Semiconductor Equipment Spare Parts in Asia:Please email us for the availability of the items. They are subject to prior sale without notice.Appreciate your time!

1. No Description
1 Novellus C3 Triple Speed Max, Concept3, 300mm, Tool No : TNHG58
2 0010‐43023,CRESCENT ASSY, UD,DESICA, 300mm
3 0090‐04993, Controller RTC CPCI Centura AP w/CCM Block, 0090‐04683
4 0190‐19008, SPECIFICATION FOR UHP POLYMER FOUR VALVE, APPLIED MATERIALS, INC.
5 1040495R, ENTRON PBN ESC, Working, 3month warranty
6 11039040R,PHASE MONITOR BOX Repair
7 2124‐000009‐11, TEL
8 300mm, Dual Blade, VHP Robot, 0010‐27382, ELA‐B014CG1‐04, 0190‐25030, Arm set
9 391‐41000‐02,NOVA CONTROL UNIT, SDS‐8000X‐1‐000
10 3KW MSK ASTEX Microwave Plasma Subsystems
11 5040‐000049‐11 ASSY,MOTOR,SERVO,AC, SGMCS‐08DDA‐TE14, YASKAWA
12 8132471G001, ON‐BOARD‐MODULE, Controller, On‐Board 8, OB‐8
13 ADTEC AMV‐1000LAB RF MATCHER
14 ADTEC AXR‐2000 III, 2000W, 13.56MHz, RF Plasma Generator
15 ADTECH AX‐3000 lII‐N RF Plasma Generator / RF Power Out Put 2300 Watt
16 AE APEX‐10KW/13 RF Generator, A3H2C200BA120G001A, Apex‐10013
17 AE ETCH RF MATCH PRECISION 5000, 0010‐09416 REV.R
18 AE HFV‐8000 RF Generator, 3155083‐504, 0190‐24487
19 AE MECURY‐1013 RF MATCH, 3150272‐013
20 AE NAVIGATOR‐10013 RF MATCH / 3155162‐023, 27‐293459‐00
21 AE NAVIGATOR‐10013 RF MATCH / 3155162‐028, 27‐304690‐00
22 AE NAVIGATOR‐10013 RF MATCH, 3155162‐003
23 AE NAVIGATOR‐3013 RF MATCH, 3155132‐004
24 AE PINNACLE‐20K, PINNACLE 20K RF Generator, 3152412‐233, 0190‐25724‐001
25 AE PINNACLE‐20K, PINNACLE 20K RF Generator, 3152412‐402,0190‐25698‐001
26 AE SYSTEM‐H.E PVD RF MATCH PVD, 0010‐22225 REV.P1
27 AE VHF OVATION 35162 Power Supply, 3.5kw 162MHz, 3150861‐002
28 Affinity EWA‐23DK‐HE04CBC, Chiller, Inova 300mm
29 Affinity EWA‐23DK‐HE04CBC0, Chiller, Inova 300mm
30 AL6095 BD Memory Tester / PE Card / P5215051‐12
31 AMAT 0010‐09340, SUSCEPTOR LIFT ASSY
32 AMAT 0010‐27688, ZMM031067‐1111, POWER SUPPLY REFLEXION UPA DC DISTRIBUTION BOX
33 AMAT 0010‐29963, Controller CCM ENABLER CS
34 AMAT 0010‐70001, Cassette Handler Assy, 150mm
35 AMAT 0010‐70058, 35C‐HL, STROAGE ELEVATOR 29 SLOT
36 AMAT 0040‐48594, CHUCK‐ESC, ESC‐263, ESC ULTIMA 300MM
37 AMAT 0150‐35202, CABLE ASSY GAS PANEL UMBILICAL #1
38 AMAT 0150‐35205, HARNESS ASSY MAINFRAME UMBILICAL CMJ1
39 AMAT 0150‐35209, HARNESS ASSY PNEUMATICS UMBILICAL
40 AMAT 0190‐24298 REV002, 10762200‐2012 RF CABLE ASSY, N R/A
41 AMAT P5000 MARK‐II 200MM Nitride 3‐CH
42 AMAT PVD RF MATCH , M0010‐09750, Automatic Impedance Matching unit, 0010‐09750
43 AMAT PVD RF MATCH / 0010‐01929
44 AMAT PVD RF MATCH / 0010‐02372
45 AMAT PVD RF MATCH / 0010‐22161
46 AMAT PVD RF MATCH / 0010‐33724
Please email us for the availability of the items. They are subject to prior sale without notice.Appreciate your time!
