This document lists replacement parts for various lithography systems, including beam splitters and output couplers from Cymer that are compatible with ASML steppers and scanners made by Cymer. It provides the OEM part numbers, descriptions, and Cymer part numbers and images for reflective coatings used in the optical systems of the listed lithography machines.

1. PacTec
OEM
Model OEM Part Description Image Part
Part Number
Number
ASML
5500/300/350/50
0/550/700/750
04-06044-0
Cymer Cymer Beam Splitter, 248nm 82007
Cymer OP-99-0606
ELS-5610
5300, 5310
5400, 5410
ASML 5500
/300/350/500/550
05-06168-001
/700/750 Cymer 20% Reflective,
Cymer EC623-98 82008
248nm
248P80 AR
Cymer
ELS-5610
Cymer 10% Reflective
Cymer 04-06051 82021
Output Coupler
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Confidential Ed West (360) 719-1822 11/17/2011