Thermal size effects in contact metal semiconductor structures are investigated. In thin diodes where the sample size is much smaller than the carrier cooling length, the electron temperature at the contact is much higher than the phonon temperature. Energy is transferred to the environment through electronic thermal conductivity. In thick diodes where the sample size is much larger than the cooling length, the electron and phonon temperatures equalize in the volume. At ohmic contacts in both thin and thick diodes, the temperatures equalize with the environment temperature under ideal heat transfer conditions. The temperatures depend on thermal boundary conditions and sample size, with thermal size effects more pronounced in barrier structures.