The document summarizes design revisions to the Beta Build loadlock chamber for a semiconductor fabrication tool. Key changes include:
- Redesigning various loadlock components like the lid, end effector, and internals to be stiffer with additional safety features.
- Performing FEA analysis to optimize components like the end effector, lid and chamber for reduced displacement under stress.
- Adding sensors to verify the end effector is fully retracted before the lid can open.
- Modifying the Alpha Build loadlock chamber with internal machining and stiffening ribs to accommodate the revised Beta Build design.
2. CF 32 Issue 11
2
BETA BUILD LOADLOCK
REDESIGNED LID TO
BE STIFFER
REDESIGNED STOP
EXISTING STANDARD DESIGN
WINDOWS INCORPORATED
WITH ADDITIONAL SAFETY
GUARD
HINGES ENLARGED
WITH ADDITIONAL
FIXINGS
REIFORCING
RIBS ADDED
OPTICAL DENSING ADDED FOR
POSITIVE VERIFICATION OF
EFFECTOR RETRACTED
FIXING POSITIONS
ADDED FOR ELECTRICAL
AND PNEUMATIC
COMPONENTS
NITROGEN
PURGE MOVED
INBD
PIVOT BLOCKS
NOW INTEGRAL
WITH CHAMBER
3. CF 32 Issue 11
3
BETA BUILD LOADLOCK
REDESIGNED END
EFFECTOR FULLY
EXTENDED
REDESIGNED END
EFFECTOR FULLY
RETRACTED
LID FULLY OPEN
4. CF 32 Issue 11
4
BETA BUILD L/L. CHAMBER FEA
Name Type Min Location Max Location
Displacement1
URES:
Resultant
displacement
0 mm
Node:
231
(235.75
mm,
-
2.60229e-
016 mm,
-4.5 mm)
0.0264306
mm
Node: 23722
(-
18.5156
mm,
-474.425
mm,
10.9278
mm)
Stress1
VON: von
Mises stress
4542.83
N/m^2
Node:
167218
(-122.125
mm,
20 mm,
-8.18061
mm)
5.21238e+007
N/m^2
Node: 118383
(-2.125
mm,
2.9654e-
005 mm,
-
0.819392
mm)
MAXIMUM DEFLECTION = 0.026mm
ADDITION OF LASER APATURE RESULTED VERY LITTLE INCREASE
7. CF 32 Issue 11
7
BETA BUILD L/L INTERNALS
SHORTENED,
LIGHTENED END
EFFECTOR
ADDITIONAL HOLES
FOR PLATTEN
REMOVAL
JACKING SCREWS
WITH LOCK NUTS
ADDED
REVISED BELT
SUPPORT BLOCK
FIXING TO CHAMBER
RAIL END STOPS NOW AT ALL
END POSITIONS TO PREVENT
ACCIDENTAL DISMOUNTING OF
CARRIAGES DURING
BUILD/MAINTENANCE NEW RAIL SUPPORTS
ADDED FIXED TO CHAMBER
AT EACH END
MACHINED SCREWS
ADDED TO PROVIDE
PRECISE LOCATION THIS
SIDE
SLOTTED HOLES IN CARRIAGE
STRUCTURE TO ALL FOR
DIFFERENTIAL THERMAL
EXPANSION IN ASSY
ACCESS HOLES
ADDED TO AID RAIL
ASSEMBLY
REDUCED HEIGHT POSN CAMS
8. CF 32 Issue 11
8
BETA BUILD L/L INTERNALS
BELT SUPPORT BLOCK & PULLEY REVISIONS
SCREW AND NUT
NOW M4
Ø5 x 0.5 HIGH
PLATTEN