ID-e-0144 www.semistarcorp.com sales@semistarcorp.com

2. 47 AMAT, Cassette Handler, 0010‐70001, 200mm, 471‐KM
48 AMAT, MAGNET;0040‐53249,MAGNET HOUSING
49 AMAT, SHIELD,0020‐54777,Inner Shield (SIP),SUS
50 APPLIED MATERIALS, 0021‐47450, BLOCKER PLATE, ALUMINUM, BLOCKER DD2439 SACVD
51 ASE AMW‐3000 Magnetron unit
52 ASE MPS‐30D RF Generator
53 ASSY, PCB, ANA.OUT W/JUMP, 19‐00136‐00
54 ASSY, PCB, Digital I/O #2, 19‐00157‐00, Concept one, C1, Novellus
55 ASTECH TL‐10R‐05, RF Match
56 ASTEX AX7610NVL‐S, CHEMICAL DOWNSTREAM PLASMA SOURCE
57 ASYST LPT FORWARD PPLT, RT / LPT‐2200
58 ASYST SMIF‐300FL,S3,25WFR, Front‐Load Port, 9750‐2000‐00, 9600‐1187‐00
59 BOC EDWARDS EPX180L VACCUM DRY PUMP
60 Brooks 003‐9010‐03, Vaccum Cassette Elevators
61 Brooks 107527, ATM Robot Controller
62 Brooks 119204, Robot Series 8 Controller
63 Brooks 122078, Pre‐Alinger Robot
64 Brooks 124804 Robot, 119204 Series 8 Controller, 002‐7391‐08 Aligner
65 Brooks 124804, ATM Robot
66 Brooks Automation 003‐1600‐29, MagnaTran 7, Robot
67 Brooks Automation 017‐0266‐01, ATM Robot with Arm, 27‐159982‐00
68 Brooks Automation 121655, ATM Robot
69 Brooks Automation 201600‐43‐0005, MagnaTran 7, MAG7 with Robot, Arm : 173735
70 BROOKS AUTOMATION FIXLOAD 25TM, WAFER LOAD PORT
71 BROOKS AUTOMATION FIXLOAD 6M, WAFER LOAD PORT
72 CAMECA LEXFAB‐300, Shallow, Probe, Metrology Tool, Measurement
73 CARD‐I/O, SIOC 0&1, 02‐057949‐00, ASM, ALTUS, SIOC FIELD CONNECTOR MODULE, ASSY
74 CKD VEC‐VH8‐X0318‐1, SYSTEM VALVE CONTROLLER
75 COMDEL CLX‐2500 RF Generator, 27‐255494‐00, FP1339R2
76 COMDEL CLX‐2500 RF Generator, 27‐287258‐00, FP1339R3
77 COMDEL CPS‐250 RF POWER SOURCE/ 3.39MHz, FP0014R2
78 COMDEL CX‐16P with CLX‐10KW RF Generator, 27‐257659‐00, FP6802R5
79 COMDEL MATCHPRO CPM‐1000 RF MATCHING NETWORK, FP2209R2
80 Controller‐Temperature, GRS‐612, KOMATSU, 20005030
81 CT5080‐105093‐11, MOTOR,SERVO IRAI Y # NP8241R733‐0, PANASONIC, MSMA082S2N
82 CTI‐CRYOGENICS 9600 COMPRESSOR, 8135908G001
83 CTI‐CRYOGENICS ON‐BOARD 8, CRYOPUMP, OB‐8, 8116236G001
84 DAIHEN NX‐AMN‐50E3 RF AUTO MATCHER 60 MHz, 5 kW / 3D80‐001458‐31
85 DAIHEN NX‐PLB‐01 RF MATCHER / 1D80‐000042‐11
86 DAIHEN RMN‐50M RF MATCHER / 0190‐04668
87 DAIHEN RMN‐50N4 RF MATCHER / 0190‐19174
88 DAIHEN WGA‐50E RF Power Generator with DC Power supply / 3D80‐000602‐12
89 DAIHEN WMN‐50C4 RF MATCHER / 3D80‐000604‐71, 3D39‐050149‐71
90 DAIHEN WMN‐50C6 RF MATCHER / 3D80‐000604‐71
91 DAIHEN WMN‐50C6A RF MATCHER / 3D80‐000604‐71, 3D39‐050149‐11
92 Dressler LFGS‐1250 D RF Generator, 1250W, 300‐500KHz
93 DRIVER‐MOTOR IRAI Z #01 NP8241R303‐0 ;5080‐105099‐11 ,SGDM‐10ADAY751, YASKAWA
Please email us for the availability of the items. They are subject to prior sale without notice.Appreciate your time!
