Alan Weber spoke at SEMICON China on Smart Manufacturing and Big Data

1. www.cimetrix.com
Integrated Equipment Data
Collection and Management for
Smart Manufacturing
16 March 2018
Cimetrix Incorporated
1

2.  Key messages
 Smart Manufacturing context
 Factory stakeholders
 Equipment model value chain
 SEMI Standards support
 Integrated data management
 Application examples
Outline
2

3.  Stakeholder needs drive all requirements
 Equipment models are key technology
 Content determines system capability
 Management tools determine user experience
 Service-oriented architectures enable smooth
technology evolution through decoupling
 Current SEMI Standards provide direct support
 Consistent user experience is vital for stakeholder
satisfaction and system adoption
 Chinese semiconductor industry is in perfect position to
leverage all the above
Key messages
3

4.  “… cyber-physical systems monitor physical
processes, create a virtual copy of the physical
world and make decentralized decisions.
 Over the Internet of Things, cyber-physical systems
communicate and cooperate with each other and
with humans in real time…”
What is “Smart Manufacturing?”
From Industry 4.0 Wikipedia…
4

5. Factory stakeholders
KPIs, applications, equipment models…
5
Key
Performance
Indicators
(KPIs)
Factory
Stakeholders
Manufacturing
Applications
Data
Equipment
Model

6. Equipment model value chain
Fundamental concept for application integration
6
Control Connect Collaborate Visualize Analyze Optimize
EDA Model
(SEMI E164)
High-Volume
Factory Ops
Pilot Factory
Operations
Process
Engineering
Equipment
Developers
Equipment
Components
Cimetrix
Software
Standardized
Equipment
Models KPIs (metrics)
• Time to money
• Yield
• Productivity
• Throughput
• Cycle time
• Capacity
• Scrap rate
• EHS

7.  Consistent implementations of GEM300
 Commonality across equipment types
 Automation of data collection processes
 Less work to interpret collected data
 Enables true “plug and play” applications
 Major increases in engineering efficiency
SEMI Standards support
Why is E164* so important?
7
E164 is to EDA what GEM was to SECS-II
* EDA Common Metadata standard

8. Equipment data management
Integrated production system architecture
8
GEM/EDA
Gateway
HSMS / HTTP
Equipment
Gateways
GEM/EDA
Gateway
SOA
MES
YMS
APC, RMS
Factory Information
and Control Systems
Process
Data
Storage
AMHS
EDA/GEM
Time-Series
DB
Equipment
Data Mgmt
Support
Data Mgmt
Config
MES,
RMS,
Other DB
CMP
Furnace
Tool
Etch
CVD
New Mfg
Applications

9.  Model Manager
 Plan Manager
 Equipment Gateway
 Data Mapper
 Data Router
 Data Repository
 Data Scope
 Synchronization Engine
 Performance Monitor
 Administrator Toolkit
Equipment data management
Major system components
9

10.  Real-time throughput monitoring
 Precision FDC feature extraction
 Specialty sensor data access
 Fleet matching and management
 eOCAP execution support
 Sub-fab data integration/analysis
 Automated equipment characterization
New manufacturing applications
Current leading edge
10
Wide range of stakeholder coverage

11.  Problem statement
 Monitor bottleneck (e.g., litho) tool throughput performance to know
when it drifts away from “normal” for whatever reason
 This is important because any loss of throughput ripples throughout
the line
 Solution components
 Monitor events and calculate process time “on the fly”
 Evaluate context to compare “equivalent” runs; flag outliers
 Equipment model leverage
 Standard material movement and recipe execution events
 Context available at event occurrence
 Key ROI factors
 Cycle time, productivity excursion MTTD (50% reduction),
equipment throughput improvement (3-5%)
Application example
Real-time throughput monitoring
11

12. Real-time throughput monitoring
SEMI E90 state machines and model
12

13.  감사합니다
 謝謝
 Merci
 Danke
 多謝
 ありがとうございます
 Gracias
Thank you
13