3. LASER PM Training
1. Perform flushing at the option menu in preparation of the tube windows cleaning.
2. Remove the two cavity windows, clean and inspect replace if necessary.
3. Press enter to continue flushing cycle and leaktest.
4. Clean & inspect e-monitor, HR and OC optics.
5.Perform diode alignment for HR & OC.
6. Perform a new gas fill. Make sure that the tube pass the leaktest to avoid possible gas leak.
7. Take a burn pattern of the novaline 100 laser and check if the burn area is even on all sides. If not
make adjustment through HR or re-align laser if necessary.
8. Check if Excimer laser is center or align to the BDS(in-front of entrance window & M1). If not adjust
the whole excimer or the HR and OC.
5. LASER PM Training
•Remove all optics
•Clean and inspect the optics, replace if necessary.
Diode alignment
1. Install the diode laser for the BDS pre alignment. Align Diode laser using the two crosshairs, placed
the 1st crosshair in front of the diode and the 2nd after M3, adjust x & y movement of the diode laser
to center it on the 1st crosshair, then use the tilt to center it to the 2nd. After aligning both crosshairs,
install the aligning cap with center hole on the first crosshair to cut off the glare of the laser diode.
2. Then adjust M3 to align beam center to M4 and adjust M4 to center the beam to M5 then adjust M5
to center the beam to M6 then adjust M6 to center the beam to the crosshair located at the pupil
position, then take the micrometer reading for the M6 straight. Check the levelness / flatness of the P
Lens holder by using spirit level. Adjust micrometers to level, adjust only two axis, X and Y, the center
micrometer is the reference/pivot.
3. Install M7 and the dummy P Lens. And align the beam center to the top and the bottom. Adjust M7
first to center the beam at the bottom of dummy P Lens, then adjust M6 to center beam at the top of
the dummy P Lens. Then take the micrometer reading of M6 for the M6 dummy.
4. Move the chuck to other location that is not yet used and level the ablation chuck by centering the
reflection of red beam back to the Diode laser source.
6. LASER PM Training
5. Level the mask by centering the reflection of red beam back to the diode laser source then move the
mask stage to insure that whenever the mask stage moves the reflection still the same to prevent mask tilt.
6. Install the condenser lens and center it to the top pinhole of Dummy P Lens by adjusting the X and Y
axis of Condenser Lens mount.
7. Take the center positions of the red beam at the mask stage, on horizontal axis and vertical axis, then
record it at the PM sheet.
8. Remove condenser lens for the raw beam alignment. It is very important to take this out prior raw beam
alignment, because with this optic installed and we're firing the laser, M6 will damage/break.
7. LASER PM Training
Raw Beam Alignment:
1. Install 2 crosshairs, one close to SA1 then after C.L, be careful not to touch the M3 micrometers. You
can do the rough alignment to get mirrors close to the center by using the glass place after each crosshairs
and the laser set @ 14 kV HV constant with 20 Hz repetition rate. Adjust M1 center to the first crosshair
and M2 to the 2nd. Set the Laser to HV constant, 1 Hz and take a burn pattern until both crosshairs are
centered.
2. Remove 2nd crosshair located after C.L and put another crosshair intended to the focal point position
after M7; then removed M7 and reset the M6 micrometers to M6 straight.
3. Install all the telescopes and adjust T1 & T2 center to the 2nd crosshair then T3 center to the 1st
crosshair, make sure that two crosshairs are centered, take a burn pattern for each crosshair and check if
it is evenly distributed if not adjust HR (turn screw facing you to adjust horizontal and the other screw for
the vertical). Also check the skewness of the beam, ensure lines are straight.
4. Install LA2/SA1 13 elements and check if it is centered to the crosshair, if not adjust LA2/SA1 and
make a burn pattern until it is centered.
5. Install SA2, LA1, and C.L, then adjust Short axis 2 to bring the beam to its ideal position at the mask
stage, then adjust LA1 or LA2 to bring the beam to its ideal position at the mask stage area. Make
LA2/SA1 as a reference for the rest of the homogenizes, this serves as pre alignment. Check the skewness
of the beam on both axis. To check this place a business card or glass after the C.L.
8. LASER PM Training
6. Install the field lenses. Adjust the skew for the long & short axis and center it to the crosshair at the
pupil position. Install M7 and Use the M6 dummy reading before centering the beam on top of the
dummy P lens. Make sure that the lines are straight and focus, adjust SA F.L for the horizontal then LA
F.L for the vertical.
7. Removed M7 and verify the skew of the field lenses, use a glass plate and placed it on the crosshair at
the pupil position, make a fine adjustment of the field lens if skew.
8. Take a burnt pattern of the homogenized beam and measure it if with in specs, adjust LA1 for the
length and SA2 for the width.
9. Perform mask to beam alignment on Flow feature and orifice being used.
10. Install P Lens, M7 and ablate parts to check diameter range, if range is greater than 1.0 um, adjust M1
to lessen the range or if still the same install field compensator.
11. Get the micrometer readings on all mirrors and Install back cover attach to the attenuator and M1
until M7.
12. Check telecentricity. Adjust field lenses/M6 to get the right telecentricity specification then record the
M6 micrometer readings as M6 telecentricity.
9. LASER PM Training
Difference between our PM from Mexico’s procedure are:
1.They don’t do transmission checks.
2.They don’t perform collimation checks even after telescope replacement.
3.They adjust only the HR to distribute the beam evenly. Ours, we adjust also OC.
4.They were still doing M6 straight and dummy alignment. Here we set-up already the M7 location and adjust
only M7 for top pinhole of dummy Plens and Plens micrometer for bottom pinhole.