ID-e-0144 www.semistarcorp.com sales@semistarcorp.com

3. 94 ENI ENI OEM‐50N SOLID STATE POWER RF GENERATOR, 27‐00096‐00
95 ENI GHW‐85A DC POWER SUPPLY, 8500W, 13.56MHz
96 ENI MKS Dual Match 2.27MHz 60‐002296‐002 / 000‐1103‐075 (DOFBC2‐075)
97 ENI MKS Dual Match 2.27MHz 660‐002296‐004 / 000‐1103‐088 (DOFBC2‐075)
98 ENI OEM‐6 SOLID STATE POWER RF GENERATOR
99 ENI OEM‐6AM‐1 RF GENERATOR
100 EQ BESTECH RFS‐2502 RF MATCH, EQM‐RFS‐2502
101 FILTER H150XPHI102,PTFE, MJ‐G204‐P10K, MIURA
102 GRANITE SURFACE PLATE;0040‐76820,300mm,Shower head
103 HARNESS ASSY, SCAN, ROTATE ASSY , E16147982,W6007R
104 IGC POLYCOLD PGC‐150, GS CHILLER
105 Intellisys IQ SERIES NC, TBV‐IQA‐200‐NW‐50‐S02, Intellisys IQ SERIES NC
106 KASHIYAMA KMB1201T ROOTS VACUUM PUMP / Boostor Pump / MOTOR BDLQ‐5Z
107 KAWASAKI, AMAT, 0190‐10602, Track Cable Set For40975‐1892
108 KOKUSAI 3ZOT088628, SEAL CAP;3ZOT088628,CAP BASE TSDS1‐0106940028 DIFF
109 KOKUSAI CQ1710, 5UOT308364, T4DS1‐00516‐10026, Temp controller, 06220‐90013,
110 LENS;5322‐695‐16148,Detector,Thru Lens,SAM DDL LIGHT GEL 200/300 FEI COMPANY
111 Leyblod Mag 2000 CT, 400045V0009, MD2000D Controller with the cables
112 Leyblod MD2000 Digital Controller, 400036V0006, Cable, Drive/Bearing, 3M
113 MERCURY‐10013 RF MATCH, 3150273‐004, 27‐256558‐00
114 MKS ASTex FI20162 Microwave Head
115 MKS ASTex FI20163‐1 Microwave Head
116 MKS ENI DCG‐200A‐S00, DCG‐200A DC Power Supply, 0190‐07967, Slave
117 MKS ENI DCG‐200A‐S0J, DCG‐200A DC Power Supply, 0190‐23636, Slave
118 MKS ENI DCG‐200Z OPTIMA, DCG‐100Z‐00, Master DC Power Supply, 0190‐10114
119 MKS ENI DCG‐200Z OPTIMA, DCG‐200Z‐S0J DC Power Supply, 0190‐19811, SLAVE
120 MKS ENI DCG‐200Z OPTIMA, DCG‐400Z‐00 DC Power Supply, 0190‐11595, Master
121 MKS ENI DCG‐200Z OPTIMA, DCG‐400Z‐0J, Master DC Power Supply, 0190‐19810
122 MKS ENI DCG‐200ZHC‐S02, DC Power Supply, 27‐298485‐00,Slave
123 MKS ENI GHW‐50, GHW‐50Z, GHW50Z‐09029 2.5KW RF GENESIS Generator
124 MKS ENI Specturm B‐5002 RF Generator, 5KW
125 MKS RPS 15L, ASTRON AX7645 RF GENERATOR,AX7645RH ASTRONhf‐s AX7645PS + AX7645RH
126 MOTOR, SERVO IRAM, M‐SSB020FN502, NSK, 5080‐192472‐12
127 MOTOR‐SERVO IRAI Z NP8241R723‐0 ;CT5080‐105094‐11
128 MOTOR‐SERVO, SGMCS‐08 DDA‐TE14 CT5040‐000049‐11, YASKAWA
129 NOVELLUS 02‐106217‐00 REVC, ASSY, WTS‐0 SIOC, CONTROLLER
130 Novellus 02‐132030‐00, Assy,Mod_Cont,P166/64 Qnx4
