The document describes the MKS Instruments MultiGas 2030 FTIR gas analyzer. It has high resolution and fast response time of 1 second for analysis. It uses a long path length, small volume gas cell that provides fast response. It has various detector options including TE or LN2 cooled MCT detectors. The MultiGas 2030 maintains permanent calibration and can detect compounds at ppb to ppm levels simultaneously. It provides full instrument diagnostics and hardware components include a heated gas cell and electronics box. MKS Instruments provides support for applications of the MultiGas 2030 in areas like compliance monitoring, engineering, and ambient air analysis.

1. MKS Instruments
MultiGas 2030 FTIR
MKS Instruments
On-Line Product Group
Presented by:
Jim Belanger
jim_belanger@mksinst.com

2. MultiGas 2030 Features
 Resolves & analyzes more compounds
– 0.5 cm-1 high resolution FTIR
 Analysis in 1 second
– (0.2 sec for HS version)
– High speed FTIR
 Fastest response
– Long path length, small
volume gas cell
– 5.11 m, 200 mL gas cell
 High speed detectors for all applications
– TE or LN2 cooled MCT detectors
 No field adjustments required  Provides correction for
– Permanently aligned spectrometer pressure fluctuations
– 0 – 1000 Torr cap.
manometer
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3. MultiGas Features, continued
 Maintains permanent calibration
– Calibration supplied with instrument
Instrument to Instrument Precision
– Reduces need for gas cylinders
– All instruments maintain same Calibration - fixed
calibration Sample
 Detection limits ppb to ppm
– All with a single gas cell
 State-of-the-art spectral analysis
– More than 30 compounds
simultaneously
 Full instrument diagnostics
– Quickly pinpoint instrument failure
– Demonstrates instrument compliance Carbon Monoxide Spectrum
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4. MultiGas 2030
Hardware Overview

5. MultiGas 2030 - Top View
Heated Cell Electronics
Detector Box Baratron pressure Heated Gas inlet
measurement
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6. MultiGas Cell Advantage
 20/20 Gas Cell
– 5.11 m, 200 mL volume
– 32 passes through cell
– Long path - small volume
-->provides fast response
– Versions
 Ni-coated Al cell
 Ni-coated Stainless Steel
20/20TM Long Path (5.11m) Gas Cell  Nickeless Stainless Steel
– Alignment indexing pads
 Mirrors
– O-ring “face” seal
 Kalrez, Viton, Metal
– Corrosive resistant coating
– High light throughput
 Windows
– KBr, MgF2-KBr, BaF2, CaF2
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7. 2 cm Gas Cell
Used for %-level analysis in particular for SynGas Reactions
255 times less sensitive then 5m gas cell
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8. MG2030 MCT Detectors
 LN2 Cooled Detectors
– Larger Range:
 Greater number of detectable species
 500 cm-1 cut off (16μ)
– High Sensitivity: Lower minimum level of detection
– Maintenance
 12 hour coolant refill require
 3-5 days coolant refill with 5L extended dewar
 TE Cooled Detectors
– Narrow Range:
 Smaller number of detectable species
 2000 cm-1 (5μ), 1350 cm-1 (7.4μ) or 1100 cm-1 (9.2μ)
– Highest Sensitivity - 2000 cm-1 (5μ),
 Lowest minimum level of detection
 Unable to detect species such as NH3
– Maintenance - None
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9. MG2030 Detectors
 MG2030 offers MCT Detectors
– 5 micron – 16 micron detector ranges
– Selection depends on gas/sensitivity/range
required
Detector Sensitivity Comparison
Cooling Sensitivity Comparison to
DETECTOR Range Coolant
Temp (D*) 16u LN2
5000 - 2000 Piezo electric
5 micron -80° C 77.1 e9 1.8x more sensitive
cm-1 element (TE)
5000 - 1350 Piezo electric
7.4 micron -80° C 6.9 e9 6x less sensitive
cm-1 element (TE)
5000 - 1100 Piezo electric
9 micron -80° C 2.3 e9 18x less sensitive
cm-1 element (TE)
5000 - 500 Liquid N2
16 micron -196° C 42.8 e9 Base value
cm-1
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10. Instrument Spectral Accuracy
 Instrument Accuracy Optimization
– Spectra linearity
 Accurate absorbance in the whole range of
absorbance level
– Resolution
 Instrument has same resolution (i.e., line width) as
the calibration spectra
– Line position
 Instrument spectra are “lining up” exactly with the
calibration spectra
 Validation
– Use transferrable calibration and verify cal cylinder
– Still need H2O Calibration on each instrument for CEM
– Remove influences from components like CO2 and H2O
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11. Field Analysis Using FTIR
 Monitoring VOCs
– CH4 ranges from 500 up to 3000 ppm
– C2H6 in the hundreds of ppm
– Propane on the order of 50 ppm and below
– Need to speciate to remove Methane and Ethane
– Unburned Propane largest VOC contribution after catalyst
 Monitoring HAPs
– Formaldehyde easy to measure by FTIR
 Conventional Total Hydrocarbon (THC) analyzers
– Can not separate Propane from Methane or Ethane
– Use Methane Analyzer then subtracts the rest – Not sensitive
– Unable to detect all HCs (e.g. formaldehyde)
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12. Field Deployable FTIR
 Advantages
– Multiple species – one instrument
 SO2, NH3, NO, HCl, HF, CO, CO2, H2O, and VOCs
– Analyze components in high CO2 and H2O
– Direct analysis – no chemical conversion or “fudge
factors”
– Analysis method minimizes interferents
– Flexibility in Changing in Method
 Customer can easily modify
 Transferable calibrations
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13. How Can MKS OLT Support You?
 MKS On-Line Products
– Dedicated to your gas analysis success
 Numerous Applications
– Compliance
– Engineering
– Ambient air
 Support Resources
– MKS Applications Team
– MKS Field Services Team
– Outside Applications Team
 Industry Standard Technology
– Field proven rugged FTIR analyzer
– Industry leading software and analysis algorithms
 Financing Assistance Available
– Capital partners
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14. Thank You!