SUPPORTS (x6)
RECESSES
FOR CAMS
REVISED BELT
SUPPORT BLOCK
10. CF 32 Issue 11
10
BETA BUILD L/L END EFFECTOR
PLATTEN SUPPORT PAD 0.5mm
ABOVE END EFFECTOR
LOCATING CAMS REDUCED TO
1.5mm THICK TO REDUCE
DISPLACEMENT EFFECTS OF
PLATTEN THERMAL EXPANSION
12. CF 32 Issue 11
12
BETA BUILD L/L
END EFFECTOR FEA
Name Type Min Location Max Location
Displacement1
URES:
Resultant
displacement
0 mm
Node:
254
(-
178.596
mm,
329.811
mm,
-3.5
mm)
0.183342
mm
Node:
122607
(-
107.761
mm,
-
74.8742
mm,
-
3.49999
mm)
13. CF 32 Issue 11
13
BETA BUILD L/L EXTERNALS
GEARBOX TO BE
REVISED AT BETA BUILD
COUPLING TO BE
REVISED AT BETA
BUILD
NEW SENSOR ASSEMBLY
ADDED TO REGISTER THAT
THE END EFFECTOR IS
RETRACTED. LASER OR
DEFUSED PHOTO CELL WILL
BE TESTED IN NEXT PHASE
14. CF 32 Issue 11
14
BETA BUILD L/L LID
REVISED HINGE HAS AN
ADDITIONAL FIXING AND THE
ABILITY TO REACT TORSIONAL
LOADS FRM THE LID
CIRCLIP
GLASS
SEAL
ADDITIONAL PYREX
PROTECTIVE SHIELD
LID ASSEMBLY MASS AND C OF G
VERTUALLY IDENTICAL TO ALPHA
BUILD UNIT BUT GREATLY
STIFFENED
EXISTING GAS STUTS CAN BE
UTILISED
ALPHA BUILD
SEAL RETAINED
15. CF 32 Issue 11
15
BETA BUILD L/L LID FEA
Name Type Min Location Max Location
Displacement1
URES:
Resultant
displacement
0 mm
Node:
1921
(251.979 mm,
-718.978 mm,
0 mm)
0.0559768 mm
Node: 4383
(-2.38662 mm,
-289.034 mm,
9.5 mm)
Stress1
VON: von
Mises stress
12737.7
N/m^2
Node:
123775
(339 mm,
4.08452 mm,
27.5 mm)
5.76537e+007
N/m^2
Node: 61052
(258.854 mm,
-366.546 mm,
17.8536 mm)
23. CF 32 Issue 11
23
BETA BUILD L/L ASSY
OUTSTANDING ISSUES
• INCORPORATION OF GEARBOX AS
TESTED ON ALPHA BUILD.
• SOURCE NEW DRIVE COUPLING TO
ELIMINATE BACKLASH
• TEST SENSORS FOR END EFFECTOR
RETRACTED INDICATION
• CONSIDER VAT VALVE OPTIONS AND
INTERFACING APATURE
• LOCKING SYSTEM FOR OPEN LID
24. CF 32 Issue 11
24
NGP-B LOADLOCK EXISTING
ALPHA BUILD MODIFICATIONS
• MODIFICATIONS TO ALPHA BUILD
CHAMBER.
• INTERNAL PART REVISIONS AND
ADDITIONS TO BE INCORPORATED.
(NEW END EFFECTOR ?)
• ALPHA BUILD LID RETAINED BUT WITH
NEW HINGES AND STOP.
25. CF 32 Issue 11
25
ALPA BUILD CHAMBER
INTERNAL MACHINING MODS
INCREASED CUTOUT
AT RAIL POSITIONS
TO INCORPORATE
RAIL SUPPORTS
ADDITIONAL HOLES
FOR REVISED BELT
FIXING BLOCK
26. CF 32 Issue 11
26
ALPA BUILD CHAMBER
STIFFENING MOD (UNDERSIDE)
INTERFACE FOR NEW
PROXIMITY SENSOR
(END EFFECTOR
RETRACTED)
FIXING HOLES FOR THE
ADDITION OF STIFFENING
RIBS