131 NOVELLUS 02‐143079‐00 ASSY, SIOC 2 SIOC, Digital Dynamics 02‐122156‐00
132 NOVELLUS 02‐144985‐00, WTS 3 FOUP, SIOC CONTROLLER, 27‐053659‐00
133 Novellus 02‐305108‐00 Rev.B, 79‐305936‐00
134 Novellus 02‐307117‐00 Rev.2
135 Novellus 15‐10534‐00, C2 Hoist, Altus Part
136 Novellus 27‐00001‐00, RFS3000MN, Matching Network
137 Novellus 38‐266474‐00, HF GENERATOR, AE14889‐01, TMS: 68999
138 Novellus 38‐266474‐01, LF Generator AE14889‐02, TMS: 68999
139 Novellus 4630‐413‐3030, 02‐101176‐00, MEASURMENT PROBE, 0199, CI8125
140 Novellus C3 Triple Speed Max, Concept3, 300mm, Tool No : TNHE24
Please email us for the availability of the items. They are subject to prior sale without notice.Appreciate your time!
ID-e-0144 www.semistarcorp.com sales@semistarcorp.com

4. 141 Novellus C3 Triple Speed Max, Concept3, 300mm, Tool No : TNHE25
142 Novellus Module Controller P100, 02‐034310‐00
143 Novellus Porter MFC‐CU‐A TEOS Controller, 27‐00198‐00,Control, Module, LMFC,S6
144 Novellus SHIELD, Reverse Tophat(Barrel), PC300, 15‐267250‐00
145 NOVELLUS SRN2, 02‐255013‐00, RF MATCH, FIXED DOME, SPEED‐S, TRAZAR
146 NOVELLUS, 15‐028471‐00, Top Plate, C2, Atlus, 200mm, 8inch, OEM Part
147 Novellus, 15‐385384‐00, RING, INSULATOR, CERAMIC, HCM TARGET, Oem New
148 NP ( NEW POWER PLASMA) NPM‐10KASH MATCHING , NPM2K6B052
149 NPP NPG‐15KM, NPG15KM RF GENERATOR
150 NPP NPG‐3KG RF Generator, New Power Plasma
151 NPP(NEW POWER PLASMA) NPM‐1250PCA‐V01 RF MATCH
152 NPP(NEW POWER PLASMA) NPM‐5KSRNA‐01 RF MATCHING NETWORK
153 P5000 MIN CONTROLLER, 0010‐70195, 5000 PLATFORM SYSTEM ELECTRONIC, 0100‐09010
154 Panasonic MOTOR‐SERVO IRAI X1 NP8241R706‐0;CT5080‐105091‐11
155 Parker Hann SX6‐DRIVE, Microstep Compumotor Servo Drive
156 PCBB‐105989, BLUEICE SPIN CHUCK, SPM SPIN CHUCK
157 PFEIFFER TCP015, TMH064, PMP02360 Vaccum Pump ,Controller, with cable
158 PFEIFFER TCP600, TCP‐600, PMC01320, Vaccum Controller, Power, Working
159 Pfeiffer TMH071P, PM P03 106‐A with TC750‐E74, PM C01 712, VACCUM, Turbo Pump
160 Pfeiffer TMH521, PM P03 210 C with TC 750‐SPECIAL DS15, PM C01 711, Turbo Pump
161 PolyCold 1XCL, GAS CHILLER
162 PSK SUPRA3 ASHER EFEM, TM, 2 PM, AC RACK, Cable, Software Installed
163 PSK TERA21, Asher, EFEM,TM,PM,AC RACK, Cables
164 PSK TERA21, Asher, EFEM,TM,PM,AC RACK, Cables, As‐is
165 PUMP;5014‐000063‐11
166 RF MATCH, ASSY HIGH EFF RF‐BIAS;0010‐33724
