This document discusses combining magnetron sputtering plasma and ion source plasma technologies. It shows views of a system that uses both a magnetron sputtering process and ion source, as well as a full view of the combined system and a view of the combined system connected to a power controller rack.

1. Magnetron Sputtering plasma Magnetron Sputtering plasma Ion source plasma

2. Combined system Sputtering + ion source
Magnetron Sputtering side view

3. Magnetron Sputtering +ion source Magnetron Sputtering +ion source full view

4. Magnetron Sputtering + ion source with power controller rack