5.They are not doing Plens tilting and adjustment.
6.Every PM they move the chuck location that is not yet used or replace the chuck if damaged.
7.If no spare available they recondition their chuck by using a fine sand paper.
7. During diode alignment of mask they move the mask stage to ensure that mask is not tilted during moving
to different orifice and flow feature.
8.During telecentricity measurement they used long program even on 1st measurement. And they were using
debris window to flatten the sample film.
9.When they perform newfill they closes the tube valve after newfill to prevent leak at Y7 valve
the disadvantage is that they perform newfill/manual halogen injection frequently.
10. LASER PM Training
Things learned:
•When doing a flushing and newfill we should clean the optics that are not sensitive to alignment while on
the flushing and newfill cycle to minimize losses on specific optics and reduce downtime; such as e-monitor
beam splitter, in-line beam splitter, entrance and lower debris window
•We can also eliminate the upper debris and entrance window for cost saving.
•We need to activate auto closed loop of EDT for more stabilized energy during ablation.
•We need to centralize the F2 sensor monitor to BMS and CCTV for proper tracking of F2 gas leak. For
minor leak evacuate to other area chipcell/changeroom in-order not to disturb other production lines. Only
on major leaks that needs to evacuate the entire production area.
•We need to monitor gases specially the F2 to schedule ahead the F2 bottle replacement and monitor
consumption.
•Revise F2 bottle replacement and evacuation procedure.
•During telecentricity taking on production mode they just put a marker to identify what part started, if
something happens bad along the telecentricity taking and continue the production until telecentricity meets
specs.
•We need to modify our cart for tube change for a faster and easy transport.
•We need to install washer for mask cleaning, it can extend the life of the mask since there is no physical
contact that causes scratch with the mask.
•We need to enhance the area for an effective paging system.
All trainings learned will be re-echoed to the engineers.
11. LASER PM Training
Proposed Flourine bottle change procedure:
Things to consider:
•Separate AHU for laser cell
•Increase vacuum exhaust pressure
•Seal properly doors and air chasers
•Synchronize Fluorine sensor monitor at BMS/CCTV
•Wireless phone for continuous communication w/ CCTV.
•Warning sign in doors/changeroom and announce earlier to inform that there’s F2 bottle change.
12. LASER PM Training
F2 bottle change(1) procedure:
•Inform through e-mail and through CCTV/ERT that there will be a fluorine bottle
replacement.
•Laser EE prepare tools and equipment for F2 bottle transport and replacement.
•Laser EE double check the area on laser cell that F2 bottle route and area of replacement for
any personnel and let them evacuate. Activate switch to enable fluorine bottle change monitor.
•Laser EE wear proper PPE’s during F2 bottle transport and replacement.
•Laser EE check the F2 bottle for leaks.
•Laser EE inside cleanroom performs flushing of halogen line 2 times and closes the valve of
cylinder. Transport empty cylinder in exchange of full cylinder bottle.
•Install the new cylinder bottle
•Install the fitting and replace the spacer.
•Open the cylinder valve while fluorine detector is monitoring for leaks. If there’s a leak close
the valve and call for evacuation procedure.
•Wait until fluorine leaks subsides and reinstall/replaced spacer then re-open valve.
13. LASER PM Training
F2 bottle change monitor at changeroom
F2 BOTTLE CHANGE MONITOR
LASER cell number
1 2 3 4 5 6 7 8 9 10
Once the number is flashing there is an on-going F2 change.
All personnel are advised not to enter the group area.
Warning sign to be posted on doors
WARNING
DO NOT ENTER!
ON-GOING F2 BOTTLE
CHANGE
14. LASER PM Training
F2 bottle change(2) procedure: Only 1 laser cell
is evacuated
•Drain all the remaining fluorine inside the cylinder tank through manual
vacuuming on the gas flow diagram, Activate the pump and vacuum solenoid
and halogen solenoid until the remaining no pressure inside the tank. Close the
cylinder tank and process valve.
•Perform flush halogen line twice.
•Replace the empty cylinder w/ the new one
•Perform a leaktest through putting a helium on the halogen line and check for
leaks.
•If no leaks detected close the valve going through halogen line and evacuate the
helium on the halogen line.
•Open the fluorine bottle cylinder and perform still a halogen leaktest.
15. Mexico’s Fluorine bottle change procedure:
>LASER EE schedules a F2 bottle change and announces through CCTV and e-mail.
>LASER EE prepare the PPE’s/tools needed for bottle change and transport.
>respirator, safety shoes, chemical suit, chemical resistant gloves, cylinder
cart w/ strap, torque wrench and fluorine detector sensor.
>CCTV guard announces that there s an F2 change in a LASER cell and evacuate the
areas affected to other changeroom and the other cell not affected can continue
production.
>LASER EE and chemical technician wears the proper PPE then go to withdraw the F2
cylinder bottle at the gas storage.area.
>Guard to cordon the F2 transport route.
>LASER EE inside cleanroom double check for personnel that needs to be evacuated
and wears PPE.
>LASER EE closes the F2 cylinder valve and performs flushing of halogen line twice.
>Uninstall the F2 cylinder bottle and put an empty sign.
16. >Transport the empty cylinder to the door for bottle exchange.
>Install the new cylinder bottle and replace the lead o-ring.
>Open the full F2 cylinder bottle valve.
>Monitor the F2 sensor for leak detection. If detected a leak they closes the cylinder
valve and evacuate the area. Wait until fluorine leak subsides. Reinstall the cylinder
fitting and replace the lead o-ring. Then re-open the valve.
>If no leak detected call the CCTV guard for the personnel's evacuated go back to their
places.
>CCTV guard announces through the paging system to go back to their places.