167 RF SERVICES RFS3000MN, 27‐00040‐00, CONTROLLER, NOVELLUS, RF Matching Network
168 Rorze RA301‐512‐004, Wafer Pre‐Aligner, Robot
169 RPS AE XSTREAM 3151806‐202 / SN. C412632
170 RPS AE XSTREAM 3151806‐202 / SN. C565271
171 RPS MKS ASTRON AX7685 GENERATOR
172 Shimadzu EI‐203M, 262‐81452‐02, Tump Controller, TMP Power Unit, AC200V
173 SHIMADZU EI‐D230M, Turbo Pump Controller, 100‐120 / 200‐240V, 50‐60 Hz, 450 VA
174 SHIMADZU MOLECULAR PUMP(TMP‐1303LMC‐G1)
175 SHIMADZU MOLECULAR PUMP(TMP‐1303LMC‐G1),TMP Power unit(EI‐D1303M)
176 SHIMADZU MOLECULAR PUMP(TMP‐1303LMC‐G2)
177 SHIMADZU MOLECULAR PUMP(TMP‐1303LMC‐G2),TMP Power unit(EI‐D1303M)
178 SHIMADZU TMP‐203M‐G1, EI‐D203M, Pump Controller, motor and power cables
179 Shinko SBX92101286‐5, Robot, Wafer Transfer, BX80‐070938‐15
180 SUMITOMO SC‐A40 OZONE GENERATOR CONTROL UNIT, O3
181 SYSTIUM Technologies Computer
182 TEL OEE‐T13327‐1, CT50Z7‐684666‐11, CGHL(30L), PLATE HOT
183 TRAZAR AMU10H‐1, RF MATCHER, 2922‐001 / 553‐07491‐00
184 TRAZAR TOP MATCH, Novellus 02‐260957‐02
185 TREK POWER SUPPLY;27‐297727‐00,ESC P/S 89X4 TREK 685‐L‐CE HIGH‐VOLTAGE POWER
186 TSL220‐1200A, RT107‐1201‐002, Stepping Motor: RM29B2S, 103G814‐5790
187 Turbo‐V 250, TV250, Turbo Pump, 9699008
Please email us for the availability of the items. They are subject to prior sale without notice.Appreciate your time!
ID-e-0144 www.semistarcorp.com sales@semistarcorp.com

5. 188 ULVAC ROBOT, Vacuum Transfer Robot, Transfer Arm, Paddle, CV‐115A
189 UOT249105, ROTATION AXIS REPAIR
190 Varian TV 551 Macro Torr, Turo Pump, Navigator
191 VARIAN TV301 NAVIGATOR, PUMP, 9698919
192 VAT 14036‐PE24‐ARV1/0161, 60‐290433‐00, pneumatic, Gate Valve
193 VAT 63‐336650‐01, PENDULUM VALVE, 65040‐PACV‐AYU2/0002, A‐450700, Working,ISO100
194 Verity SD1024DL, EYED HP SPECTROGRAPH, ROHS, 1400‐00206
195 Verity SD1024F‐2‐S, EYED HP SPECTROGRAPH, ROHS, 0190‐19764
196 VLSI 0326783‐000, LCS12‐5S‐0.204‐3.040‐5K‐25, ACS12‐0.155D‐16K‐25, Wafer
197 Watkins Johnson, WJ1000, WS‐1000, Cassette Handler, Wafer Auto detect
198 YASKAWA NXC‐100, Robot Controller ERCR‐NS01‐B004‐E1
199 YASKAWA XU‐RC250S‐D00, LOAD ROBOT, Wafer Transfer Robot
200 YASKAWA XU‐RC820M‐F00, Robot, Arm set, Paddle, 300mm, MANIPULATOR
Please email us for the availability of the items. They are subject to prior sale without notice.Appreciate your time!
ID-e-0144 www.semistarcorp.com sales@semistarcorp.com