP MONITOR CONTROL, P/N 99‐138‐004, NOS
296 Tegal 9XX PCB, 99‐165‐003 REV.J, NOS
297 Tegal 9XX PCB, 99‐207‐003 REV.2 MBE‐3
298 Tegal 9XX PCB, 99‐207‐004 REV.C MBE‐4
299 Tegal 9XX PLASMA ETCHER INTERFACE PCB, P/N 98‐223‐002 REV A, NOS
300 Tegal 9XX PLASMA ETCHER PCB IMN‐3 RF MATCH INTERFACE, 99‐172‐003, 98‐172‐003
301 Tegal 9XX PLASMA ETCHER PCB SIS‐5 SENSOR INTERFACE P/N 99‐200‐005 REV B
302 Tegal 9XX PLASMA ETCHER SOLENOID VALVE ASSY SND/RCV 31‐173‐001
303 Tegal 9XX Plasma Etcher STEPPER MOTOR RF MATCH, SPI‐31‐217‐002‐A, VEXTA PH266L33
304 Tegal 9XX SEND RECEIVE PCB, P/N 99‐247‐003 REV.E, NOS
305 Tegal 9XX SEND RECEIVE SPATULA DRIVE. CW1078‐50401, 150MM, LOT OF 2
306 Tegal BES‐530‐8‐PCB 8‐Port/Channel Solenoid Valve Control Board
307 Tegal CC1147‐00303 REAC Industrial/Laboratory Triode Split Assembly Unit
308 Tegal CC1326‐00100 Chamber‐Stripper For Parts As‐Is
309 Tegal CC1327‐00300 EZ Reactor Assembly HRE‐PM1 6500 HRe Used Working
310 Tegal CD‐1039‐00106RW Endpoint Detector w/ Cards 99‐208‐003 + 83‐126‐003
311 Tegal CD1039‐00301 Industrial/Laboratory Endpoint Detector Assembly Unit
312 Tegal CD‐1039‐00303 Endpoint Detector Detection System Module/Plug‐In
313 Tegal CD‐1039‐00303 Endpoint Detector Detection System Module/Plug‐In #2
314 Tegal CD1039‐00403 Wafer Etcher Plasma Chamber System Endpoint Detector Module
315 Tegal CD1043‐00601 Industrial Wafer Etcher System Main Controller Module
316 Tegal CD1043‐00601 Wafer Etcher Plasma Main Controller Module Chassis Frame
317 Tegal CD1043‐00601RW Industrial/Lab Main Controller Assembly Module
318 TEGAL CD1298‐02300 CON‐MDL‐VME‐1HD CHASIS
319 Tegal CE1028‐00303 AC Module Wafer Etcher 1/3/5/10/15A Power Controller Module

320 Tegal CE1028‐00303 Industrial AC Module Wafer Processing Plug‐In Assembly
321 Tegal CE1028‐00304 AC Module Wafer Etcher 1/2/5/15A Power Controller Module
322 Tegal CE1028‐00304 Industrial AC Module Wafer Processing Plug‐In Assembly
323 Tegal CE1028‐00304 Industrial/Laboratory AC Module Assembly Unit
324 Tegal CE1028‐00401RW Industrial/Lab AC Module Assembly Unit
325 Tegal CE1029‐00201 DC Module Wafer Etcher Power Supply Chassis Enclosure Frame
326 Tegal CE1029‐00201 DC Module Wafer Etcher System ‐15/5/15/24V Power Supply PSU
327 Tegal CE1029‐00201 DC Module Wafer Etcher System ‐15/5/15/24V Power Supply Unit
328 Tegal CE1029‐00201 Industrial/Laboratory DC Module Assembly Unit
329 Tegal CE1029‐00201 Industrial/Laboratory DC Module Assembly Unit #2
330 Tegal CE1029‐00201 Industrial/Laboratory DC Power Module Plug‐In Unit
331 Tegal CE1029W00840 Industrial/Laboratory DC Power Module Plug‐In Assembly
332 Tegal CE1093‐0030 Industrial Motor Controller Control Module/Unit/Plug‐In
333 Tegal CE1093‐00303 Industrial Motor Controller Module Plug‐In Unit
334 Tegal CE1093‐00303 Industrial Plug‐In Motor Controller Module Assembly
