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Research on a future MEMS product that is currently under development 1. Research on the following three aspects via patents, journals, reports, online resources, etc. · Design and Theory · Fabrication · Challenges and Prospect 2. Write a report (1200 words) · No fixed format but must include the above mentioned three contents · Include bibliography .

Research on a future MEMS product that is currently under
development
1.
Research on the following three aspects via patents, journals,
reports, online resources, etc.
·
Design and Theory
·
Fabrication
·
Challenges and Prospect
2.
Write a report (1200 words)
·
No fixed format but must include the above mentioned three
contents
·
Include bibliography

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