35. 1. An abrasive comprising
said particles having a crystal grain boundary
and having a maximum diameter of not large
than 3000 nm.
2. The abrasive of claim 1, wherein a crystallite of
said cerium oxide particles has a maximum
diameter of not larger than 600 nm
3. The abrasive of claim 1, wherein said cerium
oxide particles have pores
4. ~ 20.
vs
35
abrasive comprising cerium oxide particles,
having a crystal grain boundary
having a maximum diameter of not large
The abrasive of claim 1, wherein a crystallite of
said cerium oxide particles has a maximum
diameter of not larger than 600 nm.
The abrasive of claim 1, wherein said cerium
oxide particles have pores.
37. 7. An abrasive comprising slurry including medium and
cerium oxide particles dispersed in said medium, said
oxide particles constituted of at least two crystallites
having crystal grain boundaries
wherein:
cerium oxide particles with diameter not smaller than
occupies at least 0.1% by weight of the total weight of the
cerium oxide particles; and
said cerium oxide particles having
have characteristic of polishing target member
collapsing.
vs
37
7. An abrasive comprising slurry including medium and
dispersed in said medium, said cerium
at least two crystallites and
crystal grain boundaries,
with diameter not smaller than
occupies at least 0.1% by weight of the total weight of the
having crystal grain boundaries
have characteristic of polishing target member while
52. cerium oxide particles
having crystal grain boundary
having maximum diameter of not large
than 3000 nm
• KCS-
cerium oxide particles,
having maximum diameter of not large
than 3000 nm
1. An abrasive comprising
particles, said particles
grain boundary and
diameter of not large than 3000 nm.
52
cerium oxide particles
having crystal grain boundary
having maximum diameter of not large
than 3000 nm
?
-3100 US7,871,308
cerium oxide particles, having crystal grain boundary
having maximum diameter of not large
3000nm
.
An abrasive comprising cerium oxide
, said particles having a crystal
and having a maximum
diameter of not large than 3000 nm.
66. 1
2
100 1500 nm ,
1
An abrasive comprising cerium oxide particles
having crystal grain boundary
diameter of not large than 3000 nm.
10-2000-7006683 (20000617)
7,871,308
66
,
5 250 nm
.
cerium oxide particles said particles
having crystal grain boundary and having maximum
diameter of not large than 3000 nm.
?
70. 1
An abrasive comprising cerium oxide particles
having crystal grain boundary
diameter of not large than 3000 nm.
7,871,308
1
2
100 1500 nm ,
10-2000-7006683 (20000617)
70
cerium oxide particles said particles
having crystal grain boundary and having maximum
diameter of not large than 3000 nm.
?
,
5 250 nm
.
130. BLT
BLT Business, Law & Technology
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(1999)
(2005) SS 40” (a-Si TFT)
(2002) SS 2.2”
(1997)
OLED
130
(2009)AMOLED
(2012) LG 55”
(2007) SS AMOLED
(2007) SONY 11”
OLED TV
(2009) LG, OLED
140. 140
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Market Status
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