335 Tegal CE1153‐00102 Industrial/Lab PSVTN Module Assy w/Watlow 804 Controller Unit
336 Tegal CE1153‐00102 Watlow 804 Temperature Controller Passivation Module PARTS
337 Tegal CE1153‐00102RW PSVTN Watlow 804 Temperature Controller Passivation Module
338 Tegal CE1323‐10101 AC Distribution Unit 6500 HRe Dual Frequency Plasma Etch Used
339 Tegal CG1041‐00401 Industrial Pressure Controller w/Vacuum General AG‐2 AdapTorr
340 Tegal CG1041‐00402 Wafer Etcher Pressure Controller Tylan AdapTorr AC‐2 Module
341 Tegal CG1041‐00402RW Industrial Pressure Controller Module Assembly
342 Tegal CG1041‐00402RW Pressure Controller w/Vacuum General AG‐2 AdapTorr
343 Tegal CG1103‐00401 PNEU NDL Wafer Etcher Pneumatic Valve Vacuum Meter Pin Module
344 Tegal CG1148‐00602 Wafer Chamber Gass Delivery Valve UFC‐1020 BCI3 MFC Assembly
345 Tegal CG1150‐00205RN Industrial 8‐Channel RWK Gas Controller Plug‐In Module Unit
346 Tegal CG1150‐00206 Industrial 8‐Channel Plug‐In Gas Controller Module Unit
347 Tegal CG1150‐0020G Industrial 8‐Channel Gas Controller Module
348 Tegal Circulating System Precision Scientific Chiller

349 Tegal Coat of Arms Java Indonesia ca 1925
350 Tegal Compact Air Products Water Chuck, Vacuum Pump
351 Tegal Cooling Ring for Drie 3200 Tools
352 Tegal Corp 39‐452‐002A ARM UPPER LH DOOR T915
353 Tegal Corp 39‐453‐001 TEGAL ARM LOWER RH DOOR
354 Tegal Corp 39‐453‐002 TEGAL LOWER LH DOOR T915
355 Tegal Corp 39‐659‐001 Screw Stud Standoff Aluminum 38 T915
356 Tegal Corp 39‐958‐001 TEGAL PULLEY TENSION DOOR T915
357 Tegal Corp 40‐275‐001 UPPER INSULATOR
358 TEGAL CORP 40‐575‐002‐C RING, CHUCK FRONTLINE ‐ 6"
359 TEGAL CORP 40‐751‐601‐A RING, 6" WAFER CENTER STRIPPER
360 Tegal Corp 42‐401‐001 Bracket Slide Rear LH T915
361 Tegal Corp 42‐401‐002 O‐Ring, 235 V
362 Tegal Corp 42‐402‐001 Bracket Slide Front LH T915
363 Tegal Corp 42‐402‐002 Bracket Slide Front RH T915
364 Tegal Corp 57‐017‐001 TEGAL PULLEY IDLER (BIG) DOOR T915
365 Tegal Corp 80‐095‐146 Transformer 220/115‐24V AC Module T9156‐P‐1623420
366 Tegal Corp 80‐200‐219 "SLIM‐TRACK" BARNES ENG. CO.; SLIDE CHAMBER T915
367 Tegal Corp 81‐007‐145 SEAL PUMP; TEGAL SEAL 1/2 TEPOLITE (80‐095‐397)
368 Tegal Corp 81‐007‐146 SEAL RING PUMP
369 Tegal Corp 81‐105‐222 Sensor, Control(Platinum)Temperature TEGAL T915 RES‐ASHER
370 Tegal Corp 99‐196‐003RW PCB ATI‐3 AUTO TUNE T915
371 Tegal Corp 99‐203‐004 PCB MNP‐4 MTCH NTWK
372 Tegal Corp 99‐206‐001 PCB AGCP‐1 TEGAL 915
373 Tegal Corp. Plasma Inline Etcher As Is for Parts 701
374 Tegal Corp. Plasma Inline Etcher match tune network
375 Tegal CP1037 CRT Program Terminal 13" Wafer Etcher System Display Monitor PARTS
376 Tegal CR1031‐00303 Industrial Wafer Etcher 100KHz Matching Network Module
377 Tegal CR1031‐00305 Industrial 100kHz Matching Network Plug‐In Module Unit

378 Tegal CR1031‐00305RW Industrial 100kHz Matching Network Plug‐In Module Unit
379 Tegal CR1031‐00306 Industrial/Laboratory 100kHz Matching Network Assembly
380 Tegal CR1040‐00205EX Industrial RF Controller Plug‐In Module Unit
381 Tegal CR1040‐00205RW RF Controller Wafer Etcher Signal Generator Module PARTS
382 Tegal CR1087‐20101RW RWK‐RF Generator CR1087‐20101RW ‐ RF Plasma Model# T‐502S
383 Tegal CR1324‐00100 RF Match Network Source Strip Untested As‐Is
384 Tegal CR1324‐00400 RF Match Network Source Strip 6500 HRe Used Working
385 Tegal CW 1047‐01101RW Industrial Wafer Chuck Assembly W/ 2x SMC NAQ2000
386 Tegal CW1033‐00301 Industrial Wafer Elevator Assembly w/Stepping Motor
387 Tegal CW1033‐00302 Industrial Wafer Elevator Assembly w/Stepping Motor
388 Tegal CW1033‐00303 Wafer Elevator Library Selector Transfer Handling Assembly
389 Tegal CW1033‐00303 Wafer Elevator Library Selector Transfer Handling Assembly #2
390 Tegal CW1038‐00402 Industrial Spatula Drive Belt Assembly w/Stepping Motor
391 Tegal CW1038‐00402RW Industrial/Laboratory Spatula Drive Assembly AS‐IS
392 Tegal CW1048‐00502 Industrial Wafer Shelf Lift Assembly Machine Indexer Module
393 Tegal CW1048‐00502 Industrial/Lab Pneumatic Indexer Module Assembly Unit
394 Tegal CW1048‐00502 Industrial/Laboratory Indexer Pneumatic Assembly
395 Tegal CW1048‐00502 Industrial/Laboratory Indexer Pneumatic Assembly #2
396 Tegal CW1048‐00502 Wafer Chamber Shelf Lift Assembly Machine Indexer Module
397 TEGAL DEIONIZED WATER HEATER CONTROLLER CE132100201
398 Tegal elevator frame assembly
399 Tegal Endeavor AT PVD tool ‐ SNAP IO SMC Controller for Process Module
400 TEGAL EPROM 400k MEMORY PCB, PN 99‐095‐320
401 Tegal FLIP 03601‐22‐040 Alphanumeric Fluorescent Display ‐ Lot of 2
402 TEGAL Front Robot Loader interface
403 Tegal Gas Contrller 99‐092‐004 NEW
404 Tegal Industrial Computer Source 7410‐14H Control Unit CD1100‐00302 4U Rack
405 Tegal Industrial Computer Source 7410‐14H Control Unit CD1100‐00302 4U Rack #2
406 Tegal Industrial Lab REAC Heated Upper Electrode Chamber Assembly Plate Unit

407 Tegal Industrial Lab Upper Body Chamber Ring Unit w/Viewing Side Ports PARTS
408 Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 12.5" Diameter
409 Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 13.5" Diameter
410 Tegal Industrial REAC Heated Upper Electrode Chamber Assembly Plate CC1230‐00100
411 Tegal INS‐1 Wafer Etcher System 15‐Pin Connector Sensor Component Board PCB
412 Tegal Model 421 Manual PCB 99‐011‐001
413 Tegal Model 421, 3", 75 mm Aluminum Wafer Carrier, 25 Slot, 1
414 Tegal Model 421, 3", 75 mm Aluminum Wafer Carrier, 25 Slot, Lot of 2
415 Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80‐202‐034, NOS
416 Tegal Model 903e Plasma Etcher DC POWER DISTRIBUTION PCB, 99‐142‐001
417 Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99‐125‐008, NOS
418 Tegal Model 903e Plasma Etcher GAS INTERFACE PCB ICG5 99‐126‐005 REV M
419 Tegal Model 903e Plasma Etcher UPPER CHAMBER GROUND, PRO 29‐464‐001, NOS
420 Tegal Netherlands Indies Postal Stationery Cover To Haarlem Holland
421 Tegal P/N 31‐165‐006 Stepping Motor, Carrier
422 Tegal PEP‐250‐Te High Voltage Power AC Plasma Source Generator 100Kz RF Supply
423 Tegal PEP‐250‐Te Industrial/Laboratory AC Plasma Source Assembly 3157508‐000A
424 TEGAL PLASMA ETCH, ELECTRODE, LOWER 39‐735‐002 REV.M
425 TEGAL PLASMA ETCHER 9XX 98‐247‐002, TSI. REV B
426 TEGAL PLASMA ETCHER 9XX GAS INTERFACE PCB, ICG‐6, 99‐126‐006 REV F
427 TEGAL PLASMA ETCHER 9XX SHUTTLE INTERFACE PCB, 98‐287‐002 REV A
428 Tegal PlasmaLine 200 Plasma Barrel Etcher – As Is Power Supply
429 TEGAL PLASMALINE MODEL 421 PLASMA ETCHER / ASHER, LOT of 2
430 TEGAL PLASMALINE MODEL 421 WITH SPARE PARTS! WORKING ? > J
431 TEGAL PN 80‐055‐621 VARIAN TV‐1001 NAVIGATOR MODEL # 9698931 TURBO PUMP
432 Tegal Power Distribution Box ‐ Hoffman Enclosure ‐ 208 Volts 3 Phase
433 Tegal Quartz PIN P/N 40‐297‐001‐E, NEW, 2 each
434 TEGAL RF SIGNAL GENENRATOR SUPPLY T‐1000E
435 Tegal SE 1496A A/D Plug‐In PCB Circuit Board Assembly Unit

436 Tegal SE 2059 AX CPU Plug‐In PCB Circuit Board Assembly Unit
437 Tegal source reactor ICP CR1350‐00300 with Tegal MHZ controller CR1325‐00400
438 Tegal SPI‐80‐095‐057 Probe Temperature SST
439 Tegal SPI‐99‐247‐003 SPI‐3, Tegal 99‐247‐003,
440 Tegal T‐1000E Comdel T1000E/DCX Wafer RF Signal Generator DC Power Supply Module
441 Tegal T‐1000E Comdel T1000E/RFG 13.56MHz RF Signal High Voltage Power Supply
442 Tegal T‐1000E Industrial 40VDC DC Power Supply Plug‐In Module Unit Assembly
443 Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299‐10102 324878
444 Tegal Wafer Elevator Vexta Motorized Linear Transfer Selector Library Handler
445 Tegal Wafer Lift Quartz Tip ANOD PIN, 49‐042‐002, 6 ea.
446 Tegal Wafer Transfer System Motorized Linear Selector Handler +Vexta C4412 PARTS
447 TEGAL XJET‐11503 TCU Elbow Fitting, 416192
448 Tegal/Bay Pneumatic BES‐530‐8‐PCB 8‐Port/Channel Solenoid Valve Control Board
449 Tegal/Comdel T1000E/RF Industrial/Laboratory 13.56MHz RF Power Supply Unit
450 TEGAL/DDI SHUTTLE INTERFACE CIRCUIT BOARD 00094072, 98‐287‐002 REV. A DVO 450‐B
451 TEGAL: 50566‐02 AUX RF Controller Control Module Board 83‐126‐003
452 Thermo Couple (TC) TEGAL 80‐700‐xx JES‐CE
453 TV‐1001 VARIAN NAVIGATOR MODEL # 9698931 TURBO PUMP W TEGAL FLD KIT 29‐597‐001
454 Unit/Tegal CHF3 80SCCM ‐‐ UFC‐1000 ‐‐ Used
455 Vacuum valve, KF‐40. Tegal P/N
456 VARIAN TURBO‐V 1000HT TURBO PUMP CONTROLLER MODEL EX9699454 TEGAL 80‐055‐471
457 VARIAN TV‐1001 NAVIGATOR MODEL # 9698931 TURBO PUMP TEGAL 80‐055‐621
458 VAT 14046‐PE44‐1016 HV High Vacuum Gate Valve Tegal 6500 HRe Used Working

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